公开(公告)号：EP0406030B1

公开(公告)日：1995-05-03

申请号：EP90400529.5

申请日：1990-02-26

Applicant: QC OPTICS, INC.

Inventor： Johnson, Carly E. ,  Ormsby, Jay L. ,  Chase, Eric T. ,  Quackenbos, George S. ,  Broude, Sergey V. ,  Boudour, Abdu

IPC: G01N21/88

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

公开(公告)号：EP0390623A3

公开(公告)日：1992-01-08

申请号：EP90400508.9

申请日：1990-02-23

Applicant: MEASUREX CORPORATION

Inventor： Wennerberg, Gunnar ,  Gordon, Daniel A. ,  King, Harriss T.

IPC: G01N21/86 ,  G01N21/35 ,  G01N21/59

CPC classification number: G01N21/86 ,  G01N2021/8645 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: A system for detecting optically-sensitive properties of sheet materials during manufacture includes a first group of bundles of optical fibers that convey light to selected transmitting locations adjacent one face of the sheet material. The system further includes a second group of bundles of optical fibers that collect and convey light transmitted through the sheet material to a light detector. The light detector measures the intensity of light received from each of the bundles of the second group to provide measurements of optically-sensitive properties of the sheet material at selected cross-­directional locations.

公开(公告)号：US20110089348A1

公开(公告)日：2011-04-21

申请号：US12966595

申请日：2010-12-13

Applicant: Moshe Finarov ,  David Scheiner ,  Yoav Lishzinker ,  On Haran

Inventor： Moshe Finarov ,  David Scheiner ,  Yoav Lishzinker ,  On Haran

IPC: G01N21/86

CPC classification number: G01N21/31 ,  G01N21/6489 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/8901 ,  G01N21/9501 ,  G01N2021/3568 ,  G01N2021/8908 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic or monochromatic illumination source. The illumination is positioned in certain locations including locations where the layer stack includes a reduced number of thin film layers. Such locations may be discrete sampled points located within scribe lines, contact frames or dedicated measurement targets. The light collected from such discrete sampled points is transferred to a photo-sensitive sensor through an optical switch. The spectral signal of the light reflected, transmitted or scattered by the sampled points is collected by the sensor and processed by a controller in such a way that parameters of simplified stacks are used for accurate determination of desired parameters of the full cell stack. In this way the photovoltaic thin film parameters applicable to the quality control are derived e.g. thin film thickness, index of refraction, extinction coefficient, absorption coefficient, energy gap, conductivity, crystallinity, surface roughness, crystal phase, material composition and photoluminescence spectrum and intensity. Manufacturing equipment parameters influencing the material properties may be changed to provide a uniform thin film layer with pre-defined properties.

Abstract translation: 获得光电薄膜质量控制，其中薄膜由支撑体支撑并且膜的一部分被多色或单色照明源照射。 照明被定位在某些位置，包括层堆叠减少数量的薄膜层的位置。 这些位置可以是位于划线，接触框架或专用测量目标内的离散采样点。 从这些离散采样点收集的光通过光学开关传送到光敏传感器。 由采样点反射，传播或散射的光的光谱信号由传感器收集并由控制器进行处理，使得简化堆栈的参数用于精确确定全单元堆栈的期望参数。 以这种方式，可以使用适用于质量控制的光伏薄膜参数。 薄膜厚度，折射率，消光系数，吸收系数，能隙，导电率，结晶度，表面粗糙度，结晶相，材料组成和光致发光光谱和强度。 可以改变影响材料性能的制造设备参数，以提供具有预定特性的均匀薄膜层。

公开(公告)号：US20100220316A1

公开(公告)日：2010-09-02

申请号：US12775293

申请日：2010-05-06

Applicant: Moshe Finarov

Inventor： Moshe Finarov

IPC: G01N21/86 ,  G06F19/00 ,  G01N21/00 ,  G01J1/10

CPC classification number: G01B11/06 ,  G01B11/0625 ,  G01N21/31 ,  G01N21/6489 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/8901 ,  G01N2021/3568 ,  G01N2021/8908 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic or monochromatic illumination source. The source forms on the thin film an illuminated line. The light collected from discrete sampled points located on the illuminated line is transferred to a photo-sensitive sensor through an optical switch. The spectral signal of the light reflected, transmitted or scattered by the sampled points is collected by the sensor, processed and photovoltaic thin film parameters applicable to the quality control are derived e.g. thin film thickness, index of refraction, extinction coefficient, absorption coefficient, energy gap, conductivity, crystallinity, surface roughness, crystal phase, material composition and photoluminescence spectrum and intensity. Manufacturing equipment parameters influencing the material properties may be changed to provide a uniform thin film layer with pre-defined properties.

