公开(公告)号：US08651048B2

公开(公告)日：2014-02-18

申请号：US13090123

申请日：2011-04-19

Applicant: Guido Fridolin Verbeck ,  Stephen Davila

Inventor： Guido Fridolin Verbeck ,  Stephen Davila

IPC: C23C14/34 ,  C23C14/46 ,  C23C14/48 ,  C23C14/22

CPC classification number: C23C14/221 ,  B81C2201/112 ,  B82B3/00 ,  B82Y30/00 ,  B82Y40/00 ,  C23C14/04 ,  C23C14/12 ,  C23C14/28 ,  C23C14/54

Abstract: A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument.

Abstract translation: 本文描述了使用激光烧蚀源将离子沉积到衬底上的软着陆（SL）仪器。 本发明的仪器设计有用于分离选定离子的定制漂移管和分离环离子光学器件。 漂移管允许通过与允许离子以低于1eV的能量降落到基底上的惰性浴气碰撞在激光烧蚀之后形成的离子的分离和热化。 分裂环离子光学器件能够将离子引向检测器或用于选定部件的着陆衬底。 本发明人进一步进行原子力显微镜（AFM）和漂移管测量以表征仪器的性能特征。

公开(公告)号：US20120114925A1

公开(公告)日：2012-05-10

申请号：US13342750

申请日：2012-01-03

Applicant: Oliver HARNACK ,  Jurina Wessels ,  Akio Yasuda ,  James Clarke ,  Terry Reid

Inventor： Oliver HARNACK ,  Jurina Wessels ,  Akio Yasuda ,  James Clarke ,  Terry Reid

IPC: B32B7/02 ,  B05D5/00 ,  C23C16/44 ,  B29C41/42 ,  B05D3/06 ,  B05D3/10 ,  B29C41/00 ,  B32B5/14 ,  C23C16/56

CPC classification number: B01D69/10 ,  B01D69/105 ,  B01D69/144 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00087 ,  B81C2201/112 ,  Y10T428/24322 ,  Y10T428/24331 ,  Y10T428/24967 ,  Y10T428/24975 ,  Y10T428/249961

Abstract: A method of fabricating a membrane having a tampered pore, a polymeric membrane having a tapered pore, and uses of such polymeric membrane are disclosed. The membrane includes apertures of increasing diameter which are aligned with each other to form the tapered pore.

Abstract translation: 公开了一种制造具有篡改孔的膜的方法，具有锥形孔的聚合物膜和这种聚合物膜的用途。 膜包括直径增加的孔，其彼此对准以形成锥形孔。

公开(公告)号：US20120040095A1

公开(公告)日：2012-02-16

申请号：US13089596

申请日：2011-04-19

Applicant: Kenneth A. Abbott

Inventor： Kenneth A. Abbott

IPC: C23C16/455

CPC classification number: C23C14/564 ,  B03C3/017 ,  B05D1/185 ,  B05D1/60 ,  B81B3/0005 ,  B81B2201/042 ,  B81C2201/112 ,  C23C14/24 ,  C23C16/4402 ,  C23C16/45568 ,  C23C16/45578

Abstract: A vapor deposition system includes a filter-diffuser device connected to a vapor inlet within a vacuum chamber for simultaneously filtering inflowing vapor to remove particulate matter while injecting vapor containing perfluordecanoic acid (PFDA) into the chamber through radially arranged porous metal filters to enable the deposition of a uniform monolayer of PFDA molecules onto the surfaces of a micromechanical device, such as a digital micromirror device.

Abstract translation: 气相沉积系统包括连接到真空室内的蒸汽入口的过滤器 - 扩散器装置，用于同时过滤流入的蒸气以除去颗粒物质，同时通过径向布置的多孔金属过滤器将含有丙二酸（PFDA）的蒸汽喷射到室中，以使沉积 的PFDA分子的均匀单层到微机械装置的表面上，例如数字微镜装置。

公开(公告)号：US20110044480A1

公开(公告)日：2011-02-24

申请号：US12939748

申请日：2010-11-04

Applicant: Tohru Yamaoka ,  Hiroshi Ogura ,  Yuichi Miyoshi

Inventor： Tohru Yamaoka ,  Hiroshi Ogura ,  Yuichi Miyoshi

IPC: H04R19/01

CPC classification number: H04R19/016 ,  B81B2201/0257 ,  B81C1/00944 ,  B81C2201/112 ,  H04R19/005

Abstract: An electret condenser includes a fixed film 110 including a conductive film 118 to be an upper electrode, a vibrating film 112 including a lower electrode 104 and a silicon oxide film 105 to be an electret film, and a silicon oxide film 108 provided between the fixed film 110 and the vibrating film 112 and including an air gap 109. Respective parts of the fixed film 110 and the vibrating film 112 exposed in the air gap 109 are formed of silicon nitride films 106 and 114.

