公开(公告)号：US20190121434A1

公开(公告)日：2019-04-25

申请号：US15920378

申请日：2018-03-13

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY ,  CENTER OF HUMAN-CENTERED INTERACTION FOR COEXISTENCE

Inventor： Youngsu Cha ,  Kahye Song ,  Jung Min Park ,  Bum-Jae You

IPC: G06F3/01

CPC classification number: G06F3/016 ,  B81B3/0021 ,  B81B2201/034 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2203/06 ,  B81C2203/035

Abstract: Disclosed is an actuator including a support member, an actuating unit rotatably installed in the support member and having a first electrode installed on one side and a stimulation providing unit installed on the other side to provide stimulation by rotation, and an attraction force providing unit having a second electrode to provide an attraction force to the first electrode, wherein when an electrostatic attraction force is provided to the first electrode through the second electrode, the actuating unit pivots to enable the stimulation providing unit to apply stimulation to a sensing unit.

公开(公告)号：US09869858B2

公开(公告)日：2018-01-16

申请号：US14955060

申请日：2015-12-01

Applicant: APPLE INC.

Inventor： Yuval Gerson ,  Alexander Shpunt

IPC: G01S17/42 ,  G02B26/10 ,  B81B3/00 ,  B81C1/00 ,  G01S7/481 ,  G01S17/89 ,  G01S7/497 ,  G02B26/08 ,  G01S17/10

CPC classification number: G02B26/101 ,  B81B3/00 ,  B81B3/007 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/047 ,  B81B2203/0136 ,  B81B2203/058 ,  B81B2207/015 ,  B81C1/00515 ,  B81C2201/0111 ,  G01S7/4817 ,  G01S7/497 ,  G01S17/10 ,  G01S17/42 ,  G01S17/89 ,  G02B26/0833

Abstract: A scanning device includes a frame, having a central opening, and an array including a plurality of parallel mirrors contained within the central opening of the frame. Hinges respectively connect the mirrors to the frame and define respective, mutually-parallel axes of rotation of the mirrors relative to the frame. A main drive applies a driving force to the array so as to drive an oscillation of the mirrors about the hinges at a resonant frequency of the array. A sensor is configured to detect a discrepancy in a synchronization of the oscillation among the mirrors in the array, and an adjustment circuit applies a corrective signal to at least one of the mirrors in order to alleviate the detected discrepancy.

公开(公告)号：US20170133951A1

公开(公告)日：2017-05-11

申请号：US15412679

申请日：2017-01-23

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Guiqin Wang ,  Matthew Ng

IPC: H02N1/00 ,  H02N2/02 ,  B81B7/00 ,  B81B7/02 ,  H01L41/09 ,  B81B3/00

CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0062 ,  B81B7/0006 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/047 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81B2203/05 ,  B81B2203/053 ,  G02B7/09 ,  G02B27/646 ,  H01L41/09 ,  H01L41/0953 ,  H02N2/02 ,  H04N5/23287

Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.

公开(公告)号：US20150345196A1

公开(公告)日：2015-12-03

申请号：US14825213

申请日：2015-08-13

Applicant: Raviv Erlich ,  Yuval Gerson

Inventor： Raviv Erlich ,  Yuval Gerson

IPC: E05D7/00 ,  B81C1/00 ,  B81B3/00 ,  E05D11/00 ,  E05D1/02

CPC classification number: F16C11/12 ,  B81B3/0043 ,  B81B2201/0235 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0118 ,  B81B2203/0163 ,  B81C1/0015 ,  B81C1/00198 ,  B81C1/00523 ,  B81C2201/013 ,  E05D1/02 ,  E05D7/00 ,  E05D11/0081 ,  F16F1/48 ,  F16F2224/025 ,  F16F2226/00 ,  F16F2226/042 ,  G01C19/02 ,  G01P15/09 ,  G01P15/093 ,  G01P15/125 ,  G02B26/0833 ,  G02B26/105 ,  Y10T16/522 ,  Y10T16/525 ,  Y10T29/24 ,  Y10T29/25

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Abstract translation: 机械装置包括由刚性弹性材料制成的长而窄的元件。 刚性框架构造成锚固附接到框架的元件的至少一个端部并且限定沿着梁和框架之间的元件纵向延伸的间隙，使得元件在间隙内自由移动 。 与刚性的弹性材料不同的固体填充材料填充元件和框架之间的间隙的至少一部分，以便允许元件在间隙内的第一移动模式，同时抑制不同的第二模式 运动。

