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    Infrared Sensor Device and Method for Producing an Infrared Sensor Device
    31.
    发明申请
    Infrared Sensor Device and Method for Producing an Infrared Sensor Device 有权
    红外线传感器装置及红外线传感器装置的制作方法

    公开(公告)号：US20150137300A1

    公开(公告)日：2015-05-21

    申请号：US14400461

    申请日：2013-04-19

    Applicant: Robert Bosch Gmbh

    Inventor： Ingo Herrmann ,  Edda Sommer ,  Christoph Schelling ,  Christian Rettig ,  Mirko Hattass

    IPC: H01L27/146 ,  H01L31/028 ,  G01J5/20

    CPC classification number: H01L27/14649 ,  G01J5/20 ,  G01J2005/0048 ,  G01J2005/067 ,  H01L27/14609 ,  H01L27/14629 ,  H01L27/14636 ,  H01L27/1467 ,  H01L27/14685 ,  H01L31/028

    Abstract: An infrared sensor device includes a semiconductor substrate, at least one sensor element that is micromechanically formed in the semiconductor substrate, and at least one calibration element, which is micromechanically formed in the semiconductor substrate, for the sensor element. An absorber material is arranged on the semiconductor substrate in the area of the sensor element and the calibration element. One cavern each is formed in the semiconductor substrate substantially below the sensor element and substantially below the calibration element. The sensor element and the calibration element are thermally and electrically isolated from the rest of the semiconductor substrate by the caverns. The infrared sensor device has high sensitivity, calibration functionality for the sensor element, and a high signal-to-noise ratio.

    Abstract translation: 红外线传感器装置包括半导体衬底，至少一个在半导体衬底中微机械地形成的传感器元件，以及用于传感器元件的微机械地形成在半导体衬底中的至少一个校准元件。 在传感器元件和校准元件的区域中的半导体衬底上布置有吸收材料。 一个洞穴分别形成在半导体衬底中，基本上位于传感器元件的下方并且基本上在校准元件的下面。 传感器元件和校准元件通过洞穴与半导体衬底的其余部分热电隔离。 红外传感器设备具有高灵敏度，传感器元件的校准功能和高信噪比。

    Dewar cryopumping using barium oxide composite for moisture removal
    32.
    发明授权
    Dewar cryopumping using barium oxide composite for moisture removal 失效
    使用氧化钡复合材料进行除湿的杜瓦低温泵

    公开(公告)号：US4886240A

    公开(公告)日：1989-12-12

    申请号：US260168

    申请日：1988-10-20

    Applicant: Benjamin K. Rich

    Inventor： Benjamin K. Rich

    IPC: B01J20/04 ,  F17C13/00 ,  F25D19/00 ,  G01J5/06

    CPC classification number: G01J5/061 ,  B01J20/041 ,  B01J20/18 ,  B01J20/2803 ,  B01J20/2805 ,  F17C13/006 ,  F25D19/006 ,  G01J2005/067

    Abstract: A non-evacuated dewar 10 advantageously employs a molecular sieve 30 that serves to adsorb gasses in the dewar when cooled during operation of the detector 24 thereby preventing liquid formation onto the detector. The effects of outgassing and permeation during storage are substantially eliminated because the dewar package is in partial pressure equilibrium with its environment since the interior of the dewar is backfilled with the same inert gas as is in the surrounding outside environment. A desiccant 40 made of a barium oxide/RTV silicone rubber composite may be used to adsorb moisture which may permeate into the housing.

    Abstract translation: 非抽真空的杜瓦10有利地使用分子筛30，其用于在检测器24的操作期间冷却时吸附杜瓦瓶中的气体，从而防止液体形成到检测器上。 由于杜瓦瓶的内部与周围的外部环境中相同的惰性气体回填，杜兰瓶与其环境处于分压平衡状态，因此基本上消除了储存期间除气和渗透的影响。 可以使用由氧化钡/ RTV硅橡胶复合材料制成的干燥剂40来吸收可渗透到壳体中的水分。

    LOW-DRIFT INFRARED DETECTOR
    34.
    发明申请
    LOW-DRIFT INFRARED DETECTOR 审中-公开

    公开(公告)号：US20190154511A1

    公开(公告)日：2019-05-23

    申请号：US16191733

    申请日：2018-11-15

    Applicant: MELEXIS TECHNOLOGIES NV

    Inventor： Carl VAN BUGGENHOUT ,  Karel VANROYE

    IPC: G01J5/02 ,  G01J5/00 ,  G01J5/12 ,  G01J5/22

    CPC classification number: G01J5/0225 ,  G01J5/0003 ,  G01J5/026 ,  G01J5/12 ,  G01J5/22 ,  G01J2005/0048 ,  G01J2005/066 ,  G01J2005/067

    Abstract: A semiconductor device for measuring IR radiation comprising: at least one sensor pixel; at least one reference pixel shielded from said IR radiation comprising a heater; a controller adapted for: measuring a responsivity by applying power to the heater, while not heating the sensor pixel; measuring a first output signal of an unheated pixel and a first reference output signal of the heated pixel, obtaining the responsivity as a function of a measure of the applied power to the heater and of the difference between the first output signal and the first reference output signal; applying a period of cooling down until the temperature of the reference pixel and the sensor pixel are substantially the same; generating the output signal indicative of the IR radiation, based on the difference between the sensor and the reference output signal, by converting this difference using the responsivity.