Abstract translation: 驻极体电容器包括固定膜110，该固定膜110包括作为上电极的导电膜118，包括下电极104的振动膜112和作为驻极体膜的氧化硅膜105，以及设置在固定 膜110和振动膜112，并且包括气隙109.暴露在气隙109中的固定膜110和振动膜112的各个部分由氮化硅膜106和114形成。

公开(公告)号：US07853027B2

公开(公告)日：2010-12-14

申请号：US10591597

申请日：2005-02-07

Applicant: Tohru Yamaoka ,  Hiroshi Ogura ,  Yuichi Miyoshi

Inventor： Tohru Yamaoka ,  Hiroshi Ogura ,  Yuichi Miyoshi

IPC: H04R25/00

CPC classification number: H04R19/016 ,  B81B2201/0257 ,  B81C1/00944 ,  B81C2201/112 ,  H04R19/005

Abstract: An electric condenser includes a fixed film 110 including a conductive film 118 to be an upper electrode, a vibrating film 112 including a lower electrode 104 and a silicon oxide film 105 to be an electric film, and a silicon oxide film 108 provided between the fixed film 110 and the vibrating film 112 and including an air gap 109. Respective parts of the fixed film 110 and the vibrating film 112 exposed in the air gap 109 are formed of silicon nitride films 106 and 114.

Abstract translation: 电容器包括固定膜110，该固定膜110包括作为上电极的导电膜118，包括下电极104的振动膜112和作为电膜的氧化硅膜105，以及设置在固定 膜110和振动膜112，并且包括气隙109.暴露在气隙109中的固定膜110和振动膜112的各个部分由氮化硅膜106和114形成。

公开(公告)号：US20100206629A1

公开(公告)日：2010-08-19

申请号：US12371302

申请日：2009-02-13

Applicant: Bangalore R. Natarajan ,  Evgeni Gousev ,  Kristopher A. Lavery

Inventor： Bangalore R. Natarajan ,  Evgeni Gousev ,  Kristopher A. Lavery

IPC: H05K5/00 ,  B32B37/00 ,  B32B38/00 ,  B32B9/00 ,  B32B17/00 ,  B05D1/02

CPC classification number: B01J20/2808 ,  B01D53/261 ,  B01D53/28 ,  B01D2253/108 ,  B01J20/18 ,  B01J20/183 ,  B01J20/2803 ,  B01J2220/42 ,  B81B2201/047 ,  B81C1/00285 ,  B81C2201/112 ,  H01L23/26 ,  H01L51/5259 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/1433 ,  Y10T156/10 ,  H01L2924/00

Abstract: Systems and methods for providing MEMS devices with integrated desiccant are provided. In one embodiment, a dry composition comprising desiccant is impact sprayed onto the backplate or substrate of a MEMS device, and becomes fused with the substrate. In another embodiment, the desiccant is impact sprayed such that the desiccant adheres to the impact sprayed surface. In yet another embodiment, the impact-sprayed surface is impregnated with the desiccant. In still another embodiment, the desiccant is combined with a suitable inorganic binder, then impact sprayed such that the desiccant adheres to the impact sprayed surface. In yet a further embodiment, the desiccant is micronized or pulverized into a powder of desired particle size, and then impact sprayed onto a surface. Thus, the desiccant particles or powder are fused onto the target surface through the impact spraying process.