公开(公告)号：US08759887B2

公开(公告)日：2014-06-24

申请号：US13908688

申请日：2013-06-03

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Mayumi Yamaguchi ,  Konami Izumi

IPC: H01L29/84

CPC classification number: H01L29/84 ,  B81B2201/034 ,  B81C1/00246 ,  B81C2203/0742

Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

Abstract translation: 在相同的步骤中，在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中，包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说，结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外，通过使用用作晶体管的栅电极，源电极和漏电极的导电层作为牺牲层来制造微结构。

公开(公告)号：US20110067985A1

公开(公告)日：2011-03-24

申请号：US12884871

申请日：2010-09-17

Applicant: Jean-Christophe GABRIEL ,  Philippe Andreucci ,  Thomas Ernst ,  Thierry Poiroux

Inventor： Jean-Christophe GABRIEL ,  Philippe Andreucci ,  Thomas Ernst ,  Thierry Poiroux

IPC: H01H57/00 ,  H01H11/00

CPC classification number: B81B5/00 ,  B81B2201/034 ,  B82Y15/00 ,  B82Y30/00 ,  F04B19/006 ,  Y10T29/49105 ,  Y10T29/49126 ,  Y10T29/49155

Abstract: Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of: a) formation, inside a layer of at least one given material resting on a support, of at least one bar, b) formation around the bar of at least one first graphene sheet, and of a least one second graphene sheet, separated from the first sheet and mobile with respect to the first sheet.

Abstract translation: 一种制造机电微系统的方法，该机电微系统具有至少一个固定部分，该至少一个固定部分包括杆，以及至少一个围绕所述杆的至少一部分旋转的可移动部分，所述方法包括以下步骤：a） 至少一个给定的材料放置在支撑件上，至少一个杆，b）围绕至少一个第一石墨烯片材的棒形成，以及至少一个第二石墨烯片，与第一片材分离并且相对于 第一张。

公开(公告)号：US20090273255A1

公开(公告)日：2009-11-05

申请号：US12295027

申请日：2007-03-30

Applicant: Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

Inventor： Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

IPC: H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.

Abstract translation: 致动器包括连接部分，其一端可旋转地连接到固定部分的连接点（C1），另一端可旋转地连接到移动部分的连接点（C2），连接部分的一端可旋转地连接到 所述固定部分的连接点（C3）和另一端可旋转地连接到所述移动部分的连接点（C4），所述梳齿电极具有连接到梳齿基点（B1）的根部部分， 所述梳齿电极具有连接到所述固定部分的所述根部部分，而所述另一部分沿着所述梳齿电极的曲线延伸并且与所述梳齿电极以预定间隙相对。

公开(公告)号：US20080048519A1

公开(公告)日：2008-02-28

申请号：US11757331

申请日：2007-06-01

Applicant: Harold Stalford

Inventor： Harold Stalford

IPC: H02N10/00 ,  F04B9/00

CPC classification number: H02N10/00 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2201/037 ,  B81B2201/051 ,  H02K7/00 ,  H02N1/002 ,  H02N11/006

Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

Abstract translation: 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。

公开(公告)号：US06649947B2

公开(公告)日：2003-11-18

申请号：US10098214

申请日：2002-03-18

Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Thomas W. Krygowski

Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Thomas W. Krygowski

IPC: H01L2714

CPC classification number: B81B5/00 ,  B81B2201/034 ,  Y10T74/19651

Abstract: A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 &mgr;m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

公开(公告)号：US5366587A

公开(公告)日：1994-11-22

申请号：US887749

申请日：1992-05-26

Applicant: Minoru Ueda ,  Michitomo Iiyama

Inventor： Minoru Ueda ,  Michitomo Iiyama

IPC: C04B41/53 ,  C04B41/91 ,  C23C16/40 ,  G03F7/00 ,  H01L21/306

CPC classification number: B81C1/00198 ,  C04B41/009 ,  C04B41/53 ,  C04B41/91 ,  C23C16/408 ,  G03F7/00 ,  B81B2201/034 ,  B81B2201/035 ,  B81B2201/037 ,  B81B2203/056 ,  Y10S505/785

Abstract: A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and selectively removing the machine parts layer and the sacrificial layers so as to leave the machine element.

Abstract translation: 一种微机械的制造方法，其特征在于，具有：支撑在基板上的机械元件，其特征在于，包括以下步骤：在所述基板上依次沉积由含有稀土元素Ba，Cu的氧化物陶瓷材料构成的部分层和可除去的牺牲层， 机器部件层和牺牲层，以便离开机器元件。