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    Detecting minority gaseous species by light-emission spectroscopy
    31.
    发明申请
    Detecting minority gaseous species by light-emission spectroscopy 失效
    通过发光光谱法检测少数气态物质

    公开(公告)号：US20050190364A1

    公开(公告)日：2005-09-01

    申请号：US11064484

    申请日：2005-02-24

    Applicant: Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

    Inventor： Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

    IPC: G01J3/443 ,  G01N21/27 ,  G01N21/68 ,  G01N21/73 ,  G01J3/30

    CPC classification number: G01J3/443 ,  G01N21/274 ,  G01N21/68 ,  G01N2201/121 ,  G01N2201/1218 ,  G01N2201/127

    Abstract: The invention provides a method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of said radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of said sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

    Abstract translation: 本发明提供了一种用于通过光谱仪（8）通过发光光谱检测混合物中的少数气态物质的方法和装置，其中使用由用于分析的气体混合物中存在的等离子体（4）发射的辐射 并且在所述辐射的光谱中，识别出存在对少数物种的存在敏感的振幅的多数气态物种的品系，并且关于少数种类的浓度的信息是从 说敏感线。 这使得可以实时监测少数气态物质。

    Collisional broadening compensation using real or near-real time validation in spectroscopic analyzers
    36.
    发明授权
    Collisional broadening compensation using real or near-real time validation in spectroscopic analyzers 有权
    在光谱分析仪中使用实时或近实时验证的碰撞加宽补偿

    公开(公告)号：US08976358B2

    公开(公告)日：2015-03-10

    申请号：US13428591

    申请日：2012-03-23

    Applicant: Alfred Feitisch ,  Xiang Liu ,  Hsu-Hung Huang ,  Wenhai Ji ,  Richard Cline

    Inventor： Alfred Feitisch ,  Xiang Liu ,  Hsu-Hung Huang ,  Wenhai Ji ,  Richard Cline

    IPC: G01N21/00 ,  G01N21/27 ,  G01N21/3504

    CPC classification number: G01J3/0297 ,  G01J3/42 ,  G01N21/05 ,  G01N21/274 ,  G01N21/3504 ,  G01N21/39 ,  G01N2021/0314 ,  G01N2021/399 ,  G01N2201/1211 ,  G01N2201/1218 ,  G01N2201/127

    Abstract: Validation verification data quantifying an intensity of light reaching a detector of a spectrometer from a light source of the spectrometer after the light passes through a validation gas across a known path length can be collected or received. The validation gas can include an amount of an analyte compound and an undisturbed background composition that is representative of a sample gas background composition of a sample gas to be analyzed using a spectrometer. The sample gas background composition can include one or more background components. The validation verification data can be compared with stored calibration data for the spectrometer to calculate a concentration adjustment factor, and sample measurement data collected with the spectrometer can be modified using this adjustment factor to compensate for collisional broadening of a spectral peak of the analyte compound by the background components. Related methods, articles of manufacture, systems, and the like are described.

    Abstract translation: 验证验证数据可以收集或接收在光通过已知路径长度的验证气体之后，量化从光谱仪的光源到达光谱仪的检测器的光强度。 验证气体可以包括一定量的分析物化合物和未受干扰的背景组合物，其代表使用光谱仪分析的样品气体的样品气体背景组成。 样品气体背景组合物可以包括一种或多种背景组分。 可以将验证验证数据与存储的光谱仪校准数据进行比较，以计算浓度调节因子，并且可以使用该调整因子修改用光谱仪收集的样品测量数据，以补偿分析物化合物的光谱峰的碰撞展宽 背景组件。 描述了相关方法，制品，系统等。

    Method and apparatus for determining gas flux
    37.
    发明授权
    Method and apparatus for determining gas flux 有权
    用于确定气体通量的方法和装置

    公开(公告)号：US08433525B2

    公开(公告)日：2013-04-30

    申请号：US13085346

    申请日：2011-04-12

    Applicant: George Burba ,  Dayle McDermitt ,  Anatoly Komissarov ,  Tyler G. Anderson ,  Liukang Xu ,  Bradley A. Riensche

    Inventor： George Burba ,  Dayle McDermitt ,  Anatoly Komissarov ,  Tyler G. Anderson ,  Liukang Xu ,  Bradley A. Riensche

    IPC: G01N31/00

    CPC classification number: G01N21/3504 ,  G01N21/39 ,  G01N2201/1211 ,  G01N2201/1214 ,  G01N2201/1218

    Abstract: A system and method to obtain correct gas density and flux measurements using (i) gas analyzer (open-path, or closed-path gas analyzers with short intake tube, or any combination of the two); (ii) fast temperature or sensible heat flux measurement device (such as, fine-wire thermocouple, sonic anemometer, or any other device providing fast accurate gas temperature measurements); (iii) fast air water content or latent heat flux measurement device (such as, hygrometer, NDIR analyzer, any other device providing fast accurate gas water content measurements); (iv) vertical wind or sampling device (such as sonic anemometer, scintillometer, or fast solenoid valve, etc.) and (v) algorithms in accordance with the present invention to compute the corrected gas flux, compensated for T-P effects. In case when water factor in T-P effects is negligible, the fast air water content or latent heat flux measurement device (item iii in last paragraph) can be excluded.

