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公开(公告)号：KR1020090102494A
公开(公告)日：2009-09-30
申请号：KR1020080027970
申请日：2008-03-26
Applicant: (주)켄트
CPC classification number: B81B7/02 , B81B2201/02 , B81B2201/037 , G08C19/00
Abstract: PURPOSE: A prognosis system using MEMS sensors driven by an energy harvester is provided to use vibration energy generated in machine equipment as the driving energy of a sensor or a sensor module. CONSTITUTION: A prognosis system using MEMS sensors driven by an energy harvester comprises a MEMS sensor, a wireless sensor unit(409), an energy harvest and a base station(411). The MEMS sensor unites with objects. The wireless sensor unit receives the sensor signal of the analog type from one or more MEMS sensors and signal-processes the sensor signal and converts the sensor signal into the digital signals. The sensor signal converted into the digital signal is produced as packet data. The produced packet data are wirelessly transmitted to the base station. The energy harvest converts the vibration energy of the objects and supplies driving energy to operate one or more among the MEMS sensors and the wireless sensor unit. The base station receives and synthesizes the packet data. The base station analyzes the synthesized packet data and drives prognosis diagnosis based on the analyzed data and produces the prognosis diagnosis result.
Abstract translation: 目的：提供使用由能量收集器驱动的MEMS传感器的预测系统，以将机器设备中产生的振动能量作为传感器或传感器模块的驱动能量。 构成：使用由能量收集器驱动的MEMS传感器的预测系统包括MEMS传感器，无线传感器单元（409），能量采集和基站（411）。 MEMS传感器与物体相结合。 无线传感器单元从一个或多个MEMS传感器接收模拟类型的传感器信号，并对传感器信号进行信号处理，并将传感器信号转换为数字信号。 转换成数字信号的传感器信号作为分组数据产生。 所生成的分组数据被无线发送到基站。 能量收集转换物体的振动能量并提供驱动能量以在MEMS传感器和无线传感器单元中操作一个或多个。 基站接收并合成分组数据。 基站分析合成分组数据，根据分析数据进行预后诊断，产生预后诊断结果。
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公开(公告)号：KR1019970008324B1
公开(公告)日：1997-05-23
申请号：KR1019930016296
申请日：1993-08-21
Applicant: 인터내셔널 비지네스 머신즈 코포레이션
IPC: H01L21/00
CPC classification number: G03F7/11 , B81B2201/035 , B81B2201/037 , B81C99/0085 , G03F7/00 , H02N1/008
Abstract: In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 mu m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer 58 of material and patterning the sacrificial layer to define a shape. A photoresist layer 62 of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mould. Upon the mould there is plated a metallic layer 68 of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mould and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 mu m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.
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公开(公告)号：US09505606B2
公开(公告)日：2016-11-29
申请号：US11762683
申请日：2007-06-13
Applicant: Jin Young Sohn , Gyoung II Cho , Cheong Soo Seo
Inventor： Jin Young Sohn , Gyoung II Cho , Cheong Soo Seo
CPC classification number: B81B3/0062 , B81B2201/037 , B81B2201/045
Abstract: A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.
Abstract translation: 具有离散控制的多个运动的MEMS（微机电系统）致动器包括底层，步进板，支撑和运动板。 运动板的多重运动由静电驱动的步进板和几何预定的支撑件产生。 通过引入具有离散控制的多个运动的MEMS致动器，可以通过数字控制实现简单的运动控制，并且仅需要运动控制板的单个电压。
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公开(公告)号：US09015933B2
公开(公告)日：2015-04-28
申请号：US13417564
申请日：2012-03-12
Applicant: Harold L. Stalford
Inventor： Harold L. Stalford
CPC classification number: B81B3/0059 , B81B2201/037 , B81B2203/06 , Y10T29/49009 , Y10T29/49124 , Y10T29/49133
Abstract: A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.
Abstract translation: 微器件可以包括衬底，耦合到衬底的第一微结构，耦合到衬底的第二微结构和被配置为接收输入的端口。 第一微结构被配置为响应于输入而移动成与第二微结构接合。
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公开(公告)号：US20150061456A1
公开(公告)日：2015-03-05
申请号：US14512176
申请日：2014-10-10
Applicant: Harold L. Stalford
Inventor： Harold L. Stalford
IPC: H02N10/00
CPC classification number: H02N10/00 , B81B3/0051 , B81B7/02 , B81B2201/035 , B81B2201/037 , F03G7/065 , F16C33/20 , F16C33/201 , F16C33/208 , F16C2223/60 , F16C2223/70 , H02N1/008 , H02N11/006
Abstract: A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.
Abstract translation: 微型机器可以在或小于微米域。 微型机器可以包括微型致动器和联接到微型致动器的微型轴。 微型轴可由微型执行器驱动。 工具联接到微轴并且可操作以响应于微轴的至少运动来执行作业。
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Patent Agency Ranking
公开(公告)号：US08915158B2
公开(公告)日：2014-12-23
申请号：US11757321
申请日：2007-06-01
Applicant: Harold L. Stalford
Inventor： Harold L. Stalford
CPC classification number: G02B26/0833 , B81B3/0062 , B81B2201/033 , B81B2201/037 , Y10T74/18056 , Y10T74/18304
Abstract: Methods and systems for micro transmissions for a micro machine may comprise an input shaft assembly coupled to a micro actuator, an output shaft assembly coupled to a micro shaft, and one or more power conversion elements operable to convert a first type of movement from the micro actuator into a second, disparate type of movement for the micro shaft.
