Metal gasket for a semiconductor fabrication chamber
    32.
    发明申请
    Metal gasket for a semiconductor fabrication chamber 失效
    用于半导体制造室的金属衬垫

    公开(公告)号:US20030122326A1

    公开(公告)日:2003-07-03

    申请号:US10315230

    申请日:2002-12-10

    Abstract: A metal gasket for a semiconductor fabrication chamber capable of preventing base plate metal contamination in the chamber, wherein the metal gasket includes a diffusion barrier layer interposed between a base plate and an anti-corrosive coating layer, and wherein the diffusion barrier layer prevents elements of the base plate from being diffused to the anti-corrosive coating layer. Accordingly, the diffusion barrier layer prevents attack on the anti-corrosive coating layer.

    Abstract translation: 一种用于半导体制造室的金属衬垫,其能够防止腔室中的底板金属污染,其中金属衬垫包括介于基板和防腐蚀涂层之间的扩散阻挡层,并且其中扩散阻挡层防止 基板被扩散到防腐蚀涂层。 因此,扩散阻挡层防止对防腐蚀涂层的侵蚀。

    Reciprocating fluid pumps with chromium nitride coated components in contact with non-metallic packing and gasket materials for increased seal life
    33.
    发明授权
    Reciprocating fluid pumps with chromium nitride coated components in contact with non-metallic packing and gasket materials for increased seal life 失效
    往复式流体泵与氮化铬涂层组件接触非金属填料和衬垫材料,增加密封寿命

    公开(公告)号:US06212997B1

    公开(公告)日:2001-04-10

    申请号:US09243517

    申请日:1999-02-01

    Abstract: Chromium nitride coating of machine components such as reciprocating pump plungers for continuous sliding contact with non-metallic packing and gasket materials greatly increases the performance life of fluid seals. In an air driven reciprocating constant pressure pump, exterior surfaces of the pump plunger are coated with chromium nitride to a thickness of seven to ten microns. The coating resists failure from repeated sliding contact against non-metallic packing and gasket materials for at least four million pump cycles, with no evidence of cracking or release of metallic particles which would embed in the packing or gasket material and score the plunger. In lower pressure pumps, interior walls of a housing against which a sliding gasket bears, when coated with chromium nitride, greatly increase the seal life of the sliding gasket.

    Abstract translation: 用于与非金属填料和衬垫材料连续滑动接触的往复式泵柱塞等机械部件的氮化铬涂层大大增加了流体密封件的使用寿命。 在空气驱动的往复式恒压泵中,泵柱塞的外表面涂覆有氮化铬,厚度为7至10微米。 该涂层可抵抗非金属填料和垫片材料反复滑动接触至少四百万泵循环的故障,没有任何迹象表明会嵌入填料或垫圈材料中的金属颗粒的破裂或释放,并使柱塞得分。 在低压泵中,当涂覆有氮化铬时,滑动垫圈承受的外壳的内壁大大增加了滑动垫圈的密封寿命。

    Hydro mechanical packingless pump and liquid spray system
    34.
    发明授权
    Hydro mechanical packingless pump and liquid spray system 失效
    液压机械无包装泵和液体喷雾系统

    公开(公告)号:US5709536A

    公开(公告)日:1998-01-20

    申请号:US379917

    申请日:1995-01-30

    Abstract: A liquid pumping, handling and spraying system for liquid compositions and especially those liquid coating compositions having a suspension of metal particulate therein which tends to settle out of suspension of metal particulate therein which tends to settle out of suspension quite rapidly and which includes metal particulate having an affinity for adherence to metal surfaces. A fluid supply system is provided which accomplishes continuous agitation of the liquid composition to sprayed to maintain the metal particulate thereof in properly entrained suspension and even distribution with the liquid carrier fluid and which permits the use of low cost, lightweight containers for the liquid supply. A packingless pump is provided for pressurized delivery of the liquid composition from the supply container to a packingless spray gun. The packingless pump achieves pumping of liquid by hydro mechanical deformation of polymer variable volume pump chambers which induce intermittent suction and pressurization of the liquid for pumping and which have externally mounted check valve heads for controlling the flowing of the pumped liquid from the supply container to the spray gun. The packingless spray gun employs a body of resilient polymer which functions as a columnar spring to control the opening and closing movement of a spray valve assembly. Valve seats of the check valve head and spray gun assembly may be of flexible nature to ensure efficient separation of metal particulate therefrom. Metal operational components of the check valve head and spray gun, such as valve stems and valves define outer surfaces composed of titanium to minimize metal particulate adherence thereto.

