公开(公告)号：US07735147B2

公开(公告)日：2010-06-08

申请号：US12088223

申请日：2006-10-10

Applicant: Sungho Jin ,  Li-Han Chen ,  I-Chen Chen

Inventor： Sungho Jin ,  Li-Han Chen ,  I-Chen Chen

IPC: H01J37/06

CPC classification number: H01J9/025 ,  C01B32/162 ,  C01B32/18 ,  G01Q60/38 ,  G01Q60/56 ,  G01Q70/12 ,  G11B9/1409 ,  H01J1/3044 ,  H01J2201/30407 ,  H01J2201/30469 ,  Y10T428/11

Abstract: A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.

Abstract translation: 一种机械稳定和取向的扫描探针尖端，其包括具有逐渐减小的直径的基底的碳纳米管，在探针尖端具有尖锐的尖端。 通过在基板（图1（a）中的10和12）上沉积催化剂金属膜，在催化剂金属上沉积碳点（图1（b）中的14））来产生尖端或尖端阵列 蚀刻不被碳点掩蔽的催化剂金属膜（图1（c）），从催化剂金属膜除去碳点以暴露催化剂金属膜（图1（d）），并生长 催化剂膜上的碳纳米管探针尖端（图1（e）中的16））。 碳探针尖端可以是直的，有角度的或急剧弯曲的，并具有各种技术应用。

公开(公告)号：US20090160307A1

公开(公告)日：2009-06-25

申请号：US12094250

申请日：2007-09-18

Applicant: Akihiko Ueda ,  Yoshiyuki Yamamoto ,  Yoshiki Nishibayashi ,  Takahiro Imai

Inventor： Akihiko Ueda ,  Yoshiyuki Yamamoto ,  Yoshiki Nishibayashi ,  Takahiro Imai

IPC: H01J1/16 ,  H01J9/02

CPC classification number: H01J1/3044 ,  H01J9/025 ,  H01J37/065 ,  H01J37/073 ,  H01J2201/30407 ,  H01J2201/30411 ,  H01J2201/30419 ,  H01J2201/30457 ,  H01J2237/06341 ,  H01J2237/26 ,  H01J2237/3137 ,  H01J2237/3146 ,  H01J2237/31749 ,  H01J2237/3175

Abstract: A diamond electron source in which a single sharpened tip is formed at one end of a pillar-shaped diamond monocrystal of a size for which resist application is difficult in a microfabrication process, as an electron emission point used in an electron microscope or other electron beam device, and a method for manufacturing the diamond electron source. One end of a pillar-shaped diamond monocrystal 10 is ground to form a smooth flat surface 11, and a ceramic layer 12 is formed on the smooth flat surface 11. A thin-film layer 14 having a prescribed shape is deposited on the ceramic layer 12 using a focused ion beam device, after which the ceramic layer 12 is patterned by etching using the thin-film layer 14 as a mask. A single sharpened tip is formed at one end of the pillar-shaped diamond monocrystal 10 by dry etching using the resultant ceramic mask.

Abstract translation: 一种金刚石电子源，其中在微细加工过程中难以施加抗蚀剂尺寸的柱状金刚石单晶的一端形成单个锐化尖端作为电子显微镜或其他电子束中使用的电子发射点 器件，以及金刚石电子源的制造方法。 将柱状金刚石单晶10的一端研磨成平滑的平坦面11，在平坦的平坦面11上形成陶瓷层12.具有规定形状的薄膜层14沉积在陶瓷层上 12，使用聚焦离子束装置，之后通过使用薄膜层14作为掩模的蚀刻对陶瓷层12进行图案化。 通过使用所得到的陶瓷掩模的干蚀刻，在柱状金刚石单晶10的一端形成单个尖锐的尖端。

公开(公告)号：US20090153015A1

公开(公告)日：2009-06-18

申请号：US11852122

申请日：2007-09-07

Applicant: Lyon Bradley King

Inventor： Lyon Bradley King

IPC: F03H1/00 ,  H01J9/50

CPC classification number: F03H1/00 ,  H01J2201/30407

Abstract: Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self-assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is created by applying a negative potential near the surface of a liquefied base metal to create a Taylor cone converging to a nanotip, and solidifying the Taylor cone for use as a field-emission cathode. When the nanotip of the Taylor cone becomes sufficiently blunted or damaged to affect its utility, the base metal is re-liquefied by application of a heat source, a negative potential is reapplied to the surface of the base metal to recreate the Taylor cone, and a new nanotip is generated by solidifying the base metal.