    Abstract translation: 使用（i）气体分析仪（具有短进气管的开路或闭路气体分析仪或两者的任意组合）获得正确的气体密度和通量测量的系统和方法; （ii）快速温度或显热通量测量装置（例如细线热电偶，声波风速计或提供快速精确气体温度测量的任何其他装置）; （iii）快速空气含水量或潜热通量测量装置（如湿度计，NDIR分析仪，任何其他提供快速准确气体含水量测量的装置）; （iv）垂直风或取样装置（例如声波风速计，闪烁仪或快速电磁阀等）和（v）根据本发明的计算校正气体通量的算法，补偿T-P效应。 在T-P效应中的水分因子可忽略的情况下，可以排除快速空气含水量或潜热通量测量装置（最后一项中的项目iii）。

    NON-DISPERSIVE INFRARED SENSOR MEASUREMENT SYSTEM AND METHOD
    38.
    发明申请
    NON-DISPERSIVE INFRARED SENSOR MEASUREMENT SYSTEM AND METHOD 审中-公开
    非散射红外传感器测量系统和方法

    公开(公告)号：US20120078532A1

    公开(公告)日：2012-03-29

    申请号：US12889656

    申请日：2010-09-24

    Applicant: David Edward Forsyth ,  Wayne Kenneth Miller

    Inventor： David Edward Forsyth ,  Wayne Kenneth Miller

    IPC: G06F19/00

    CPC classification number: G01N21/3504 ,  G01N21/274 ,  G01N21/61 ,  G01N2201/1218 ,  G01N2201/1248

    Abstract: Non-dispersive infrared (NDIR) sensing systems employ a NDIR sensor coupled to a microprocessor to determine gas concentrations by employing slope-based methodologies that compensate for pressure variations, temperature variations, or both, which may compare NDIR signals with calibrated data. NDIR sensor systems may employ means for limiting the system peak current demand providing for the portability and scalability of the system. In NDIR sensor systems calculating gas concentrations using calibration data, the phase of the change in the NDIR output signal in response to a change in the infrared source emitter level may be measured as part of the calibration process.

    Abstract translation: 非分散红外（NDIR）感测系统使用耦合到微处理器的NDIR传感器来通过采用补偿压力变化，温度变化或两者的基于斜率的方法来确定气体浓度，这可以将NDIR信号与校准数据进行比较。 NDIR传感器系统可以采用用于限制系统峰值电流需求的装置，以提供系统的可移植性和可扩展性。 在使用校准数据计算气体浓度的NDIR传感器系统中，响应于红外源发射极电平的变化，NDIR输出信号的变化的相位可以作为校准过程的一部分来测量。

    DEFECT INSPECTING APPARATUS
    39.
    发明申请
    DEFECT INSPECTING APPARATUS 有权
    缺陷检查装置

    公开(公告)号：US20100214561A1

    公开(公告)日：2010-08-26

    申请号：US12774379

    申请日：2010-05-05

    Applicant: Shuichi CHIKAMATSU ,  Minori NOGUCHI ,  Kenji AIKO

    Inventor： Shuichi CHIKAMATSU ,  Minori NOGUCHI ,  Kenji AIKO

    IPC: G01N21/00

    CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8822 ,  G01N2201/1211 ,  G01N2201/1218

    Abstract: A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection pixel size, a focal depth becomes shallow, a height of imaging is varied due to environmental change and the detection sensitivity of a defect becomes unstable. This apparatus comprises an XY stage, which carries a substrate to be inspected and scans in a predetermined direction, and a mechanism having a system of irradiating a defect on the inspected substrate at a slant and detecting the defect by a detection optical system disposed on the upper side, which corrects a height of imaging in real time for change in temperature and barometric pressure in order to keep the imaging in a best condition.

    Abstract translation: 本发明的缺陷检查装置解决了在缺陷检查装置中，由于通过减小检测像素尺寸来提高微观缺陷的检测灵敏度，焦点深度变浅，成像高度由于环境变化而变化， 缺陷的检测灵敏度变得不稳定。 该装置包括XY台，其承载要检查的基板并沿预定方向扫描;以及机构，其具有以倾斜方式照射被检查基板上的缺陷的系统，并且通过设置在所述检测光学系统上的检测光学系统检测所述缺陷 上部，其实时校正成像的高度以改变温度和大气压力，以便将成像保持在最佳状态。

    DEFECT INSPECTING APPARATUS
    40.
    发明申请
    DEFECT INSPECTING APPARATUS 失效
    缺陷检查装置

    公开(公告)号：US20090207405A1

    公开(公告)日：2009-08-20

    申请号：US12428065

    申请日：2009-04-22

    Applicant: Shuichi CHIKAMATSU ,  Minori Noguchi ,  Kenji Aiko

    Inventor： Shuichi CHIKAMATSU ,  Minori Noguchi ,  Kenji Aiko

    IPC: G01N21/88

    CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8822 ,  G01N2201/1211 ,  G01N2201/1218

    Abstract: A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection pixel size, a focal depth becomes shallow, a height of imaging is varied due to environmental change and the detection sensitivity of a defect becomes unstable. This apparatus comprises an XY stage, which carries a substrate to be inspected and scans in a predetermined direction, and a mechanism having a system of irradiating a defect on the inspected substrate at a slant and detecting the defect by a detection optical system disposed on the upper side, which corrects a height of imaging in real time for change in temperature and barometric pressure in order to keep the imaging in a best condition.

    Abstract translation: 本发明的缺陷检查装置解决了在缺陷检查装置中，由于通过减小检测像素尺寸来提高微观缺陷的检测灵敏度，焦点深度变浅，成像高度由于环境变化而变化， 缺陷的检测灵敏度变得不稳定。 该装置包括XY台，其承载要检查的基板并沿预定方向扫描;以及机构，其具有以倾斜方式照射被检查基板上的缺陷的系统，并且通过设置在所述检测光学系统上的检测光学系统检测所述缺陷 上部，其实时校正成像的高度以改变温度和大气压力，以便将成像保持在最佳状态。

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