Abstract translation: 获得光电薄膜质量控制，其中薄膜由支撑体支撑并且膜的一部分被多色或单色照明源照射。 源在薄膜上形成一条照明线。 从位于照明线上的离散采样点收集的光通过光学开关转移到光敏传感器。 由采样点反射，传播或散射的光的光谱信号由传感器收集，处理和适用于质量控制的光伏薄膜参数例如被导出。 薄膜厚度，折射率，消光系数，吸收系数，能隙，导电率，结晶度，表面粗糙度，结晶相，材料组成和光致发光光谱和强度。 可以改变影响材料性能的制造设备参数，以提供具有预定特性的均匀薄膜层。

公开(公告)号：US20100006785A1

公开(公告)日：2010-01-14

申请号：US12410878

申请日：2009-03-25

Applicant: Moshe Finarov

Inventor： Moshe Finarov

IPC: G01N21/86 ,  G06F19/00

CPC classification number: G01N21/8422 ,  G01N21/31 ,  G01N21/6489 ,  G01N21/8901 ,  G01N2021/3568 ,  G01N2021/8908 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic illumination source. The source forms on the thin film a continuous illuminated line. Discrete sampled points located on the illuminated line are imaged onto a two dimensional optical switch. A concordance look-up-table between the coordinates of the above sampled points on the thin film and their coordinates on the two dimensional optical switch are generated. The spectral composition of the illumination reflected by the sampled points is determined and photovoltaic thin film parameters applicable to the quality control are derived from the spectral composition of reflected or transmitted by the photovoltaic thin film illumination.

Abstract translation: 获得光电薄膜质量控制，其中薄膜由支撑体支撑并且膜的一部分被多色照明源照射。 源在薄膜上形成连续的照明线。 位于照明线上的离散采样点成像到二维光学开关上。 产生薄膜上面的采样点的坐标与二维光开关上的坐标之间的一致性查找表。 确定由采样点反射的照明的光谱组成，并且适用于质量控制的光电薄膜参数是从光电薄膜照射反射或透射的光谱组成得出的。

公开(公告)号：US20060132878A1

公开(公告)日：2006-06-22

申请号：US11017440

申请日：2004-12-20

Applicant: Douglas Curry ,  Richard Bruce ,  Robert Krivacic

Inventor： Douglas Curry ,  Richard Bruce ,  Robert Krivacic

IPC: G02B26/08

CPC classification number: G01N21/6456 ,  G01N21/6428 ,  G01N2021/6484 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage has a planar surface for supporting a sample. A fiber optic bundle has a first end of parallel first fiber ends that are arranged to define an input aperture for viewing the sample on the imager stage. A distal bundle end is arranged to define an output aperture disposed away from the imager stage. A scanning radiation source scans a radiation beam along a path that is perpendicular to the sample on the imager stage. The input aperture of the fiber optic bundle receives a light signal that is produced by the radiation source scan of the imager stage sample. The light signal is transmitted to the bundle output aperture. A photodetector detects the light signal at the distal bundle end, and a processor processes the detected light.

Abstract translation: 装置对表面进行成像。 成像器台具有用于支撑样品的平坦表面。 光纤束具有平行的第一光纤端的第一端，其布置成限定用于观察成像器台上的样品的输入孔。 远侧束端布置成限定远离成像器台布置的输出孔。 扫描辐射源沿着与成像器台上的样品垂直的路径扫描辐射束。 光纤束的输入孔径接收由成像器台样品的辐射源扫描产生的光信号。 光信号被传输到束输出孔径。 光电检测器检测远侧束端处的光信号，并且处理器处理检测到的光。

公开(公告)号：US20060132778A1

公开(公告)日：2006-06-22

申请号：US11018759

申请日：2004-12-21

Applicant: Douglas Curry ,  Richard Bruce

Inventor： Douglas Curry ,  Richard Bruce

IPC: G01N21/64 ,  G01J3/30

CPC classification number: G01N21/6456 ,  G01N15/1468 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage linearly translates the surface in a first direction. A light path has a first end defining an input aperture perpendicular to the first direction and parallel to the surface, and a second end defining an output aperture. A plurality of radiation beams linearly scan and interact in time-multiplexed alternating turns with the surface below the input aperture to produce a time-multiplexed light signal that is collected by the input aperture and transmitted by the light path to the output aperture. A photodetector arrangement detects the light signal at the output aperture. A processor processes the detected time-multiplexed light.

Abstract translation: 装置对表面进行成像。 成像器台沿第一方向线性平移表面。 光路具有限定垂直于第一方向并平行于表面的输入孔的第一端，以及限定输出孔的第二端。 多个辐射束在时间多路复用的交替匝中线性扫描并与输入孔下方的表面相互作用，以产生由输入孔收集并由光路传输到输出孔的时间复用光信号。 光电检测器装置检测输出孔处的光信号。 处理器处理检测到的时间复用光。

公开(公告)号：US5359416A

公开(公告)日：1994-10-25

申请号：US963572

申请日：1992-10-19

Applicant: Mark K. Mueller

Inventor： Mark K. Mueller

IPC: G01N21/95 ,  G01N21/47

CPC classification number: G01N21/9515 ,  G01N2021/8864 ,  G01N2021/8887 ,  G01N2021/9518 ,  G01N2201/102 ,  G01N2201/1085

