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    공간 절약적 사용을 위한 탈착 가능한 마이크로 부품 및 나노 부품
    33.
    发明公开
    공간 절약적 사용을 위한 탈착 가능한 마이크로 부품 및 나노 부품 无效
    可分离的微型和纳米组件，用于节省空间

    公开(公告)号：KR1020130119986A

    公开(公告)日：2013-11-01

    申请号：KR1020137024777

    申请日：2012-02-24

    Applicant: 하르팅 아게 운트 코. 카게

    Inventor： 갓첸한스-하인리히 ,  그리스바흐팀

    IPC: B81C1/00 ,  G11B5/31

    CPC classification number: H05K1/0271 ,  B81B3/0072 ,  B81B2201/11 ,  B81C2201/0167 ,  H05K3/303 ,  Y10T29/49133

    Abstract: 본 발명에 따라 공간 절약형 마이크로 부품들과 나노 부품들 및 이들의 제조 방법이 제안된다. 이러한 부품들의 특징은, 상기 부품들이 상당한 두께의 경성 기판을 갖지 않는다는 점이다. 이 경우, 기계적으로 응력 보상이 이루어지는 구조를 이용하여, 그리고/또는 적절한 응력 보상층들의 증착을 통한 능동적인 기계적 응력 보상에 의해, 부품 내에서 변형 및/또는 휨을 야기하는 기계적 응력이 보상되므로, 비교적 두꺼운 기판에 대한 필요성이 없어진다. 그럼으로써 상기 부품들의 전체 두께가 감소하고, 기술적 시스템 내에서의 집적 가능성이 향상된다. 추가로 이와 같은 부품들의 사용 분야가 확장된다.

    ACTUATOR USING COMB-TOOTH
    35.
    发明申请
    ACTUATOR USING COMB-TOOTH 失效
    执行器使用COMB-TOOTH

    公开(公告)号：US20090273255A1

    公开(公告)日：2009-11-05

    申请号：US12295027

    申请日：2007-03-30

    Applicant: Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

    Inventor： Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

    IPC: H02N1/00

    CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

    Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.

    Abstract translation: 致动器包括连接部分，其一端可旋转地连接到固定部分的连接点（C1），另一端可旋转地连接到移动部分的连接点（C2），连接部分的一端可旋转地连接到 所述固定部分的连接点（C3）和另一端可旋转地连接到所述移动部分的连接点（C4），所述梳齿电极具有连接到梳齿基点（B1）的根部部分， 所述梳齿电极具有连接到所述固定部分的所述根部部分，而所述另一部分沿着所述梳齿电极的曲线延伸并且与所述梳齿电极以预定间隙相对。

    Method of fabricating micro actuator having media stage
    36.
    发明授权
    Method of fabricating micro actuator having media stage 失效
    具有介质载物台的微型致动器的制造方法

    公开(公告)号：US07520998B2

    公开(公告)日：2009-04-21

    申请号：US11595876

    申请日：2006-11-13

    Applicant: Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    Inventor： Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    IPC: C23F1/00

    CPC classification number: H02K41/0354 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1436 ,  H02K2201/18

    Abstract: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

    Abstract translation: 提供了一种制造微型致动器的方法，包括：介质台，其具有介质装载表面和用于驱动介质载物台的线圈，其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽，在第二基板的第一表面上形成线圈，将第一基板的第一表面接合到第二基板的第一表面，并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

    Bi-directional, single material thermal actuator
    39.
    发明授权
    Bi-directional, single material thermal actuator 有权
    双向单材料热传动器

    公开(公告)号：US06608714B2

    公开(公告)日：2003-08-19

    申请号：US09892616

    申请日：2001-06-28

    Applicant: Heather Shannon Hanson ,  Joseph Nathan Mitchell

    Inventor： Heather Shannon Hanson ,  Joseph Nathan Mitchell

    IPC: G02B2600

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2201/11 ,  B81B2203/055 ,  H01H2061/008

    Abstract: A thermal actuator includes a first arm having a proximal end and a distal end, a second arm, parallel to the first arm, having a proximal end and a distal end, and a third arm arranged between and parallel to the first and second arms, the third arm having a proximal end and a distal end. The third arm has at least one portion at the distal end of the third arm having a width that is substantially larger than a width of the first arm and a width of the second arm. The distal ends of the first, second and third arms are coupled together to form a distal end of the thermal actuator, and the first, second and third arms preferably are made of a single material. A number of thermal actuators can be arranged in an array. The thermal actuator or array of thermal actuators can be coupled to an applicator.

    Abstract translation: 热致动器包括具有近端和远端的第一臂，平行于第一臂的第二臂，具有近端和远端，以及布置在第一臂和第二臂之间并平行于第一臂的第三臂， 第三臂具有近端和远端。 第三臂具有在第三臂的远端处的至少一个部分，其宽度基本上大于第一臂的宽度和第二臂的宽度。 第一，第二和第三臂的远端联接在一起以形成热致动器的远端，并且第一，第二和第三臂优选地由单一材料制成。 许多热致动器可以排列成阵列。 热致动器或热致动器阵列可以耦合到施加器。

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