公开(公告)号：GB2205942B

公开(公告)日：1992-01-29

申请号：GB8811132

申请日：1988-05-11

Applicant: CANON KK

Inventor： YOSHII MINORU ,  NOSE NORIYUKI ,  NIWA YUKICHI ,  KURODA RYO

IPC: G01D5/38 ,  G02B7/32 ,  G11B7/085

公开(公告)号：DE3816247A1

公开(公告)日：1988-12-08

申请号：DE3816247

申请日：1988-05-11

Applicant: CANON KK

Inventor： NOSE NORIYUKI ,  YOSHII MINORU ,  NIWA YUKICHI ,  KURODA RYO

IPC: G01D5/38 ,  G01B11/02 ,  G01P3/36

Abstract: A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on the other object. The measuring portion includes a second diffraction grating, a light source and a photodetecting system, wherein the light source provides lights which are projected upon two points on the second diffraction grating so that they emanate from the two points in the form of diffraction lights having different diffraction orders. The diffraction lights are directed to the same point on the first diffraction grating and are diffracted again by the first diffraction grating so that they are emitted in the same direction, and the photodetecting system is operable to detect a change in the light intensity caused due to the interference of the two lights emanating from the first diffraction grating. The device further includes a detecting system for detecting the relative moving distance of the two objects on the basis of the detection by the photodetecting.

公开(公告)号：DE69133624D1

公开(公告)日：2009-12-03

申请号：DE69133624

申请日：1991-03-26

Applicant: CANON KK

Inventor： NOSE NORIYUKI ,  SAITOH KENJI ,  SENTOKU KOICHI ,  YOSHII MINORU

IPC: G03F9/00 ,  G03F7/20

公开(公告)号：DE69331515D1

公开(公告)日：2002-03-14

申请号：DE69331515

申请日：1993-11-15

Applicant: CANON KK

Inventor： YOSHII MINORU ,  NOSE NORIYUKI ,  MORI TETSUZO ,  MIYAZAKI KYOICHI ,  TSUJI TOSHIHIKO ,  TAKEUCHI SEIJI

IPC: G01N21/94 ,  G03F7/20 ,  G01N21/88

公开(公告)号：DE3856296D1

公开(公告)日：1999-02-25

申请号：DE3856296

申请日：1988-08-24

Applicant: CANON KK

Inventor： YANAGISAWA YOSHIHIRO ,  MORIKAWA YUKO ,  MATSUDA HIROSHI ,  KAWADA HARUKI ,  SAKAI KUNIHIRO ,  KAWADE HISAAKI ,  EGUCHI KEN ,  KAWAKAMI EIGO ,  KAWASE TOSHIMITSU ,  YOSHII MINORU ,  SAITOH KENJI ,  YAMANO AKIHIKO ,  NOSE HIROYASU

IPC: G01B7/00 ,  G01D5/244 ,  G01D5/245 ,  G01Q10/00 ,  G01Q20/04 ,  G01Q60/00 ,  G01Q60/10 ,  G01Q70/06 ,  G11B9/00 ,  G01N27/00

Abstract: An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electric voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.

公开(公告)号：DE69317686T2

公开(公告)日：1998-09-24

申请号：DE69317686

申请日：1993-01-28

Applicant: CANON KK

Inventor： YOSHII MINORU ,  NOSE HIROYASU ,  TAKEUCHI SEIJI

IPC: G01B11/00 ,  G01D5/38 ,  H01L21/027 ,  H01L21/30

Abstract: A device for detecting the displacement of an object is provided with a semiconductor laser having an active layer for emitting laser beams in two directions, mirrors for directing the laser beams toward a diffraction grating provided on the object, and a detector for receiving the interfering lights diffracted by the diffraction grating. The active layer of the semiconductor laser is arranged substantially parallel to the diffraction grating, to save space, also to enable light deflection such that the spreading direction of the light beams from the semiconductor laser coincides with the direction of pitch of the diffraction grating. The diffraction grating is irradiated with an improved efficiency, giving diffracted lights with higher intensity to the detector and improving the S/N ratio of detection. The space between the semiconductor laser and the object is reduced, thus reducing the entire volume of system.

公开(公告)号：DE69127850T2

公开(公告)日：1998-03-12

申请号：DE69127850

申请日：1991-04-29

Applicant: CANON KK

Inventor： TOKUMITSU JUN ,  SEKINE MASAYOSHI ,  KONDO TOSHIAKI ,  TAKAHASHI KOJI ,  HARIGAYA ISAO ,  YOSHII MINORU ,  SUDA SHIGEYUKI

IPC: G02B27/64 ,  H04N5/232 ,  H04N5/335

公开(公告)号：DE69126800D1

公开(公告)日：1997-08-21

申请号：DE69126800

申请日：1991-01-04

Applicant: CANON KK

Inventor： TOKUMITSU JUN ,  YOSHII MINORU ,  SUDA SHIGEYUKI ,  SEKINE MASAYOSHI

IPC: G02B7/36 ,  H04N5/232

公开(公告)号：DE68925139T2

公开(公告)日：1996-06-13

申请号：DE68925139

申请日：1989-02-16

Applicant: CANON KK

Inventor： SAITOH KENJI ,  MATSUGU MASAKAZU ,  NIWA YUKICHI ,  NOSE NORIYUKI ,  YOSHII MINORU ,  SUDA SHIGEYUKI

IPC: G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G03B41/00 ,  G03B27/53

公开(公告)号：DE68925139D1

公开(公告)日：1996-02-01

申请号：DE68925139

申请日：1989-02-16

Applicant: CANON KK

Inventor： SAITOH KENJI ,  MATSUGU MASAKAZU ,  NIWA YUKICHI ,  NOSE NORIYUKI ,  YOSHII MINORU ,  SUDA SHIGEYUKI

IPC: G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G03B41/00 ,  G03B27/53