公开(公告)号：WO2008029187A2

公开(公告)日：2008-03-13

申请号：PCT/HU2007000081

申请日：2007-09-05

Applicant: SZEGEDI TUDOMANYEGYETEM ,  OSVAY KAROLY ,  GOERBE MIHALY

Inventor： OSVAY KAROLY ,  GOERBE MIHALY

IPC: H01S3/13

CPC classification number: H01S3/1303 ,  G01J9/02 ,  G01J11/00 ,  G01J2009/0234 ,  H01S3/0014 ,  H01S3/10053 ,  H01S3/1304 ,  H01S3/1307

Abstract: The invention relates to a method and to a setup for detecting and stabilizing a carrier-envelope phase drift of laser pulses by means of spectrally and spatially resolved interferometry. According to the method, a laser pulse train of at least two pulses (1, 2, 3) is directed along a first light path and a second light path that extend between a starting point and an end point and are characterized by different ray paths. One of the pulses travelling in the first light path is taken as reference pulse (2R). A closed light resonator ring (46) is inserted into the second light path, whereby a certain portion of the pulses (1, 2, 3) is circulated back from a second point of the second light path along a light path segment differing from the second light path into a first point of the second light path, wherein the second point is located in the direction of light propagation farther from the starting point and the first point is located in the direction of light propagation nearer to the starting point. Spectrally resolved interference patterns are generated at the end point via interference of the reference pulse (2R) with the whole of the individual pulses (1, 2, 3) travelling through the second point of the second light path towards the end point. The thus obtained interference patterns are imaged by an optical imaging means that is connected to an output of a unit for performing resolution with respect to wavelength arranged at the end point. On the basis of a superimposed image obtained as the superposition of interference images captured, a spectral visibility value is determined. Finally, from a change in the spectral visibility value, the carrier-envelope phase drift of subsequent laser pulses (1, 2, 3) is deduced.

Abstract translation: 本发明涉及一种用于通过光谱和空间分辨干涉测量来检测和稳定激光脉冲的载波包络相位漂移的方法和装置。 根据该方法，具有至少两个脉冲（1,2,3）的激光脉冲串沿着第一光路和在起始点和终点之间延伸的第二光路被引导，并且其特征在于不同的射线路径 。 将在第一光路中行进的脉冲之一作为参考脉冲（2R）。 闭合的光谐振器环（46）插入到第二光路中，由此一部分脉冲（1,2,3）从第二光路的第二点沿着与第二光路不同的光路段循环回来 第二光路进入第二光路的第一点，其中第二点位于比起始点更远的光传播方向，第一点位于更靠近起点的光传播方向上。 通过参考脉冲（2R）与通过第二光路的第二点向终点行进的整个单个脉冲（1,2,3）的干扰，在终点处产生频谱解析的干涉图案。 如此获得的干涉图案通过光学成像装置成像，该光学成像装置连接到用于执行关于设置在端点处的波长的分辨率的单元的输出。 基于作为捕获的干涉图像的叠加获得的叠加图像，确定光谱可见度值。 最后，从光谱可见度值的变化，推导出后续激光脉冲（1,2,3）的载波包络相位漂移。

公开(公告)号：US20190212130A1

公开(公告)日：2019-07-11

申请号：US16328309

申请日：2017-06-01

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Qinghua WANG ,  Shien RI ,  Hiroshi TSUDA

IPC: G01B11/16 ,  G01J9/02 ,  G01B11/25

CPC classification number: G01B11/161 ,  G01B11/16 ,  G01B11/25 ,  G01B11/254 ,  G01J9/02 ,  G01J2009/0234 ,  G01N21/45

Abstract: In a conventional moiré method, achieving both measurement accuracy and dynamic measurement and balancing field of view and measurement accuracy have been difficult. The present invention makes it possible to handle conventional moiré fringes as a grating for generating phase-shifted second-order moiré fringes, use a spatial phase shift method algorithm to accurately analyze the phases of the second-order moiré fringes before and after deformation, and determine shape from the phase differences between gratings projected onto the surface of an object of measurement and a reference surface and determine deformation and strain from the phase differences between the second-order moiré fringes, before and after deformation, of a repeating pattern on the object surface or a produced grating. As a result, it is possible to measure the three-dimensional shape and deformation distribution of an object accurately and with a wide field of view or dynamically and with a high degree of accuracy.

