公开(公告)号：US20140240700A1

公开(公告)日：2014-08-28

申请号：US14185333

申请日：2014-02-20

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA ,  Hiromu Inoue

IPC: G01N21/956

CPC classification number: G01N21/956 ,  G01N21/01

Abstract: A sample support apparatus is provided in which a XY-table and a Z-table moving along a height direction are disposed in a Z-reference surface as a height reference, and in which a sample is disposed at a predetermined height position while supported by the Z-table, the sample support apparatus comprising, a height correction unit that controls movement of the Z-table, and a Z-sensor that is provided on the Z-reference surface to measure the height from the Z-reference surface, wherein a measuring surface is aligned along the same axis with respect to a measuring position of the sample, the height of the measuring surface from the Z-reference surface is measured by the Z-sensor, the height correction unit moves the Z-table according to the measured value of the height so that the sample is disposed at the predetermined height position.

Abstract translation: 提供了一种样品支持装置，其中沿着高度方向移动的XY工作台和Z工作台作为高度参考设置在Z参考表面中，并且其中将样品设置在预定的高度位置，同时由 所述Z台，所述样本支撑装置包括：控制所述Z表的移动的高度校正单元;以及设置在所述Z基准面上的Z传感器，以测量与所述Z基准面的高度， 测量表面相对于样品的测量位置沿着相同的轴线对齐，通过Z传感器测量测量表面与Z参考表面的高度，高度校正单元根据 高度的测量值，使得样品设置在预定高度位置。

公开(公告)号：US20190195621A1

公开(公告)日：2019-06-27

申请号：US16222270

申请日：2018-12-17

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA ,  Hiroyuki NAGAHAMA

IPC: G01B11/25 ,  H01J37/28 ,  H01J37/20 ,  H01J37/21 ,  H01J37/22

CPC classification number: G01B11/25 ,  H01J37/20 ,  H01J37/21 ,  H01J37/222 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/20235 ,  H01J2237/216 ,  H01J2237/2448

Abstract: A displacement measuring apparatus includes an illumination system to obliquely irradiate the target object surface with beams, a sensor to receive a reflected light from the target object surface, an optical system to diverge the reflected light in a Fourier plane with respect to the target object surface, a camera to image a diverged beam in the Fourier plane, a gravity center shift amount calculation circuitry to calculate a gravity center shift amount of the reflected light in the light receiving surface of the sensor, based on a light quantity distribution of the beam imaged by the camera, and a measurement circuitry to measure a heightwise displacement of the target object surface by an optical lever method, using information on a corrected gravity center position obtained by correcting the gravity center position of the reflected light received by the sensor by using the gravity center shift amount.

公开(公告)号：US20180045656A1

公开(公告)日：2018-02-15

申请号：US15724614

申请日：2017-10-04

Applicant: NuFlare Technology, Inc.

Inventor： Hideo TSUCHIYA ,  Riki OGAWA

IPC: G01N21/956 ,  G06T3/60 ,  G01N21/95 ,  G06T7/00

CPC classification number: G01N21/956 ,  G01N21/9501 ,  G06T3/60 ,  G06T7/0004 ,  G06T7/0008 ,  G06T2200/24 ,  G06T2207/10004 ,  G06T2207/10056 ,  G06T2207/10148 ,  G06T2207/30144 ,  G06T2207/30148 ,  G06T2207/30204

Abstract: Disclosed is a template substrate for use in adjusting a focus offset to detect a defect using an optical image obtained by irradiating a substrate with light emitted from a light source. The template substrate includes a first pattern constructed with a repetitive pattern that is not resolved by the wavelength of the light source, and at least one alignment mark that is arranged on the same plane as the first pattern. The alignment mark includes a second pattern constructed with a repetitive pattern that is not resolved by the wavelength of the light source, and a programmed defect that is provided in the second pattern and not resolved by the wavelength of the light source. The alignment mark includes the second pattern, and a region, where the second pattern is not arranged but a mark used in alignment is formed by contrast with a region where the second pattern is arranged.

公开(公告)号：US20170132772A1

公开(公告)日：2017-05-11

申请号：US15343339

申请日：2016-11-04

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA

IPC: G06T7/00 ,  G06K9/62 ,  G01N21/956 ,  H04N5/225 ,  G02B27/28 ,  G01N21/95

CPC classification number: G06T7/001 ,  G01N21/9505 ,  G01N21/95607 ,  G01N2021/8848 ,  G01N2021/8861 ,  G01N2021/8874 ,  G01N2021/95676 ,  G02B27/283 ,  G03F1/84 ,  G06K9/6202 ,  G06T2207/30148 ,  H04N5/2256 ,  H04N5/2258

Abstract: An inspection apparatus includes a tone correction unit, a dimensional error acquisition unit, and a map generating unit. The correction unit acquires a transmissivity distribution for transmission of light from a light source through an incident surface of an inspection target based on the optical image data to correct a tone of the optical image data so as to eliminate variations in contrast of the optical image data which correspond to the transmissivity distribution. The acquisition unit determines a dimension of the pattern based on the corrected optical image data to acquire a dimensional error that is a difference between the dimension of the pattern and a design value for the pattern. The generating unit generates a map in which the dimensional error is associated with the position coordinates of the table on the inspection target based on the position coordinates and the dimensional error.

