公开(公告)号：WO0233458A3

公开(公告)日：2003-08-14

申请号：PCT/US0132512

申请日：2001-10-17

Applicant: AXSUN TECH INC ,  MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

Inventor： MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

IPC: B81B3/00 ,  G02B26/00 ,  G02B1/10

CPC classification number: B81B3/0083 ,  B81B2201/042 ,  B81B2201/047 ,  B81C1/0038 ,  B81C2201/0159 ,  B81C2201/053 ,  B81C2201/056 ,  G02B26/001

Abstract: A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress.

Abstract translation: 公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。 电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。 在一个实例中，使用掩模层作为保护层来蚀刻涂层。 在另一示例中，示出了剥离过程。 光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。

公开(公告)号：WO02073285A3

公开(公告)日：2003-03-13

申请号：PCT/US0207589

申请日：2002-03-11

Applicant: AXSUN TECH INC

Inventor： FLANDERS DALE C ,  NAGLE STEVEN F ,  STERN MARGARET B

IPC: G02B5/18 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B3/00

CPC classification number: G02B26/001 ,  G02B5/1828 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0875

Abstract: An optical membrane device (110) and method for making such a device (110) are described. This membrane is notable in that it comprises an optically curved surface (250). In some embodiments, this curved optical surface (250) is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.

Abstract translation: 描述了一种用于制造这种装置（110）的光学膜装置（110）和方法。 该膜是值得注意的，因为它包括光学曲面（250）。 在一些实施例中，该弯曲光学表面（250）是光学凹入的并且例如涂覆有高反射（HR）涂层以形成弯曲镜。 在其它实施例中，光学表面是光学凸起的并且涂覆有优选抗反射（AR）涂层，用作折射或衍射透镜。

公开(公告)号：WO02052329A3

公开(公告)日：2002-09-06

申请号：PCT/US0149412

申请日：2001-12-19

Applicant: AXSUN TECH INC ,  ATIA WALID A ,  NAGLE STEVEN F ,  MILLER MICHAEL F

Inventor： ATIA WALID A ,  NAGLE STEVEN F ,  MILLER MICHAEL F

IPC: B81B3/00 ,  B81B7/02 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B7/188

CPC classification number: G02B26/02 ,  B81B7/02 ,  G01J3/26 ,  G02B26/001

Abstract: A MOEMS Fabry-Perot tunable filter 100 includes an optical membrane structure 150. Two electrostatic cavities 136, 138 are provided, one on either side of the membrane structure 150. As a result, electrostatic attractive forces can be exerted on the optical membrane to enable deflection in either direction, typically, along the optical axis 10. This is useful in calibrating the tunable filter during operation to a lambd° set point. It is also useful in controlling the membrane to avoid unstable operation and increasing a deflection range.

Abstract translation: MOEMS法布里 - 珀罗可调滤波器100包括光学膜结构150.设置两个静电空腔136,138，一个在膜结构150的两侧。结果，可以在光学膜上施加静电吸引力，以使得能够 通常沿着光轴10在任一方向上偏转。这在将操作期间的可调谐滤波器校准到羔羊设定点时是有用的。 它也可用于控制膜以避免不稳定的操作和增加偏转范围。

公开(公告)号：AU2442602A

公开(公告)日：2002-04-29

申请号：AU2442602

申请日：2001-10-17

Applicant: AXSUN TECH INC

Inventor： MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

IPC: B81B3/00 ,  G02B26/00 ,  G02B6/00

公开(公告)号：AU2002258503A1

公开(公告)日：2002-09-24

申请号：AU2002258503

申请日：2002-03-11

Applicant: AXSUN TECH INC

Inventor： NAGLE STEVEN F ,  FLANDERS DALE C ,  STERN MARGARET B

IPC: G02B5/18 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B3/00

公开(公告)号：AU2002231134A1

公开(公告)日：2002-07-08

申请号：AU2002231134

申请日：2001-12-19

Applicant: AXSUN TECH INC

Inventor： ATIA WALID A ,  NAGLE STEVEN F ,  MILLER MICHAEL F

IPC: B81B3/00 ,  B81B7/02 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B7/188

Abstract: A MOEMS Fabry-Perot tunable filter includes an optical membrane structure. Two electrostatic cavities are provided, one on either side of the membrane structure. As a result, electrostatic attractive forces can be exerted on the optical membrane to enable deflection in either direction, typically, along the optical axis. This is useful in calibrating the tunable filter during operation to a lambd∘ set point. It is also useful in controlling the membrane to avoid unstable operation.