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公开(公告)号：JP2007265705A
公开(公告)日：2007-10-11
申请号：JP2006086882
申请日：2006-03-28
Inventor： KIMURA KIYOSHI , YAMADA ONORI
Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic conductive connector with a small interval between adjacent electrodes and capable of surely attaining electric connection with the electrodes with necessary insulation secured between the electrodes even if a connection object has varied levels of height of electrodes, and yet with a simple structure.
SOLUTION: The anisotropic conductive connector is provided with a first anisotropic conductive elastomer sheet containing conductive particles showing magnetism in an elastic polymer substance in a state oriented and forming chains in a thickness direction, and with the chains by the conductive particles dispersed in a plane direction, a plurality of contact films formed in correspondence with the electrodes to be connected with the surface of the first anisotropic conductive elastomer sheet, and a second anisotropic conductive elastomer sheet superposed on the surface of the first anisotropic conductive elastomer sheet including the contact films, and containing conductive particles showing magnetism in a state oriented and forming chains in a thickness direction, and with the chains by the conductive particles dispersed in a plane direction.
COPYRIGHT: (C)2008,JPO&INPITAbstract translation: 要解决的问题：为了提供在相邻电极之间具有小间隔的各向异性导电连接器，并且能够确保在电极之间具有必要绝缘性的电极的电连接，即使连接对象具有不同程度的电极高度 ，但结构简单。 解决方案：各向异性导电连接器设置有第一各向异性导电弹性体片，其包含在弹性聚合物物质中显示出磁性的导电粒子，其状态取向并在厚度方向形成链，并且通过导电粒子分散在链中 平面方向，与要与第一各向异性导电弹性体片的表面连接的电极形成的多个接触膜，以及重叠在包括接触部的第一各向异性导电弹性体片的表面上的第二各向异性导电弹性体片 膜，并且包含在取向的状态下显示磁性的导电颗粒并且在厚度方向上形成链，并且所述导电颗粒通过导电颗粒沿平面方向分散。 版权所有（C）2008，JPO＆INPIT
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2.发明专利Anisotropic conductive sheet, inspection device and inspection method for circuit device 审中-公开用于电路设备的各向异性导电片，检查装置和检查方法
公开(公告)号：JP2005235509A
公开(公告)日：2005-09-02
申请号：JP2004041662
申请日：2004-02-18
Inventor： YAMADA ONORI , KIMURA KIYOSHI
Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet which can be used for inspection of a circuit device at a high frequency area of 1 GHz or higher, especially, at 10 GHz or higher, and to provide an inspection device and an inspection method for the circuit device using the same. SOLUTION: The anisotropic conductive sheet contains conductive particles covered by highly conductive metal in a state of being oriented in a thickness direction, and particle size sorting is carried out after the conductive particles are covered by the highly conductive metal. The particles with too large a size and too small a size are removed, so as to have an average particle size of 3 to 50 μm, with their numerical variation coefficient of 50% or less. A BET specific surface area of the conductive sheet is 0.01×10 3 to 0.7×10 3 m 2 /kg, and a content of the conductive particles is 10 to 40 wt.%. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供可用于1GHz以上，特别是10GHz以上的高频区域的电路装置的检查的各向异性导电片，并且提供检查装置和 使用该电路装置的电路装置的检查方法。 解决方案：各向异性导电片含有以高度导电金属覆盖的导电颗粒，其方向为厚度方向，并且在导电颗粒被高导电性金属覆盖之后进行粒度分选。 除去尺寸太大，尺寸过小的颗粒，其平均粒径为3〜50μm，数值变化系数为50％以下。 导电片的BET比表面积为0.01×10
3 至0.7×10 3 m 2 / kg， 导电粒子为10〜40重量％。 版权所有（C）2005，JPO＆NCIPI -
公开(公告)号：JP2004241377A
公开(公告)日：2004-08-26
申请号：JP2004001569
申请日：2004-01-07
Inventor： YAMADA ONORI , KIMURA KIYOSHI
Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic conductive connector capable of suppressing permanent deformation due to pressure welding of an electrode to be connected, and deformation due to wearing, even if the electrode is of a protrusion type, obtaining stable conductivity for a long period, even if repeatedly pressed, and preventing or suppressing adhesion of the connected body, to provide a manufacturing method of the anisotropic conductive connector, and to provide a test device for a circuit device with the anisotropic conductive connector. SOLUTION: The anisotropic conductive connector comprises an anisotropic conductive film in which a plurality of conducting path forming parts each extending in a thickness direction are arranged, mutually insulated by an insulating part. The anisotropic conductive film is made of an insulating elastic polymer material, and conductive particles indicating magnetic properties are contained in the conductive path forming part. The surface layer portion of one surface side of the anisotropic conductive film contains a reinforcing material including insulating mesh or non-woven fabric. COPYRIGHT: (C)2004,JPO&NCIPI
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公开(公告)号：JP2000206184A
公开(公告)日：2000-07-28
申请号：JP797699
申请日：1999-01-14
Inventor： SEDAKA RYOJI , YAMADA ONORI , INABA JUNICHIRO , KIMURA TAKAHIRO , TANIOKA MICHINAGA , MATSUOKA HIROSHI
Abstract: PROBLEM TO BE SOLVED: To enable an inspection device to apply a pressure uniformly to each terminal of an object to be inspected, without deteriorating the operability even when the number of terminals of a semiconductor device is comparatively increased. SOLUTION: This inspection device is equipped with an operation frame member 12 having an inclined plane parts (12F) and (12E), and a spring case 16 which has roller 16Da and 16Db engaging with the inclined plane parts (12F) and (12E) and accommodates a coil spring (40). In accordance with operation of the operation frame member 12, the spring case 16 is moved downward. Thereby, the coil spring (40) is deflected, and a semiconductor device (38) is pressed by the elastic force of the coil spring (40).
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公开(公告)号：JP2000193714A
公开(公告)日：2000-07-14
申请号：JP37457398
申请日：1998-12-28
Applicant: JSR CORP
Inventor： SEDAKA RYOJI , SATO KATSUMI , YAMADA ONORI
Abstract: PROBLEM TO BE SOLVED: To provide an inspection apparatus in which a series of operations to place an object to be inspected and to take out the tested object to be inspected can be automated easily when the object to be inspected is tested, and in which a stable electric continutiy state can be obtained between the electrode of the object to be inspected and the connecting terminal of an object- to-be-inspected housing part. SOLUTION: A pair of pressure members 16 are constituted so as to contain respective contact parts 16C comprising end parts on one side, as flat faces come electrically into contact with the nearly central part on the outer surface of a semiconductor element 6 placed on the opening part 22c of a positioning member 22. In addition, they are constituted so as to contain respective arm parts 16A in which connector pins 32 connected to connection members 30 formed at a prescribed angle of inclination with reference to the end parts, on one side, of the contact parts 16C are provided at ends on-one side. In addition, they are constituted so as to contain respective connection part 16B by which end parts on the other side of the contact parts 16c are connected to end parts on the other side of the arm parts 16A.
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Patent Agency Ranking6.发明专利Probe card and method of manufacturing probe contact stylus fixing holder for probe card 审中-公开探针卡及其制造方法探针接触式固定支架用于探针卡
公开(公告)号：JP2007225501A
公开(公告)日：2007-09-06
申请号：JP2006048538
申请日：2006-02-24
Inventor： YAMADA ONORI , KIMURA KIYOSHI
Abstract: PROBLEM TO BE SOLVED: To provide a compact probe card, capable of shortening the length of a contact stylus body part of a probe contact stylus and capable of performing precise and quick inspection of the electrical characteristics without variations in voltage, due to mutual effect of the probe contact styluses.
