公开(公告)号：JP2013200986A

公开(公告)日：2013-10-03

申请号：JP2012068016

申请日：2012-03-23

Applicant: Hitachi High-Tech Science Corp ,  株式会社日立ハイテクサイエンス

Inventor： ASAHATA TATSUYA ,  SUGIYAMA YASUHIKO ,  OBA HIROSHI

IPC: H01J37/317 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/10 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/0206 ,  H01J2237/04924 ,  H01J2237/216 ,  H01J2237/24535 ,  H01J2237/31749

Abstract: PROBLEM TO BE SOLVED: To smoothly change a beam without generating electric discharge in an ion beam optical system.SOLUTION: An ion beam device includes an ion source 101 discharging an ion beam 9, a condenser lens electrode 102, a storage section 13 storing a set voltage value of a lens corresponding to an irradiation mode, and a control section 16 which reads out the set voltage value appropriately corresponding to the next previous irradiation mode and sets the voltage value to a lens power source.

Abstract translation: 要解决的问题：在离子束光学系统中平滑地改变光束而不产生放电。解决方案：离子束装置包括离子源101，离子束9，聚光透镜电极102，存储部分13 设置与照射模式相对应的透镜的电压值;以及控制部16，其读取与下一次照射模式适当对应的设定电压值，并将电压值设定为透镜电源。

公开(公告)号：JP2013065511A

公开(公告)日：2013-04-11

申请号：JP2011204507

申请日：2011-09-20

Applicant: Hitachi High-Tech Science Corp ,  株式会社日立ハイテクサイエンス

Inventor： UEMOTO ATSUSHI ,  YAMAMOTO HIROSHI ,  ASAHATA TATSUYA

IPC: H01J37/317 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/261 ,  G01N1/32 ,  G01N23/2208 ,  G01N23/225 ,  G01N2223/0816 ,  G01N2223/102 ,  G01N2223/105 ,  H01J37/28 ,  H01J37/317 ,  H01J2237/20285 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: PROBLEM TO BE SOLVED: To achieve operability of sample stage movement in a device having two charged particle beam lens barrels arranged orthogonal to each other.SOLUTION: A composite charged particle beam device is used which includes: a focused ion beam lens barrel 4; an electron beam lens barrel 5 orthogonal to the focused ion beam lens barrel 4; a sample stage 2 which moves a sample 11; an optical microscope 14 which observes the sample 11; display parts 9, 10 capable of displaying a focused ion beam image, an electron beam image, and an optical microscope image; and a stage control part 3 which moves the sample stage 2 in accordance with a coordinate system of each image.

Abstract translation: 要解决的问题：为了实现具有彼此正交布置的两个带电粒子束透镜筒的装置中的样品台运动的可操作性。 解决方案：使用复合带电粒子束装置，其包括：聚焦离子束透镜镜筒4; 与聚焦离子束透镜镜筒4正交的电子束透镜镜筒5; 移动样品11的样品台2; 观察样品11的光学显微镜14; 能够显示聚焦离子束图像的显示部分9,10，电子束图像和光学显微镜图像; 以及舞台控制部3，其根据各图像的坐标系移动样本台2。 版权所有（C）2013，JPO＆INPIT