公开(公告)号：WO2011011661A3

公开(公告)日：2011-04-28

申请号：PCT/US2010043014

申请日：2010-07-23

Applicant: OMNIPROBE INC ,  ZAYKOVA-FELDMAN LYUDMILA ,  MOORE THOMAS ,  AMADOR GONZALO

Inventor： ZAYKOVA-FELDMAN LYUDMILA ,  MOORE THOMAS ,  AMADOR GONZALO

IPC: H01J37/26 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/304 ,  H01J2237/20207 ,  H01J2237/2482 ,  H01J2237/30466 ,  H01J2237/31745

Abstract: An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling

Abstract translation: 用于监测带电粒子仪器中的样品研磨的装置具有附接到仪器倾斜台（120）的可变倾斜试样保持器（130）。 可变倾斜试样架（130）包括第一枢转板（260），其具有用于保持可旋转地支撑在可变倾斜试样保持器（130）中的试样（290）的狭槽（280）。 第一枢转板（260）具有足够的旋转范围，以便将倾斜台（120）放置在其最大倾斜范围的第一位置移动样品（290）的优选稀疏轴线， 样品（290）的薄化的优选轴线和仪器的离子束柱（110）的轴线大于零，到第二位置，其中样品（290）的薄化优选轴线基本上平行于 离子束柱（110）的轴线。 光检测器（250）被定位成通过离子束铣削来遮蔽通过样品（290）的光线。 可以将通过样品（290）的光的强度与先前研磨阶段记录的强度进行比较，以确定铣削的终点

公开(公告)号：WO2011011659A3

公开(公告)日：2011-04-28

申请号：PCT/US2010043012

申请日：2010-07-23

Applicant: OMNIPROBE INC ,  AMADOR GONZALO ,  MILLER BRIAN

Inventor： AMADOR GONZALO ,  MILLER BRIAN

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J2237/20207 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A variable-tilt specimen holder (100) for a charged particle instrument having a tilt stage (360), where the tilt stage (360) has a maximum range of tilt, a sample plate (280) affixed to the tilt stage (360), and an ion-beam column (320) having an ion-beam column axis. The variable-tilt specimen holder (100) has a base (110) for mounting to the sample plate (280), so that the base (110) is substantially parallel to the tilt stage (360). A rotatably supported pivot plate (140) has slots (210) for holding TEM specimens (270) or TEM grids holding specimens (270). The pivot plate (140) is rotatable so that the TEM specimens (270) held therein can be aligned with the axis of the ion beam column (320) for thinning of the specimen (270). The pivot plate (140) has a range of rotation sufficient to move the preferred axis (275) of thinning of the specimen (270) from a first position where the tilt stage (360) is placed at its maximum range of tilt and the angle between the preferred axis (275) of thinning of the specimen (270) and the axis of the ion beam column (320) is greater than zero, to a second position where the preferred axis (275) for thinning of the specimen (270) is substantially parallel to the axis of the ion-beam column (320).

Abstract translation: 一种用于具有倾斜台（360）的带电粒子仪器的可变倾斜试样保持器（100），其中倾斜台（360）具有最大倾斜范围，固定到倾斜台（360）的样品板（280） 和具有离子束列轴的离子束柱（320）。 可变倾斜试样架（100）具有用于安装到试样板（280）的基座（110），使得基座（110）基本平行于倾斜台（360）。 可旋转地支撑的枢轴板（140）具有用于容纳保持样本（270）的TEM样本（270）或TEM网格的狭槽（210）。 枢轴板（140）是可旋转的，使得保持在其中的TEM样本（270）可以与离子束柱（320）的轴线对齐以使样本（270）变薄。 枢转板（140）具有足以使试样（270）变薄的优选轴（275）从其中倾斜台（360）被放置在其最大倾斜范围处的第一位置移动的旋转范围， 在样本（270）的变薄的优选轴（275）和离子束列（320）的轴之间的距离大于零的第二位置到用于使样本（270）变薄的优选轴（275） 基本平行于离子束柱（320）的轴线。

公开(公告)号：WO2010033420A3

公开(公告)日：2010-03-25

申请号：PCT/US2009/056492

申请日：2009-09-10

Applicant: OMNIPROBE, INC. ,  ZAYKOVA-FELDMAN, Lyudmila ,  KRUGER, Rocky ,  MARCHMAN, Herschel ,  MOORE, Thomas