SOLUTION: The probe card includes the probe contact stylus, a probe card contact stylus fixing holder for fixing a base end part of the probe contact stylus so that a part in the vicinity of a tip of the probe contact stylus is exposed from a front surface, an inspection circuit board, the base end part of the probe contact stylus exposed from a back surface side of the probe contact stylus fixing holder, and an anisotropic conductive sheet for electrical connection between inspection electrodes of the inspection circuit board. The anisotropic conductive sheet comprises an elastic anisotopic conductive film that includes a plurality of connection conductive parts arranged along a surface direction, separated each other, and extending in the thickness direction and insulating parts, formed between the connection conductive parts, and a frame plate supporting the elastic anisotropic conductive film.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供一种紧凑的探针卡，其能够缩短探针接触触针的接触针体部分的长度，并且能够在没有电压变化的情况下对电特性进行精确和快速的检查，因为 探针接触笔的相互作用。 解决方案：探针卡包括探针触针，用于固定探针触针的基端部分的探针卡触针固定支架，使得探针尖端附近的部分触针被暴露于 前表面，检查电路板，从探针触针固定保持器的背面露出的探针触针的基端部和用于检查电路板的检查电极之间的电连接的各向异性导电片。 各向异性导电片包括弹性各向异性导电膜，其包括沿着表面方向布置的多个连接导电部件，彼此分离并在厚度方向上延伸，并且形成在连接导电部件之间的绝缘部件和支撑 弹性各向异性导电膜。 版权所有（C）2007，JPO＆INPIT
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7.发明专利Circuit board device for inspecting wafer, probe card, and wafer inspection device 审中-公开用于检查波浪，探头卡和波形检测装置的电路板装置
公开(公告)号：JP2007192799A
公开(公告)日：2007-08-02
申请号：JP2006262824
申请日：2006-09-27
Inventor： KIMURA KIYOSHI , YAMADA ONORI , HARA FUJIO
CPC classification number: Y02D70/00
Abstract: PROBLEM TO BE SOLVED: To provide a circuit board device for inspecting a wafer high in connection reliability and reduced in manufacturing cost, a probe card provided with the circuit board device for inspecting the wafer, and an wafer inspection device provided therewith. SOLUTION: The circuit board device includes a board body, and a connector device provided on the board body and stacked layeredly with a plurality of connector units, the each connector unit has the first anisotropic conductive elastomer sheet, a composite conductive sheet, the second anisotropic conductive elastomer sheet, and a pitch conversion board, the composite conductive sheet has an insulating sheet formed with a plurality of through holes, and a rigid conductor arranged in the each through hole of the insulating sheet to be projected respectively from both faces of the insulating sheet, the rigid conductor is formed with a terminal part having a diameter larger than that of the through hole of the insulating sheet, in both ends of a barrel part inserted into the each through hole of the insulating sheet, and is movable along a thickness direction with respect to the insulating sheet. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：为了提供一种用于检查连接可靠性高且制造成本降低的电路板装置，设置有用于检查晶片的电路板装置的探针卡以及设置有晶片检查装置的探针卡。 电路板装置包括：电路板主体和设置在电路板主体上且与多个连接器单元层叠堆叠的连接器装置，每个连接器单元具有第一各向异性导电弹性体片，复合导电片， 第二各向异性导电弹性体片和间距转换板，复合导电片具有形成有多个通孔的绝缘片，布置在绝缘片的每个通孔中的刚性导体分别从两个面突出 绝缘片的刚性导体形成有直径大于绝缘片的通孔直径的端子部，插入绝缘片的每个通孔中的筒部的两端，并且是可移动的 沿厚度方向相对于绝缘片。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2006351504A
公开(公告)日：2006-12-28
申请号：JP2005304253
申请日：2005-10-19
Applicant: JSR CORP
Inventor： KIMURA KIYOSHI , HARA FUJIO , YAMADA ONORI , SHIMODA SUGIRO
Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic conductive connector capable of surely attaining a good electric connection state even for a wafer of which the pitch between inspection electrodes is very small, and to provide a manufacturing method of the same, a probe card for wafer inspection, a manufacturing method of the same, and a wafer inspection device. SOLUTION: The manufacturing method of the anisotropic conductive connector comprises a process of arranging magnetized metallic contact member on a surface of a conductive elastomer material layer formed on a mold releasable supporting plate: a process of forming conductive elastomer layer by applying magnetic field on the material for the conductive elastomer in its thickness direction, and by applying curing process; a process of forming a conductive part for connection having a contact member by removing a part excluding the part on which the contact member is arranged by applying laser processing on the conductive elastomer layer; and a process of forming an insulation part by making respective conductive part for connection intrude into an insulation part material layer formed so as to block an opening of a frame plate, and applying curing process on the insulation part material layer. COPYRIGHT: (C)2007,JPO&INPIT
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9.发明专利Anisotropic conductive sheet, its manufacturing method, and inspection device for circuit board 审中-公开各向异性导电片及其制造方法和电路板检测装置
公开(公告)号：JP2005100968A
公开(公告)日：2005-04-14
申请号：JP2004241042
申请日：2004-08-20
Inventor： YAMADA ONORI , KIMURA KIYOSHI
Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet capable of obtaining high resolution and a long service life, since required conductivity is maintained for a long period of time when repeatedly used even if its thickness is small, its manufacturing method, and an inspection device of a circuit board equipped with the anisotropic conductive sheet.
SOLUTION: In this anisotropic conductive sheet, conductive particles showing magnetism are contained in a substrate of an insulating elastic high polymer with the particles oriented in their thickness direction to form a chain, and an insulating reinforcement comprising a mesh is contained in the substrate. In this manufacturing method of the anisotropic conductive sheet, a compound containing the conductive particles showing magnetism is prepared in a high polymer material which becomes the elastic high polymer by being cured, a compound layer containing the reinforcement of the mesh with the reinforcement immersed in the compound is formed, and while a magnetic field is made to act on the compound layer in its thickness direction or after it is made to act on it, the compound layer is cured.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 解决问题：为了提供能够获得高分辨率和长使用寿命的各向异性导电片，由于即使其厚度小也重复使用，长时间保持所需的导电性，其制造方法， 以及配备有各向异性导电片的电路板的检查装置。 解决方案：在这种各向异性导电片中，具有磁性的导电粒子被包含在绝缘弹性高分子的基体中，其中颗粒在其厚度方向上取向以形成链，并且包含网状物的绝缘增强层包含在 基质。 在这种各向异性导电片的制造方法中，通过固化而形成弹性高分子的高分子材料制备含有显示磁性的导电性粒子的化合物，将含有增强剂的网状物的增强剂浸渍在 形成化合物，并且当使磁场在其厚度方向上作用于化合物层时，或在使其作用于其上之后，化合物层被固化。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2004109121A
公开(公告)日：2004-04-08
申请号：JP2003298768
申请日：2003-08-22
Inventor： YASUDA TADASHI , YAMADA ONORI , KIMURA KIYOSHI
Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic conduction sheet usable in impedance measurement in a high-frequency region at 1GHz or higher, in particular in a high-frequency region at 10GHz or higher, and a probe for measuring impedance which suppresses the occurrence of damage on a substrate to be measured in impedance measurement in a high-frequency region at 1GHz or higher, in particular in a high frequency region at 10GHz or higher and obtains a high measurement reliability.
SOLUTION: The anisotropic conduction sheet has a thickness of 10 to 100 μm and a number average particle size of conductive particle exhibiting magnetism is 5 to 50 μm. The ratio of the thickness W
1 and the number average particle size D of conductive particle exhibiting magnetism, W
1 /D is 1.1 to 10 and the containing fraction of the conductive particle exhibiting magnetism is 10-40% in weight fraction, which is used in impedance measurement in the high-frequency region. The impedance measurement probe is provided with the anisotropic conduction sheet and is used in the high frequency region.
COPYRIGHT: (C)2004,JPO
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