公开(公告)号：KR1020030072722A

公开(公告)日：2003-09-19

申请号：KR1020020011886

申请日：2002-03-06

Applicant: 삼성전자주식회사

Inventor： 여선영 ,  강성철 ,  주진호 ,  전재홍 ,  남석현 ,  변진섭

IPC: G09G3/36

CPC classification number: G09G3/3648 ,  G09G2320/0257

Abstract: PURPOSE: An LCD and a driving method thereof are provided to remove an afterimage by setting properly a relation between an optimum common voltage of a white gray scale and an optimum common voltage of a black gray scale. CONSTITUTION: An LCD includes an LCD panel(1), a gate driving portion(2), and a data driving portion(3). The LCD panel(1) is formed with a plurality of gate lines, a plurality of data lines, a plurality of TFTs having gate electrodes connected to the gate lines and source electrodes connected to the data lines, the first substrate including pixel electrodes, and the second substrate including common electrodes. The gate driving portion(2) applies the gate voltage to the gate lines in order to turn on/off the TFTs. The data driving portion(3) applies the gray voltage to the data lines. The LCD satisfies a condition such as optimum common voltage of white gray scale-optimum common voltage of a black gray scale

Abstract translation: 目的：提供一种LCD及其驱动方法，通过适当地设定白色灰度级的最佳公共电压与黑色灰度级的最佳公共电压之间的关系来去除残像。 构成：LCD包括LCD面板（1），门驱动部分（2）和数据驱动部分（3）。 LCD面板（1）形成有多条栅极线，多条数据线，连接到栅极线的栅电极和连接到数据线的源极的多个TFT，第一衬底包括像素电极，以及 所述第二基板包括公共电极。 栅极驱动部分（2）将栅极电压施加到栅极线以便打开/关闭TFT。 数据驱动部分（3）将灰色电压施加到数据线。 LCD满足黑灰度<=设定值的白色灰度最佳公共电压的最佳公共电压等条件。

公开(公告)号：KR1020020045025A

公开(公告)日：2002-06-19

申请号：KR1020000074314

申请日：2000-12-07

Applicant: 삼성전자주식회사

Inventor： 전재홍

IPC: H01L21/68

Abstract: PURPOSE: A chamber apparatus having a cooling line on a wafer supporting stand and a wafer process using the same are provided to reduce a working space and the manufacturing cost by installing a wafer supporting stand for cooling a wafer. CONSTITUTION: A chamber apparatus has a wafer supporting stand. The wafer supporting stand comprises a spiral-type heating line(210), a cooling line(220) having the same shape of the heating line(210) located along the heating line(210), and an insulating material(230) made of a ceramic located between the spiral-type heating line(210) and the cooling line(220). At this point, the insulating material(230) is installed so as to prevent a heat transfer between the cooling line(220) and heating line(210), thereby increasing the efficiency through an enough ascent and descent of a temperature. In cooling a wafer, the cooling line(220) is ascended and the heating line(210) is descended to contact the wafer with the cooling line(220).

Abstract translation: 目的：提供一种在晶片支撑架上具有冷却线的腔室装置和使用其的晶片工艺，通过安装用于冷却晶片的晶片支撑架来减少工作空间和制造成本。 构成：腔室装置具有晶片支撑架。 晶片支撑架包括螺旋型加热线（210），具有与加热线（210）相对的加热线（210）形状相同形状的冷却线（220）和绝缘材料（230） 位于螺旋型加热线（210）和冷却线（220）之间的陶瓷。 此时，绝缘材料（230）被安装成防止冷却管线（220）和加热管线（210）之间的热传递，从而通过足够的上升和下降温度来提高效率。 在冷却晶片时，冷却管线（220）上升，并且加热管线（210）下降以与冷却管线（220）接触晶片。

公开(公告)号：KR1020010055909A

公开(公告)日：2001-07-04

申请号：KR1019990057244

申请日：1999-12-13

Applicant: 삼성전자주식회사

Inventor： 전재홍

IPC: H01L21/68

Abstract: PURPOSE: A wafer cassette of a front open unified pod(FOUP) type is provided with a simple structure to reduce errors in operation and also to prevent damage thereof. CONSTITUTION: The wafer cassette(100) includes a cassette body(200) and a twofold door(300). The cassette body(200) has slots formed therein to hold a plurality of wafers, and a doorway through which the wafer is loaded or unloaded. The twofold door(300) opens or shuts the doorway of the cassette body(200) by an opener. In addition, a pair of guide bars(210) are formed at both sides of the doorway, and a supporting plate(220) is formed under the guide bars(210). The twofold door(300) is inserted into the guide bars(210) and then supported by the supporting plate(220). The twofold door(300) has a main door(310) and an auxiliary door(320). The main door(310) has a slit(311) formed in one side end thereof to admit the opener thereinto, while the auxiliary door(320) faces the main door(310) at close range. The main door(310) and the auxiliary door(320) are connected to a connector capable of adjusting a distance therebetween.

Abstract translation: 目的：前开式统一盒（FOUP）类型的晶片盒具有简单的结构，可减少操作误差，并防止损坏。 构成：晶片盒（100）包括盒体（200）和双重门（300）。 盒体（200）具有形成在其中的槽以保持多个晶片，以及通过其加载或卸载晶片的门口。 双重门（300）通过开启器打开或关闭盒体（200）的门口。 此外，在门口的两侧形成有一对导杆（210），在导杆（210）的下方形成有支撑板（220）。 双重门（300）插入导杆（210）中，然后由支撑板（220）支撑。 双重门（300）具有主门（310）和辅助门（320）。 主门（310）在其一个侧端形成有狭缝（311），以在其中容纳开启器，而辅助门（320）在近距离处面对主门（310）。 主门（310）和辅助门（320）连接到能够调节其间距离的连接器。

公开(公告)号：KR1020000014177A

公开(公告)日：2000-03-06

申请号：KR1019980033432

申请日：1998-08-18

Applicant: 삼성전자주식회사

Inventor： 전재홍

IPC: H01L21/68

Abstract: PURPOSE: A wafer transfer equipment is provided to improve a structure of chamber for transfer equipment and load lock chamber and increase quantity of processing and reduce cost. CONSTITUTION: The wafer transfer equipment comprises a cassette, a load lock chamber and a stage. In the wafer transfer equipment, the cassette contains a wafer and moves in up/down direction. The load lock chamber has a loading unit and an unloading unit and exchanges and transfers the wafer between the cassette and a processing chamber, wherein the loading unit and the unloading unit are connected to a supporter and a driver which connect an arm to a supporting plate to adjust a location of arm. The stage moves the wafer on load lock chamber to the processing chamber.

Abstract translation: 目的：提供晶圆转移设备，改善输送设备和装载锁室的室结构，增加加工量，降低成本。 构成：晶片传送设备包括一个盒式磁带，一个装载锁定室和一个平台。 在晶片转印设备中，盒子包含晶片并沿上/下方向移动。 负载锁定室具有装载单元和卸载单元，并且在盒和处理室之间交换和传送晶片，其中装载单元和卸载单元连接到支撑件和将臂连接到支撑板的驱动器 调整手臂的位置。 工作台将加载锁定室上的晶片移动到处理室。