    Abstract translation: 一种用于液体组合物的液体泵送,处理和喷雾系统,特别是那些其中具有金属颗粒的悬浮液的液体涂料组合物,其倾向于从其中非常迅速地悬浮在悬浮液中的金属颗粒的悬浮液中沉淀,并且其包括具有 对粘附金属表面的亲和力。 提供了一种流体供应系统,其实现喷射的液体组合物的连续搅拌,以将其金属颗粒保持在适当夹带的悬浮液中,并与液体载体流体均匀分布,并且允许使用低成本,轻质的容器用于液体供应。 提供了一种无包装泵,用于将液体组合物从供应容器加压输送到无包装喷枪。 无包装泵通过聚合物可变体积泵室的水力机械变形泵送液体,其引起用于泵送的液体的间歇抽吸和加压,并且具有外部安装的止回阀头,用于控制泵送的液体从供应容器流向 喷枪。 无包装喷枪采用弹性聚合物体,其用作柱状弹簧以控制喷雾阀组件的打开和关闭运动。 止回阀头和喷枪组件的阀座可以是柔性的,以确保金属颗粒从其中的有效分离。 止回阀头和喷枪的金属操作部件,例如阀杆和阀,限定由钛组成的外表面,以使金属颗粒附着到最小程度。

    ROTARY ENGINE WITH ROTOR LAND
    39.
    发明申请
    ROTARY ENGINE WITH ROTOR LAND 有权
    带转子土地的旋转发动机

    公开(公告)号:US20150167546A1

    公开(公告)日:2015-06-18

    申请号:US14108522

    申请日:2013-12-17

    Abstract: A rotary internal combustion engine with a rotor body made at least in major part of a first material, including at least one land protruding axially from each of its end faces and defining a contact surface extending at a fixed position with respect to the end faces. The contact surface frictionally engages a portion of the inner surface of the internal cavity of the engine, and at least the outer surface of the land includes a second material. The second material has a greater wear resistance than that of the first material with respect to frictional engagement with the portion of the inner surface of the internal cavity contacting the land. A method of axially positioning a rotor of a rotary engine within an internal cavity of an outer body of the engine are also discussed.

    Abstract translation: 一种旋转式内燃机,其具有至少在第一材料的主要部分上制成的转子体,该旋转内燃机包括从其每个端面轴向突出的至少一个凸台,并限定了相对于端面在固定位置延伸的接触表面。 接触表面摩擦地接合发动机的内腔的内表面的一部分,并且至少外壳的外表面包括第二材料。 与第一材料的摩擦接合相比,第二材料具有比与内部空腔的内表面接触的部分更大的耐磨性。 还讨论了将旋转发动机的转子轴向定位在发动机的外部主体的内部空腔内的方法。

    Actuators based on ferromagnetic shape memory alloy composites
    40.
    发明授权
    Actuators based on ferromagnetic shape memory alloy composites 失效
    基于铁磁形状记忆合金复合材料的执行器

    公开(公告)号:US07688168B2

    公开(公告)日:2010-03-30

    申请号:US11222022

    申请日:2005-09-08

    Abstract: Linear actuators (also known as an inchworm actuator) including a magnetically actuatable shape memory alloy (SMA) are described. The linear actuators include a bar and an actuator assembly, configured to achieve a linear displacement of the actuator assembly relative to the bar. A hybrid magnetic trigger including an electromagnet and a permanent magnet is used to selectively attract the magnetically actuatable SMA toward the magnetic trigger. The motion of the magnetically actuatable SMA can be converted to a linear displacement. The magnetically actuatable SMA can be implemented using a SMA exhibiting both ferromagnetic and SMA properties, or by a ferromagnetic mass coupled with an SMA (i.e., a ferromagnetic SMA composite). Linear actuators including bars incorporating a ratchet mechanism, and featureless bars are described. A hydraulic system incorporating actuators including magnetically actuatable SMA membranes is also disclosed.

    Abstract translation: 描述了包括可磁致动形状记忆合金(SMA)的线性致动器(也称为蚯蚓致动器)。 线性致动器包括杆和致动器组件,构造成实现致动器组件相对于杆的线性位移。 使用包括电磁体和永磁体的混合磁触发器来选择性地将磁致动SMA吸引到磁触发器。 磁致动SMA的运动可以转换为线性位移。 可磁致动SMA可以使用表现出铁磁性和SMA性质的SMA,或通过与SMA(即铁磁SMA复合材料)耦合的铁磁性质量来实现。 描述了包括具有棘轮机构的杆的线性致动器和无特征杆。 还公开了一种包括具有可磁致动SMA膜的致动器的液压系统。

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