公开(公告)号：WO02073285A3

公开(公告)日：2003-03-13

申请号：PCT/US0207589

申请日：2002-03-11

Applicant: AXSUN TECH INC

Inventor： FLANDERS DALE C ,  NAGLE STEVEN F ,  STERN MARGARET B

IPC: G02B5/18 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B3/00

CPC classification number: G02B26/001 ,  G02B5/1828 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0875

Abstract: An optical membrane device (110) and method for making such a device (110) are described. This membrane is notable in that it comprises an optically curved surface (250). In some embodiments, this curved optical surface (250) is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.

Abstract translation: 描述了一种用于制造这种装置（110）的光学膜装置（110）和方法。 该膜是值得注意的，因为它包括光学曲面（250）。 在一些实施例中，该弯曲光学表面（250）是光学凹入的并且例如涂覆有高反射（HR）涂层以形成弯曲镜。 在其它实施例中，光学表面是光学凸起的并且涂覆有优选抗反射（AR）涂层，用作折射或衍射透镜。

公开(公告)号：WO0137020A9

公开(公告)日：2002-11-28

申请号：PCT/US0031180

申请日：2000-11-14

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S

Inventor： FLANDERS DALE C ,  WHITNEY PETER S

IPC: G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B6/38 ,  G02B6/42 ,  G02B7/00 ,  G02B27/62

CPC classification number: G02B6/3656 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3586 ,  G02B6/3636 ,  G02B6/3644 ,  G02B6/3696 ,  G02B6/4201 ,  G02B6/4225 ,  G02B6/4226 ,  G02B6/4237 ,  G02B6/4238 ,  G02B6/4243 ,  G02B6/4249 ,  G02B6/4256 ,  G02B7/003 ,  G02B27/62

Abstract: An alignment structure (100) maintains an optical fiber in a bore(113). The structure is fixed on a bench and is passively or ac tively aligned with a light source. Then the structure may be welded or soldered to the optical bench whereby the alignment may suffer due to heat transfer. To correct this, the alignment structure can be plastically deformed to correct the alignment after thecomponents have been fixed. The alignment structure has a substantially constant cross section in a z-axis direction as well as flexible links in order to allow displacements orthogonal to the optical axis. This mouvements will be initiated by seizing the component with a micro-positioner at a handle (136) and displacing it over the elastic limit to achieve permanent deformation.

Abstract translation: 对准结构（100）将光纤维持在孔（113）中。 该结构固定在工作台上，被动地或与光源一致地对齐。 然后可以将结构焊接或焊接到光学工作台，由此由于热传递可能会导致对准。 为了纠正这种情况，对准结构可以塑造变形，以在固定部件之后纠正对准。 对准结构在z轴方向上具有基本恒定的横截面以及柔性连杆，以允许与光轴正交的位移。 这种动作将通过在手柄（136）处用微型定位器抓住部件并将其移动超过弹性极限来实现永久变形。

公开(公告)号：WO0165734A3

公开(公告)日：2002-08-29

申请号：PCT/US0106620

申请日：2001-03-01

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S

Inventor： FLANDERS DALE C ,  WHITNEY PETER S

IPC: G02B6/34 ,  G02B6/42 ,  H04B10/08

CPC classification number: H04B10/07955 ,  G02B6/29362 ,  G02B6/29395 ,  G02B6/4215 ,  G02B6/4226 ,  G02B6/4246 ,  H04B10/077

Abstract: An integrated optical monitoring system comprises a hermetic package and an optical bench sealed within the package. An optical fiber pigtail enters the package via a feed-through to connectto and terminate above the bench. A tunable filter is connected to the top of the bench and filters an optical signal transmitted by the fiber pigtail. A detector, also connected to the bench, detects the filtered signal from the tunable filter. Thus, the entire system is integrated together, on a single bench within a preferably small package. This configuration makes the system useful as a subsystem, for example, in a larger system offering higher levels of functionality and optical signal processing capability.

