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公开(公告)号：AU2003243303A1
公开(公告)日：2003-12-19
申请号：AU2003243303
申请日：2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor： DRIEENHUIZEN BERT P VAN , WILDE JEFFREY P , KUAN NELSON
Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.
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公开(公告)号：CA2487819A1
公开(公告)日：2003-12-11
申请号：CA2487819
申请日：2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor： VAN DRIEENHUIZEN BERT P , WILDE JEFFREY P , KUAN NELSON
Abstract: A MEMS apparatus (100) comprises a bulk element (110), first and second hing es (121, 122), and a support (130). The bulk element (110) has a top and a bott om surface (112, 111), and the hinges are disposed below the top surface (112).
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公开(公告)号：CA2839168A1
公开(公告)日：2011-12-29
申请号：CA2839168
申请日：2011-06-17
Applicant: CAPELLA PHOTONICS INC
Inventor： YANG LONG , GARRETT MARK H , EHRLICH JEFFREY E
IPC: G02B6/26
Abstract: An optical apparatus can include an optical port array having an MxN array of fiber collimator ports. The array of ports is configured such that there is a gap within each column of ports located between two rows of ports. The gap is wide enough to permit a hitless beam switching trajectory to pass between the two rows of ports from one side of the array of ports to an opposite side.
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公开(公告)号：CA2562087C
公开(公告)日：2011-06-21
申请号：CA2562087
申请日：2005-04-06
Applicant: CAPELLA PHOTONICS INC
Inventor： TREMAINE BRIAN P , DAVIS JOSEPH E
Abstract: A system and method for canceling disturbance in a MEMS device. The system 200 includes a MEMS device 203, which may include a substrate 205 and a plurality of individually movable MEMS elements 203-1 through 203-N, and a control assembly 207. The optical system 200 may be utilized in and/or form a portion of any optical apparatus employing an array of MEMS devices. The control assembly 207 uses feed-forward control signals to cancel disturbance in the MEMS device 203, and more particularly, to cancel disturbance in the non-switched or static mirrors of the MEMS device 203 caused by switched or moving mirrors.
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公开(公告)号：ES2314239T3
公开(公告)日：2009-03-16
申请号：ES03756196
申请日：2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor： VAN DRIEENHUIZEN BERT P , WILDE JEFFREY P , KUAN NELSON
Abstract: Método de realización de un aparato MEMS, que comprende un componente de dispositivo y un componente de soporte, que comprende las etapas de: a) proporcionar un componente (400) de dispositivo que comprende silicio (415) monocristalino; b) crear al menos una bisagra (421, 422) en dicho componente (400) de dispositivo; c) construir un componente (450) de soporte que tiene una cavidad (440); d) adherir dicho componente (400) de dispositivo a dicho componente (450) de soporte, de modo que dicha al menos una bisagra (421, 422) esté dispuesta dentro de dicha cavidad (440); y e) formar en dicho componente (400) de dispositivo un elemento (410) de material base que tiene una superficie (412) de dispositivo y una superficie (411) inferior, por lo que dicha al menos una bisagra (421, 422) está acoplada a dicho elemento (410) de material base y está dispuesta por debajo de dicha superficie (411) inferior, suspendiendo de ese modo dicho elemento (410) de material base de dicho soporte (450).