Inventor： ZAYKOVA-FELDMAN, Lyudmila ,  KRUGER, Rocky ,  MARCHMAN, Herschel ,  MOORE, Thomas

IPC: H01L21/205

Abstract: We disclose methods for materials deposition on a surface (120) inside an energetic-beam instrument, where the energetic-beam instrument is provided with a laser beam (170), an electron beam (100), and a source (130) of precursor gas (150). The electron beam (100) is focused on the surface (120), and the laser beam (170) is focused to a focal point (190) that is at a distance (200) above the surface (120) of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point (190) of the laser beam (170) will thus be within the stream of precursor gas (150) injected at the sample surface (120), so that the laser beam (170) will facilitate reactions in this gas cloud with less heating of the surface (120).

公开(公告)号：WO2010033420A2

公开(公告)日：2010-03-25

申请号：PCT/US2009056492

申请日：2009-09-10

Applicant: OMNIPROBE INC ,  ZAYKOVA-FELDMAN LYUDMILA ,  KRUGER ROCKY ,  MARCHMAN HERSCHEL ,  MOORE THOMAS

Inventor： ZAYKOVA-FELDMAN LYUDMILA ,  KRUGER ROCKY ,  MARCHMAN HERSCHEL ,  MOORE THOMAS

IPC: H01L21/205

CPC classification number: C23C16/487 ,  C23C16/0227 ,  C23C16/48 ,  C23C16/483

Abstract: We disclose methods for materials deposition on a surface (120) inside an energetic-beam instrument, where the energetic-beam instrument is provided with a laser beam (170), an electron beam (100), and a source (130) of precursor gas (150). The electron beam (100) is focused on the surface (120), and the laser beam (170) is focused to a focal point (190) that is at a distance (200) above the surface (120) of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point (190) of the laser beam (170) will thus be within the stream of precursor gas (150) injected at the sample surface (120), so that the laser beam (170) will facilitate reactions in this gas cloud with less heating of the surface (120).

Abstract translation: 我们公开了用于在能量束仪器内的表面（120）上沉积材料的方法，其中能量束仪器设置有激光束（170），电子束（100）和前体源（130） 气（150）。 电子束（100）聚焦在表面（120）上，并且激光束（170）聚焦到焦点（190），焦点（190）距表面（120）上的距离（200）约为5微米到 1毫米，优选5至50微米。 激光束（170）的焦点（190）将因此位于在样品表面（120）处注入的前体气体（150）的流内，使得激光束（170）将促进该气体云中的反应与 表面（120）的加热较少。

公开(公告)号：WO2006050495A3

公开(公告)日：2008-08-14

申请号：PCT/US2005039942

申请日：2005-11-03

Applicant: OMNIPROBE INC ,  MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

Inventor： MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

IPC: H01J37/26 ,  H01J37/304

CPC classification number: H01J37/302 ,  B82Y15/00 ,  G01N1/32 ,  H01J37/20 ,  H01J37/22 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/30411 ,  H01J2237/30472 ,  H01J2237/31745

Abstract: An apparatus for performing automated in-situ lift-out of a sample (150) from a specimen (125) includes a computer (100) having a memory with computer-readable instructions, a stage (120) for a specimen (125) and a nano-manipulator (130). The stage (120) and the nano-manipulator (130) are controlled by motion controllers (110) connected to the computer (100). The nano-manipulator (130) has a probe tip (140) for attachment to samples (150) excised from the specimen (125). The computer-readable instructions include instructions to cause the stage motion controllers (110) and the nano-manipulator motion controllers (110), as well as an ion-beam source (170), to automatically perform in-situ lift-out of a sample (150) from the specimen (125).

