Abstract:
PURPOSE: A manufacturing method of a silicate-based electrode active material is provided to ensure the particle size and composition uniformity of a silicate electrode active material by the use of microwaves as a heating source. CONSTITUTION: A manufacturing method of an electrode active material represented by chemical formula Li2MSiO4 comprises: a step of dispersing a silicon compound into a solvent; a step of mixing lithium salt and transition metal salt into the solution, and forming a complex ion by adding a chelating agent into the mixture; and a step of gelating the mixture through a microwave treatment. In the chemical formula, M is Mn, Fe, Co, Ni, Ti, V, Cr or a mixture thereof. The molar ratio of the lithium salt and the transition metal salt is 2:1.
Abstract:
본 발명은 고농축함불소가스 열분해를 위한 고효율 열플라즈마 반응기에 관한 것으로서, 더욱 상세하게는 플라즈마 처리 공정중 고농축 함불소가스를 용이하게 열분해시킬 수 있도록 최적의 재질 및 설계 구조로 만들어진 고농축함불소가스 열분해를 위한 고효율 열플라즈마 반응기에 관한 것이다. 이를 위해, 본 발명은 내부반응관과 외부반응관이 서로간에 반응기체 흐름통로를 위한 일정 간격을 형성하며 중첩된 이중관 반응기; 상기 외부반응관의 외경부에 일정 간격의 폐기체 흐름통로를 형성하며 배열되는 것으로서, 반응기체 흐름통로 및 폐기체 흐름통로에 각각 반응기체 및 폐기체를 공급하기 위한 반응기체 공급구와 폐기체 공급구가 하단부에 형성된 제1외부냉각관; 상기 제1외부냉각관의 외경부에 일정 간격의 냉각수 흐름통로를 형성하며 배열되는 것으로서, 상단 및 하단부에 각각 냉각수 흐름통로와 연통되는 냉각수 공급구 및 냉각수 배출구가 형성된 제2외부냉각관; 상기 내부 및 외부반응관의 하단이 체결되는 동시에 상기 제1외부냉각관 및 제2외부냉각관의 하단에 일체로 형성된 하부플랜지와 결합되는 배출블럭; 을 포함하여 구성된 것을 특징으로 하는 고농축 함불소가스 열분해를 위한 고효율 열플라즈마 반응기를 제공한다.
Abstract:
PURPOSE: A high efficient thermal plasma reactor for pyrolyzing highly concentrated perfluorocompounds gas is provided to overcome safety-related problems and the capacity limit of a exhaust gas disposing device. CONSTITUTION: A high efficient thermal plasma reactor includes a dual pipe reactor(10), a first external cooling pipe(16), a second external cooling pipe(20), a plasma torch connecting plate(26), and a discharging block(30). The dual pipe reactor includes a dual pipe structure with different diameters and heights. The first external cooling pipe is arranged at the outer diameter part of an external reacting pipe(14) in the dual pipe reactor and forms a closed gas flow path(15). The second external cooling pipe is arranged on the outer diameter part of the external reacting pipe and forms a coolant flowing path(19). The plasma torch connecting plate is attached to an upper flange(22). The upper flange is integrated with the upper sides of the first external cooling pipe and the second external cooling pipe. The discharging block is combined with a lower flange(24).
Abstract:
PURPOSE: A hybrid thermal destruction processes coupled with adsorptive enriched units for the removal of perfluorocompounds gases from semi-conductor production industry is provided to reduce the amount of the process energy by heat-dissolving the concentrated perfluorocompounds by incineration and plasma. CONSTITUTION: The fluorinated gas(S1) is adsorbed by the absorbent from the exhaust gas. The absorbed fluorinated gas is detached from the absorbent. The detached perfluorinated gas is removed by the thermal process. The absorbent is the compound of one or two kinds selected output the A1216 activated charcoal, the A836 activated charcoal, and the A1261 activated charcoal.