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公开(公告)号：JP2003092317A
公开(公告)日：2003-03-28
申请号：JP2001284896
申请日：2001-09-19
Applicant: JSR CORP
Inventor： SATO KATSUMI , IGARASHI HISAO , INOUE KAZUO
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-shaped connector with which a stable electrical- contact state is surely obtained even to an object to be contacted which has a small configuration pitch of electrodes to be contacted, and to provide a probe device with which a satisfactory electrical-contact state can be obtained to the electrodes to be inspected of a circuit device to be inspected, even if the electrodes to be inspected are fine in size and are configured with a small pitch. SOLUTION: This sheet-shaped connector comprises an insulating sheet and a plurality of electrode structures configured mutually separated in the plane directions and extending by piercing the insulating sheet in its thickness direction. The insulating sheet is constituted by a sheet substrate made of non-woven fabric or mesh, impregnated with an elastic high-polymer substance. The probe device is constituted by being provided with the sheet-shaped connector.
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公开(公告)号：JP2001093599A
公开(公告)日：2001-04-06
申请号：JP27455599
申请日：1999-09-28
Applicant: JSR CORP
Inventor： SATO KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic electrical connector for achieving effective electrical connection with the projecting electrodes of a semiconductor device with a prolonged life even with small push pressure, and a checker for the connector. SOLUTION: The anisotropic electrical connector consists of an anisotropic conductive sheet forming the conductive path projected upwards in the thickness direction, and a spacer sheet laid over the conductive sheet to make an electrical connection with a semiconductor connector with the projecting electrode arrange on the spacer. It includes a through-holes stretched towards the thickness direction receiving the projected conductive path. The through-hole receives the projecting electrode of the semiconductor device, being greater than the sum of the thickness of the spacer sheet and the height of the projecting electrode. The sum H+p of the height H of the projecting electrode and the height p of the projected conductive path is greater than the thickness d of the spacer sheet.
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公开(公告)号：JP2001068179A
公开(公告)日：2001-03-16
申请号：JP24409399
申请日：1999-08-30
Applicant: JSR CORP
Inventor： SATO KATSUMI
Abstract: PROBLEM TO BE SOLVED: To surely position an electrode part of a semiconductor device and a conductive part of an anisotropic conductive connection member by installing an opening having a diameter larger than that of an electrode, integratedly installing a conductor having elasticity in the opening, and making the depth from the surface of an insulating sheet to the conductor shallower than the height of the electrode projected from the plane of the semiconductor device in the opening. SOLUTION: When the electrode is a semiconductor device to be inspected and projected from the plane of the semiconductor device, the projected electrode is inserted into each opening corresponding to the anisotropic conductive connection member, the electrode part of the semiconductor device and the conductive part of the anisotropic conductive connection member can correctly be positioned. In this state, when a normal pressure is applied, the electrode of the semiconductor device and the conductive part of the anisotropic conductive connection member can surely be electrically connected. Since the diameter of the bump-shaped electrode of the semiconductor device is smaller than that of the opening of the anisotropic conductive connection member, the inserted electrode comes in contact with the conductor whose tip has elasticity to be electrically connected, and deformation of the device can be reduced.
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公开(公告)号：JP2000193714A
公开(公告)日：2000-07-14
申请号：JP37457398
申请日：1998-12-28
Applicant: JSR CORP
Inventor： SEDAKA RYOJI , SATO KATSUMI , YAMADA ONORI
Abstract: PROBLEM TO BE SOLVED: To provide an inspection apparatus in which a series of operations to place an object to be inspected and to take out the tested object to be inspected can be automated easily when the object to be inspected is tested, and in which a stable electric continutiy state can be obtained between the electrode of the object to be inspected and the connecting terminal of an object- to-be-inspected housing part. SOLUTION: A pair of pressure members 16 are constituted so as to contain respective contact parts 16C comprising end parts on one side, as flat faces come electrically into contact with the nearly central part on the outer surface of a semiconductor element 6 placed on the opening part 22c of a positioning member 22. In addition, they are constituted so as to contain respective arm parts 16A in which connector pins 32 connected to connection members 30 formed at a prescribed angle of inclination with reference to the end parts, on one side, of the contact parts 16C are provided at ends on-one side. In addition, they are constituted so as to contain respective connection part 16B by which end parts on the other side of the contact parts 16c are connected to end parts on the other side of the arm parts 16A.
