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公开(公告)号：KR101096533B1
公开(公告)日：2011-12-20
申请号：KR1020100015126
申请日：2010-02-19
Applicant: 전남대학교산학협력단
IPC: A61B5/026 , A61B5/0295
Abstract: 본 발명은 생체용 무선 유량센서 구조물 및 생체용 무선 유량센서 제조방법에 관한 것으로서, 혈관과 같은 생체 내에서 사용하기 위해 망사 그물 형태의 절연체막과, 그 내부에 구비된 용량형 압력 센서로 구성된 무선 유량센서 구조물 및 유량센서 제조방법을 제공함에 그 목적이 있다.
이러한 기술적 과제를 달성하기 위한 본 발명은, 생체용 무선 유량센서 구조물에 관한 것으로서, 그 내부 양측단에 유량센서가 형성되어 있는 복수개의 절연체막; 상기 절연체막 양측면에 소정 간격으로 형성된 복수개의 금속선으로서, 상기 절연체막들을 연결해주는 연결부재; 를 포함하되, 상기 유량센서는, 혈관 벽 고정 시 그 양측단의 압력을 측정하고, 그 압력의 차로서, 혈관 내부에 흐르는 혈류량을 파악하는 것을 특징으로 한다.-
Patent Agency Ranking
公开(公告)号：KR1020110133824A
公开(公告)日：2011-12-14
申请号：KR1020100053449
申请日：2010-06-07
Applicant: 전남대학교산학협력단
Abstract: PURPOSE: A method for manufacturing the polymer cantilever using a silicon-wire is provided to manufacture the high sensitive cantilever. CONSTITUTION: A metal wire is manufactured on the upper part of the silicon nano wire(S4). A cantilever pattern is formed on the upper part of the metal wire through a sensitive film(SU-8 2002) of a polymer materials(S5). The body pattern of a cantilever is formed on the upper part of the cantilever pattern through a sensitive film(SU-8 2050) of the polymer materials(S6). A bio-sensor pattern is formed on the upper part of the cantilever by using AZ5214 photo sensitizer(S7). A metal pad is formed on upper part of the body pattern of the cantilever with Ni through a electroplating process(S8).
Abstract translation: 目的：提供使用硅线制造聚合物悬臂的方法来制造高灵敏度悬臂。 构成：在硅纳米线的上部制造金属线（S4）。 通过高分子材料（S5）的敏感膜（SU-8 2002）在金属丝的上部形成悬臂图案。 通过聚合物材料（S6）的敏感膜（SU-8 2050）在悬臂图案的上部形成悬臂的主体图案。 通过使用AZ5214光敏剂（S7）在悬臂的上部形成生物传感器图案。 金属垫通过电镀工艺以Ni形成在悬臂的主体图案的上部（S8）上。
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公开(公告)号：KR1020110077522A
公开(公告)日：2011-07-07
申请号：KR1020090134132
申请日：2009-12-30
Applicant: 전남대학교산학협력단
CPC classification number: B81B3/0035 , B81B7/0019 , B81B2201/0292 , B81B2201/031
Abstract: PURPOSE: A micro-stage having a piezo resistance displacement sensor and a chevron beam structure is provided to amplify displacement of a column driver having a large shift through the chevron beam structure extended from four sides of a platform to vertical and horizontal directions. CONSTITUTION: A micro-stage having a piezo resistance displacement sensor and a chevron beam structure includes a platform(100), an extension beam(200), a chevron beam(300), a piezo resistance displacement sensor, and a column driver(400). The platform has a square shape, and a sample is placed in the center of the platform. The extension beam is extended from one side of the platform. The extension beam includes an electrode for preventing the extension beam from being bent to a specific axis. The chevron beam has a 'V' shape, and the center thereof is connected to the extension beam. The chevron beam draws the extension beam to drive the platform when the piezo resistance displacement sensor is driven. The piezo resistance displacement sensor is driven to a particular direction by generating Joule heat when a voltage is applied thereto. The piezo resistance displacement sensor comprises two integrated column drivers.