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Patent Agency Ranking
公开(公告)号：CA2603993A1
公开(公告)日：2006-10-19
申请号：CA2603993
申请日：2006-03-24
Applicant: CAPELLA PHOTONICS INC
Inventor： DARLING MICHAEL , TREMAINE BRIAN , DAVIS JOSEPH E , GARRETT MARK H
Abstract: A wavelength selective switch architecture (100) for ROADMs for switching th e spectral channels of a multi-channel, multi- wavelength optical signal betwe en input and output ports employs a biaxial MEMS port mirror array (106) for optimal coupling efficiency and ITU grid alignment, an anamorphic beam expander (110) for expanding input optical signals to create an elongated be am profile (146), a diffraction grating (112) for spatially separating the spectral channels, an anamorphic focusing lens system (116), an array (118) of biaxial elongated channel MEMS micromirrors, a built-in Optical Channel Monitor, and an electronic feedback control system. The biaxial channel micromirrors are rotatable about one axis to switch spectral channels betwee n ports, and are rotatable about an orthogonal axis to vary the coupling of th e spectral channel to an output port and control attenuation of the spectral signal for complete blocking or for a predetermined power level. The architecture affords hitless switching, near notchless operation, ITU channe l alignment, high passband, stability over a broad temperature range, and minimum insertion loss through the optimal coupling efficiency enabled by th e feedback control system.
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公开(公告)号：AU2003243303A8
公开(公告)日：2003-12-19
申请号：AU2003243303
申请日：2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor： WILDE JEFFREY P , DRIEENHUIZEN BERT P VAN , KUAN NELSON
Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.
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38.发明专利
公开(公告)号：AU2002330075A1
公开(公告)日：2003-04-01
申请号：AU2002330075
申请日：2002-09-19
Applicant: CAPELLA PHOTONICS INC
Inventor： WILDE JEFFREY P , TIMMONS MICHAEL J , GARRETT MARK H , POLYNKIN PAVEL
Abstract: This invention provides a novel method and apparatus which use a wavelength-dispersing means such as a diffraction grating to spatially separate a multi-wavelength optical signal along with a reference signal by wavelength into multiple spectral channels and a reference spectral component in a spectral array with a predetermined relative alignment. By aligning the reference spectral component at a predetermined location, the spectral channels simultaneously impinge onto designated locations, e.g., on an array of beam-receiving elements positioned in accordance with the spectral array. The reference spectral component may be further maintained at the predetermined location by way of servo-control, thereby ensuring that the spectral channels stay aligned at the designated locations. The present invention can be used to construct a new line of servo-based optical systems, including spectral power monitors and optical multiplexers/demultiplexers, for WDM optical networking applications.
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39.发明专利
公开(公告)号：CA2460975A1
公开(公告)日：2003-03-27
申请号：CA2460975
申请日：2002-09-19
Applicant: CAPELLA PHOTONICS INC
Inventor： GARRETT MARK H , WILDE JEFFREY P , POLYNKIN PAVEL G , TIMMONS MICHAEL J
IPC: G01J3/02 , G01J3/14 , G01J3/18 , G01J3/28 , G01J3/36 , G01J3/433 , G01J3/447 , G02B5/18 , G02B5/30 , G02F1/13 , G02B6/28 , G02B6/26 , G02B6/34 , H04J14/02
Abstract: This invention provides a novel method and apparatus which use a wavelength- dispersing means such as a diffraction grating (220) to spatially separate a multi-wavelength optical signal along with a reference signal by wavelength into multiple spectral channels and a reference spectral component in a spectral array with a predetermined relative alignment. By aligning the reference spectral component at a predetermined location, the spectral channels simultaneously impinge onto designated locations, e.g., on an array of beam-receiving elements positioned in accordance with the spectral array. The reference spectral component may be further maintained at the predetermined location by way of servo-control (260), thereby ensuring that the spectral channels stay aligned at the designated locations. The present invention can be used to construct a new line of servo-based optical systems , including spectral power monitors and optical multiplexers/demultiplexers, f or WDM optical networking applications.
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公开(公告)号：CA2839168C
公开(公告)日：2018-10-02
申请号：CA2839168
申请日：2011-06-17
Applicant: CAPELLA PHOTONICS INC
Inventor： YANG LONG , GARRETT MARK H , EHRLICH JEFFREY E
Abstract: An optical apparatus can include an optical port array having an MxN array of fiber collimator ports. The array of ports is configured such that there is a gap within each column of ports located between two rows of ports. The gap is wide enough to permit a hitless beam switching trajectory to pass between the two rows of ports from one side of the array of ports to an opposite side.
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