公开(公告)号：JPH05302815A

公开(公告)日：1993-11-16

申请号：JP13135492

申请日：1992-04-27

Applicant: KOSAKA LAB

Inventor： HIGUCHI AKIRA

IPC: G01B7/34 ,  G01B7/00 ,  G01B11/00 ,  G01B21/30 ,  G01C3/06 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q60/24 ,  H01J37/28

Abstract: PURPOSE:To improve component performance by small sizing and lightening an optical microdisplacement measuring device and reluxing the limitation for attaching to other components. CONSTITUTION:As for a light source means, a small size and light weight semiconductor laser 11 is used. The photo-resonator of a laser oscillator 12 is constituted of the upper surface of a measured object 3 and the upper end surface of the semiconductor laser 11. In accordance with the small displacement of the measured object 3, the frequency of the laser light emitted from the semiconductor laser 11 varies. Therefore, the intensity of the laser light passed through a Farby-Perot etalon 14 varies. A light intensity detector 19 detects the light intensity and the above small displacement is obtained based on this detected value.

公开(公告)号：JPH047443B2

公开(公告)日：1992-02-12

申请号：JP11435683

申请日：1983-06-27

Applicant: KOSAKA LAB

Inventor： MYAMOTO KOZO ,  TAKAHASHI AKIRA ,  NAKAGAWA HARUKI

IPC: G01B7/00 ,  G01B7/28 ,  G01D5/22

公开(公告)号：JPH02170003A

公开(公告)日：1990-06-29

申请号：JP32363688

申请日：1988-12-23

Applicant: AGENCY IND SCIENCE TECHN ,  SEIKO INSTR INC ,  KOSAKA LAB

Inventor： OKAYAMA SHIGEO ,  HONMA AKIHIKO ,  ISHIHARA KENICHIRO ,  NAKAGAWA HARUKI ,  SHIMURA MASAYUKI

IPC: G01B7/34 ,  G01N23/00 ,  H01J37/20 ,  H01J37/28

Abstract: PURPOSE:To making the direction of a voltage applied to each piezoelectric element coincident with a polarizing direction at all times and to display performance which is stable for a long period by connecting a couple of piezoelectric elements of the same kind after polarization in series with each other and applying the connection part with a driving voltage which is opposite in phase from both piezoelectric elements. CONSTITUTION:The couple of piezoelectric elements 3a and 3b are coincident in electrode direction, the polarity of driving voltage applied to the piezoelectric elements 3a and 3b is coincident with the electrode direction, and bias voltages VB of the same level are applied in a normal state to cause displacement of LB as compared with when no voltage is applied to the piezoelectric elements 3a and 3b. When a probe 1 is displaced in an X direction, voltages +DELTAV and -DELTAV which are made opposite in phase by a couple of amplifiers 6a and 6b provided in front of the connection point of the piezoelectric elements 3a and 3b are added to the bias voltages VB respectively. Consequently, the length of one piezoelectric element 3a is LB+DELTALa and the length of the other piezoelectric element 3b is LB-DELTALb, so that the probe 1 supported between both piezoelectric elements 3a and 3b is put in slow motion smoothly in the X direction.

公开(公告)号：JPH028499A

公开(公告)日：1990-01-11

申请号：JP15683288

申请日：1988-06-27

Applicant: DAIMEI DENWA KOGYO KK ,  KOSAKA LAB

Inventor： SHIBUYA TAKAO ,  AKASHI TAKUYA

IPC: E21D11/10

Abstract: PURPOSE:To clean up a back-filler supply pipe as well as prevent the dilution of back-filler during supplying by a method in which pressure supplying of back filler and washing of the pressure supply pipe are automatically made by interlocking a back filler sensor, a washing water cleanness sensor, and various switch valves. CONSTITUTION:A controller for a back filler supply pipe cleaner consists of a back filler path switch valve 9, a drain switch valve 10, a back filler sensor 11, a washing water cleanness sensor 12, and a back filler pressure supplying and cleaning controller 13. The sensors 11 and 12 are interlocked with the valves 9 and 10 by the controller 13 in such a way as to enable the supplying of back filler and the cleaning of a pressure supply pipe 2 to be automatically performed. A sponge ball supplier 5 consisting of a ball stocker with a gate 22, a ball charging valve 23, a switch valve 2c, and a controller 13 exactly introduce a sponge ball into the pipe 2 by temporarily operating a pressure supply pump 3 reversely.