Abstract translation: Spindt型场致发射阴极，用于具有自组装纳米结构的电力推进（EP）系统，可以反复再生损坏的阴极发射器纳米尖端。 通过在液化贱金属的表面附近施加负电位以产生会聚到纳米尖端的泰勒锥，并固化泰勒锥以用作场致发射阴极来产生纳米尖端。 当泰勒锥的纳米尖端变得足够钝或损坏以影响其效用时，通过施加热源来重新液化贱金属，将负电位重新施加到贱金属的表面以再生泰勒锥，以及 通过固化贱金属产生新的纳米尖端。

公开(公告)号：US07138760B2

公开(公告)日：2006-11-21

申请号：US11137135

申请日：2005-05-24

Applicant: Si Myeong Kim

Inventor： Si Myeong Kim

IPC: H01J1/304 ,  H01J29/50

CPC classification number: H01J3/022 ,  H01J2201/30407 ,  H01J2329/00

Abstract: An electron emission device and/or display using the same includes a beam-focusing structure. The beam-focusing structure has a first insulating layer formed on a plate. The first insulating layer has a thickness, and is formed with a first hole. A first electrode is formed on the first insulating layer and extending into the first hole. An emission portion is formed in the first hole and connected to the first electrode. A second insulating layer is formed on the first electrode and is also formed with a second hole through which the emission portion is at least partially exposed. A second electrode is formed on the second insulating layer. In the electron emission device and/or the display, an electric field between the first electrode and the second electrode causes the emission portion to emit an electron beam and focuses the electron beam from the emission portion.

Abstract translation: 使用其的电子发射装置和/或显示器包括光束聚焦结构。 光束聚焦结构具有形成在板上的第一绝缘层。 第一绝缘层具有厚度，并且形成有第一孔。 第一电极形成在第一绝缘层上并延伸到第一孔中。 发射部分形成在第一孔中并连接到第一电极。 第二绝缘层形成在第一电极上，并且还形成有第二孔，发射部分至少部分地暴露在第二孔中。 第二电极形成在第二绝缘层上。 在电子发射装置和/或显示器中，第一电极和第二电极之间的电场使得发射部分发射电子束并且聚焦来自发射部分的电子束。

公开(公告)号：US07118679B2

公开(公告)日：2006-10-10

申请号：US10902762

申请日：2004-07-30

Applicant: Peter G. Hartwell ,  Uija Yoon

Inventor： Peter G. Hartwell ,  Uija Yoon

IPC: B44C1/22 ,  H01L21/00

CPC classification number: H01J9/025 ,  G01Q70/16 ,  G01Q80/00 ,  H01J2201/30407 ,  H01J2329/00

Abstract: A method of fabricating a sharp protrusion on an underlayer is disclosed. A tip layer is deposited on an underlayer and then a mask layer is deposited on the tip layer. The mask layer is patterned with a beam-and-hat pattern that is used to form a beam-and-hat mask in the mask layer. Portions of the tip layer that are not covered by the beam-and-hat mask are isotropically etched to form a tip including a vertex. Beam portions of the beam-and-hat mask support the hat portion and prevent a release of the hat portion during the isotropic etching process. An anisotropic etch process can be used prior to the isotropic etching process to change a character of the tip. The underlayer can be patterned and etched to form a cantilever that includes the sharp protrusion extending outward of a surface of the cantilever.