公开(公告)号：US20160267648A1

公开(公告)日：2016-09-15

申请号：US15064204

申请日：2016-03-08

Applicant: NuFlare Technology, Inc.

Inventor： Yasuhiro YAMASHITA ,  Riki OGAWA

IPC: G06T7/00 ,  G01B11/00 ,  G01N21/956

CPC classification number: G01B11/002 ,  G01N21/95607 ,  G01N2021/95676 ,  G01N2201/06113 ,  G01N2201/12 ,  G06T5/009 ,  G06T5/50 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/10152 ,  G06T2207/30148

Abstract: An inspection target is illuminated by an illumination optical unit using a light source. Optical image data of a pattern disposed in the inspection target is acquired by an imaging unit by causing light transmitted or reflected to be incident to a first and second area of a sensor. Reference image data is generated, corresponding to the optical image data, from design data of the pattern. The optical image data is corrected by obtaining a fluctuation of a gradation value of optical image data acquired using light incident to the second area, and correcting a gradation value of optical image data acquired using the light incident to the first area. A line width of the pattern of the corrected data, and a line width error which is a difference between the line widths of corrected data and reference image data are obtained by the line width error obtaining unit.

Abstract translation: 使用光源的照明光学单元照射检查对象。 通过使透射或反射的光入射到传感器的第一和第二区域，由成像单元获取设置在检查对象物中的图案的光学图像数据。 从图案的设计数据生成对应于光学图像数据的参考图像数据。 通过获得使用入射到第二区域的光获取的光学图像数据的灰度值的波动来校正光学图像数据，并且校正使用入射到第一区域的光获取的光学图像数据的灰度值。 校正数据的图案的线宽以及作为校正数据和参考图像数据的线宽之间的差的线宽误差由线宽度误差获取单元获得。

公开(公告)号：US20150377800A1

公开(公告)日：2015-12-31

申请号：US14849300

申请日：2015-09-09

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA ,  Masatoshi Hirono

IPC: G01N21/956

CPC classification number: G01N21/95607 ,  G01N21/956 ,  G01N2021/95676 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: According to one embodiment, a pattern test apparatus includes a light source configured to apply test light to a test sample, a polarizing beam splitter which reflects or transmits the test light, an imaging device which receives light which has been reflected by the test sample and transmitted through or reflected by the polarizing beam splitter, an optical system which forms a Fourier transform plane of the test sample between the test sample and the polarizing beam splitter, and a polarizing controller disposed in the Fourier transform plane. The polarizing controller includes a first region which lets the test light through, and a second region which is greater than the first region and lets the light reflected by the test sample through, and the each regions have different retardation quantities.

Abstract translation: 根据一个实施例，图案测试装置包括被配置为将测试光施加到测试样本的光源，反射或透射测试光的偏振分束器，接收被测试样品反射的光的成像装置和 通过偏振分束器透射或反射的光学系统，在测试样本和偏振分束器之间形成测试样本的傅立叶变换平面的光学系统，以及设置在傅里叶变换平面中的偏振控制器。 偏振控制器包括使测试光通过的第一区域和大于第一区域的第二区域，并且使由测试样品反射的光通过，并且每个区域具有不同的延迟量。

公开(公告)号：US20150285744A1

公开(公告)日：2015-10-08

申请号：US14677039

申请日：2015-04-02

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95

CPC classification number: G01N21/956 ,  G01N2021/8848 ,  G01N2021/95676 ,  G01N2201/06113 ,  G01N2201/0636 ,  G01N2201/0683 ,  G02B21/0016 ,  G02B27/283 ,  G02B27/286

Abstract: An imaging capturing apparatus comprising, a light source, a polarizing beam splitter configured to illuminate a target with light from the light source, a sensor configured to capture an image of the inspection target by incidence of light reflected from the target through the polarizing beam splitter, and a Faraday rotator provided between the polarizing beam splitter and the target and disposed away from the polarizing beam splitter such that a Faraday rotation angle in the polarizing beam splitter is within a range of an angle equal to or larger than −0.5 degrees and an angle equal to or smaller than 0.5 degrees.

Abstract translation: 一种成像摄像装置，包括光源，被配置为用来自光源的光照射目标物的偏振光束分离器，被配置为通过偏振光束分离器从目标物反射的光的入射来捕获检查对象的图像的传感器 以及设置在偏振分束器和靶之间并远离偏振分束器的法拉第旋转器，使得偏振分束器中的法拉第旋转角度在等于或大于-0.5度的角度的范围内，并且 角度等于或小于0.5度。

公开(公告)号：US20140307254A1

公开(公告)日：2014-10-16

申请号：US14251718

申请日：2014-04-14

Applicant: NuFlare Technology, Inc.