Abstract translation: 集成光学监控系统包括密封包装和密封在包装内的光学工作台。 光纤尾纤通过馈通进入包装，以连接并终止在工作台上。 可调谐滤波器连接到台架的顶部，并对由纤维尾纤传输的光信号进行滤波。 也连接到工作台的检测器检测来自可调谐滤波器的滤波信号。 因此，整个系统集成在一起，在一个优选的小包装内的单个工作台上。 该配置使得该系统可用作子系统，例如在较大的系统中提供更高水平的功能和光信号处理能力。

公开(公告)号：WO0141539A3

公开(公告)日：2002-08-29

申请号：PCT/US0031183

申请日：2000-11-14

Applicant: AXSUN TECH INC ,  FLANDERS DALE C

Inventor： FLANDERS DALE C

IPC: G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B6/38 ,  G02B6/42 ,  G02B7/00 ,  G02B27/62

CPC classification number: G02B6/4249 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3582 ,  G02B6/3584 ,  G02B6/3636 ,  G02B6/3644 ,  G02B6/3652 ,  G02B6/4201 ,  G02B6/4225 ,  G02B6/4226 ,  G02B6/4237 ,  G02B6/4238 ,  G02B6/4257 ,  G02B7/003 ,  G02B27/62

Abstract: A structure that is compatible with passive alignment, and is capable of integration onto a micro-optical bench system, provides for the secure attachment of optical components to the bench. The structure comprises a base and a clip structure for an optical component that is formed in the base. The clip structure can be etched into bulk material of the base. In one implementation, the clip structure is created using reactive ion etching in silicon or silicon-on-insulator (SOI) wafer material. In the preferred embodiment, the clip comprises an alignment wall and a resilient arm. The resilient arm engages a first side of the optical component to urge a second side of the optical component into engagement with the alignment wall. This cooperation between the arm and the alignment wall allows for precise registration of the optical component against the alignment wall to scales attainable with semiconductor lithography.

Abstract translation: 与被动对准兼容并且能够集成到微型光学台架系统上的结构提供了将光学部件牢固地附接到工作台上的结构。 该结构包括形成在基座中的用于光学部件的基座和夹子结构。 夹子结构可以被蚀刻成基部的大量材料。 在一个实施方案中，使用硅或绝缘体上硅（SOI）晶片材料中的反应离子蚀刻来创建夹子结构。 在优选实施例中，夹具包括对准壁和弹性臂。 弹性臂接合光学部件的第一侧，以推动光学部件的第二侧与对准壁接合。 臂和对准壁之间的这种协作允许光学部件抵抗对准壁的精确配准，以便通过半导体光刻可达到的尺寸。

公开(公告)号：WO0167158A2

公开(公告)日：2001-09-13

申请号：PCT/US0106944

申请日：2001-03-02

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

Inventor： FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

IPC: G01J3/26 ,  G02B26/00 ,  G02B26/02

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  Y10S359/90

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract translation: 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 跨过静电腔施加到电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 图案可以是直的或径向的系绳将内膜与外体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

公开(公告)号：WO2011091408A2

公开(公告)日：2011-07-28

申请号：PCT/US2011022375

申请日：2011-01-25

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  GETZ JAMES W ,  ATIA WALID A ,  WHITNEY PETER S ,  KUZNETSOV MARK E ,  COOK CHRISTOPHER C

Inventor： FLANDERS DALE C ,  GETZ JAMES W ,  ATIA WALID A ,  WHITNEY PETER S ,  KUZNETSOV MARK E ,  COOK CHRISTOPHER C

IPC: A61B5/00 ,  B29D11/00 ,  G02B6/42

CPC classification number: A61B5/6852 ,  A61B5/0066 ,  A61B5/0084 ,  G02B6/322 ,  G02B6/3624 ,  G02B6/3652

Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

Abstract translation: 用于在体内发射和/或接收光的光学探头包括传输和/或接收光学信号的光纤，包括纵向延伸的光纤凹槽的硅光学平台，所述光纤凹槽保持光纤的光纤终端和反射器 表面，其将光纤终端的端面光学耦合到光具座的侧面。 纤维凹槽使用硅各向异性蚀刻技术制造。 一些示例在光学平台周围使用利用LIGA或其他电铸技术制造的外壳。 还描述了用于形成透镜结构的方法，其包括在复合晶圆材料（例如SOI（绝缘体上硅）晶圆）的第一层中形成折射透镜并且沿光学方向形成穿过复合晶圆材料背侧的光学端口 折射透镜的轴。

公开(公告)号：WO2007112437A3

公开(公告)日：2007-12-06

申请号：PCT/US2007065361

申请日：2007-03-28

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  KOTIDIS PETROS ,  WANG XIAOMEI

Inventor： FLANDERS DALE C ,  KOTIDIS PETROS ,  WANG XIAOMEI

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01N21/658

Abstract: A Raman system uses a semiconductor tunable laser subsystem to generate a tunable signal that is tuned over a scan band of greater than 50 nanometers. A probe system transmits the tunable signal to a sample. Finally, a detector system comprises a bandpass filter for filtering a Raman signal from the analyzed sample generated by the tunable signal, and a detector for detecting the filtered Raman signal.

