SOLID PHASE EPITAXY OF SEMICONDUCTOR THIN FILM

    公开(公告)号:JPS62257718A

    公开(公告)日:1987-11-10

    申请号:JP10162686

    申请日:1986-04-30

    Applicant: SONY CORP

    Abstract: PURPOSE:To enable a solid phase epitaxial region to be formed at any position as required, by applying energy beams to a region having a smaller area than that of the solid phase epitaxial region while moving the energy beam applied region. CONSTITUTION:Insulation films 2, 2... are formed selectively on the surface of a wafer-type semiconductor substrate 1. A silicon semiconductor layer 4 is deposited over the whole surface of the substrate 1. A region 4a of the semiconductor layer 4 located on an exposed region 3 of the substrate 3, including its peripheral region, is heated by laser beams. Thereby, the solid phase epitaxy is started from the exposed region 3 of the substrate 1 and extended to the region 4a. The semiconductor layer 4 is then irradiated, in its broad region 4b including the irradiated region 4a and a peripheral region extending around it, with laser beams and heated thereby, During this process, the epitaxial region can be further extended from the region 4a to the region 4b. The position and configuration of the extended epitaxial region can be selected as required by controlling the region irradiated with laser beams.

    Micro substrate
    42.
    发明专利
    Micro substrate 审中-公开
    微基板

    公开(公告)号:JP2009284769A

    公开(公告)日:2009-12-10

    申请号:JP2008137754

    申请日:2008-05-27

    Inventor: TAKEDA MINORU

    Abstract: PROBLEM TO BE SOLVED: To provide a substrate enabling highly accurate treatment when treating samples.
    SOLUTION: The substrate is equipped with at least a sample-introducing part for introducing the samples, a plurality of storing parts for storing the samples, and a plurality of air-discharging parts connected to the storing parts. Two or more of the air-discharging parts are communicated with one open channel having one opened terminal.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提供在处理样品时能够进行高精度处理的基板。 解决方案:基板至少配备有用于引入样品的样品引入部件,用于存储样品的多个存储部件和连接到存储部件的多个排气部件。 两个以上的排气部与具有一个开放端子的一个开放通道连通。 版权所有(C)2010,JPO&INPIT

    Printer, optical disk device, electronic device, and printing method
    43.
    发明专利
    Printer, optical disk device, electronic device, and printing method 审中-公开
    打印机,光盘设备,电子设备和打印方法

    公开(公告)号:JP2007305190A

    公开(公告)日:2007-11-22

    申请号:JP2006130242

    申请日:2006-05-09

    Abstract: PROBLEM TO BE SOLVED: To provide a printer deciding whether to print or not even for any type of an optical recording medium, an optical disk device, and a printing method.
    SOLUTION: In step 402, the optical pickup of a recording/reproducing part reads printable/unprintable information recorded in its optical disk to decide whether the optical disk is a printable medium. Even when there is no printable/unprintable information recorded in the optical disk, in step 407, return light from the surface of the optical disk is detected by an optical sensor to estimate whether the optical disk includes an ink reception layer.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种决定是否对任何类型的光学记录介质,光盘装置和打印方法进行打印的打印机。 解决方案:在步骤402中,记录/再现部分的光学拾取器读取记录在其光盘中的可打印/不可打印信息,以决定光盘是否是可打印介质。 即使当没有记录在光盘中的可打印/不可打印信息时,在步骤407中,由光学传感器检测来自光盘表面的返回光,以估计光盘是否包括墨接收层。 版权所有(C)2008,JPO&INPIT

    Recording medium processing apparatus, printing method and computer program
    44.
    发明专利
    Recording medium processing apparatus, printing method and computer program 审中-公开
    记录介质处理设备,打印方法和计算机程序

    公开(公告)号:JP2007280510A

    公开(公告)日:2007-10-25

    申请号:JP2006105243

    申请日:2006-04-06

    CPC classification number: B41J3/4071 B41J3/44 G11B23/40

    Abstract: PROBLEM TO BE SOLVED: To provide a recording medium processing apparatus used when visible information is printed on a principal surface of a recording medium, and to provide a printing method and a computer program. SOLUTION: The recording medium processing apparatus 100 includes: a head part 140 for reading a data signal by tracing a track formed on the recording surface of the recording medium 200; a signal processing part 300 for detecting rotational angle information of the recording medium based on the data signal; and a printing part for printing visual information on a principal surface different from the recording surface of the recording medium referring to the rotational angle information. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供当可视信息被打印在记录介质的主表面上时使用的记录介质处理装置,并提供打印方法和计算机程序。 解决方案:记录介质处理设备100包括:头部140,用于通过跟踪形成在记录介质200的记录表面上的轨道来读取数据信号; 信号处理部300,用于根据数据信号检测记录媒体的旋转角度信息; 以及打印部分,用于根据旋转角度信息,在与记录介质的记录表面不同的主表面上打印视觉信息。 版权所有(C)2008,JPO&INPIT

