公开(公告)号：EP1705676B1

公开(公告)日：2007-10-24

申请号：EP05370005.0

申请日：2005-03-21

Applicant: DELFMEMS

Inventor： Millet, Olivier

IPC: H01H1/00 ,  H01H59/00

CPC classification number: H01H1/0036 ,  B81B5/00 ,  B81B2201/018 ,  H01H59/0009 ,  H01H2001/0063

公开(公告)号：EP3038126A1

公开(公告)日：2016-06-29

申请号：EP14307128.0

申请日：2014-12-22

Applicant: DelfMEMS SAS

Inventor： Rollier, Anne-Sophie ,  Bonnabel, Antoine ,  Segueni, Karim

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  B81B3/0051 ,  B81B2201/018 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/013 ,  H01H49/00 ,  H01H2059/0027 ,  H01H2059/0036 ,  H01H2227/004

Abstract: The present invention relates to a method of manufacturing an MEMS device that comprises the steps of forming a first membrane layer over a sacrificial base layer, forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer and forming stoppers to restrict movement of the first membrane layer. Moreover, it is provided MEMS device comprising a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer.

Abstract translation: 本发明涉及一种制造MEMS器件的方法，该方法包括以下步骤：在牺牲基底层上形成第一膜层，在第一膜层上形成第二膜层，其中第二膜层包括侧向凹槽， 的第一膜层并形成止挡件以限制第一膜层的运动。 此外，提供了包括可移动膜的MEMS装置，该可移动膜包括形成在第一膜层上的第一膜层和第二膜层，其中第二膜层包括暴露第一膜层的侧向部分的侧向凹部。

公开(公告)号：EP2725595A1

公开(公告)日：2014-04-30

申请号：EP12306326.5

申请日：2012-10-25

Applicant: Delfmems

Inventor： Pavageau, Christophe

IPC: H01G5/16 ,  H01G5/18

CPC classification number: H01L28/65 ,  H01G5/16 ,  H01G2005/02 ,  H01L23/5223 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The MEMS fixed capacitor (1) comprises a bottom metal electrode (3) formed onto a substrate (S), a top metal electrode (2) supported by metal pillars (5) above the bottom metal electrode, and a gas-containing gap (4) forming a non-solid dielectric layer between said top (2) and bottom (3) metal electrodes ; the distance (D) between the top (2) and bottom (3) metal electrodes is not more than 1µm and the thickness (E) of the top metal electrode (2) is not less than 1µm.

Abstract translation: 该MEMS固定电容器（1）包括一个底部金属电极（3）上形成一个底物（S），（2）由金属柱（5）的底部金属电极的上方支撑的顶部金属电极，和一个含气体的间隙（ 4）形成所述顶部（2）和底部之间的非固体介电层（3）的电极的金属; 顶部（2）和底部（3）金属电极之间的距离（D）为不大于1微米和顶部金属电极的厚度（E）（2）为不小于1微米。

公开(公告)号：EP2230679A1

公开(公告)日：2010-09-22

申请号：EP09370007.8

申请日：2009-03-20

Applicant: DELFMEMS

Inventor： Segueni, Karim ,  Lorphelin, Nicolas

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  B81B5/00 ,  B81B2201/018

Abstract: The MEMS structure comprises:
- a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X),
- at least one pillar (3, 3') under the flexible membrane (6),
- electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state
- electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state.
The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) on both sides of the said at least one pillar (3) in the longitudinal direction (X).

Abstract translation: MEMS结构包括：柔性膜（6），其具有限定纵向方向（X）的主纵向轴线（6a）， - 在柔性膜（6）下面的至少一个柱体（3,3'）， 适于将柔性膜（6）向下弯曲成向下压制状态的电动下降致动装置（7） - 适于将柔性膜（6）弯曲成向上强制状态的电动致动装置（8）。 电降下致动装置（7）或电动致动装置（8）包括在膜（6）的一部分下方延伸并且适于在膜上施加拉力的致动区域（7c或8c） 6）在所述至少一个支柱（3）的纵向方向（X）的两侧。

公开(公告)号：EP1705676B9

公开(公告)日：2010-08-11

申请号：EP05370005.0

申请日：2005-03-21

Applicant: DELFMEMS

Inventor： Millet, Olivier

IPC: H01H1/00 ,  H01H59/00

CPC classification number: H01H1/0036 ,  B81B5/00 ,  B81B2201/018 ,  H01H59/0009 ,  H01H2001/0063