公开(公告)号：US20180292748A1

公开(公告)日：2018-10-11

申请号：US16003723

申请日：2018-06-08

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hiroshi Sato

IPC: G03F7/00 ,  G03F9/00

CPC classification number: G03F7/0002 ,  G01J2009/0234 ,  G03F9/7042 ,  G03F9/7049 ,  G03F9/7065

Abstract: This disclosure provides an imprint apparatus configured to form a pattern with an imprint material by bringing the imprint material on a substrate and a pattern of the mold into contact with each other including a drive unit to bring part of the pattern of the mold into contact with the imprint material, and bring the pattern into contact with the imprint material so a contact surface area between the pattern of the mold and the imprint material increases, an interference fringe detecting unit to detect an interference fringe generated by reflected light from the pattern of the mold and reflected light from the substrate, and a state detecting unit to detect a contact state between the pattern of the mold and the imprint material on the basis of the interference fringe.

公开(公告)号：US09618369B2

公开(公告)日：2017-04-11

申请号：US13060033

申请日：2009-08-25

Applicant: Jonathan Mark Ralph Weaver ,  Phillip Stephen Dobson ,  David Paul Burt ,  Stephen Thoms ,  Kevin Edward Docherty ,  Yuan Zhang

Inventor： Jonathan Mark Ralph Weaver ,  Phillip Stephen Dobson ,  David Paul Burt ,  Stephen Thoms ,  Kevin Edward Docherty ,  Yuan Zhang

IPC: G01B11/02 ,  G01D5/26 ,  G01D5/38 ,  G01D11/00 ,  G01J9/02 ,  G01N21/45 ,  G03H1/00

CPC classification number: G01D5/266 ,  G01D5/38 ,  G01D11/00 ,  G01J9/0246 ,  G01J2009/0234 ,  G01N21/45 ,  G03H1/0005

Abstract: Various uses of visible light interference patterns are provided. Suitable interference patterns are those formed by diffraction from patterns of apertures. Typical uses disclosed herein relate to spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of the light itself (such as the determination of the wavelength of the electromagnetic radiation). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. Part of the interference pattern is captured at a pixellated detector, such as a CCD chip, and the captured pattern compared with a calculated pattern. Very precise measurements of the spacing between maxima is possible, thus allowing very precise measurements of position of the detector in the interference pattern.

公开(公告)号：US20080174786A1

公开(公告)日：2008-07-24

申请号：US12005882

申请日：2007-12-28

Applicant: Hideo Takizawa ,  Koji Miyazaki ,  Haruhiko Kusunose

Inventor： Hideo Takizawa ,  Koji Miyazaki ,  Haruhiko Kusunose

IPC: G01B9/02

CPC classification number: G03F1/84 ,  G01J9/0215 ,  G01J2009/0234 ,  G01N21/45 ,  G03F1/32

Abstract: A phase shift amount measurement apparatus able to further correctly measure a phase shift amount of a phase shifter, wherein a laterally offset interference image of a phase shift mask is formed by a shearing interferometer, the interference image is captured by a two-dimensional imaging device, an output signal output from each light receiving element of the two-dimensional imaging device is supplied to a signal processing device, the phase shift amount is calculated for each light receiving element, the light receiving area of the light receiving element is very small, therefore the phase shift amount of any light receiving element outputting a peculiar phase amount due to incidence of diffraction light or multi-reflection light is excluded and the phase shift amount is determined based on the phase shift amount found from output signals of the remaining light receiving elements.

