公开(公告)号：HK1095426A1

公开(公告)日：2007-05-04

申请号：HK07100867

申请日：2007-01-25

Applicant: OMNIPROBE INC

Inventor： MOORE THOMAS

IPC: B01F20060101 ,  H01J20060101 ,  H01J37/20

Abstract: A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to other portions of the sheet. A TEM sample holder is formed by cutting the TEM sample holder form from the coupon in a press. The cutting joins the tip point of a nano-manipulator probe tip with the formed TEM sample holder. The tip point of the probe has a sample attached for inspection in a TEM.

公开(公告)号：USRE46350E1

公开(公告)日：2017-03-28

申请号：US14258285

申请日：2014-04-22

Applicant: Omniprobe, Inc.

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: G01N23/00 ,  G01N23/04

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

公开(公告)号：US09097625B2

公开(公告)日：2015-08-04

申请号：US13864362

申请日：2013-04-17

Applicant: Omniprobe, Inc.

Inventor： Rocky Kruger ,  Aaron Smith ,  Cheryl Hartfield

IPC: C23C16/00 ,  G01N1/28 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  H01J37/02

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。 储存器的出口通过出口阀联接到输出通道，并且构造成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。

公开(公告)号：US20150318141A1

公开(公告)日：2015-11-05

申请号：US14797389

申请日：2015-07-13

Applicant: Omniprobe, Inc.

Inventor： Rocky Kruger ,  Aaron Smith ,  Cheryl Hartfield

IPC: H01J37/08

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。 来自储存器的出口通过出口阀联接到输出通道，并且构造成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。

公开(公告)号：CA2543396A1

公开(公告)日：2005-12-29

申请号：CA2543396

申请日：2004-06-08

Applicant: OMNIPROBE INC

Inventor： MOORE THOMAS M ,  ANTHONY JOHN M

IPC: B01D59/44 ,  G01N23/22 ,  G02B21/32

公开(公告)号：CA2543462A1

公开(公告)日：2005-05-26

申请号：CA2543462

申请日：2004-11-03

Applicant: OMNIPROBE INC

Inventor： MOORE THOMAS

IPC: H01J37/20 ,  B01F20060101

Abstract: A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to other portions of the sheet. A TEM sample holder is formed by cutting the TEM sample holder form from the coupon in a press. The cutting joins the tip point of a nano-manipulator probe tip with the formed TEM sample holder. The tip point of the probe has a sample attached for inspection in a TEM.

公开(公告)号：US20160189929A1

公开(公告)日：2016-06-30

申请号：US14926648

申请日：2015-10-29

Applicant: Omniprobe, Inc.

Inventor： Matt Hammer ,  Michael Dawson ,  Cheryl Hartfield

IPC: H01J37/305 ,  H01J37/285

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument such as a FIB-SEM is disclosed. The method includes rotating a nanomanipulator probe tip holding an extracted sample by an angle calculated according to the geometry of the apparatus; moving the instrument stage to position a TEM grid in a fixed holder so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling to prepare a thinned cross-sectional sample for TEM viewing.

Abstract translation: 公开了一种用于在诸如FIB-SEM的能量束仪器中从工件提取的样品的背面研磨的TEM样品制备方法。 该方法包括使保持提取的样品的纳米操纵器探针尖端旋转根据装置的几何形状计算的角度; 移动仪器台以将TEM格栅定位在固定夹具中，使得TEM网格的平面基本上平行于TEM样品的所需平面; 将提取的样品连接到TEM网格; 并且使台架相对于台架保持固定姿态，同时使台架倾斜角度，使得离子束的轴线基本上平行于TEM样品的所需平面; 从而将提取的样品置于适当位置，以允许背面研磨以制备用于TEM观察的变薄的横截面样品。

公开(公告)号：US20140014742A1

公开(公告)日：2014-01-16

申请号：US13864362

申请日：2013-04-17

Applicant: OMNIPROBE, INC.

Inventor： Rocky Kruger ,  Aaron Smith ,  Cheryl Hartfield

IPC: G01N1/28

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。 来自储存器的出口通过出口阀联接到输出通道，并且构造成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。

公开(公告)号：WO2011011661A2

公开(公告)日：2011-01-27

申请号：PCT/US2010/043014

申请日：2010-07-23

Applicant: OMNIPROBE, Inc. ,  ZAYKOVA-FELDMAN, Lyudmila ,  MOORE, Thomas ,  AMADOR, Gonzalo

Inventor： ZAYKOVA-FELDMAN, Lyudmila ,  MOORE, Thomas ,  AMADOR, Gonzalo

IPC: H01J37/26 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/304 ,  H01J2237/20207 ,  H01J2237/2482 ,  H01J2237/30466 ,  H01J2237/31745

Abstract: An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling

Abstract translation: 用于监视带电粒子仪器中的样本研磨的装置具有附接到仪器倾斜台（120）的可变倾斜样本保持器（130）。 可变倾斜试样保持器130包括第一枢转板260，第一枢转板260具有用于保持可旋转地支撑在可变倾斜试样保持器130中的试样290的槽280。 第一枢转板（260）具有足以使试样（290）的优选减薄轴从第一位置移动到第一位置的旋转范围，其中倾斜台（120）被放置在其最大倾斜范围处， 所述样本（290）的优选减薄轴线和所述器械的离子束列（110）的轴线大于零，至第二位置，在所述第二位置，所述样本（290）变薄的优选轴线基本上平行于 离子束柱（110）的轴线。 光检测器（250）被定位成在其通过离子束铣削变薄时拦截穿过样本（290）的光。 穿过样本（290）的光的强度可以与针对之前研磨阶段记录的强度进行比较以确定研磨的终点

公开(公告)号：WO2005123227A3

公开(公告)日：2006-12-14

申请号：PCT/US2004018206

申请日：2004-06-08

Applicant: OMNIPROBE INC ,  MOORE THOMAS M ,  ANTHONY JOHN M

Inventor： MOORE THOMAS M ,  ANTHONY JOHN M

IPC: G01N23/22 ,  B01D59/44 ,  G01N1/28 ,  G02B21/32

CPC classification number: G01N23/2204 ,  G02B21/32 ,  H01J2237/31745

Abstract: Disclosed is a method for analyzing the composition of a microscopic particle (100) resting on a first sample surface (110). The method comprises positioning a micro-manipulator probe (120) near the particle; attaching the particle to the probe (120); moving the probe (120) and the attached particle (100) away from the first sample surface (110); positioning the particle on a second sample surface (150); and, analyzing the composition of the particle on the second sample surface (150) by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface (150) has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface (110). Also disclosed are methods for adjusting potentials after its transfer and relocation to the second sample surface (150).

Abstract translation: 公开了一种用于分析搁置在第一样品表面（110）上的微观颗粒（100）的组成的方法。 该方法包括在微粒附近定位微机械手探针（120）; 将所述颗粒附着到所述探针（120）上; 将探针（120）和附着的颗粒（100）移离第一样品表面（110）; 将颗粒定位在第二样品表面（150）上; 以及通过能量色散X射线分析或俄歇电子的检测来分析第二样品表面（150）上的颗粒的组成。 第二表面（150）在分析期间相对于第一表面（110）的背景信号具有减小的或非干扰的背景信号。 还公开了用于在其转移和重新定位到第二样品表面（150）之后调节电位的方法。