公开(公告)号：EP4496994A1

公开(公告)日：2025-01-29

申请号：EP23717337.2

申请日：2023-03-23

Applicant: SI-Ware Systems

Inventor： SABRY, Yasser M. ,  MORTADA, Bassem ,  ABOZYD, Samir ,  MEDHAT, Mostafa ,  SAID, Mai ,  SAADANY, Bassam ,  HELMY, Youssri ,  BADR, Ahmed ,  PUJOLRAS, Marcal Plans

IPC: G01N21/31 ,  G01N21/27 ,  G01J3/28 ,  G01B9/02055 ,  G01J3/45 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577 ,  G01N21/359

公开(公告)号：EP3390991A1

公开(公告)日：2018-10-24

申请号：EP16719673.2

申请日：2016-04-18

Applicant: SI-Ware Systems

Inventor： ANWAR, Momen ,  MEDHAT, Mostafa ,  MORTADA, Bassem ,  EL SHATER, Ahmed, Othman ,  GAD SEIF, Mina ,  NAGY, Muhammed ,  SAADANY, Bassam, A. ,  HAFEZ, Amr, N.

IPC: G01J3/06 ,  G01B9/02 ,  G01J3/453

CPC classification number: G01J3/4532 ,  G01B9/02051 ,  G01B9/02068 ,  G01J3/06 ,  G01J3/4535 ,  G01J2003/2879

Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self- calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.

公开(公告)号：EP3259228A1

公开(公告)日：2017-12-27

申请号：EP16711920.5

申请日：2016-02-19

Applicant: SI-Ware Systems

Inventor： SAADANY, Bassam, A. ,  SABRY, Yasser, M. ,  MEDHAT, Mostafa ,  MORTADA, Bassem ,  NAGI, Muhammed ,  SADEK, Mohamed ,  NADA, Yasseen ,  HASSAN, Khaled

IPC: B81C1/00 ,  G01B9/02 ,  G01J3/02 ,  G01J3/453

CPC classification number: G02B6/136 ,  B81B2201/047 ,  B81C1/00833 ,  G01B9/02051 ,  G01J3/0259 ,  G01J3/453 ,  G02B6/3692

Abstract: A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.

公开(公告)号：EP2948812A1

公开(公告)日：2015-12-02

申请号：EP14704976.1

申请日：2014-01-28

Applicant: SI-Ware Systems

Inventor： MEDHAT, Mostafa ,  MORTADA, Bassem ,  EL SHATER, Ahmed Othman ,  NAGY, Muhammed ,  GAD SEIF, Mina ,  SAADANY, Bassam A. ,  HAFEZ, Amr N.

IPC: G02B26/06 ,  G01J3/06 ,  G01J3/453 ,  G02B26/08 ,  G01N21/35 ,  G01B9/02

Abstract: A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometor includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.

公开(公告)号：EP2419370A2

公开(公告)日：2012-02-22

申请号：EP10716949.2

申请日：2010-04-16

Applicant: SI-Ware Systems

Inventor： MEDHAT, Mostafa ,  NADA, Yasseen ,  MORTADA, Bassem ,  SAADANY, Bassam, A.

IPC: B81B3/00

CPC classification number: B81B3/0051 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/051 ,  H02N1/008 ,  Y10T74/20558

Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件，每个组合驱动组件在其相对侧上与弯曲弹簧组件连接。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动的梳子驱动指状物，其联接到挠曲弹簧组件并朝着固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被平均分配，并且围绕挠曲弹簧组件的对称轴线对称地放置。 当电通电时，第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。