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    41.
    发明专利
    未知

    公开(公告)号：DE69225858D1

    公开(公告)日：1998-07-16

    申请号：DE69225858

    申请日：1992-09-24

    Applicant: CANON KK

    Inventor： NOSE NORIYUKI ,  YOSHII MINORU ,  SAITOH KENJI ,  OSAWA HIROSHI ,  SENTOKU KOICHI ,  TSUJI TOSHIHIKO ,  MATSUMOTO TAKAHIRO

    IPC: H01L21/027 ,  G03F7/20 ,  G03F9/00

    Abstract: A device and method for measuring the positional deviation between a plurality of diffraction gratings (2a,2b) formed on the same object (1) include an illumination optical system (3,6,20,21) for illuminating the plurality of diffraction gratings with a light beam, the illumination by the optical system generating a plurality of diffracted light beams from the plurality of diffraction gratings, an interference optical system (22,23,10) for forming at least one interference light beam from the plurality of diffracted light beams, a detector (12,14) for detecting the at least one interference light beam, the result of the detection serving as the basis for measuring the positional deviation between the plurality of diffraction gratings, and a measuring portion (31-33,41-44) for measuring the relative positional relation between the illumination optical system and the plurality of diffraction gratings.

    42.
    发明专利
    未知

    公开(公告)号：DE69223207D1

    公开(公告)日：1998-01-02

    申请号：DE69223207

    申请日：1992-09-24

    Applicant: CANON KK

    Inventor： SENTOKU KOICHI ,  MATSUMOTO TAKAHIRO ,  NOSE NORIYUKI ,  YOSHII MINORU ,  SAITOH KENJI

    IPC: G03F7/20 ,  G03F9/00

    Abstract: A method and device for measuring the relative displacement between first and second diffraction gratings (7,8) includes an interference optical system (2,4a,4b,10) forming first and second interference rays of light from light diffracted from the first and second diffraction gratings and separating the first and second interference rays of light on the basis of the difference in their direction of polarization, a first Detector (11a) for detecting the first interference ray of light to generate a first detection signal, a second detector (11b) for detecting the second interference ray of light to generate a second detection signal, and signal processing section (12,13) for detecting the phase difference between the first and second detection signals and for determining the relative displacement between the first and second diffraction gratings on the basis of the phase difference.

    50.
    发明专利
    未知

    公开(公告)号：DE3816247C2

    公开(公告)日：1995-10-19

    申请号：DE3816247

    申请日：1988-05-11

    Applicant: CANON KK

    Inventor： NOSE NORIYUKI ,  YOSHII MINORU ,  NIWA YUKICHI ,  KURODA RYO

    IPC: G01D5/38 ,  G01B11/02 ,  G01P3/36

    Abstract: A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on the other object. The measuring portion includes a second diffraction grating, a light source and a photodetecting system, wherein the light source provides lights which are projected upon two points on the second diffraction grating so that they emanate from the two points in the form of diffraction lights having different diffraction orders. The diffraction lights are directed to the same point on the first diffraction grating and are diffracted again by the first diffraction grating so that they are emitted in the same direction, and the photodetecting system is operable to detect a change in the light intensity caused due to the interference of the two lights emanating from the first diffraction grating. The device further includes a detecting system for detecting the relative moving distance of the two objects on the basis of the detection by the photodetecting.

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