Abstract translation: 公开了一种在底层上制造尖锐突起的方法。 尖端层沉积在底层上，然后掩模层沉积在尖端层上。 使用用于在掩模层中形成光束和帽子掩模的光束和帽子图案来对掩模层进行图案化。 尖端层的未被束帽掩模覆盖的部分被各向同性蚀刻以形成包括顶点的尖端。 梁和帽子面罩的梁部分支撑帽部分并且防止在各向同性蚀刻过程期间帽部分的释放。 在各向同性蚀刻工艺之前可以使用各向异性蚀刻工艺来改变尖端的特性。 底层可以被图案化和蚀刻以形成悬臂，其包括从悬臂的表面向外延伸的尖锐突起。

公开(公告)号：US20060057928A1

公开(公告)日：2006-03-16

申请号：US10730676

申请日：2003-12-05

Applicant: Yukiko Nagasaka ,  Kazuya Kitamura ,  Toshihiro Tamura

Inventor： Yukiko Nagasaka ,  Kazuya Kitamura ,  Toshihiro Tamura

IPC: H01J9/14 ,  H01J9/04 ,  H01J9/12

CPC classification number: B82Y10/00 ,  H01J9/025 ,  H01J2201/30407 ,  H01J2201/30469

Abstract: A manufacturing method for a field emission display includes the steps of (1) forming a conductive film on a substrate that is to be a base plate, the conductive film being for forming a cathode electrode; (2) applying, on the conductive film, a positive resist, which is a photosensitive material; (3) exposing the positive resist to light, so as to form openings that correspond in a shape of emitters, the light being (a) emitted from a light source, (b) paralleled so that rays thereof have even light intensity distribution, and (c) directed into a micro lens array so as to be condensed in interior of the photosensitive material; and (4) forming the emitters respectively in the openings. This arrangement provides a manufacturing method for a field emission display, the method capable of highly accurately and highly productively sharp emitters aligned orderly, without a complicate manufacturing step and a complicate optical system.

Abstract translation: 场发射显示器的制造方法包括以下步骤：（1）在作为基板的基板上形成导电膜，所述导电膜用于形成阴极电极; （2）在导电膜上涂敷作为感光材料的正性抗蚀剂; （3）将正性抗蚀剂曝光，以形成对应于发射体形状的开口，所述光源（a）从光源发射，（b）并联，使得光线具有均匀的光强度分布;以及 （c）引导到微透镜阵列中以在感光材料的内部被冷凝; 和（4）分别在开口中形成发射器。 这种布置提供了一种用于场致发射显示的制造方法，该方法能够高精度地且高效地将尖锐的发射体排列成顺序，而不需要复杂的制造步骤和复杂的光学系统。

公开(公告)号：US06762543B1

公开(公告)日：2004-07-13

申请号：US09617351

申请日：2000-07-17

Applicant: Weng Poo Kang ,  Jimmy Lee Davidson ,  David V. Kerns, Jr.

Inventor： Weng Poo Kang ,  Jimmy Lee Davidson ,  David V. Kerns, Jr.

IPC: H01J130

CPC classification number: H01J9/025 ,  B82Y10/00 ,  G01L9/0041 ,  G01L9/0047 ,  G01P15/0802 ,  G01P15/0894 ,  G01P2015/0828 ,  H01J1/3042 ,  H01J1/3044 ,  H01J3/022 ,  H01J31/127 ,  H01J2201/30407 ,  H01J2201/30457

Abstract: Diamond microtip field emitters are used in diode and triode vacuum microelectronic devices, sensors and displays. Diamond diode and triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.

Abstract translation: 金刚石微尖端场发射器用于二极管和三极管真空微电子器件，传感器和显示器。 可以制造具有整体阳极和栅格结构的金刚石二极管和三极管器件。 在制造工艺中在发射体上形成超尖尖，其中金刚石以两步沉积顺序沉积到模腔中。 在沉积金刚石期间，仔细控制碳石墨含量以增强排放性能。 尖端或发射器通过后制造处理来进一步提高性能。

公开(公告)号：US20030132695A1

公开(公告)日：2003-07-17

申请号：US10340160

申请日：2003-01-09

Applicant: Matsushita Electric Industrial Co., Ltd.