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35.发明专利Conductive rubber sheet, connector using it, electrical inspection jig for circuit board, and manufacturing method of conductive rubber sheet 审中-公开导电橡胶片，使用它的连接器，电路板电气检查和导电橡胶片的制造方法
公开(公告)号：JP2006318923A
公开(公告)日：2006-11-24
申请号：JP2006167621
申请日：2006-06-16
Inventor： SATO KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide a conductive rubber sheet having elasticity to be electrically connected with a surface mounted LSI and an electronic circuit board, a connector using it, and an electrical inspection jig for the circuit board.
SOLUTION: This conductive rubber sheet, in which an insulation part 4 comprising an electrical insulating material and anisotropic conductive sheets 1, 2 formed from a plurality of conductive parts 3 obtained by blending conductive particles in the electrical insulating material are disposed at the position where the conductive parts overlaps each other so as to bring them into an electrically conductive state, and is formed so that the area of the surface of at least one conductive part of the anisotropic conductive rubber sheet on the one surface side of the conductive sheet becomes larger than the area of the surface of the conductive part disposed at the corresponding position of the anisotropic conductive rubber sheet on the other surface side of the conductive rubber sheet. A circuit board as an intermediate layer is formed between the anisotropic conductive rubber sheets, and the conductive rubber sheet in a laminated state of two or more layers and the circuit board as the intermediate layer are integrated.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供一种具有弹性的导电橡胶片，其与表面安装的LSI和电子电路板电连接，使用它的连接器以及用于电路板的电检查夹具。 解决方案：该导电橡胶片，其中包括电绝缘材料的绝缘部分4和通过在电绝缘材料中掺入导电颗粒而获得的多个导电部分3形成的各向异性导电片1,2设置在 导电部分彼此重叠以使其处于导电状态的位置，并且形成为使导电片的一个表面侧上的各向异性导电橡胶片的至少一个导电部分的表面的面积 变得大于布置在导电橡胶片的另一个表面侧上的各向异性导电橡胶片的相应位置处的导电部分的表面的面积。 在各向异性导电橡胶片之间形成作为中间层的电路板，并且以两层或更多层的叠层状态的导电橡胶片和作为中间层的电路板一体化。 版权所有（C）2007，JPO＆INPIT
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Patent Agency Ranking
公开(公告)号：JP2006105851A
公开(公告)日：2006-04-20
申请号：JP2004294644
申请日：2004-10-07
Inventor： FUJIYAMA HITOSHI , INOUE KAZUO , SATO KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like probe for stably maintaining a good electric connection state by surely preventing displacement between an electrode structure and an electrode to be inspected due to temperature change even when an inspection object is a circuit device in which the diameter of a wafer of a large area is 8 inches or larger and the pitch of the electrode to be inspected is very small, and to provide its manufacturing method and its application. SOLUTION: The sheet-like probe comprises forming a plurality of insulation films by hardening to form a material layer for the insulation film comprising a liquid-like resin material of a shape corresponding to the insulation film to be formed on the support film on a metal foil for a rear face electrode part so as to block each opening of a support film, forming a short circuit part and a surface electrode part connected to it by plating to form a through hole of a pattern corresponding to the electrode structure to be formed on the insulation film, and being obtained by etching the metal foil for the back electrode part and forming the back electrode part. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供一种用于稳定地保持良好的电连接状态的片状探针，即使当检查对象是电路装置时，也可以确保防止由于温度变化而检查的电极结构和电极之间的位移 其中大面积的晶片的直径为8英寸或更大，并且待检查的电极的间距非常小，并且提供其制造方法及其应用。 解决方案：片状探针包括通过硬化形成多个绝缘膜，以形成用于绝缘膜的材料层，该绝缘膜包括与要形成在支撑膜上的绝缘膜相对应的形状的液体状树脂材料 在用于背面电极部分的金属箔上，以阻挡支撑膜的每个开口，形成短路部分和通过电镀连接到其上的表面电极部分，以形成与电极结构对应的图案的通孔， 形成在绝缘膜上，并且通过蚀刻用于背面电极部分的金属箔并形成背面电极部分而获得。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2006078495A
公开(公告)日：2006-03-23
申请号：JP2005293877
申请日：2005-10-06
