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    33.
    发明专利
    未知

    公开(公告)号：NO20020139L

    公开(公告)日：2002-03-12

    申请号：NO20020139

    申请日：2002-01-11

    Applicant: INPUT OUTPUT INC

    Inventor： YU DULI ,  YU LIANZHONG ,  GOLDBERG HOWARD D ,  RIED ROBERT P

    IPC: B81B3/00 ,  G02B26/10 ,  B81C1/00 ,  C23F1/02 ,  G01P9/04 ,  G02B26/08 ,  G03F7/20 ,  G06V30/224 ,  G01P

    Abstract: The present invention provides merged-mask processes for fabricating micromachined devices in general and mirrored assemblies for use in optical scanning devices in particular. A method of fabricating a three dimensional structure, comprising, providing a substrate, applying a layer of a first masking material onto the substrate, applying a layer of a second masking material onto the layer of the first masking material, patterning the layer of the second masking material, applying a layer of a third masking material onto the portions not covered by the patterned layer of the second masking material, the layer of the third masking material is at least as thick as the combined thickness of the layers of the first and second masking materials, patterning the layers of the first and third masking materials, etching the exposed portions of the substrate, etching the exposed portions of the layers of the first and third masking materials and etching the exposed portions of the substrate.

    34.
    发明专利
    未知

    公开(公告)号：NO20020140D0

    公开(公告)日：2002-01-11

    申请号：NO20020140

    申请日：2002-01-11

    Applicant: INPUT OUTPUT INC

    Inventor： YU DULI ,  YU LIANZHONG ,  GOLDBERG HOWARD D ,  SCHMIDT MARTIN A ,  RIED ROBERT P

    IPC: G02B26/10 ,  B81B3/00 ,  G02B7/182 ,  G02B26/08 ,  G06K7/10 ,  G02B

    Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.

    ACCELEROMETER WITH RE-ENTRANT GROOVES
    35.
    发明专利
    ACCELEROMETER WITH RE-ENTRANT GROOVES 未知

    公开(公告)号：CA2410909A1

    公开(公告)日：2001-12-06

    申请号：CA2410909

    申请日：2001-05-29

    Applicant: INPUT OUTPUT INC

    Inventor： YU LIANZHONG ,  SCHMIDT MARTIN A ,  GOLDBERG HOWARD D ,  RIED ROBERT P ,  SELVAKUMAR ARJUN

    IPC: G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P15/00

    Abstract: An accelerometer (305) which comprises a measurement mass assembly having to p capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entra nt opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) there by lowering manufacturing costs and increasing production yields.

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