Inventor： Masahide Yamauchi ,  Takashi Itoh ,  Koji Fujii

IPC: H01J001/02 ,  H01J001/304 ,  H01J029/46

CPC classification number: H01J29/04 ,  H01J29/481 ,  H01J29/488 ,  H01J2201/30407 ,  H01J2229/481

Abstract: In a picture tube device with a field-emission cold cathode, including a plurality of electron-emitting cathodes, and a lead electrode provided with a plurality of apertures surrounding the plurality of electron-emitting cathodes respectively, a surface of the lead electrode has a curved shape that is convex in an electron emission direction. This makes it possible to obtain a high-resolution and high-performance picture tube device that has an excellent focus performance over an entire beam current.

Abstract translation: 在具有场致发射冷阴极的显像管装置中，包括多个电子发射阴极，以及分别具有围绕多个电子发射阴极的多个孔的引线电极，所述引线电极的表面具有 在电子发射方向上凸起的弯曲形状。 这使得可以获得在整个束电流上具有优异的聚焦性能的高分辨率和高性能的显像管装置。

公开(公告)号：US5791959A

公开(公告)日：1998-08-11

申请号：US711828

申请日：1996-09-10

Applicant: Johann Bartha ,  Johann Greschner ,  Volkhard Wolf

Inventor： Johann Bartha ,  Johann Greschner ,  Volkhard Wolf

IPC: H01J1/304 ,  H01J9/02

CPC classification number: B82Y10/00 ,  H01J1/3042 ,  H01J9/025 ,  H01J2201/30403 ,  H01J2201/30407

Abstract: To fabricate a field emission device a micromechanically manufactured array (1) of widely-spaced tips (2) and a micromechanically manufactured perforated extracting electrode (3) are provided. The outer sides of the perforated extracting electrode are bonded to the array in a way that the perforated extracting electrode is facing the array. With the array of widely-spaced tips and the perforated extracting electrode being fabricated separately and bonded together subsequently, both the number of process steps required for each of the two parts and the manufacturing process costs are reduced.

Abstract translation: 为了制造场发射装置，提供了一种微机械制造的广泛间隔的尖端（2）的阵列（1）和一个微机械制造的穿孔提取电极（3）。 穿孔提取电极的外侧以穿孔提取电极面向阵列的方式结合到阵列。 利用广泛间隔的尖端阵列和穿孔提取电极单独制造并且随后结合在一起，减少了两个部件中的每一个所需的工艺步骤数量和制造工艺成本。

公开(公告)号：US5399238A

公开(公告)日：1995-03-21

申请号：US232790

申请日：1994-04-22

Applicant: Nalin Kumar

Inventor： Nalin Kumar

IPC: H01J9/02 ,  H05K3/00 ,  H01J9/00

CPC classification number: H01J9/025 ,  H01J2201/30407 ,  H01J2201/30457 ,  H05K2201/2081 ,  H05K2203/0554 ,  H05K2203/107 ,  H05K3/0023 ,  H05K3/0041

Abstract: A method of making sub-micron low work function field emission tips without using photolithography. The method includes physical vapor deposition of randomly located discrete nuclei to form a discontinuous etch mask. In one embodiment an etch is applied to low work function material covered by randomly located nuclei to form emission tips in the low work function material. In another embodiment an etch is applied to base material covered by randomly located nuclei to form tips in the base material which are then coated with low work function material to form emission tips. Diamond is the preferred low work function material.

Abstract translation: 一种制造亚微米低功函数场发射尖端而不使用光刻的方法。 该方法包括随机定位的离散核的物理气相沉积以形成不连续的蚀刻掩模。 在一个实施例中，蚀刻被施加到由随机定位的核覆盖的低功函数材料，以在低功函数材料中形成发射尖端。 在另一个实施例中，蚀刻被施加到由随机定位的核覆盖的基材上，以在基材中形成尖端，然后用低功函数材料涂覆以形成发射尖端。 钻石是首选的低功能材料。