Abstract translation: 提供了提供MEMS器件集成干燥剂的系统和方法。 在一个实施方案中，将包含干燥剂的干组合物冲击喷射到MEMS装置的背板或基板上，并与基底熔合。 在另一个实施方案中，干燥剂被冲击喷雾，使得干燥剂粘附到冲击喷涂表面上。 在另一个实施例中，冲击喷射表面用干燥剂浸渍。 在另一个实施方案中，将干燥剂与合适的无机粘合剂组合，然后冲洗喷雾，使得干燥剂粘附到冲击喷涂表面。 在又一个实施方案中，干燥剂被微粉化或粉碎成所需粒度的粉末，然后冲击喷涂到表面上。 因此，干燥剂颗粒或粉末通过冲击喷涂工艺熔合到目标表面上。

公开(公告)号：US20100165442A1

公开(公告)日：2010-07-01

申请号：US12719751

申请日：2010-03-08

Applicant: Ming-Hau Tung ,  Lior Kogut

Inventor： Ming-Hau Tung ,  Lior Kogut

IPC: G02B26/00 ,  B32B9/04 ,  B32B19/00 ,  B32B15/04 ,  B32B27/30

CPC classification number: B81C1/00801 ,  B81B3/001 ,  B81B3/0072 ,  B81B2201/042 ,  B81C2201/0109 ,  B81C2201/017 ,  B81C2201/112 ,  B81C2201/115 ,  G02B26/001 ,  Y10T428/30 ,  Y10T428/31678 ,  Y10T428/31935

Abstract: Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.

Abstract translation: 公开了在微机电装置的一个或多个表面上形成保护涂层的方法，其包括以下步骤：形成牺牲材料和保护材料的复合层，并选择性地蚀刻牺牲材料以形成保护涂层。 本发明的保护性涂层优选地改进了其中并入其中的微机电装置的性能的一个或多个方面。 还公开了通过本发明的方法形成的微机电装置以及包括这种装置的视觉显示装置。

公开(公告)号：US20100127339A1

公开(公告)日：2010-05-27

申请号：US12312165

申请日：2007-09-10

Applicant: Franz Laermer ,  Silvia Kronmueller ,  Tino Fuchs

Inventor： Franz Laermer ,  Silvia Kronmueller ,  Tino Fuchs

IPC: H01L29/84 ,  H01L21/50

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B81C2203/0109 ,  B81C2203/031

Abstract: A micromechanical component, having a substrate and a functional element, the functional element having a functional surface which has an anti-adhesion layer, that has been applied at least in regions, for reducing the surface adhesion forces, and in which the anti-adhesion layer is stable to a temperature of more than 800° C.

Abstract translation: 具有基材和功能元件的微机械部件具有功能性表面，该功能性表面具有抗粘附层，该功能性表面至少在区域中被应用于减少表面粘附力，其中抗粘附性 层对于超过800℃的温度是稳定的

公开(公告)号：US20100006540A1

公开(公告)日：2010-01-14

申请号：US12501009

申请日：2009-07-10

Applicant: Rudolf Dinger ,  Thierry Ravenel

Inventor： Rudolf Dinger ,  Thierry Ravenel

IPC: B44C1/22

CPC classification number: B81C99/008 ,  B81B2201/035 ,  B81C1/00674 ,  B81C2201/112 ,  G04B13/02 ,  G04D3/0069 ,  Y10T29/49579

Abstract: The invention relates to a method of manufacturing (1) a mechanical part (51) including the following steps:a) providing (3) a substrate (53) made of micro-machinable material;b) etching (5), with help of photolithography, a pattern (50) that includes said part through said entire substrate;According to the invention, the method further includes the following steps:c) mounting (7) said etched substrate on a support (55′) so as to leave the top and bottom surfaces of said substrate accessible;d) depositing (9, C′) a coating of better tribological quality than said micro-machinable material on the outer surface of said part e) releasing (11) the part from the substrate. The invention concerns the field of timepiece manufacture.

Abstract translation: 本发明涉及一种制造（1）机械部件（51）的方法，包括以下步骤：a）提供（3）由可微加工材料制成的基底（53）; b）借助于光刻法蚀刻（5）包括通过所述整个基板的所述部分的图案（50）; 根据本发明，该方法还包括以下步骤：c）将所述蚀刻的衬底安装（7）到支撑体（55'）上，以使所述衬底的顶表面和底表面可接近; d）在所述部件的外表面上沉积（9，C'）比所述可微加工材料更好的摩擦质量的涂层（e）将部件从基材上释放（11）。 本发明涉及钟表制造领域。

公开(公告)号：US20090065928A1

公开(公告)日：2009-03-12

申请号：US12264774

申请日：2008-11-04

Applicant: Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

Inventor： Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

IPC: H01L23/12

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

Abstract translation: 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。