Abstract translation: 用于从样本（125）进行样品（150）的自动原位取出的设备包括具有计算机可读指令的存储器的计算机（100），用于样本（125）的级（120）和 纳米操纵器（130）。 舞台（120）和纳米机械手（130）由连接到计算机（100）的运动控制器（110）控制。 纳米操纵器（130）具有用于附接到从样本（125）切除的样品（150）的探针尖端（140）。 所述计算机可读指令包括使所述载物台运动控制器（110）和所述纳米机械手运动控制器（110）以及离子束源（170）自动执行原位取出的指令 来自样品（125）的样品（150）。

公开(公告)号：WO2006096549A3

公开(公告)日：2007-04-19

申请号：PCT/US2006007700

申请日：2006-03-03

Applicant: OMNIPROBE INC ,  ZAYKOVA-FELDMAN LYUDMILA ,  MOORE THOMAS M

Inventor： ZAYKOVA-FELDMAN LYUDMILA ,  MOORE THOMAS M

IPC: G01N27/82 ,  G01N11/00 ,  G01R33/09 ,  G01R33/12

CPC classification number: G01R31/2881 ,  G01M7/08 ,  G01N3/00 ,  G01N3/307 ,  G01N3/313 ,  G01N2203/0044 ,  G01N2203/005 ,  G01N2203/0057 ,  G01N2203/0296 ,  G01N2203/0676 ,  G01R31/2868 ,  H01L21/67011

Abstract: An apparatus for testing flip-chip packages has a programmed computer (100), a test-engine stage (130) for applying an impact to at least one package (110) under test, and a monitoring stage (140). The test-engine stage (130) causes an impact on the package (110) on the side opposite its ball-grid array. The test-engine stage (130) has actuators connected to the test-engine stage (130) and the computer (100), for moving and aligning the test-engine stage (130). The monitoring stage (140) has a digital camera (300) connected to the computer (100) for transmitting digital images from the ball-grid array side of the package (110) to the computer (100). A microscope (290) is preferably connected to the digital camera (300). A sample stage (120) located between the test-engine stage (130) and the monitoring stage (140) holds the package (110 under test. The sample stage (120) has an acoustic transducer (190) capable of being removably connected to the package (110) under test. The acoustic transducer (190) is connected to the computer (100) for transmitting signals from the acoustic transducer (190) to the computer (100).

Abstract translation: 用于测试倒装芯片封装的装置具有编程计算机（100），用于对被测试的至少一个封装（110）施加冲击的测试引擎级（130）和监视级（140）。 测试引擎级（130）在与球栅阵列相对的一侧上引起对包装（110）的冲击。 测试发动机级（130）具有连接到测试引擎级（130）和计算机（100）的致动器，用于移动和对准测试引擎级（130）。 监视级（140）具有连接到计算机（100）的数字照相机（300），用于将数字图像从包装（110）的球栅阵列侧传送到计算机（100）。 显微镜（290）优选地连接到数字照相机（300）。 位于测试引擎级（130）和监控级（140）之间的样品台（120）保持被测试的包装（110）。样品台（120）具有能够可移除地连接到 声学换能器（190）连接到计算机（100），用于将信号从声换能器（190）发送到计算机（100）。

公开(公告)号：WO2006050494A2

公开(公告)日：2006-05-11

申请号：PCT/US2005/039940

申请日：2005-11-03

Applicant: OMNIPROBE, INC. ,  MOORE, Thomas, M. ,  ZAYKOVA-FELDMAN, Lyudmila

Inventor： MOORE, Thomas, M. ,  ZAYKOVA-FELDMAN, Lyudmila

IPC: H01J37/08

CPC classification number: H01J37/22 ,  B82Y35/00 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/31745

Abstract: We disclose an apparatus and method for detecting probe-tip (120) contact with a surface, generally inside a focused ion-beam instrument, where the probe tip (120) is attached to a capsule (130), and the capsule (130) is movably secured in a probe shaft (140). There is a fiber-optic cable (150) having a first end and a second end; a beam splitter (115) having first and second output ports; and a light source (100) connected to the beam splitter (115). The first output port of the beam splitter (115) is connected to the first end of the fiber-optic cable (150), and the second output port of the beam splitter (115) is connected to a photodiode (110). The second end of the fiber-optic cable (150) has a mirror (155) for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable (150) and onto the capsule (130), so that the intensity of the light reflected back from the capsule (130) through the fiber-optic cable (150) is proportional to the deflection of the capsule (130) as the probe tip (120) makes contact with the surface.

