SILICON SUBSTRATES WITH DOPED SURFACE CONTACTS FORMED DOPED SILICON INKS AND CORRESPONDING PROCESSES

    公开(公告)号:PH12016501092A1

    公开(公告)日:2017-03-13

    申请号:PH12016501092

    申请日:2016-06-08

    Applicant: NANOGRAM CORP

    Abstract: The use of doped silicon nanoparticle inks and other liquid dopant sources can provide suitable dopant sources for driving dopant elements into a crystalline silicon substrate using a thermal process if a suitable cap is provided. Suitable caps include, for example, a capping slab, a cover that may or may not rest on the surface of the substrate and a cover layer. Desirable dopant profiled can be achieved. The doped nanoparticles can be delivered using a silicon ink. The residual silicon ink can be removed after the dopant drive-in or at least partially densified into a silicon material that is incorporated into the product device. The silicon doping is suitable for the introduction of dopants into crystalline silicon for the formation of solar cells.

    REACTANT NOZZLES WITHIN FLOWING REACTORS

    公开(公告)号:AU2003241284A1

    公开(公告)日:2003-10-27

    申请号:AU2003241284

    申请日:2003-04-07

    Applicant: NANOGRAM CORP

    Abstract: Improved reaction chamber designs are described that provide for improved control over the flow within the reaction chamber. The reaction chambers contain reactions for particle production from a flowing reactant stream. Improved reactant delivery nozzles are described that are useful for the delivery of gas/vapor reactants and/or aerosol reactants. Improved nozzle designs can result in more uniform reactant flow. Suitable reactors can comprise an electromagnetic radiation source that projects through the reactor to drive the reaction at an electromagnetic radiation reaction zone. The improved nozzle features are suitable for reactors for particle collection and/or for coating of substrates within the reaction chamber.

    REACTANT DELIVERY APPARATUSES
    39.
    发明专利

    公开(公告)号:CA2349945A1

    公开(公告)日:2000-05-18

    申请号:CA2349945

    申请日:1999-11-08

    Applicant: NANOGRAM CORP

    Abstract: An aerosol delivery apparatus (96) is used to deliver an aerosol into a reaction chamber (92) for chemical reaction to produce reaction products suc h as nanoparticles. A variety of improved aerosol delivery approaches provide for the production of more uniform reaction products. In preferred embodiments, a reaction chamber (92) is used that has a cross section perpendicular to the flow of reactant having a dimension along a major axis greater than a dimension along a minor axis. The aerosol preferably is elongated along the major axis of the reaction chamber.

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