Abstract translation: 目的：提供具有压电阻位移传感器和人字形梁结构的微型平台，用于放大通过从平台的四个侧面延伸到垂直和水平方向的人字形梁结构具有大偏移的列驱动器的位移。 构造：具有压电阻位移传感器和人字形梁结构的微型平台包括平台（100），延伸梁（200），人字形梁（300），压电阻位移传感器和列驱动器（400 ）。 该平台具有正方形形状，样品放置在平台的中心。 延伸梁从平台的一侧延伸。 延伸梁包括用于防止延伸梁弯曲到特定轴线的电极。 人字形梁具有“V”形，其中心连接到延伸梁。 当压电阻力位移传感器被驱动时，人字形梁拉伸延伸梁来驱动平台。 当施加电压时，通过产生焦耳热来将压电阻位移传感器驱动到特定的方向。 压电阻位移传感器包括两个集成的列驱动器。
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公开(公告)号：KR100987111B1
公开(公告)日：2010-10-11
申请号：KR1020080092961
申请日：2008-09-22
Applicant: 전남대학교산학협력단
IPC: H01L21/302
Abstract: 본 발명은 습식 식각 장치에 관한 것으로, 보다 구체적으로는 식각 용액에 반응하지 않는 소수성의 식각 용기, 및 상기 식각 용기를 식각 대상에 점착시키는 점착부재를 포함하는 습식 식각 장치에 관한 것이다. 본 발명에 따르면, 원하는 부분만을 쉽고 간단하게 식각할 수 있는 습식 식각 장치를 제공한다.
테프론, PDMS, 습식 식각, 웨이퍼-
公开(公告)号：KR1020100038243A
公开(公告)日：2010-04-14
申请号：KR1020080092912
申请日：2008-09-22
Applicant: 전남대학교산학협력단
CPC classification number: G02B21/0004 , B82Y35/00 , G01Q60/30 , G01Q70/10 , G01Q70/14 , G01Q70/16 , Y10S977/849
Abstract: PURPOSE: A micro probe device and a manufacturing method thereof are provided to use the device as subminiature tongs, and to sharply manufacture a probe to accurately measure a sample. CONSTITUTION: A micro probe device comprises a handling part and a cantilever part(120). The cantilever part is connected to the handling part, and has four cantilevers(122), a connection part(121), and probes(125). The cantilevers are formed in the end of the connection part, and arranged to be faced each other. The connection part is connected to one surface of the handling part. The probes are formed in the end of each cantilever.
Abstract translation: 目的：提供微型探针装置及其制造方法，以将该装置用作超小型钳，并且锐利地制造探针以精确测量样品。 构成：微探针装置包括处理部和悬臂部（120）。 悬臂部分连接到处理部分，并且具有四个悬臂（122），连接部分（121）和探针（125）。 悬臂形成在连接部的端部，并且被布置为彼此面对。 连接部分连接到处理部分的一个表面。 探针形成在每个悬臂的末端。
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公开(公告)号：KR1020100038241A
公开(公告)日：2010-04-14
申请号：KR1020080091794
申请日：2008-09-18
Applicant: 전남대학교산학협력단
CPC classification number: G01Q60/16 , G01Q60/22 , G01Q60/40 , H01L21/306
Abstract: PURPOSE: A device of manufacturing a probe using electrochemical etching and the probe thereof are provided to automatically control cut-off time. CONSTITUTION: The first metal wire(120a) is connected to the positive pole of a power supply device(110). The second metal wire(120b) is connected to the negative pole of the power supply device. At etching container(200) contains etching solution. The etching container is formed by a hydrophobic structure. The hydrophobic structure is formed by Teflon.
Abstract translation: 目的：提供使用电化学蚀刻制造探针的装置及其探针，以自动控制切断时间。 构成：第一金属线（120a）连接到电源装置（110）的正极。 第二金属线（120b）连接到电源装置的负极。 在蚀刻容器（200）中含有蚀刻溶液。 蚀刻容器由疏水结构形成。 疏水结构由特氟隆形成。
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