Inventor： YOSHIOKA MUTSUHIKO , FUJIYAMA HITOSHI , IGARASHI HISAO , SATO KATSUMI , INOUE KAZUO
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like probe, wherein stable connection state is achieved even for a circuit device having a small electrode with a fine pitch, wherein electrode structure bodies do not come out from an insulation film and high durability is achieved, wherein, in a burn-in test for a wafer having a large area and for a circuit device having the electrode to be inspected with the small pitch, positional displacement between the electrode structure bodies and the electrode to be inspected due to temperature variation can be securely prevented so that the superior connection condition is stably maintained. SOLUTION: Each of the electrode structure bodies is composed of: a surface electrode section exposed to the surface of the insulation layer, projecting from the surface of the insulation layer, and having the shape whose diameter is reduced as it proceeds from the base end to the tip; a back surface electrode section exposed to the back surface of the insulation layer; and a short circuit section extending from the base end of the surface electrode section, continuously penetrating the insulation layer with respect to the thickness direction, and connected to the back surface electrode section. The diameter of the base end of the surface electrode section is larger than the diameter of the end of the short circuit section which is in contact with the surface electrode section, and the thickness of the short circuit section is larger than the thickness of the insulation layer. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供一种片状探针，即使对于具有细间距的小电极的电路器件也能实现稳定的连接状态，其中电极结构体不从绝缘膜出来并且高 实现了耐久性，其中，在具有大面积的晶片的老化测试和具有要以小间距检查的电极的电路装置中，由于电极结构体和待检查的电极之间的位置偏移 可以可靠地防止温度变化，从而稳定地保持良好的连接状态。 解决方案：每个电极结构体包括：暴露于绝缘层的表面的表面电极部分，从绝缘层的表面突出，并且具有直径从它的直径减小的形状 底端到尖端; 背面电极部分，暴露于绝缘层的背面; 以及从表面电极部的基端延伸的短路部，其相对于厚度方向连续贯通绝缘层，并与背面电极部连接。 表面电极部的基端的直径大于与表面电极部接触的短路部的端部的直径，短路部的厚度大于绝缘体的厚度 层。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2006058308A
公开(公告)日：2006-03-02
申请号：JP2005270659
申请日：2005-09-16
Inventor： YOSHIOKA MUTSUHIKO , FUJIYAMA HITOSHI , IGARASHI HISAO , SATO KATSUMI , INOUE KAZUO
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like probe with high durability, capable of reliably achieving a stable electrical connecting conditions even for a circuit device, in which electrodes are formed in small pitches, equipped with electrode structure having surface electrode sections of small diameter and large thickness of an insulated layer. SOLUTION: The sheet-like probe is provided such that each of electrode structure comprises the surface electrode sections of shape exposed to the surface of insulated layer, projecting from the surface of insulated layer, and reducing its diameter heading off from its tip to its tip, back electrode sections exposed to the backside of insulated layer and the short-circuited section connected with the back electrode sections, penetrating to extend from the proximal end of surface electrode sections continuously through the insulated layer in thickening direction; while the diameter of surface electrode sections is characterized to be larger than the diameter of end at the side touching the surface electrode sections of the short-circuit section. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供具有高耐久性的片状探针，即使对于电极形成为小间距的电路装置也能够可靠地实现稳定的电连接条件，该电路装置具有电极结构，该电极结构具有表面电极 绝缘层的小直径和大厚度的截面。 解决方案：提供片状探针，使得每个电极结构包括从绝缘层的表面暴露于绝缘层的表面的表面电极部分，从绝缘层的表面突出并且减小其直径从其尖端 在其顶端，暴露于绝缘层的背面的背面电极部分和与后部电极部分连接的短路部分，从表面电极部分的基端延伸穿过绝缘层，使其在增厚方向上连续延伸; 而表面电极部分的直径的特征在于大于在接触短路部分的表面电极部分的一侧的端部的直径。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2005338071A
公开(公告)日：2005-12-08
申请号：JP2005128649
申请日：2005-04-26
Inventor： SATO KATSUMI , INOUE KAZUO , FUJIYAMA HITOSHI , YOSHIOKA MUTSUHIKO , IGARASHI HISAO