    Method of manufacturing magnetic disk
    45.
    发明专利
    Method of manufacturing magnetic disk 审中-公开
    制造磁盘的方法

    公开(公告)号:JP2007115323A

    公开(公告)日:2007-05-10

    申请号:JP2005304679

    申请日:2005-10-19

    Inventor: TAKEDA MINORU

    CPC classification number: G11B5/855 B82Y10/00 G11B5/743

    Abstract: PROBLEM TO BE SOLVED: To easily manufacture a magnetic disk of DTR configuration with high productivity.
    SOLUTION: In a method of manufacturing the magnetic disk which is made up by being formed of an isolation groove between data areas, an isolation groove formation step has; a step of forming a resist layer 103 which has an opening 104 corresponding to a pattern of the isolation groove by photolithography; and an etching step of forming the isolation groove of a necessary depth on a material layer 102 on a substrate surface through the opening 104 of the resist layer 103, and performs formation of the isolation groove on both front and back sides 101A and 101B of the substrate 101.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:以高生产率容易地制造DTR配置的磁盘。 解决方案:在通过在数据区之间由隔离槽形成的磁盘的制造方法中,隔离槽形成步骤具有: 通过光刻法形成具有对应于隔离槽的图案的开口104的抗蚀剂层103的步骤; 以及蚀刻步骤,通过抗蚀剂层103的开口104,在衬底表面上的材料层102上形成所需深度的隔离沟槽,并且在前后面101A和101B的两侧形成隔离槽 底物101.版权所有(C)2007,JPO&INPIT

    Electron microscope
    46.
    发明专利

    公开(公告)号:JP2004327302A

    公开(公告)日:2004-11-18

    申请号:JP2003122037

    申请日:2003-04-25

    Abstract: PROBLEM TO BE SOLVED: To provide an electron microscope in which the observation of a test piece by an electron beam can be attained without placing the test piece in a vacuum atmosphere, and the extraction efficiency of secondary electrons emitted from the test piece is improved.
    SOLUTION: An electrode ring 1 is adapted to comprise an insulating tube 2 having a hollow part 6, an electrode membrane 3 for voltage impression which is formed on the end face opposed to the test piece with a fine gap and has an equal potential to the test piece, a grounding electrode membrane 4 which is formed and grounded on the other end face, and a resistance membrane 11 which is formed on the inner face of the hollow part 6 and connects between the electrode membrane 3 for voltage impression and the grounding electrode membrane 4. The electrode ring 1 is installed on the opposed face side to the test piece 20 of an irradiation head 50, and the gap between the electrode ring 1 and the test piece is made locally into vacuum atmosphere.
    COPYRIGHT: (C)2005,JPO&NCIPI

    Optical disk and optical disk device
    47.
    发明专利

    公开(公告)号:JP2004103183A

    公开(公告)日:2004-04-02

    申请号:JP2002267275

    申请日:2002-09-12

    Abstract: PROBLEM TO BE SOLVED: To provide an ROM type optical disk dedicated for high density reproduction which has compatibility with an RAM type optical disk of a similarly high density and can obtain an excellent regenerative signal property. SOLUTION: In the ROM type optical disk, information is reproduced by recording digital information on a substrate 1 in a pit column at a specified track pitch and having a light beam irradiated through an objective lens. The pit 2 is formed into a convex shape towards an entrance side of the light beam to a flat part where the pit is not recorded. Then, when a wavelength of the light beam is λ, the numerical aperture of the objective lens is N.A., the track pitch is TP, an average width of a width of a top face of the convex pit and a width at a bottom part is Pw, a slope width of a side face of the pit is WS, and an optical depth of the pit is d, the compatibility with the RAM type optical disk is possessed and the excellent regenerative signal property is obtained by having equations, 0.6λ/N.A.≤Tp≤0.7λ/N.A. 0.25×Tp≤Pw≤0.5×Tp 0.03×Tp≤WS ≤0.15×Tp 0.1λ≤d≤0.3λ. COPYRIGHT: (C)2004,JPO

    Manufacturing method of master disk for manufacturing optical recording medium and manufacturing method of stamper for manufacturing optical recording medium
    48.
    发明专利
    Manufacturing method of master disk for manufacturing optical recording medium and manufacturing method of stamper for manufacturing optical recording medium 审中-公开
    用于制造光记录介质的主磁盘的制造方法和用于制造光记录介质的冲压器的制造方法