    APPARATUS AND METHOD OF DETECTING TEMPERATURE AND APPARATUS FOR PROCESSING SUBSTRATE
    37.
    发明申请
    APPARATUS AND METHOD OF DETECTING TEMPERATURE AND APPARATUS FOR PROCESSING SUBSTRATE 有权
    检测温度的装置和方法以及处理基板的装置

    公开(公告)号：US20140284316A1

    公开(公告)日：2014-09-25

    申请号：US14190084

    申请日：2014-02-25

    Applicant: AP SYSTEMS INC.

    Inventor： Sang Hyun JI

    IPC: G01J5/02

    CPC classification number: G01J5/602 ,  G01J5/0007 ,  G01J2005/0048 ,  G01J2005/067

    Abstract: Disclosed are an apparatus and method of detecting a temperature through a pyrometer in a non-contact manner, and an apparatus for processing a substrate using the apparatus, and more particularly, an apparatus and method of detecting a temperature, which precisely measures a temperature without any effect by humidity, and an apparatus for processing a substrate using the same. In an exemplary embodiment, an apparatus for detecting a temperature includes a humidity sensor configured to measure a humidity value, a temperature compensation database configured to store a temperature compensation value for each humidity value, and a pyrometer in which, assuming that a wavelength band including a transmittance limiting wavelength band as a wavelength band having a transmittance less than a first threshold value due to the humidity and a transmittance allowing wavelength band as a wavelength band having a transmittance more than a second threshold value due to the humidity is a wavelength band to be compensated, a non-contact temperature is calculated by adding a temperature compensation value corresponding to a humidity value detected by the humidity sensor to a temperature to be compensated calculated by measuring a wavelength intensity of the wavelength band to be compensated radiated from an object to be measured.

    Abstract translation: 公开了以非接触方式通过高温计检测温度的装置和方法，以及使用该装置处理基板的装置，更具体地，涉及一种检测温度的装置和方法，其精确地测量温度而没有 湿度的任何影响，以及使用其的基板的处理装置。 在一个示例性实施例中，用于检测温度的装置包括被配置为测量湿度值的湿度传感器，配置成存储每个湿度值的温度补偿值的温度补偿数据库，以及高温计，其中， 作为具有由于湿度而导致的透射率小于第一阈值的波长带的透光率限制波长带和由于湿度导致的具有大于第二阈值的波长带的波长带的透射率为波长带宽 通过将对应于由湿度传感器检测到的湿度值的温度补偿值与通过测量从物体辐射的待补偿的波长带的波长强度计算得到的待补偿温度相加来计算非接触温度 被测量。

    Temperature sensing arrangement
    38.
    发明授权
    Temperature sensing arrangement 失效
    温度传感装置

    公开(公告)号：US4904090A

    公开(公告)日：1990-02-27

    申请号：US125991

    申请日：1987-11-27

    Applicant: Colin C. Oliver

    Inventor： Colin C. Oliver

    IPC: F25B21/04 ,  G01J5/06 ,  G05D23/27

    CPC classification number: F25B21/04 ,  G01J5/061 ,  G05D23/27 ,  G01J2005/062 ,  G01J2005/067 ,  G01J2005/068

    Abstract: A temperature sensor is incorporated within a housing having a silicon window through which infra-red radiation can enter. Mounted on a support structure is a semiconductor fabrication consisting of a reference junction and a sensing junction, covered with a black absorber. The reference junction is responsive to the temperature of the housing, whereas the sensing junction is responsive to the temperature of the housing and also the temperature of a remote zone from which infra-red radiation can enter the housing via the window. A Peltier heater/cooler controls the temperature of the housing, which temperature is monitored by a sensor to provide a measure of that of the remote zone.

    Abstract translation: 温度传感器结合在具有硅窗口的壳体内，红外辐射可以通过该窗口进入。 安装在支撑结构上的是由参考接头和感测接头组成的半导体制造，覆盖有黑色吸收体。 参考接头响应于壳体的温度，而感测接点响应于壳体的温度以及远红外区域的温度，红外线辐射可以通过窗口进入壳体。 珀尔帖加热器/冷却器控制壳体的温度，该温度由传感器监测以提供远程区域的温度。

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