公开(公告)号：JPH0441701B2

公开(公告)日：1992-07-09

申请号：JP1481886

申请日：1986-01-28

Applicant: TORAY INDUSTRIES

Inventor： OKAMOTO HIDEHIRO ,  HASEGAWA KATSUMI

IPC: C08J7/00 ,  D06B19/00 ,  D06M10/00

公开(公告)号：JPH0428827B2

公开(公告)日：1992-05-15

申请号：JP22691583

申请日：1983-12-02

Applicant: TORAY INDUSTRIES

Inventor： NAGATA HIDEO ,  TAKAHASHI SHIGEAKI ,  OKAMOTO HIDEHIRO

IPC: D06M13/50 ,  D06M10/00 ,  D06M10/02 ,  D06M13/02 ,  D06M13/51 ,  D06M13/513 ,  D06M14/32 ,  D06M15/00 ,  D06M101/00 ,  D06M101/16 ,  D06M101/30 ,  D06M101/32 ,  D06P5/04 ,  D06P5/08

公开(公告)号：JPH0260786B2

公开(公告)日：1990-12-18

申请号：JP21708782

申请日：1982-12-13

Applicant: TORAY INDUSTRIES

Inventor： OOHASHI MASAYASU ,  OKAMOTO HIDEHIRO ,  SUGANO KATSUO

IPC: D03D27/00 ,  D06P3/00

公开(公告)号：JPS6319628B2

公开(公告)日：1988-04-23

申请号：JP454980

申请日：1980-01-21

Applicant: TORAY INDUSTRIES

Inventor： ISHIBASHI HIDEO ,  MATSUMOTO TADAYUKI ,  OKAMOTO HIDEHIRO

IPC: D06M11/00 ,  D01F6/62 ,  D01F6/92 ,  D02G3/02 ,  D02G3/30 ,  D06M11/38 ,  D06M11/84 ,  D06M101/00 ,  D06M101/16 ,  D06M101/30 ,  D06M101/32

公开(公告)号：JPS62184182A

公开(公告)日：1987-08-12

申请号：JP2016686

申请日：1986-02-03

Applicant: TORAY INDUSTRIES

Inventor： TAKAHASHI SHIGEAKI ,  OKAMOTO HIDEHIRO ,  SUGIMOTO TAKEO

IPC: D06M10/00 ,  D06M10/02 ,  D06M15/423 ,  D06M101/00

公开(公告)号：JPS62172035A

公开(公告)日：1987-07-29

申请号：JP1369586

申请日：1986-01-27

Applicant: TORAY INDUSTRIES

Inventor： OKAMOTO HIDEHIRO ,  HASEGAWA KATSUMI

IPC: B01J19/08 ,  C08J7/00 ,  D06B19/00

Abstract: PURPOSE:A treating machine, having respective means integrally laid on a movable frame capable of being freely carried in and out of a vacuum treating vessel therein and capable of stably processing a material even at a high speed without changing the vacuum degree and minimizing the vacuum treating vessel and having improved operability in changing over the grade. CONSTITUTION:In a plasma treating machine consisting of a vacuum treating vessel, a delivery means for a material to be treated, winding means, transfer means and plasma irradiation means contained in the treating vessel, the respective means are integrally laid on a movable frame capable of being freely carried in and out of the vessel. Driving source terminals, power source terminals and cooling water supply source terminals for operating the respective means laid on the frame are provided in the vessel and such terminals are detachably connected to the corresponding terminals corresponding to the respective means on the frame.

公开(公告)号：JPS6297968A

公开(公告)日：1987-05-07

申请号：JP23644085

申请日：1985-10-24

Applicant: TORAY INDUSTRIES

Inventor： SEKI MASAO ,  NAGATA HIDEO ,  OKAMOTO HIDEHIRO

IPC: C23C18/16 ,  C23C18/20 ,  C23C18/31 ,  C23C18/34 ,  C23C18/52 ,  D06M10/00 ,  D06M10/02 ,  D06M11/00 ,  D06M11/83 ,  D06M11/84

公开(公告)号：JPS6215670B2

公开(公告)日：1987-04-08

申请号：JP16144179

申请日：1979-12-14

Applicant: TORAY INDUSTRIES

Inventor： OKAMOTO HIDEHIRO ,  SUGAWARA TADAO ,  FUJII YOSHIHIRO

IPC: D06M15/643 ,  D06M13/02 ,  D06M13/51 ,  D06M13/513 ,  D06M101/00 ,  D06M101/16 ,  D06M101/30 ,  D06M101/32

公开(公告)号：JPS61146871A

公开(公告)日：1986-07-04

申请号：JP26850984

申请日：1984-12-21

Applicant: TORAY INDUSTRIES

Inventor： OKAMOTO HIDEHIRO ,  NAGATA HIDEO ,  IWATSUBO TAKASHI

IPC: D06M10/00 ,  C08J7/00 ,  D06M10/02 ,  D06M13/00 ,  D06M13/02 ,  D06M13/51 ,  D06M13/513 ,  D06M14/28 ,  D06N3/14 ,  D06N7/04

公开(公告)号：JPS6183375A

公开(公告)日：1986-04-26

申请号：JP20224884

申请日：1984-09-27

Applicant: Toray Industries

Inventor： NAGATA HIDEO ,  YOKURA MITSUYOSHI ,  OKAMOTO HIDEHIRO

IPC: D06M10/00 ,  C08J7/00 ,  C08J7/04 ,  D06M10/02 ,  D06M11/00 ,  D06M11/79 ,  D06M15/643 ,  D06M23/08 ,  D06P5/02 ,  D06P5/20