Abstract translation: 我们公开了一种用于检测探针尖端（120）与通常在聚焦离子束仪器内部的表面接触的装置和方法，其中探针尖端（120）附接到胶囊（130），并且胶囊（130） 可移动地固定在探针轴（140）中。 存在具有第一端和第二端的光纤电缆（150） 分束器（115），具有第一和第二输出端口; 以及连接到分束器（115）的光源（100）。 分束器（115）的第一输出端口连接到光纤电缆（150）的第一端，并且分束器（115）的第二输出端口连接到光电二极管（110）。 光纤电缆（150）的第二端具有反射镜（155），用于将入射光以与光纤电缆（150）中的光路的轴线成约90度的角度反射到胶囊（ 130），使得通过光纤电缆（150）从胶囊（130）反射的光的强度与探针尖端（120）与表面接触的胶囊（130）的偏转成比例 。

公开(公告)号：WO2005123227A2

公开(公告)日：2005-12-29

申请号：PCT/US2004/018206

申请日：2004-06-08

Applicant: OMNIPROBE, INC. ,  MOORE, Thomas, M. ,  ANTHONY, John, M.

Inventor： MOORE, Thomas, M. ,  ANTHONY, John, M.

IPC: B01D59/44

CPC classification number: G01N23/2204 ,  G02B21/32 ,  H01J2237/31745

Abstract: We disclose a method for analyzing the composition of a microscopic particle (100) resting on a first sample surface (110). The method comprises positioning a micro-manipulator probe (120) near the particle (100); attaching the particle (100) to the probe (120); moving the probe (120) and the attached particle (100) away from the first sample surface (110); positioning the particle (100) on a second sample surface (150); and, analyzing the composition of the particle (100) on the second sample surface (150) by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface (150) has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface (110). We also disclose methods for adjusting the electrostatic forces and DC potentials between the probe (120), the particle (100), and the sample surfaces (110, 150) to effect removal of the particle (100), and its transfer and relocation to the second sample surface (150).

Abstract translation: 我们公开了分析搁置在第一样品表面（110）上的微观颗粒（100）的组成的方法。 该方法包括将微操作器探针（120）定位在颗粒（100）附近; 将所述颗粒（100）附着到所述探针（120）上; 将探针（120）和附着的颗粒（100）移离第一样品表面（110）; 将颗粒（100）定位在第二样品表面（150）上; 并且通过能量色散X射线分析或俄歇电子的检测来分析第二样品表面（150）上的颗粒（100）的组成。 第二表面（150）在分析期间相对于第一表面（110）的背景信号具有减小的或非干扰的背景信号。 我们还公开了用于调整探针（120），颗粒（100）和样品表面（110,150）之间的静电力和DC电位以实现除去颗粒（100）的方法，并且将其转移和迁移到 第二样品表面（150）。

公开(公告)号：WO2005046851A3

公开(公告)日：2005-05-26

申请号：PCT/US2004/036560

申请日：2004-11-03

Applicant: OMNIPROBE, Inc. ,  MOORE, Thomas

Inventor： MOORE, Thomas

IPC: H01J37/20

Abstract: A coupon (100) for preparing a TEM sample holder (170) comprises a sheet of material (120) that includes a TEM sample holder form (170). There is at least one section of the sheet (120) connecting the TEM sample holder form (170) to other portions of the sheet (120). A TEM sample holder (170) is formed by cutting the TEM sample holder form (170) from the coupon in a press. The cutting joins the tip point (160) of a nano-manipulator probe tip (150) with the formed TEM sample holder (170). The tip point (160) of the probe (150) has a sample (140) attached for inspection in a TEM.

公开(公告)号：EP2742334A4

公开(公告)日：2015-03-11

申请号：EP12822777

申请日：2012-08-08

Applicant: OMNIPROBE INC

Inventor： HARTFIELD CHERYL ,  MOORE THOMAS ,  MILLER BRIAN

IPC: G01N1/32 ,  B82Y10/00 ,  B82Y40/00 ,  G01B9/04 ,  G01N1/28 ,  G02B21/32 ,  H01J37/20

CPC classification number: G01N1/32 ,  B82Y10/00 ,  B82Y40/00 ,  G01N1/286 ,  G01N2001/2886 ,  G02B21/32 ,  H01J37/20 ,  H01J2237/0216 ,  H01J2237/208 ,  H01J2237/31745