Abstract translation: 一种相移量测量装置，其能够进一步正确地测量移相器的相移量，其中通过剪切干涉仪形成相移掩模的横向偏移干涉图像，所述干涉图像由二维成像装置 从二维成像装置的每个光接收元件输出的输出信号被提供给信号处理装置，针对每个光接收元件计算相移量，光接收元件的光接收面积非常小， 因此排除由于衍射光或多反射光的入射而输出特殊相位量的任何光接收元件的相移量，并且基于从剩余的光接收的输出信号中发现的相移量来确定相移量 元素。

公开(公告)号：US07359063B2

公开(公告)日：2008-04-15

申请号：US11193999

申请日：2005-07-29

Applicant: Douglas R. Jungwirth

Inventor： Douglas R. Jungwirth

IPC: G01B9/02

CPC classification number: G01B9/02097 ,  G01B9/02051 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234

Abstract: A method and apparatus for correcting an input beam (102) that uses an array of detectors (114) sensing a scanning fringe pattern to generate phase error information which can be corrected by a physically adjacent beam correction device such as an array of micro-electrical-mechanical-system (MEMS) mirrors (116).

Abstract translation: 一种用于校正使用感测扫描条纹图案的检测器阵列（114）的输入光束（102）的方法和装置，以产生相位误差信息，所述相位误差信息可由物理上相邻的光束校正装置校正，例如微电子阵列 机械系统（MEMS）镜（116）。

公开(公告)号：US07324207B1

公开(公告)日：2008-01-29

申请号：US11112245

申请日：2005-04-22

Applicant: Sean Kirkpatrick ,  Ali A. Said ,  Mark Allen Dugan ,  Thomas Sosnowski ,  Philippe Bado

Inventor： Sean Kirkpatrick ,  Ali A. Said ,  Mark Allen Dugan ,  Thomas Sosnowski ,  Philippe Bado

IPC: G01B9/02

CPC classification number: G01J11/00 ,  G01J9/02 ,  G01J2009/023 ,  G01J2009/0234

Abstract: An optical device is useful for analyzing an optical signal pulse to determine information related to the pulse, such as information related to its temporal coherence length. The optical device generally includes a plurality of interferometric devices to generate one or more respective interference patterns from the optical signal pulse, and a plurality of detectors associated with each respective interferometric device to receive the one or more respective interference patterns. At least one of the plurality of interferometric devices is disposed in a glass substrate. The optical device may be integrated in an optical correlation system having an analyzer coupled to the plurality of detectors to determine the temporal coherence length or other pulse-related information for the optical signal pulse based on the received interference patterns.

Abstract translation: 光学装置用于分析光信号脉冲以确定与脉冲相关的信息，例如与其时间相干长度相关的信息。 光学装置通常包括多个干涉装置以从光信号脉冲产生一个或多个相应的干涉图案，以及与每个相应的干涉仪装置相关联的多个检测器，以接收一个或多个相应的干涉图案。 多个干涉仪中的至少一个设置在玻璃基板中。 光学装置可以集成在具有耦合到多个检测器的分析器的光学相关系统中，以基于所接收的干涉图案来确定用于光信号脉冲的时间相干长度或其它脉冲相关信息。

公开(公告)号：US07268885B2

公开(公告)日：2007-09-11

申请号：US11073712

申请日：2005-03-08

Applicant: Kinpui Chan ,  Masahiro Akiba ,  Yasufumi Fukuma ,  Hiroyuki Otsuka ,  Hisashi Tsukada

Inventor： Kinpui Chan ,  Masahiro Akiba ,  Yasufumi Fukuma ,  Hiroyuki Otsuka ,  Hisashi Tsukada

IPC: G01B9/02

CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02041 ,  G01B9/02069 ,  G01B2290/45 ,  G01J2009/0234

Abstract: An optical image measuring apparatus capable of effectively obtaining a direct current component of a heterodyne signal which is composed of background light of interference light is provided. The optical image measuring apparatus includes: an optical interference system in which a light beam from a light source is divided into signal light and reference light by a beam splitter, a frequency of the reference light is shifted by a frequency shifter, and the signal light propagating through an object to be measured and the reference light reflected on a mirror are superimposed on each other by the beam splitter to produce interference light; beam splitters for dividing the interference light into interference light beams; shutters serving as an intensity modulating unit for modulating intensities of the respective interference light beams at predetermined intervals; CCDs for receiving the respective interference light beams whose intensities are modulated and outputting electrical signals; and a signal processing portion serving as a calculating unit for calculating an intensity of the direct current component corresponding to the background light of the interference light based on the outputted electrical signals.