    公开(公告)号:JP2003331480A

    公开(公告)日:2003-11-21

    申请号:JP2002134544

    申请日:2002-05-09

    Inventor: TAKEDA MINORU

    Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a master disk for manufacturing optical recording media and a manufacturing method of a stamper for manufacturing optical recording media capable of stably manufacturing a stamper with a fine rugged pattern with high yield by preventing the rugged pattern of the stamper from being damaged in exfoliating the stamper with the fine rugged pattern formed thereto from the master disk.
    SOLUTION: A first film 22 is formed on a substrate 21, after the first film 22 is brought into a state having no photosensitivity against exposure, a second film 23 comprising a resist film having immunity to dry etching is formed on the first film 22, the second film 23 is subjected to patterning by exposure/ development, the second film 23 formed with the rugged pattern through this patterning is used for a mask, the rugged pattern is formed on the first film 22 by dry etching to manufacture the master disk 24 for manufacturing optical recording media. Further, the master disk 24 for manufacturing optical recording media is used to manufacture the stamper 25 for manufacturing optical recording media.
    COPYRIGHT: (C)2004,JPO

    Abstract translation: 要解决的问题:提供一种用于制造光学记录介质的母盘的制造方法和用于制造光学记录介质的压模的制造方法,其能够通过防止以高产率稳定地制造具有高产量的精细粗糙图案的压模 压模的粗糙图案在从母盘形成的精细凹凸图案剥离压模时被损坏。 解决方案:第一膜22形成在基板21上,在第一膜22处于不受曝光的光敏性的状态之后,在第一膜22上形成具有抗干蚀刻抗蚀剂的抗蚀剂膜的第二膜23 膜22,第二膜23通过曝光/显影进行图案化,通过该图案形成具有凹凸图案的第二膜23用于掩模,通过干蚀刻在第一膜22上形成凹凸图案,以制造 用于制造光学记录介质的主盘24。 此外,用于制造光学记录介质的母盘24用于制造用于制造光学记录介质的压模25。 版权所有(C)2004,JPO

    STAMPER FOR MANUFACTURING OPTICAL RECORDING MEDIUM, OPTICAL RECORDING MEDIUM, AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:JP2003085831A

    公开(公告)日:2003-03-20

    申请号:JP2001331531

    申请日:2001-10-29

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a stamper of which surface roughness, thickness unevenness, the deviation in the out-of-roundness of a bore, etc., are suppressed, a method of manufacturing the same, an optical recording medium which can be manufactured by molding using this stamper and a method of manufacturing the same. SOLUTION: A resist film R is formed on a mirror finished surface of a substrate 10 consisting of silicon or glass subjected to mirror finish polishing on its surface and this resist film is exposed by a convergent electron beam or UV laser, etc., and is developed, thereby, the resist films Ra of the patterns corresponding to rugged shapes are formed. Next, the surface of the mirror finished surface of the substrate is processed to the rugged shapes (projecting parts 10a and recessed parts 10b) by dry etching, etc., using the resist films Ra as a mask, by which the stamper 10 (ST) is formed. The medium substrate is formed by injection molding using the resultant stamper and an optical recording laminate and a protective layer are formed, by which the optical recording medium is manufactured.

    MANUFACTURING METHOD FOR STAMPER FOR OPTICAL DISK MANUFACTURE AND MANUFACTURING DEVICE USED FOR THE SAME

    公开(公告)号:JP2002304780A

    公开(公告)日:2002-10-18

    申请号:JP2001108853

    申请日:2001-04-06

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method for a stamper for optical disk manufacture by which fine unevenness can be formed by using chemical amplification type photoresist capable of high-density recording and peeling of the stamper from an original disk does not occur even during polishing stamper reverse surface when the stamper for optical disk manufacture is manufactured. SOLUTION: A process of manufacturing the stamper for optical disk manufacture which has fine unevenness has a process of forming the fine unevenness of photoresist by exposing the photoresist applied to the original disk to a pattern corresponding to the fine unevenness and developing it, a process of bonding a 1st conductive layer to the outer peripheral part of the original disk having the fine unevenness formed by electroless plating from the top surface side where the fine unevenness is formed to the reverse surface on the opposite side, a process of bonding and depositing a 2nd conductive layer by physical vapor phase deposition(PVD) on the top surface side of the original disk, and a process of electrolytically plating the 1st and 2nd conductive layers of the original disk by electrifying the 1st and 2nd conductive layers.

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