Abstract: PROBLEM TO BE SOLVED: To provide a sheetlike probe and its manufacturing method capable of attaining a stable connection state for a circuit device having minute and fine pitch electrodes, capable of obtaining highly durable electrode structure without dropout from an insulation layer, capable of preventing positional misalignment between the electrode structures and electrodes to be tested caused by a temperature variation in a burn-in test to a wafer of large area or the circuit device with small pitch electrodes to be tested, and capable of stably maintaining an excellent connection state. SOLUTION: The sheet like probe is composed of an insulation layer provided with a plurality of electrode structures extending in the thickness direction and supports for supporting the same. The electrode structure comprises: a front electrode part protruding from the surface of insulation layer; a rear electrode exposed to the rear surface of the insulation layer; a short circuit part extending continuously from the base of the front electrode part in the thickness direction and connected with the rear electrode; and a retaining part extending continuously from the base part of the front electrode along the surface of the insulation layer. The method of manufacture of this invention is characterized in that the front electrode part and the short circuit part are filled separately with metal. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供能够获得具有细小间距电极的电路装置的稳定连接状态的片状探针及其制造方法，能够获得非常耐用的电极结构而不会从绝缘层脱落，能够 防止由于大面积的晶片的老化试验的温度变化而导致的电极结构和被测试电极之间的位置不对准，或者是要测试的具有小间距电极的电路装置，并且能够稳定地保持良好的连接 州。 解决方案：片状探针由设置有沿厚度方向延伸的多个电极结构的绝缘层构成，并且支撑用于支撑该绝缘层。 电极结构包括：从绝缘层的表面突出的前电极部分; 暴露于所述绝缘层的后表面的后电极; 短路部，其从所述前电极部的基部在厚度方向连续延伸并与所述后电极连接; 以及沿着绝缘层的表面从前电极的基部连续延伸的保持部。 本发明的制造方法的特征在于前电极部分和短路部分分别用金属填充。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2005338070A
公开(公告)日：2005-12-08
申请号：JP2005128648
申请日：2005-04-26
Inventor： SATO KATSUMI , INOUE KAZUO , FUJIYAMA HITOSHI , YOSHIOKA MUTSUHIKO , IGARASHI HISAO
Abstract: PROBLEM TO BE SOLVED: To provide a sheetlike probe and its manufacturing method capable of obtaining stable connection states in a circuit device having minute and fine pitch electrodes, capable of obtaining durability of the electrode structure without dropout from an insulation film, capable of preventing the positional misalignment between the electrode structures and electrodes to be tested caused by a temperature variation in a burn-in test to a wafer of large area or the circuit device with small pitch electrodes to be tested, and capable of maintaining excellent connection state. SOLUTION: The sheetlike electrode is composed of an insulation layer provided with a plurality of electrode structures extending in the thickness direction and metal frames supporting the insulation layer. The electrode structure comprises: a surface electrode part protruding from the surface of insulation layer; a rear electrode exposed to the rear surface of the insulation layer; a short circuit part extending continuously from the base of the surface electrode part in the thickness direction and connected with the rear electrode; and a retainer part extending continuously from the base part of the surface electrode along the surface of the insulation layer. The method of manufacture is employed for separately filling the surface electrode and the short circuit part with metal. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供能够在具有细小间距电极的电路装置中获得稳定的连接状态的片状探针及其制造方法，能够获得电极结构的耐久性而不会从绝缘膜脱落，能够 防止由大面积的晶片的老化试验的温度变化引起的电极结构和被测试电极之间的位置偏移，或者要测试的具有小间距电极的电路器件，并且能够保持良好的连接状态 。 解决方案：片状电极由设置有沿厚度方向延伸的多个电极结构的绝缘层和支撑绝缘层的金属框架构成。 电极结构包括：从绝缘层的表面突出的表面电极部分; 暴露于所述绝缘层的后表面的后电极; 短路部，其从厚度方向的表面电极部的基部连续延伸并与后部电极连接; 以及沿着绝缘层的表面从表面电极的基部连续延伸的保持器部。 采用制造方法用金属分别填充表面电极和短路部分。 版权所有（C）2006，JPO＆NCIPI
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