公开(公告)号：FR3031098A1

公开(公告)日：2016-07-01

申请号：FR1463357

申请日：2014-12-26

Applicant: DELFMEMS

Inventor： LORPHELIN NICOLAS ,  SEGUENI KARIM

IPC: B81B5/00 ,  H01H1/00

Abstract: Le dispositif microélectromécanique ou nanoélectromécanique (1) comorte une membrane (3), qui est mobile en translation le long d'au moins un premier axe de translation (XX') sensiblement parallèle au substrat (2), et dans au moins une première direction (X1) le long de ce premier axe de translation (XX'). La face inférieure (3a) de la membrane (3) comporte d'une part une partie active (31), qui est positionnée au droit d'une électrode d'actionnement (5) sous-jacente, et dont la zone d'actionnement électrostatique (31a) la plus proche de l'électrode d'actionnement (5) est située dans un premier plan de référence (P1) lorsque la membrane n'est pas actionnée, et d'autre part au moins un décrochement (30), qui s'étend en direction du substrat jusqu'à un deuxième plan (P2) plus proche de électrode d'actionnement (5) que ledit plan de référence (P1). Pour au moins une partie des positions en translation de la membrane (3), ledit décrochement (30) comporte au moins une première portion (30a) qui n'est pas positionnée au droit de l'électrode d'actionnement (5) et qui est proche d'au moins une première portion (50a) de la tranche (50) de l'électrode d'actionnement (5). Le dispositif comporte (a) (figure 2) une couche diélectrique (7), qui recouvre au moins ladite première portion (50a) de tranche (50) de l'électrode d'actionnement (5), et/ou (b) (figure 22) une couche diélectrique, qui recouvre la face inférieure (3a) de la membrane (3) au moins dans une zone correspondant à ladite première portion (30a) du décrochement (30).

公开(公告)号：AU2010225137B2

公开(公告)日：2014-07-10

申请号：AU2010225137

申请日：2010-03-18

Applicant: DELFMEMS

Inventor： SEGUENI KARIM ,  LORPHELIN NICOLAS

IPC: H01H59/00

Abstract: The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3') under the flexible membrane (6), electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) simultaneously on both sides of the said at least one pillar (3) in the longitudinal direction (X).

公开(公告)号：MX2013011270A

公开(公告)日：2013-10-17

申请号：MX2013011270

申请日：2012-03-20

Applicant: DELFMEMS

Inventor： PAVAGEAU CHRISTOPHE

IPC: H01H59/00 ,  H01P1/12

Abstract: El conmutador de puntos de cruce para RF MEMS (1) comprende una primera línea de transmisión (10) y una segunda línea de transmisión (11) que cruza la primera línea de transmisión; la primera línea de transmisión (10) comprende dos porciones de línea de transmisión separadas (100, 101), y un elemento conmutador (12) que conecta eléctricamente en forma permanente a dichas dos porciones de línea de transmisión separadas (100, 101); la segunda línea de transmisión (11) cruza la primera línea de transmisión (10) entre las dos porciones de línea de transmisión separadas (100, 101); el conmutador de puntos de cruce para RF MEMS (1) también comprende medios de accionamiento (121) para accionar el elemento conmutador (12) por lo menos entre una primera posición, en la que el elemento conmutador (12) está conectando eléctricamente a dichas dos porciones de línea de transmisión separadas (100, 101) de la primera línea de transmisión (10) y la primera (10) y la segunda (11) líneas de transmisión están desconectadas eléctricamente, y una segunda posición, en la que el elemento conmutador (12) está conectando eléctricamente a dichas dos porciones de línea de transmisión separadas (100, 101) de la primera línea de transmisión (10) y también está conectando eléctricamente entre sí a las dos líneas de transmisión (10, 11).

公开(公告)号：IL227548D0

公开(公告)日：2013-09-30

申请号：IL22754813

申请日：2013-07-18

Applicant: DELFMEMS ,  PAVAGEAU CHRISTOPHE

IPC: H01H20060101

Abstract: The RF MEMS crosspoint switch (1) comprising a first transmission (10) line and a second transmission line (11) that crosses the first transmission line ; the first transmission line (10) comprises two spaced-apart transmission line portions (100, 101), and a switch element (12) that permanently electrically connects the said two spaced-apart transmission line portions (100, 101) ; the second transmission line (11) crosses the first transmission line (10) between the two spaced-apart transmission line portions (100, 101); the RF MEMS crosspoint switch (1) further comprises actuation means (121) for actuating the switch element (12) at least between a first position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and the first (10) and second (11) transmission lines are electrically disconnected, and a second position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and is also electrically connecting the two transmission lines (10, 11) together.

公开(公告)号：IL215099A

公开(公告)日：2013-06-27

申请号：IL21509911

申请日：2011-09-12

Applicant: DELFMEMS

IPC: H01H20060101

Abstract: The MEMS structure comprises: - a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), - at least one pillar (3, 3') under the flexible membrane (6), - electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state - electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) on both sides of the said at least one pillar (3) in the longitudinal direction (X).