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公开(公告)号：JPH1064406A
公开(公告)日：1998-03-06
申请号：JP21352396
申请日：1996-08-13
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
Abstract: PROBLEM TO BE SOLVED: To provide the electron-emitting element which enhances efficiency and employs a current quantity correction electrode capable of being easily manufactured, an electron source employing the electron-emitting elements, and the image-forming device wherein the aforesaid efficiency is so determined as to be the ratio of the quantity of electrons arriving at an anode to the quantity of electrons flowing between the emitting elements in the control of electrons emitted in the air by means of surface conductive type electron- emitting elements. SOLUTION: A thin film 14, including an electron-emitting part 16 acting as a resistor, is formed on the element electrodes 12 and 13 of a substrate 11. Electrons emitted from the electron-emitting part 16 by applying drive voltage Vf, follow a locus indicated by an arrow 17. An anode electrode 18 picks up the emitted electrons by means of high voltage Va. A current quantity correcting electrode 1 is formed of conductive thin films, and is floated electrically with respect to the electron-emitting part 16. At this time, since emitting current depends on the element voltage Vf, the quantity of electron emission is thereby controlled by the electrical signals of Vg and Vf.
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公开(公告)号：JPH08167035A
公开(公告)日：1996-06-25
申请号：JP31073894
申请日：1994-12-14
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI , OKUDA MASAHIRO
IPC: G06T11/20
Abstract: PURPOSE: To provide a method and device for self-evasion random walk curve preparation which easily prepare a self-evasion random walk curve fast. CONSTITUTION: This method and device have a stage for searching for allocating specific gratings to a closed area encircled with four segments, 1st data to a grating including one segment in similar directions among the four segments, 2nd data to a grating including the other segment in the similar direction, and the 1st or 2nd data to a grating other than the grating to which the 1st and 2nd data are allocated, selecting and storing the 1st or 2nd data in the grating according to a Voltzmann distribution based on data allocated to grating nearby the gratings, and searching for the border line of the stored data as a self- evasion random walk curve. The closed area encircled with the 1st four segments is specified to the stage to prepare a 1st self-evasion random walk curve (steps S10-S21), a closed area encircled with 2nd four segments based on the 1st self-evasion random walk curve is specified to this stage to prepare a 2nd self-evasion random walk curve, and the 1st and 2nd self-evasion random walk curve is outputted (steps S22-S21').
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公开(公告)号：JPH08162006A
公开(公告)日：1996-06-21
申请号：JP31940594
申请日：1994-11-30
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
Abstract: PURPOSE: To provide an electron emission element to be used as an electron source by which the large area and the high grade of an image forming device can be realized. CONSTITUTION: An electron emission element part 6 composed of a surface conductive electron emission element, and a gate electrode composed of a piezoelectric cantilever 10 are provided. The scattering direction of emitted electrons from the electron emission element part 6 can be controlled by controlling the bending deformation of the piezoelectric cantilever 10.
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公开(公告)号：JPH07334694A
公开(公告)日：1995-12-22
申请号：JP12492794
申请日：1994-06-07
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI , OKUDA MASAHIRO
IPC: G06T11/20
Abstract: PURPOSE:To provide a method for generation or sent-avoiding random walk curves which quickly and easily generates a self-avoiding random walk curve and a method and a device for generation presentation materials which use this method. CONSTITUTION:In a step S10, a matrix table is set, and a time (t) elapsed for processing is set to '0'. In a step S11, values '+1' and '-1' are given to the highest stage and the lowest stage respectively. In a step S12, value '+1' or '-1' is set to an active area at random. In a step S13, it is discriminated whether the time (t) is shorter than a prescribed time t0 or not. If it is shorter, an evaluation function is calculated in the active area and a probability P is calculated at each lattice to generate randomness to set a value in each lattice in steps S14 to S17. In a step S18, deltat is added to the time (t) elapsed for processing. In a step S19, T is reduced by a minute quantity. Then, the control is returned to the step S13, and this operation is repeated till the time (t) reaches t0. When the time (t) exceeds to, steps S20 to S21 are executed, and boundaries between '+1' areas and '-1' areas are retrieved to generate a self-avoiding random walk curve, and this curve data is stored in a RAM and is displayed on a CRT.
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公开(公告)号：JPH07263757A
公开(公告)日：1995-10-13
申请号：JP7134294
申请日：1994-03-17
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
IPC: G01R33/035 , H01L39/00 , H01L39/22
Abstract: PURPOSE:To provide an electronic element of which the resistance can be changed adequately at very low temperature. CONSTITUTION:An electronic element, for use at very low temperature, comprises a discontinuous metal film 1, a magnetic field generating apparatus 2 that generates controllable magnetic field around the discontinuous magnetic film 1 in the vertical direction and an electronic l element with electrodes to flow current through the discontinuous metal film 1.
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Patent Agency Ranking
公开(公告)号：JPH07192611A
公开(公告)日：1995-07-28
申请号：JP34592793
申请日：1993-12-24
Applicant: CANON KK
Inventor： MITOME MASANORI , OKUDA MASAHIRO , ASAI AKIRA , MATSUTANI SHIGEKI , SUGIOKA HIDEYUKI
IPC: H01J9/02
Abstract: PURPOSE:To complete a forming process in a short time simultaneously relating to a plurality of elements, in a method whereby the forming process of the electron emitting element can be performed without directly applying voltage and allowing a current to directly flow in an element wire. CONSTITUTION:Electrodes 5, 6 and a conductive thin film 2 are formed on an insulating substrate 1, and by locally destructing and deforming or denaturing this conductive thin film, an electron emitting part is formed. An AC electric field and AC magnetic field or electromagnetic wave are applied as an external field to the conductive thin film 2 by an irradiating means 7, to locally destruct and deform or denature this conductive thin film.
