Abstract:
The invention provides a synthetic silica glass article or tool for a dopant-diffusing process in semiconductors, which is quite satisfactory in use in respect of the outstandingly small creeping at high temperatures, by working from a silica glass block having such a creeping characteristic that the elongation under a tension of 62.5 g/mm² at a temperature of 1250 °C does not exceed 0.025% after 5 minutes.
Abstract translation:本发明提供了一种用于半导体中的掺杂剂扩散工艺的合成二氧化硅玻璃制品或工具,其通过从具有这种蠕变特性的二氧化硅玻璃块加工而在高温下在突出的小蠕变方面非常满意, 在1250℃的温度下在62.5g / mm 2的张力下的伸长在5分钟后不超过0.025%。
Abstract:
process for manufacturing glass from silicon dioxide by vacuum melting, which comprises uniformly pre-heating a silicon dioxide powder containing a phase conversion promoter to about 800°C. filling it in a vessel while substantially keeping that temperature, re-heating it to form a sintered molding having a cristobalite crystal phase, and heat-melting the molding in vacuo to effect vitrification. This process makes it possible to increase the conversion of the starting material and the productivity by shortening the heating time, and nearly completely prevent formation of cracks on the surface of the sintered molding, thus suppressing the formation of defectives.
Abstract:
A method for producing silica glass wherein a dry silica gel subjected to a water desorption treatment and a carbon removal treatment is heated and has its temperature raised in an atmosphere containing chlorine, to perform a hydroxyl group removal treatment, the resultant silica gel is thereafter heated to a temperature of approximately 1,000-1,100°C in an atmosphere containing at least 1 % of oxygen, to perform a chlorine removal treatment, and the resultant silica gel is further heated do a temperature of 1,050-1,300` C in He or in vacuum, to perform a sintering treatment. The silica glass thus produced forms quite no bubble even when heated to high temperatures of or above 1300° C. Therefore, it is easy of working and it is free from the lowering of transparency attributed to the bubble formation.
Abstract:
A production method of synthetic silica glass according to the present invention comprises a first step of ejecting a silicon compound and a combustion gas containing oxygen and hydrogen from a burner to effect hydrolysis of the silicon compound in oxyhydrogen flame to produce fine particles of silica glass, and thereafter depositing and vitrifying the fine particles of silica glass on a target opposed to the burner to obtain a synthetic silica glass ingot; a second step of heating the synthetic silica glass ingot or the like obtained in the first step up to a first retention temperature of not less than 900 DEG C, retaining the ingot or the like at the first retention temperature, and cooling the ingot or the like at a temperature decrease rate of not more than 10 DEG C/h down to a temperature of not more than 500 DEG C; and a third step of heating the synthetic silica glass ingot or the like obtained in the second step up to a second retention temperature of not less than 500 DEG C nor more than 1100 DEG C, retaining the ingot or the like thereat, and thereafter cooling the ingot or the like at a temperature decrease rate of not less than 50 DEG C/h down to a temperature 100 DEG C lower than the second retention temperature.
Abstract:
PROBLEM TO BE SOLVED: To provide synthetic amorphous silica powder suitable for raw material for producing a synthetic silica glass product in which bubbles are little generated or little expanded even when the glass product is used in a high temperature and reduced pressure environment, and to provide a method for producing the synthetic amorphous silica powder. SOLUTION: The synthetic amorphous silica powder is obtained by subjecting a granulated silica powder to spheroidizing treatment and then cleaning and drying the resulting silica powder, and has an average particle diameter D 50 of 10 to 2,000 μm. The synthetic amorphous silica powder is characterized by having a value, which is obtained by dividing the BET specific surface area by the theoretical specific surface area as calculated from the average particle diameter D 50 , of 1.00 to 1.35, true density of 2.10 to 2.20 g/cm 3 , and intragranular porosity of 0 to 0.05, a circularity of 0.75 to 1.00, and a spheroidization ratio of 0.55 to 1.00. COPYRIGHT: (C)2011,JPO&INPIT