公开(公告)号：EP3449312A1

公开(公告)日：2019-03-06

申请号：EP17717149.3

申请日：2017-04-12

Applicant: ASML Netherlands B.V.

Inventor： NASALEVICH, Maxim, Aleksandrovich ,  ABEGG, Erik, Achilles ,  BANERJEE, Nirupam ,  BLAUW, Michiel, Alexander ,  BROUNS, Derk, Servatius, Gertruda ,  JANSSEN, Paul ,  KRUIZINGA, Matthias ,  LENDERINK, Egbert ,  MAXIM, Nicolae ,  NIKIPELOV, Andrey ,  NOTENBOOM, Arnoud, Willem ,  PILIEGO, Claudia ,  PÉTER, Mária ,  RISPENS, Gijsbert ,  SCHUH, Nadja ,  VAN DE KERKHOF, Marcus, Adrianus ,  VAN DER ZANDE, Willem, Joan ,  VAN ZWOL, Pieter-Jan ,  VERBURG, Antonius, Willem ,  VERMEULEN, Johannes, Petrus, Martinus, Bernardus ,  VLES, David, Ferdinand ,  VOORTHUIJZEN, Willem-Pieter ,  ZDRAVKOV, Alexandar, Nikolov

IPC: G03F1/24 ,  G03F1/62 ,  G03F7/20

公开(公告)号：EP4022392A1

公开(公告)日：2022-07-06

申请号：EP20765216.5

申请日：2020-08-20

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey ,  BALTUSSEN, Sander ,  BANINE, Vadim, Yevgenyevich ,  DOLGOV, Alexandr ,  DONMEZ NOYAN, Inci ,  HOUWELING, Zomer, Silvester ,  NOTENBOOM, Arnoud, Willem ,  VAN DE KERKHOF, Marcus, Adrianus ,  VAN DER WOORD, Ties, Wouter ,  VERMEULEN, Paul, Alexander ,  VLES, David, Ferdinand ,  VORONINA, Victoria ,  YEGEN, Halil, Gökay

IPC: G03F1/62 ,  G03F7/20 ,  C01B32/158 ,  D01F9/12 ,  D01F11/12

公开(公告)号：EP3963402A1

公开(公告)日：2022-03-09

申请号：EP20716758.6

申请日：2020-04-01

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey ,  DE GROOT, Antonius, Franciscus, Johannes

IPC: G03F7/16 ,  G03F7/20 ,  H01L21/687

公开(公告)号：EP3861405A1

公开(公告)日：2021-08-11

申请号：EP19773830.5

申请日：2019-09-25

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey ,  BECKERS, Johan Franciscus Maria

IPC: G03F7/20 ,  C23C16/30

公开(公告)号：EP3514630A1

公开(公告)日：2019-07-24

申请号：EP19152558.3

申请日：2014-06-17

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey ,  FRIJNS, Olav Waldemar Vladimir ,  DE VRIES, Gosse Charles ,  LOOPSTRA, Erik Roelof ,  BANINE, Vadim Yevgenyevich ,  DE JAGER, Pieter Willem Herman ,  DONKER, Rilpho Ludovicus ,  NIENHUYS, Han-Kwang ,  KRUIZINGA, Borgert ,  ENGELEN, Wouter Joep ,  LUITEN, Otger Jan ,  AKKERMANS, Johannes Antonius Gerardus ,  GRIMMINCK, Leonardus Adrianus Gerardus ,  LITVINENKO, Vladimir

IPC: G03F7/20 ,  H05H7/04 ,  G01J1/26 ,  G02B1/06 ,  G02B5/20 ,  G01J1/04 ,  G21K1/10 ,  H01S3/09 ,  G01J1/42 ,  G02B26/02 ,  H01S3/00

Abstract: A method of patterning lithographic substrates, the method comprising using a free electron laser to generate EUV radiation and delivering the EUV radiation to a lithographic apparatus which projects the EUV radiation onto lithographic substrates, wherein the method further comprises reducing fluctuations in the power of EUV radiation delivered to the lithographic substrates by using a feedback-based control loop to monitor the free electron laser and adjust operation of the free electron laser accordingly.

公开(公告)号：EP4473359A1

公开(公告)日：2024-12-11

申请号：EP23701775.1

申请日：2023-01-26

Applicant: ASML Netherlands B.V.

Inventor： VAN DE GOOR, Tim, Willem, Johan ,  GALUTSCHEK, Ernst ,  YAKUNIN, Andrei, Mikhailovich ,  JANSEN, Paul ,  WOLF, Abraham, Jan ,  VERMEULEN, Paul, Alexander ,  HOUWELING, Zomer, Silvester ,  HEIJMANS, Lucas, Christiaan, Johan ,  NIKIPELOV, Andrey

IPC: G03F1/62 ,  G03F7/20

公开(公告)号：EP4437380A1

公开(公告)日：2024-10-02

申请号：EP22809484.3

申请日：2022-11-03

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey ,  VAN DER WOORD, Ties, Wouter ,  VERMEULEN, Paul, Alexander ,  HOUWELING, Zomer, Silvester

IPC: G03F1/62 ,  G03F7/20 ,  C01B32/158

CPC classification number: G03F1/62 ,  G03F7/70983 ,  C01B32/168

公开(公告)号：EP4200670A1

公开(公告)日：2023-06-28

申请号：EP21749855.9

申请日：2021-07-29

Applicant: ASML Netherlands B.V.

Inventor： BANINE, Vadim, Yevgenyevich ,  VERMEULEN, Paul, Alexander ,  DE MEIJERE, Cornelis, Adrianus ,  MOORS, Johannes, Hubertus, Josephina ,  NIKIPELOV, Andrey ,  SALMASO, Guido ,  VAN DE KERKHOF, Marcus, Adrianus ,  YAGHOOBI, Parham

IPC: G03F7/20 ,  G03F1/62 ,  G03F1/64

公开(公告)号：EP4045974A1

公开(公告)日：2022-08-24

申请号：EP20758237.0

申请日：2020-08-25

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey ,  KURILOVICH, Dmitry

IPC: G03F1/62 ,  G03F1/82 ,  B08B7/00

公开(公告)号：EP3596546A1

公开(公告)日：2020-01-22

申请号：EP18704983.8

申请日：2018-02-15

Applicant: ASML Netherlands B.V.

Inventor： KLUGKIST, Joost André ,  BANINE, Vadim Yevgenyevich ,  BECKERS, Johan Franciscus Maria ,  JAMBUNATHAN, Madhusudhanan ,  NASALEVICH, Maxim Aleksandrovich ,  NIKIPELOV, Andrey ,  STAS, Roland Johannes Wilhelmus ,  VLES, David Ferdinand ,  WELTERS, Wilhelmus Jacobus Johannes ,  WRICKE, Sandro

IPC: G03F7/20 ,  G03F9/00 ,  G01J1/42