BOX AND SYSTEM FOR PRESERVING SAMPLE STAGE

    公开(公告)号:JP2001133463A

    公开(公告)日:2001-05-18

    申请号:JP31058799

    申请日:1999-11-01

    Applicant: CANON KK

    Inventor: UENO RIE

    Abstract: PROBLEM TO BE SOLVED: To retrieve and select a desired sample stage automatically from a preservation box containing a plurality of sample stages each charged with a sample to be analyzed. SOLUTION: When a sample stage is contained in a preservation box, a reader 902 reads out information for identifying a sample being held on each sample stage 1201 and the information is stored in a computer 903 incorporated in the preservation box. When a desired sample stage is taken out from a containing section 901 preserving a plurality of sample stages, it is selected by retrieving the identification information of the sample stage.

    SAMPLE BASE AND ANALYZER
    54.
    发明专利

    公开(公告)号:JPH11230968A

    公开(公告)日:1999-08-27

    申请号:JP2756698

    申请日:1998-02-09

    Applicant: CANON KK

    Inventor: UENO RIE

    Abstract: PROBLEM TO BE SOLVED: To discriminate a sample quickly and surely by a method wherein a mark means which displays the discrimination of every sample is installed at a sample base and the mark means is read out by using a mechanical, optical, electric or magnetic readout means. SOLUTION: A sample 14 which is to be analyzed is placed on a boardlike sample base 11. An information display part P and an instruction part Q are formed in a side on the surface of the sample base 11. Discrimination information 12 which can discriminate the sample 14 is formed in the information display part P. A mark 13 used to instruct a position in which the discrimination information 12 is displayed is formed in the instruction part Q. The mark 13 is composed of a simple figure, and it occupies a sufficiently large area on the surface of the sample base 11. Consequently, the mark 13 can be detected easily when the sample 14 is discriminated. The discrimination information 12 which is displayed on the information display part P is read out by a readout means. The readout means can be constituted, e.g. of an optical reader which is composed of a light source and of a photodetector, of a scanning electron microscope or of the like.

    SPACER AND IMAGE FORMING DEVICE
    55.
    发明专利

    公开(公告)号:JPH10275575A

    公开(公告)日:1998-10-13

    申请号:JP7738297

    申请日:1997-03-28

    Applicant: CANON KK

    Abstract: PROBLEM TO BE SOLVED: To increase the height, and provide a spacer at a low cost. SOLUTION: In a spacer for holding a space between opposite boards, in the case where height is expressed with (d), length of a longitudinal side of a square having the minimum area seen from over is expressed with L1, length of a lateral side thereof is expressed with L2, in the case of L1>L2, L=L2, and in the case of L1

    ELECTRON SOURCE, IMAGE FORMING DEVICE AND MANUFACTURE OF THESE ELECTRON SOURCE AND IMAGE FORMING DEVICE

    公开(公告)号:JPH09245695A

    公开(公告)日:1997-09-19

    申请号:JP5463896

    申请日:1996-03-12

    Applicant: CANON KK

    Inventor: UENO RIE

    Abstract: PROBLEM TO BE SOLVED: To prevent wire breaking and cracking of wiring on an insulation belt, by providing a recessed part formed with a step difference in accordance with a number of insulation belt layers in the insulation belt. SOLUTION: In an insulation belt 4, 5 orthogonal to a wiring 3 connected to one element electrode 1 of a surface conduction electron emitting element, a recessed part 9a, 9b is provided so as to prevent overlapping with the other element electrode 2. In the recessed part 9a, 9b of the insulation belt 4, 5, a step difference 6 in accordance with number of insulation belt layers is provided, a wiring 7 connected to the element electrode 2 is formed. By forming the wiring 7 thus on the insulation belt 4, 5, the wiring 7 and the element electrode 2 can be directly electrically connected without generating wire breaking and cracking. Further, a plurality of the insulation belts 4, 5 are layered, the step difference 6 is provided in the recessed part 9a, 9b, so as to decrease a height per one step of the step difference, wire breaking and wire cracking can be more prevneted from being easily generated.

    SAMPLE MOUNT FOR SCANNING ELECTRON MICROSCOPE

    公开(公告)号:JPH0765767A

    公开(公告)日:1995-03-10

    申请号:JP20782893

    申请日:1993-08-23

    Applicant: CANON KK

    Inventor: UENO RIE

    Abstract: PURPOSE:To make the sampling easier, to reduce the contamination on a sample, and to decrease the working time, by providing a notch to insert the sample on the surface of a sample mount which consists of a conductive material. CONSTITUTION:A notch 1 is provided on the surface of a sample mount 2, and at least a part of a sample is inserted to the notch 1. When the observation by a scanning microscope (SEM) is carried out by using such a sample mount 2, the size of the sample 3 can be increased as the part of the size of the notch 1, and the sample can be cut easily. Furthermore, an adhesive such as a carbon paste can be reduced, and the contamination of the sample is reduced, and a clear image can be obtained.

    PREPARING AND OBSERVING METHOD FOR CROSS-SECTION OF THIN FILM

    公开(公告)号:JPH06307998A

    公开(公告)日:1994-11-04

    申请号:JP9318893

    申请日:1993-04-20

    Applicant: CANON KK

    Inventor: UENO RIE

    Abstract: PURPOSE:To observe a sample having no damage with high resolution by mak ing a cut in metal substrate applied with a thin film at such depth as not reaching the film along the linear texture thereof, rupturing the thin film with the cut as a trigger, and then cutting the thin film into micropieces. CONSTITUTION:A thin film 10 is formed on a metal substrate 9 having linear texture 8 by plastic machining, e.g. rolling or polishing. A cut 12, not reaching the thin film 10, is then made in the rear of the substrate 9 in same direction as the texture 8 by means of a knife 11 and the thin film 10 is ruptured with the cut 12 as a trigger. The sample including the thin film 10 is then cut into size of 1mm square or less by means of scissors such that the cross-sections 13, 14 are not touched. When the micropiece is observed by an in-lens type scanning electron microscope, the sample can be measured with high resolution.

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