SURFACE EMITTING TYPE SEMICONDUCTOR LASER ELEMENT HAVING VERTICAL CAVITY

    公开(公告)号:JPH11150340A

    公开(公告)日:1999-06-02

    申请号:JP26407598

    申请日:1998-09-18

    Applicant: XEROX CORP

    Inventor: SUN DECAI

    Abstract: PROBLEM TO BE SOLVED: To provide a surface emitting type semiconductor laser element, which has a vertical cavity and is constituted into a structure, wherein even if elements are densely arranged, the elements are hardly exerted the effect of electricity, light or heat and the elements can be separately made to emit independently. SOLUTION: Semi-annular grooves 200 are formed in a plurality of semiconductor layers, which consist of an active layer 116, an upward DBR 128 over the layer 116 and a downward DBR 106 under the lower part of the layer 116. An opening 202, which is specified by a natural oxide layer 204 formed by a side oxidation, is provided inside the grooves 200.

    OXIDATION CONTROL METHOD FOR MULTILAYER SEMICONDUCTOR STRUCTURE

    公开(公告)号:JPH10163194A

    公开(公告)日:1998-06-19

    申请号:JP32327697

    申请日:1997-11-25

    Applicant: XEROX CORP

    Abstract: PROBLEM TO BE SOLVED: To demarcate the boundary of an oxidation area parallel to a substrate and demarcate and control the area to be oxidated of a semiconductor hetero structure, by arranging an AlAs layer between two AlGaAs layers poor in aluminum content. SOLUTION: After sticking of an AlGaA layer 102, a layer rich in aluminum content such as an AlAs layer 104 is made. This AlAs layer 104 has silicon doping of generally 5×10 cm or larger than this, and this gives an impurity source for irregularization of the layer. Here, the AlAS layer 104 is used, but an AlGaAs layer richer in aluminum content than the aluminum content of adjacent AlGaAs layers 102 and 106 can also be used. Generally, molar fraction of about 90% or larger than that is used to the layer rich in aluminum content.

    VCSEL ARRAY FOR OPTICAL SCANNING AND INTEGRATED STRUCTURE OF MICROLENS

    公开(公告)号:JP2003188460A

    公开(公告)日:2003-07-04

    申请号:JP2002321951

    申请日:2002-11-06

    Applicant: XEROX CORP

    Abstract: PROBLEM TO BE SOLVED: To integrate a refractive microlens on the surface of a VCSEL array. SOLUTION: A laser scanner having an extremely compact size and not including movable parts includes a vertical cavity surface-emitting laser (VCSEL) 310. A microlens 330 is directly fitted to the light emitting surface of the VCSEL 310 by flip chip joint. A VCSEL array 305 may be an one-dimensional or two-dimensional array. The laser array can be used for various purposes including free space optical communication. COPYRIGHT: (C)2003,JPO

    Microminiature optoelectronic machine system(moems)
    34.
    发明专利
    Microminiature optoelectronic machine system(moems) 审中-公开
    微电子光电机系统(MOEMS)

    公开(公告)号:JP2003014997A

    公开(公告)日:2003-01-15

    申请号:JP2002120185

    申请日:2002-04-23

    Abstract: PROBLEM TO BE SOLVED: To provide a mechanism aligning chips and an optical fiber with a simple method by using a mirror without aligning them under the use of a microscope. SOLUTION: When an MEMS-based adjustable mirror module is used, it is possible to make an optical fiber existing in a substrate to be in an alignment state more quickly, at a lower cost and more simply. Moreover, when the movable mirrors formed on the substrate are used, it is possible to prevent alignment failure by adjusting an optical path after the optical fiber is attached to the substrate and, thereafter, by fixing the mirrors at that positions.

    Abstract translation: 要解决的问题:通过使用不使用显微镜对准的镜子,通过简单的方法提供使芯片和光纤对准的机构。 解决方案:当使用基于MEMS的可调镜模块时,可以以更低的成本和更简单的方式使存在于基板中的光纤更快地对准状态。 此外,当使用形成在基板上的可动反射镜时,可以通过在将光纤附着到基板之后调整光路,然后通过将反射镜固定在该位置来防止对准故障。

    MICRO-OPTO-ELECTRO-MECHANICAL LASER SCANNER
    37.
    发明专利

    公开(公告)号:JP2002250886A

    公开(公告)日:2002-09-06

    申请号:JP2001369543

    申请日:2001-12-04

    Applicant: XEROX CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a scanner system which is inexpensively manufactured, mechanically sturdy, compact, and has an improved resolution. SOLUTION: The micro-opto-electro-mechanical laser scanner 40 is composed of a silicone substrate layer, a laser of embedded oxide layer, and an insulating body silicone substrate having a single silicon device layer. A first device layer part has a micro mirror 34 which is made of the device layer. A laser unit is connected with a second device layer part and a hinge 24 connects the first device layer part and the second device layer part. The hinge 24 is formed by a bimorph material and the bimorph material creates a specific stress in the hinge 24. The bimorph type hinge 24 moves the released micro mirror 34 from a horizontal plane to a position in which a laser beam 42 emitted from the laser unit is directly or indirectly reflected.

    SEMICONDUCTOR LASER ARRAY
    39.
    发明专利

    公开(公告)号:JPH11145567A

    公开(公告)日:1999-05-28

    申请号:JP25778398

    申请日:1998-09-11

    Applicant: XEROX CORP

    Inventor: SUN DECAI

    Abstract: PROBLEM TO BE SOLVED: To provide high yield and good diode characteristics by specifying a border of an embedded-type ridge element, using wet-type oxidizing process. SOLUTION: For an edge release type laser array structure 100, the current flowing through an active layer 108 is limited by apertures 180, 182, 184, and 186, wherein a native oxide layer 178 is stipulated for border. The border between the native oxide layer 178 and the aperture is decided by a selective layer mixture and lateral-direction wet type oxidizing process. Thus, a higher yield is obtained as compared to the use of etching or re-growth method.

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