Inventor： Yasuhiro YAMASHITA ,  Riki OGAWA ,  Toshiaki OTAKI

IPC: G01N21/956 ,  G06T7/00

CPC classification number: G01N21/95607 ,  G01N2021/95615 ,  G01N2021/95676 ,  G06T7/001 ,  G06T2207/30148

Abstract: An inspection apparatus comprising, a Rochon prism configured to branch the light transmitted through a half-wave plate, a first sensor and a second sensor for acquiring an optical image of a pattern of the sample, the branched light being incident to the first sensor and the second sensor, a light quantity acquisition unit configured to acquire a light quantity ratio (1:A) of the second sensor to the first sensor using the optical image, and to obtain an angle θ of the half-wave plate such that the light quantity ratio becomes A:1, an angle controller configured to receive information on the angle θ from the light quantity acquisition unit to control an angle of the half-wave plate, a light source controller configured to control a light quantity of the light source such that each of the light quantity values becomes a target value.

Abstract translation: 一种检查装置，包括：Rochon棱镜，被配置为分支透过半波片的光，第一传感器和第二传感器，用于获取样品图案的光学图像，所述分支光入射到第一传感器， 第二传感器，光量获取单元，被配置为使用光学图像获取第二传感器的光量比（1：A）到第一传感器，并获得角度和角度; 使得光量比成为A：1，角度控制器被配置为接收关于角度的信息; 从所述光量获取单元控制所述半波片的角度;光源控制器，被配置为控制所述光源的光量，使得每个所述光量值成为目标值。

公开(公告)号：US20140232849A1

公开(公告)日：2014-08-21

申请号：US14177546

申请日：2014-02-11

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA ,  Masatoshi Hirono

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T2207/10016 ,  G06T2207/30148

Abstract: An inspection method and apparatus comprising, a step of reflecting linearly-polarized light having a predetermined wavelength using an non-polarizing beam splitter after transmitting the linearly-polarized light through a half-wave plate, irradiating a sample with the linearly-polarized light having a polarization plane of a predetermined angle, causing the light reflected by the sample to be incident to an image capturing sensor through a lens, the non-polarizing beam splitter, and an analyzer, and acquiring an optical image of a pattern formed on the sample; acquiring a plurality of optical images by changing an angle of the analyzer or the half-wave plate, and obtaining an angle of the analyzer or the half-wave plate such that a value of (σ/√A) becomes a minimum; and a step of inspecting whether a defect of the pattern exists, wherein the pattern is a repetitive pattern having a period at a resolution limit or less.

Abstract translation: 一种检查方法和装置，包括：在透过半波片透射线偏振光后，使用非偏振光束分光器反射具有预定波长的线偏振光的步骤，用具有 预定角度的偏振平面，使得由样本反射的光通过透镜，非偏振分束器和分析器入射到图像捕获传感器，并获取形成在样本上的图案的光学图像 ; 通过改变分析器或半波片的角度来获取多个光学图像，并且获得分析器或半波片的角度，使得（＆sgr; /√A）的值变得最小; 以及检查图案的缺陷是否存在的步骤，其中图案是具有在分辨率极限以下的周期的重复图案。

公开(公告)号：US20130176559A1

公开(公告)日：2013-07-11

申请号：US13737106

申请日：2013-01-09

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA ,  Hiroyuki NAGAHAMA ,  Tomohiro NAKAMURA

IPC: G02B27/10 ,  G01N21/95

CPC classification number: G01N21/9506 ,  G01N21/956 ,  G01N2021/95676 ,  G02B27/10 ,  G02B27/108 ,  G02B27/144

Abstract: A luminous flux branching element includes a transparent base member arranged diagonally to an optical axis and having an incidence plane and an emission plane parallel to each other. Incident light from the incidence plane is split into a main luminous flux emitted from an emission position on the emission plane and a branched luminous flux emitted from a branch position apart from the emission position and having a smaller light quantity than of the main luminous flux. A reflecting member is arranged on the incidence plane to cause the incidence plane to reflect reflected light from the emission plane. A non-coat region in which antireflection-treatment is not performed is formed in a region of the emission plane where the incident light from the incidence plane is reached, and antireflection-treatment is performed in the emission plane excluding the non-coat region and the incidence plane.

Abstract translation: 光通量分支元件包括与光轴对角布置并具有彼此平行的入射平面和发射平面的透明基底部件。 来自入射平面的入射光被分为从发射平面上的发射位置发射的主光束和从离发射位置分支位置发射的分支光束，并且具有比主光束小的光量。 反射构件设置在入射平面上，以使入射平面反射来自发射平面的反射光。 在其中到达来自入射面的入射光的发射面的区域中形成未进行防反射处理的非涂层区域，并且在除了非涂覆区域以外的发射面进行防反射处理， 发射机。