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    광섬유형 피조 간섭계를 이용한 나노 변위 및 표면 형상 측정 장치
    33.
    发明公开
    광섬유형 피조 간섭계를 이용한 나노 변위 및 표면 형상 측정 장치 无效
    使用光纤FIZEAU干涉仪测量纳米位移和表面轮廓的装置

    公开(公告)号：KR1020120004578A

    公开(公告)日：2012-01-13

    申请号：KR1020100065137

    申请日：2010-07-07

    Applicant: 광주과학기술원

    Inventor： 강진호 ,  이선규 ,  주재영 ,  이차범 ,  우도균

    IPC: G01B9/02 ,  G01B11/24 ,  G01B11/00 ,  B82B1/00

    CPC classification number: G01B11/2441 ,  G01B9/02049 ,  G01B11/026 ,  G01J9/02 ,  G01J2009/0292 ,  G01N21/45

    Abstract: PURPOSE: An apparatus for measuring nanometric displacement and surface profile using a fiber-optic fizeau interferometer is provided to remarkably reduce time required for aligning optical axes because an optical element is not required. CONSTITUTION: An apparatus for measuring nanometric displacement and surface profile using a fiber-optic fizeau interferometer comprises a light source(10), a light source driver(70), a photo coupler(40), a lensed fiber(90), first and second photoelectric conversion units, and a computing unit(80). The light source emits light. The light source driver drives the light source. The photo coupler branches the light from the light source into two light routes and sends one and the other light routes to the first and second photoelectric conversion units, respectively. The lens fiber sends the light reflected from an object to the photo coupler. The first and second photoelectric conversion units convert the light from the photo coupler into an electric signal. The computing unit computes the nano displacement of the object by analyzing the electric signal.

    Abstract translation: 目的：提供一种用于使用光纤fizeau干涉仪测量纳米位移和表面轮廓的设备，以显着减少对准光轴所需的时间，因为不需要光学元件。 构成：使用光纤fizeau干涉仪测量纳米位移和表面轮廓的装置包括光源（10），光源驱动器（70），光耦合器（40），透镜光纤（90），第一和 第二光电转换单元和计算单元（80）。 光源发光。 光源驱动器驱动光源。 光耦合器将来自光源的光分成两条光路，并将一条光路分别发送到第一和第二光电转换单元。 透镜光纤将从物体反射的光线发送到光电耦合器。 第一和第二光电转换单元将来自光耦合器的光转换成电信号。 计算单元通过分析电信号来计算物体的纳米位移。

    Luminous energy ratio regulation filter for interferometer unit, interferometer unit, and light interference measuring method
    35.
    发明专利
    Luminous energy ratio regulation filter for interferometer unit, interferometer unit, and light interference measuring method 有权
    用于干燥器单元，干燥器单元和光干扰测量方法的能量比率过滤器

    公开(公告)号：JP2006090829A

    公开(公告)日：2006-04-06

    申请号：JP2004276434

    申请日：2004-09-24

    Applicant: Fujinon Corp ,  フジノン株式会社

    Inventor： UEKI NOBUAKI

    IPC: G01B9/02 ,  G02B26/02

    CPC classification number: G01B9/02058 ,  G01B9/02057 ,  G01J3/0213 ,  G01J2009/0292

    Abstract: PROBLEM TO BE SOLVED: To obtain highly precise interference wave information of high contrast, using one luminous energy ratio regulation means, in each of various specimens different in light return ratios.
    SOLUTION: This luminous energy ratio regulation filter 112 is arranged between a reference face and an inspected face of the interferometer. In the luminous energy ratio regulation filter 112, a luminous energy ratio regulation film 12 including a light reflecting and absorbing layer 12a and a dielectric reflection preventive layer 12b is provided on one face (face in a specimen 117 side) of a transparent substrate comprising glass, a light reflection preventive film 13 is provided on the other face (face in a reference face 116a side), one portion of incident light is reflected as to the incident light from a face opposed to the reference face, one portion of the residual light is absorbed to be emitted thereafter toward the specimen 117. In the regulation filter 112, one portion of return light is absorbed, reflection is restrained, and the residue is emitted toward a direction of the reference face 116a as inspected light, as to the return light from the specimen 117 incident from a specimen-opposed face side.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题：为了获得高对比度的高精度干涉波信息，使用一种光能比调节装置，在各种不同试样中的光返回率不同。

    解决方案：该光能比调节滤波器112布置在干涉仪的参考面和被检查面之间。 在光能比调节滤光器112中，在包括玻璃的透明基板的一个面（试样117侧的面）上设置有包含光反射和吸收层12a和介电反射防止层12b的光能比例调节膜12 在另一面（基准面116a侧的面）设置防反射膜13，一部分入射光从与基准面相反的面反射入射光，残留光的一部分 被吸收后被发射到样本117.在调节滤光器112中，一部分返回光被吸收，反射被抑制，并且残留物作为检测光朝向参考面116a的方向发射，作为返回 从样本对置面侧入射的试样117的光。 版权所有（C）2006，JPO＆NCIPI

    모드 선택 튜너로부터의 광 피드백
    36.
    发明公开
    모드 선택 튜너로부터의 광 피드백 有权
    模式选择性调谐器的光学反馈

    公开(公告)号：KR1020070062572A

    公开(公告)日：2007-06-15

    申请号：KR1020077009116

    申请日：2005-09-20

    Applicant: 코닝 인코포레이티드

    Inventor： 듄,토마스제임스 ,  파미가,네스터오. ,  쿨라웨익,앤드류더블유. ,  말론,조셉씨.

    IPC: H01S3/10

    CPC classification number: H01S5/0687 ,  G01B9/02004 ,  G01B9/02057 ,  G01B9/02083 ,  G01B2290/60 ,  G01J9/02 ,  G01J2009/0292 ,  H01S5/0014 ,  H01S5/141 ,  H01S5/142

    Abstract: A mode-monitoring system used in connection with discrete beam frequency tunable laser provides optical feedback that can be used for adjusting the laser or for other processing associated with the use of the laser. For example, the output of a frequency tunable source for a frequency-shifting interferometer can be monitored to support the acquisition or processing of more accurate interference data. A first interferometer for taking desired measurements of optical path length differences traveled by different portions of a measuring beam can be linked to a second interferometer for taking measurements of the measuring beam itself. The additional interference data can be interpreted in accordance with the invention to provide measures of beam frequency and intensity.

    Abstract translation: 与分立光束可调谐激光器相结合使用的模式监测系统提供可用于调整激光器或与使用激光器相关的其他处理的光学反馈。 例如，可以监视用于频移干涉仪的频率可调谐源的输出，以支持获取或处理更准确的干扰数据。 用于取得测量光束的不同部分所行进的光程长差的期望测量的第一干涉仪可以连接到用于测量测量光束本身的第二干涉仪。 可以根据本发明解释附加的干扰数据，以提供射束频率和强度的测量。

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