公开(公告)号：US20210231562A1

公开(公告)日：2021-07-29

申请号：US17122490

申请日：2020-12-15

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Christoph Glacer ,  Steffen Kubacki

IPC: G01N21/3504

Abstract: A radiation source for obliquely launching a narrowband electromagnetic radiation into a cavity, comprises an emitter structure having a main radiation emission region for emitting the narrowband electromagnetic radiation, wherein the emitter structure is optically coupled to the cavity, and a layer element coupled to the main radiation emission region of the emitter structure, wherein the layer element comprises a radiation deflection structure configured for deflecting the radiation emission characteristic of the emitter structure with respect to the surface normal of the main radiation emission region of the emitter structure.

公开(公告)号：US10935451B2

公开(公告)日：2021-03-02

申请号：US16025703

申请日：2018-07-02

Applicant: Infineon Technologies AG

Inventor： David Tumpold

IPC: G01L27/00 ,  G01L9/00 ,  G01L19/04 ,  G01L11/02

Abstract: In accordance with an embodiment, a sensor arrangement includes a pressure transducer configured to be in fluid connection with a volume region having a fluid, where the pressure transducer is configured to output a pressure signal in response to a pressure change in the volume region, the pressure signal comprising a signal curve that depends on the pressure change; a heating element configured to provide a defined temperature change of the fluid situated in the volume region, wherein the defined temperature change of the fluid brings about a corresponding pressure change in the volume region; and a processing device configured to ascertain a current functional parameter of the pressure transducer based on the signal curve of the pressure signal obtained in the volume region due to the defined temperature change provided by the heating element.

公开(公告)号：US10367430B2

公开(公告)日：2019-07-30

申请号：US14992615

申请日：2016-01-11

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Alfons Dehe ,  Christoph Glacer

IPC: H02N1/00 ,  H01L41/08 ,  H01L41/09

Abstract: According to an embodiment, a microelectromechanical systems MEMS transducer includes a deflectable membrane attached to a support structure, an acoustic valve structure configured to cause the deflectable membrane to be acoustically transparent in a first mode and acoustically visible in a second mode, and an actuating mechanism coupled to the deflectable membrane. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.

公开(公告)号：US20190181776A1

公开(公告)日：2019-06-13

申请号：US16274720

申请日：2019-02-13

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Alfons Dehe ,  Christoph Glacer

IPC: H02N1/00 ,  H01L41/08 ,  H01L41/09

Abstract: According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.

公开(公告)号：US10302554B2

公开(公告)日：2019-05-28

申请号：US15172178

申请日：2016-06-03

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Alfons Dehe ,  Christoph Glacer

IPC: G01N21/17

Abstract: An acoustic wave detector may include: an exterior housing with an exterior housing wall, a gas chamber located within the exterior housing and configured to receive a gas therein. The exterior housing wall may include an aperture providing a gas passage between the gas chamber and the exterior of the acoustic wave detector. The acoustic wave detector may further include an excitation element configured to selectively excite gas molecules of a specific type in the gas received in the gas chamber in a time-varying fashion, thereby generating acoustic waves in the gas, and an acoustic wave sensor configured to detect the acoustic waves generated in the gas and acoustic waves generated outside of the acoustic wave detector. The acoustic wave sensor may have an acoustic port overlapping with the aperture in the exterior housing wall.

公开(公告)号：US20180164215A1

公开(公告)日：2018-06-14

申请号：US15376738

申请日：2016-12-13

Applicant: Infineon Technologies AG

Inventor： Christoph Glacer ,  Alfons Dehe ,  David Tumpold ,  Gueclue Onaran

IPC: G01N21/64 ,  G01N21/84

Abstract: A gas analyzer may include: a gas chamber configured to receive a gas to be analyzed therein, a radiation source configured to emit electromagnetic radiation into the gas chamber, the electromagnetic radiation being adapted to selectively excite gas molecules of a specific type that is to be detected in the gas received in the gas chamber, a collimator configured to collimate the electromagnetic radiation emitted by the radiation source, and a sensor configured to detect a physical quantity indicative of a degree of interaction between the electromagnetic radiation emitted by the radiation source and the gas to be analyzed.

公开(公告)号：US20250060338A1

公开(公告)日：2025-02-20

申请号：US18939121

申请日：2024-11-06

Applicant: Infineon Technologies AG

Inventor： Derek Debie ,  Klaus Elian ,  Ludwig Heitzer ,  David Tumpold ,  Jens Pohl ,  Cyrus Ghahremani ,  Thorsten Meyer ,  Christian Geissler ,  Andreas Allmeier

IPC: G01N29/22 ,  G01N25/00 ,  G01N29/02 ,  G01N29/24

Abstract: A radiation source device includes at least one membrane layer, a radiation source structure to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and wherein the radiation source structure is arranged between the at least one membrane layer and the substrate.

公开(公告)号：US12030021B2

公开(公告)日：2024-07-09

申请号：US17144978

申请日：2021-01-08

Applicant: Infineon Technologies AG

Inventor： Abidin Güçlü Onaran ,  David Tumpold

IPC: G01N29/22 ,  B01D69/10 ,  B81B7/00 ,  B81C1/00 ,  G01N21/17 ,  H04R7/02 ,  H04R9/08

CPC classification number: B01D69/10 ,  B81B7/0038 ,  B81C1/00285 ,  G01N21/1702 ,  H04R7/02 ,  H04R9/08 ,  B01D2325/028 ,  B01D2325/04 ,  B01D2325/24 ,  B81B2201/0257 ,  G01N2021/1704 ,  G01N29/222 ,  H04R2201/003 ,  H04R2201/025

Abstract: The present disclosure concerns a micromechanical device and a method for manufacturing the same. The micromechanical device may comprise a membrane structure suspended on a substrate. The membrane structure may comprise a perforated gas permeable membrane comprising a plurality of perforations, and a reinforcement structure being coupled with the perforated membrane for stiffening the perforated membrane and/or for increasing the mechanical stability of the perforated membrane in order to attenuate an oscillation of the perforated membrane.

公开(公告)号：US20230194478A1

公开(公告)日：2023-06-22

申请号：US18050178

申请日：2022-10-27

Applicant: Infineon Technologies AG

Inventor： Derek Debie ,  Klaus Elian ,  Ludwig Heitzer ,  David Tumpold ,  Jens Pohl ,  Cyrus Ghahremani ,  Thorsten Meyer ,  Christian Geissler ,  Andreas Allmeier

IPC: G01N29/22 ,  G01N29/02 ,  G01N25/00 ,  G01N29/24

CPC classification number: G01N29/222 ,  G01N29/02 ,  G01N25/00 ,  G01N29/2425 ,  G01N2291/021

Abstract: A radiation source device includes at least one membrane layer, a radiation source structure to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and wherein the radiation source structure is arranged between the at least one membrane layer and the substrate.

公开(公告)号：US11490460B2

公开(公告)日：2022-11-01

申请号：US16251713

申请日：2019-01-18

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Sebastian Anzinger ,  Christoph Glacer

IPC: G01N21/3504 ,  H05B3/20 ,  G01J3/10 ,  G01N21/17 ,  H05B3/03

Abstract: An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.