Abstract translation: 拉曼系统使用半导体可调谐激光子系统来产生在超过50纳米的扫描带上调谐的可调谐信号。 探头系统将可调信号发送到样品。 最后，检测器系统包括用于从由可调信号产生的分析样本中滤出拉曼信号的带通滤波器和用于检测滤波的拉曼信号的检测器。

公开(公告)号：WO2005038418A3

公开(公告)日：2005-10-20

申请号：PCT/US2004034691

申请日：2004-10-13

Applicant: AXSUN TECH INC ,  ATIA WALID A ,  FLANDERS DALE C ,  KOTIDIS PETROS ,  KUZNETSOV MARK E

Inventor： ATIA WALID A ,  FLANDERS DALE C ,  KOTIDIS PETROS ,  KUZNETSOV MARK E

IPC: B81B7/02 ,  G01J3/10 ,  G01J3/26 ,  G01J3/36 ,  G01N21/25 ,  G02B5/28 ,  G02B26/00

CPC classification number: G01J3/36 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/26 ,  G01N21/255

Abstract: Integrated spectroscopy systems are disclosed. In some examples, integrated tunable detectors, using one or multiple Fabry-Perot tunable filters, are provided. Other examples use integrated tunable sources. The tunable source combines one or multiple diodes, such as superluminescent light emitting diodes (SLED), and a Fabry Perot tunable filter or etalon. The advantages associated with the use of the tunable etalon are that it can be small, relatively low power consumption device. For example, newer microelectrical mechanical system (MEMS) implementations of these devices make them the size of a chip. This increases their robustness and also their performance. In some examples, an isolator, amplifier, and/or reference system is further provided integrated.

Abstract translation: 公开了集成光谱系统。 在一些示例中，提供了使用一个或多个法布里 - 珀罗可调谐滤波器的集成可调谐检测器。 其他示例使用集成的可调源。 可调谐源组合了一个或多个二极管，例如超发光发光二极管（SLED）和法布里珀罗可调滤波器或标准具。 与可调谐标准具的使用相关的优点是它可以是小的，相对较低的功率消耗装置。 例如，这些器件的较新的微电机械系统（MEMS）实现使其成为芯片的尺寸。 这增加了它们的稳健性和性能。 在一些示例中，还集成了隔离器，放大器和/或参考系统。

公开(公告)号：WO0233469A3

公开(公告)日：2003-03-20

申请号：PCT/US0132513

申请日：2001-10-17

Applicant: AXSUN TECH INC ,  FLANDERS DALE C

Inventor： FLANDERS DALE C

IPC: G02B5/20 ,  G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  G02B5/207

Abstract: A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer (110) on a handle wafer (100). Concavities (127) are etched into the sacrificial layer (110). Polycrystalline silicon membrane layer (125) is then formed on the sacrificial layer (110). The polycrystalline membrane layer (125) is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer (110) is removed to release the membrane (125). The concavities (127) in the sacrificial layer (110) yield convexities in the polysilicon layer (125) to prevent stiction adhesion to the handle wafer (100). During processing, a mask used to pattern the membrane layer functions to protect a highly reflecting (HR) coating for the membrane.

Abstract translation: 用于从多晶硅制造光学膜的方法包括首先在处理晶片（100）上形成牺牲层（110）。 凹部（127）蚀刻到牺牲层（110）中。 然后在牺牲层（110）上形成多晶硅膜层（125）。 随后抛光多晶膜层（125）以实现预定的膜厚度和表面平滑度，退火，然后图案化。 最后，去除牺牲层（110）以释放膜（125）。 牺牲层（110）中的凹部（127）在多晶硅层（125）中产生凸起，以防止对手柄晶片（100）的粘附。 在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。

公开(公告)号：WO0165302A9

公开(公告)日：2003-02-06

申请号：PCT/US0140252

申请日：2001-03-05

Applicant: AXSUN TECH INC

Inventor： FLANDERS DALE C ,  WHITNEY PETER S

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such that light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一种配置中，光学端口包括孔或孔，使得光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。