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公开(公告)号：JPH0765705A
公开(公告)日：1995-03-10
申请号：JP23596693
申请日：1993-08-30
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI , ASAI AKIRA , YAMAMOTO KEISUKE , NOMA TAKASHI , OKUDA MASAHIRO , SUGIOKA HIDEYUKI , OSADA YOSHIYUKI
Abstract: PURPOSE:To enable the arrangement of electron emission part fine particles or the design of its material, and lessen the dispersion between elements, and enable the enlargement of an emitted electron current by fairing or processing a fine particle dispersed type of film, using the probe of a scanning tunneling microscope. CONSTITUTION:Film sections left behind the cutting of a conductive film 3 with the probe 4 of a scanning tunneling microscope (STM) effectively serve as a particles dispersed type of film. At that time, the fine particles are controlled to be in specified position by the positional control of the probe 4 of the STM and to have such cross sections as to be electrically discontinuous (D). Hereby, the design of the arrangement of the fine particles of an electron emission part becomes possible, and the improvement of an element is facilitated, and the dispersion between elements decreases sharply. Moreover, the material of the fine particles can be selected freely, and even a material small in work function can be used without being confined to gold, silver, etc., and the enlargement of the current of emitted electrons becomes possible.
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公开(公告)号：JPH0765703A
公开(公告)日：1995-03-10
申请号：JP23596493
申请日：1993-08-30
Applicant: CANON KK
Inventor： OKUDA MASAHIRO , SUGIOKA HIDEYUKI , ASAI AKIRA , MITOME MASANORI , MATSUTANI SHIGEKI , OSADA YOSHIYUKI
Abstract: PURPOSE:To lessen the temperature rise of an element during electron emission and lessen the dispersion between the element of currents inside an insulating substrate, and improve the efficiency of electron emission by forming a groove in the insulating substrate at the crack part of a conductive film. CONSTITUTION:In the first place, after cleaning of an insulating substrate 1, element electrodes 2 and 3 of, for example, Ni are formed on the surface by vacuum evaporation and photolithography technology. Solution of organic compound, which has Pd, Ru, or the like for its main element, is applied on over the electrodes 2 and 3, and left as it is to form a film. This organic metallic film is heated and baked and is patterned by lift off, etching, or the like so as to form a thin film 4 for formation of an electron emission part. A current is applied between the electrodes 2 and 3 so as to form a crack part in the electron emission part 5. With the island structure of the thin film 4 as a mask, a groove 6 is formed in the substrate 1 in the emission part 5 by dry or wet etching process.
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公开(公告)号：JPH0765702A
公开(公告)日：1995-03-10
申请号：JP23596393
申请日：1993-08-30
Applicant: CANON KK
Inventor： OKUDA MASAHIRO , MITOME MASANORI , ASAI AKIRA , SUGIOKA HIDEYUKI , MATSUTANI SHIGEKI , OSADA YOSHIYUKI
Abstract: PURPOSE:To make the temperature rise during electron emission small and lessen the dispersion between elements and improve the efficiency of electron emission by constituting a conductive film out of two or more different kinds of stacked layers, and besides constituting a crack layer out of two or more kinds of substances. CONSTITUTION:The quartz surface of an insulating substrate 1 is cleaned and element electrodes 2 and 3 consisting of Ni are made. Next, a gold thin film 13 is made between the electrodes 2 and 3 by lift off method and vacuum evaporation method, and a crank part 14 is made by applying voltage with a pulse- shaped power source 7. Next, solution containing organic palladium is applied on the film 13, and is heat-treated so as to make a thin film 4 for formation of an electron emission part consisting of palladium monoxide fine particles. Lastly, the electrode emission part 5 is made in the crack part 14 by applying voltage between the electrodes 2 and 3 and heat-treating it. Hereby, materials different in work function are stacked on the electron emission part 5, and the dispersion of an electron current is suppressed, and the efficiency of electron emission can be raised.
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公开(公告)号：JPH04303915A
公开(公告)日：1992-10-27
申请号：JP9362191
申请日：1991-03-29
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
IPC: G03F9/00 , H01L21/027 , H01L21/30
Abstract: PURPOSE:To align a wafer with an image pickup means with high accuracy by a method wherein pieces of information on positions from a plurality of alignment marks whose line width is different are extracted simultaneously or at intervals in terms of time and the pieces of information on the positions are utilized. CONSTITUTION:An LED light source 12 is radiated; the image of a reference mark GS is formed on an image pickup device 11 ; The electric signal of the image pickup device 11 is rearranged as a two-dimensional arrangement; after that, it is changed to a one-dimensional arrangement; and a discrepancy amount S from the center of an image corresponding to a fundamental frequency is measured. Then, an He-Ne laser 2 is radiated; the image of an alignment mark Wa1 is formed on the image pickup device 11. A discrepancy amount 1 is measured. Then, a stopper 25 is changed to a prescribed position. A discrepancy amount 2 is measured in the same manner as above. In the same manner, a discrepancy amount 3 is measured. Then, a shift amount due to an irregularity in a resist coating operation is computed form the discrepancy amounts 1 to 3; the true position of a wafer mark GW with reference to the image pickup device 11 is decided.
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