Abstract translation: 用于微型机器的微型变速器的方法和系统可以包括耦合到微型致动器的输入轴组件，耦合到微型轴的输出轴组件和可操作以将来自微型机械的第一类型的运动转换的一个或多个功率转换元件 致动器成为微型轴的第二种不同类型的运动。
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47.发明授权公开(公告)号：US08789438B2
公开(公告)日：2014-07-29
申请号：US13575624
申请日：2010-11-01
Applicant: Yangzhi Chen , Zhen Chen , Jiang Ding
Inventor： Yangzhi Chen , Zhen Chen , Jiang Ding
CPC classification number: F16H1/12 , B81B5/00 , B81B2201/037 , F16H1/24 , F16H37/065 , F16H55/0853 , Y10T74/1966 , Y10T74/19972
Abstract: A space curve mesh driving pair and a polyhedral space curve mesh transmission are disclosed. Said space curve mesh driving pair consists of a driving wheel and a driven wheel. Axes of the driving wheel and the driven wheel are intersected at an angle of 0°˜180°, and power transmission is realized by continuous mesh between the driving tines and the driven tines; a number of driving tines are provided on said driving wheel, and a number of driven tines are provided on the driven wheel; the driving tines are uniformly arranged on an end face of a cylinder of the driving wheel, and the driven tines are uniformly arranged on the circumference of a cylindrical surface of the driven wheel. Said polyhedral space curve mesh transmission consists of an above-mentioned space curve mesh driving pair. Motion is input from an input end, and is passed through a number of pace curve mesh driving pairs to realize the speed change, then is output from one or more output ends. Wherein, the space curve mesh driving pair is the core of the transmission. The invention has the advantages of compact structure, small size, light weight, stable transmission and flexible operation, and can be widely used in micro-mechanism field.
Abstract translation: 公开了空间曲线网格驱动对和多面体空间曲线网格传输。 所述空间曲线网格驱动对由驱动轮和从动轮组成。 驱动轮和从动轮的轴线以0°〜180°的角度相交，通过驱动齿和从动齿之间的连续啮合实现动力传递; 在所述驱动轮上设置有多个行进齿，并且在所述从动轮上设置有多个从动齿; 驱动齿均匀地布置在驱动轮的气缸的端面上，并且从动齿均匀地布置在从动轮的圆柱形表面的圆周上。 所述多面体空间曲线网格传输由上述空间曲线网格驱动对组成。 运动是从输入端输入的，并通过多个速度曲线网格驱动对来实现速度变化，然后从一个或多个输出端输出。 其中，空间曲线网格驱动对是传输的核心。 本发明结构紧凑，体积小，重量轻，传动稳定，操作灵活，可广泛应用于微机械领域。
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公开(公告)号：US08134276B2
公开(公告)日：2012-03-13
申请号：US11757343
申请日：2007-06-01
Applicant: Harold L. Stalford
Inventor： Harold L. Stalford
CPC classification number: B81B3/0059 , B81B2201/037 , B81B2203/06 , Y10T29/49009 , Y10T29/49124 , Y10T29/49133
Abstract: A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.
Abstract translation: 微器件可以包括衬底，耦合到衬底的第一微结构，耦合到衬底的第二微结构和被配置为接收输入的端口。 第一微结构被配置为响应于输入而移动成与第二微结构接合。
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公开(公告)号：US20080048519A1
公开(公告)日：2008-02-28
申请号：US11757331
申请日：2007-06-01
Applicant: Harold Stalford
Inventor： Harold Stalford
CPC classification number: H02N10/00 , B81B3/0024 , B81B2201/031 , B81B2201/034 , B81B2201/037 , B81B2201/051 , H02K7/00 , H02N1/002 , H02N11/006
Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.
Abstract translation: 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。
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公开(公告)号：US20020162675A1
公开(公告)日：2002-11-07
申请号：US10100253
申请日：2002-03-14
Inventor： John H. Jerman , John D. Grade
IPC: H02G003/08
CPC classification number: H02N1/008 , B81B3/0051 , B81B2201/033 , B81B2201/037 , B81B2201/047 , B81B2203/051 , G11B7/0925
Abstract: A miniature device comprising a substrate and primary and secondary movable members overlying the substrate. First and second suspension members couple the secondary movable member to the substrate. Third and fourth suspension members couple the primary movable member to the secondary movable member. A lever assembly is provided and has a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the primary movable member and an opposite second extremity. The secondary movable member is coupled to the lever between the first extremity and the pivot.
Abstract translation: 一种微型装置，包括衬底和覆盖衬底的一次和二次活动部件。 第一和第二悬架构件将二次可移动构件联接到基板。 第三和第四悬架构件将主可动构件联接到次可移动构件。 提供了杠杆组件，并且具有联接到枢轴并且可绕枢轴枢转的枢轴和杆。 杠杆具有联接到主可动构件的第一末端和相对的第二末端。 次级可动构件在第一末端和枢轴之间联接到杠杆。
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