公开(公告)号：JPS62185961A

公开(公告)日：1987-08-14

申请号：JP2575686

申请日：1986-02-10

Applicant: KOSAKA LAB

Inventor： OKAWA KOJI

IPC: F04B15/02 ,  E04G21/04 ,  F04B43/06

公开(公告)号：JPS62118083A

公开(公告)日：1987-05-29

申请号：JP25677785

申请日：1985-11-18

Applicant: KOSAKA LAB

Inventor： SHINOHARA KYUMA

IPC: F04C18/20

Abstract: PURPOSE:To reduce operating power as a vacuum pump by providing a valve which is opened only when a discharge port side pressure is lowered, immediately before the discharge port on a projected part where a main cylinder part is overlapped with a subsidiary cylinder part, and reducing difference in pressures which are applied to the front and rear surfaces of said projection. CONSTITUTION:A passage 26 which is connected to both a large cylindrical part 17 and a discharge port 22, is provided on a projection 21 part in a position in which the large cylindrical part 17 of a casing 10 overlaps with a small cylindrical part 18, on a discharge side, and a piston type take-out valve 27 is provided in the passage 26. And, the inside of the large cylindrical part 17 is connected to the discharge port 22 via the passage 26 by moving the valve 27 being interlocked with pressure which rises accompanying the rotation of rotors 8, 9, or the main rotor 8, and it is possible to discharge a gaseous body from the discharge port 22 when the gaseous body is compressed to a certain extent. It is also possible to prevent the occurrence of a large pressure difference between the front and rear faces in the rotating direction of the projection 21 when operating a device as a vacuum pump, reducing power required for the operation of the pump.

公开(公告)号：JPS6246811A

公开(公告)日：1987-02-28

申请号：JP18169885

申请日：1985-08-21

Applicant: KOSAKA LAB

Inventor： MATSUMOTO FUMIO ,  SOYAMA YUKIO

IPC: H01L21/677 ,  B65G49/07 ,  B65G51/00 ,  B65G51/02 ,  H01L21/67 ,  H01L21/68

Abstract: PURPOSE:To protect a semiconductor wafer from scratches and dust sticking, by inserting the thin disclike semiconductor wafer into an oval section transfer pipe whose major axis is larger than a diameter of this semiconductor wafer and the minor axis is shorter than this diameter, and transferring the wafer with a fluid. CONSTITUTION:A transfer pipe 2 consists in an oval section taking its major axis (a) to be larger than a diameter R of a semiconductor wafer 1 and to be smaller than the diameter R of its minor axis (b). A fluid is made to flow in this transfer pipe whereby the semiconductor wafer is transferable, and since this semiconductor wafer 1 has a little chance to be exposed in the air, a fear of dust being stuck is reducible and, what is more, scratches and the like attributable to a conveying device are hardly sustained.

公开(公告)号：JPS60237310A

公开(公告)日：1985-11-26

申请号：JP9275884

申请日：1984-05-11

Applicant: KOSAKA LAB

Inventor： MIYAMOTO KOUZOU ,  OOHASHI KIMIO

IPC: G01B5/28 ,  G01B11/30

Abstract: PURPOSE:To enable optimum measurement corresponding to an article to be measued, by providing an up-and-down freely movable probe needle and the measuring head of an optical displacement detector on a surface to be measured by a position converting apparatus freely movable to a horizontal direction so as to selectively and freely oppose to both of them on said surface to be measured. CONSTITUTION:When a surface to be measured is measured by a probe needle type fine shape measuring intrument, a mount plate 19 is moved to the left from the state shown by the drawing and a probe needle 22 is opposed to the surface to be measured of the article to be measured placed on a measuring stand 28 while position regulating knobs 29, 29b are rotated to align the leading end of the probe needle 22 with the point where measurement must be started. Subsequently, the position of the probe needle 22 and the measuring stand 28 are gradually moved in parallel while the leading end of the probe needle 22 is brought into contact with the surface to be measured to measure the uneveness of the surface to be measured in the moving range. When measurement is performed by an optical displacement detector, the leading end of the probe needle 22 is at first coincided with the point, where measurement must be started, in such a state that the mount stand 19 is moved to the left in the drawing and the probe needle is raised while the mount plate 19 is moved to the righthand end of a substrate 17. A measured head 24 and the measuring stand 28 are relatively moved in parallel while laser beam is irradiated from the measuring head 24 and the measurement of a shape in a definite range is performed.

公开(公告)号：JPS58189496A

公开(公告)日：1983-11-05

申请号：JP7136582

申请日：1982-04-30

Applicant: Hazama Gumi ,  Kosaka Lab

Inventor： WATANABE SHIYUUSUKE ,  MATSUSHITA SHINJI

IPC: E21D9/06

公开(公告)号：JPS58110728A

公开(公告)日：1983-07-01

申请号：JP20762281

申请日：1981-12-22

Applicant: KOSAKA LAB

Inventor： KIMURA ITSUROU

IPC: E02F7/10 ,  E21D9/12 ,  F17D3/12

Abstract: PURPOSE:To greatly reduce the resistance of pipe by uniformly injecting a lubricant, e.g., water, etc., into between the excavation muck moving the inside a pipe and the wall of the pipe. CONSTITUTION:A flexible inner pie 2 formed by providing large numbers of slits to a thin-thick cylinder is provided to a body 1. When a lubricant, e.g., wter, etc., is supplied to a charging port 3 at a higher pressure than the pressure of sludge, the sludge is sent toward the direction of arrow by pump, but an apertue is formed between the body 1 and the inner cylinder 2 due to the flexion of the inner cylinder 2, the lubricant is uniformly injected from the aperture to the inner wall of the pipe, and a thin mud water layer mixed sludge is formed. On the other hand, the sludge occupying the central part of the pipe becomes smaller in even water permeation coefficient as the feed distance and consolidation increases, so that the mud water layer of great water content near the wall of the pipe is maintained as such.