Abstract: A system and process for detecting and monitoring defects in large surfaces such as the field joints of the container segments of a space shuttle booster motor. Beams of semi-collimated light from three non-parallel fiber optic light panels are directed at a region of the surface at non-normal angles of expected incidence. A video camera gathers some portion of the light that is reflected at an angle other than the angle of expected reflectance, and generates signals which are analyzed to discern defects in the surface. The analysis may be performed by visual inspection of an image on a video monitor, or by inspection of filtered or otherwise processed images. In one alternative embodiment, successive predetermined regions of the surface are aligned with the light source before illumination, thereby permitting efficient detection of defects in a large surface. Such alignment is performed by using a line scan gauge to sense the light which passes through an aperture in the surface. In another embodiment a digital map of the surface is created, thereby permitting the maintenance of records detailing changes in the location or size of defects as the container segment is refurbished and re-used. The defect detection apparatus may also be advantageously mounted on a fixture which engages the edge of a container segment.

Abstract translation: 用于检测和监测诸如航天飞机增压马达的容器段的大面积的缺陷的系统和过程。 来自三个非平行光纤光板的半准直光束是指以预定入射角为非正常角度的表面区域。 视频摄像机收集除了预期反射角度之外的角度反射的光的一部分，并产生被分析的信号以辨别表面中的缺陷。 分析可以通过目视检查视频监视器上的图像，或者通过检查过滤的或以其他方式处理的图像来执行。 在一个替代实施例中，表面的连续预定区域在照射之前与光源对准，从而允许有效地检测大表面中的缺陷。 通过使用线扫描仪来感测通过表面中的孔的光来进行这种对准。 在另一个实施例中，创建表面的数字地图，从而允许维护记录，以便在容器段被翻新和重新使用时详细描述缺陷的位置或尺寸的变化。 缺陷检测装置还可以有利地安装在与容器段的边缘接合的固定件上。

公开(公告)号：US5164603A

公开(公告)日：1992-11-17

申请号：US731038

申请日：1991-07-16

Applicant: Nile F. Hartman ,  James W. Larsen ,  Carl M. Verber

Inventor： Nile F. Hartman ,  James W. Larsen ,  Carl M. Verber

IPC: G01N21/59 ,  G01N21/86 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  G01N21/93

CPC classification number: G01N21/8901 ,  G01N2021/4711 ,  G01N2021/5961 ,  G01N2021/8627 ,  G01N2201/0233 ,  G01N2201/04 ,  G01N2201/1085

Abstract: An apparatus 10 for inspecting the surface of an object S moving in the direction of travel 23 relative to the apparatus comprises a modular sensing head assembly 11 including a plurality of sensing head modules 12, 13, each of which includes a number of sensing stations 16-21. Each sensing station includes a light source 77, 81, 84 for generating a line of light extending across substantially the width of the surface of the object and a plurality of optical detector means for detecting light scattered from the line of light by the surface of the object. The optical detectors are positioned and oriented to receive scattered light scattered along paths lying in detection planes which are perpendicular to each other and perpendicular to the surface of the object. Signal processing electronics are provided to convert the light received by the detectors into analog signals which are multiplexed, converted to digital signals, filtered and then compared to preselected thresholds to determine the existence of any defects in the surface.

Abstract translation: 用于检查在行进方向23相对于设备移动的物体S的表面的装置10包括：模块化感测头组件11，包括多个感测头模块12,13，每个检测头模块12,13包括多个感测站16 -21。 每个感测站包括用于产生延伸穿过物体表面的宽度的光线的光源77,81,84;以及多个光学检测器装置，用于检测从该光线的表面散射的光 目的。 光学检测器被定位和定向成接收沿着彼此垂直并且垂直于物体表面的检测平面中的路径散射的散射光。 提供信号处理电子设备以将由检测器接收的光转换成模拟信号，该模拟信号被多路复用，转换成数字信号，经过滤波，然后与预先选择的阈值进行比较，以确定表面存在任何缺陷。

公开(公告)号：US4969746A

公开(公告)日：1990-11-13

申请号：US239893

申请日：1988-09-02

Applicant: Bain C. McConnell ,  Clifford R. Marritt ,  John L. Nelson ,  Kenneth W. White

Inventor： Bain C. McConnell ,  Clifford R. Marritt ,  John L. Nelson ,  Kenneth W. White

IPC: A24C5/34 ,  G01N21/952

CPC classification number: G01N21/952 ,  A24C5/3412 ,  G01N2201/1085

Abstract: The apparatus of the invention comprises a lighting device for illuminating a component to be inspected to form a halo of light around a periphery of the component and a system for comparing the shape of the halo of light to a known acceptable shape. A camera may be used to detect the halo and a programmed computer may be used to perform image analysis of the shape of the halo to determine if it conforms to an acceptable shape.

Abstract translation: 本发明的装置包括照明装置，用于照亮待检查的部件以在部件的周边周围形成光晕，以及用于将光晕的形状与已知可接受的形状进行比较的系统。 可以使用相机来检测光晕，并且可以使用编程的计算机来执行光晕形状的图像分析，以确定其是否符合可接受的形状。