Abstract translation: 提供一种能够有效地获得由干涉光的背景光组成的外差信号的直流分量的光学图像测量装置。 光学图像测量装置包括：光学干涉系统，其中来自光源的光束被分束器分成信号光和参考光，参考光的频率被移频器偏移，并且信号光 通过被测量物体传播并且通过分束器将反射在反射镜上的参考光彼此叠加以产生干涉光; 分束器，用于将干涉光分成干涉光束; 用作强度调制单元的快门，用于以预定间隔调制各个干涉光束的强度; 用于接收其强度被调制并输出电信号的各个干涉光束的CCD; 以及信号处理部分，用作计算单元，用于基于输出的电信号计算与干涉光的背景光相对应的直流分量的强度。

公开(公告)号：EP2318810B1

公开(公告)日：2018-08-01

申请号：EP09785006.9

申请日：2009-08-25

Applicant: The University Court Of The University Of Glasgow

Inventor： WEAVER, Jonathan, Mark, Ralph ,  DOBSON, Phillip, Stephen ,  BURT, David, Paul ,  THOMS, Stephen ,  DOCHERTY, Kevin, Edward ,  ZHANG, Yuan

IPC: G01D11/00 ,  G01D5/26 ,  G01D5/38 ,  G01J9/02 ,  G01N21/45 ,  G03H1/00

CPC classification number: G01D5/266 ,  G01D5/38 ,  G01D11/00 ,  G01J9/0246 ,  G01J2009/0234 ,  G01N21/45 ,  G03H1/0005

Abstract: Various uses of visible light interference patterns are provided. Suitable interference patterns are those formed by diffraction from patterns of apertures. Typical uses disclosed herein relate to spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of the light itself (such as the determination of the wavelength of the electromagnetic radiation). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. Part of the interference pattern is captured at a pixellated detector, such as a CCD chip, and the captured pattern compared with a calculated pattern. Very precise measurements of the spacing between maxima is possible, thus allowing very precise measurements of position of the detector in the interference pattern.

公开(公告)号：EP0341960A3

公开(公告)日：1990-10-03

申请号：EP89304644.1

申请日：1989-05-08

Applicant: Hewlett-Packard Company

Inventor： Wayne, Kenneth.J.

IPC: G01J9/02 ,  G01B9/02

CPC classification number: G01B9/02041 ,  G01B9/02059 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261 ,  G01J2009/0284

Abstract: Method and apparatus for obtaining an enhanced clearer measurement signal with improved fringe contrast from a laser interferometer. The interferometer sends a laser beam (12) through atmospheric air to a polarizing or nonpolarizing beamsplitter (13) that sends one laser beam portion (14,16) to a fixed reference retroreflector (15) and another portion (19,21) to a movable measurement retroreflector (20). Both beams, upon retroreflection go back to the beamsplitter and are recombined to produce a combined beam (22) that is then sent to an aperture (30) such that only a small selected portion of that combined beam passes through the aperture, attenuating the energy of the combined beam but increasing its fringe contrast. This portion is sent to a detector (32) and is subsequently amplified by a high-gain amplifier.

Abstract translation: 用于从激光干涉仪获得具有改进的条纹对比度的增强的更清晰的测量信号的方法和装置。 干涉仪将激光束（12）通过大气引导到偏振或非偏振分束器（13），该分束器将一个激光束部分（14,16）发送到固定参考后向反射器（15），另一部分（19,21）发送到 可移动测量回射器（20）。 两个光束在逆反射时返回分束器并被重新组合以产生组合的光束（22），然后将组合的光束（22）发送到孔（30），使得只有该组合光束的小的选定部分通过孔径，衰减能量 的组合光束，但增加其条纹对比度。 该部分被发送到检测器（32），随后被高增益放大器放大。