公开(公告)号：JP2004287431A

公开(公告)日：2004-10-14

申请号：JP2004070776

申请日：2004-03-12

Applicant: Xerox Corp ,  ゼロックス コーポレイションXerox Corporation

Inventor： KUBBY JOEL A ,  FEINBERG KATHLEEN A ,  GERMAN KRISTINE A ,  GULVIN PETER M ,  MA JUN ,  LIN PINYEN

IPC: G02B26/02 ,  B81B3/00 ,  G02B6/12 ,  G02B6/35

CPC classification number: G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

Abstract: PROBLEM TO BE SOLVED: To reduce the whole dimension of a chip of a micro-electromechanical system (MEMS) switch and a waveguide into the order of centimeter. SOLUTION: An optical multistate latching switch 100 includes one or more drive actuators 130, one or more latch actuators 120 having correlated teeth, an elastic cantilever platform 150 forming a plurality of optical waveguides 152 and 154, a connecting part which connects the drive actuator and the cantilever platform, a link mechanism which forms one or more link teeth, is connected to the drive actuator, so positioned to decide one or more latched condition positions and so positioned to engage with the latch teeth an electric stimulation means of which the timing is so set to variably operate the drive actuator and the latch actuator between a balanced state and a latched state. COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2004287429A

公开(公告)日：2004-10-14

申请号：JP2004070774

申请日：2004-03-12

Applicant: Xerox Corp ,  ゼロックス コーポレイションXerox Corporation

Inventor： KUBBY JOEL A ,  FEINBERG KATHLEEN A ,  GERMAN KRISTINE A ,  GULVIN PETER M ,  MA JUN ,  LIN PINYEN

IPC: G02B26/02 ,  B81B3/00 ,  G02B6/12 ,  G02B6/35

CPC classification number: G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

Abstract: PROBLEM TO BE SOLVED: To reduce the size of a multicomponent optical device and the production cost without sacrificing operation characteristic. SOLUTION: In a thermal drive actuator which has a thermal latch actuator and defines translating latch teeth, a movable waveguide shuttle platform which defines a plurality of optical waveguides and is connected with a suspension element, a tether which connects the thermal drive actuator to the movable waveguide platform, and a link mechanism which is arranged for deciding a latched state position and defines link mechanism teeth for diagonal connection of the thermal drive actuator to the translating latch teeth, the optical switch is so composed that an electrical stimulation is generated at a predetermined time for switching between an equilibrium state and a latched state by actuating one or more thermal drive actuators and thermal latch actuators. COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2002301697A

公开(公告)日：2002-10-15

申请号：JP2001360361

申请日：2001-11-27

Applicant: MICROSCAN SYSTEMS INC ,  XEROX CORP

Inventor： ZOSEL ANDREW J ,  GULVIN PETER M ,  CHEN JINGKUANG ,  KUBBY JOEL A ,  LIN CHUANG-CHIA ,  TRAN ALEX T

IPC: B81C1/00 ,  B81B3/00 ,  G02B26/08 ,  H01L21/302 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/762 ,  H01L27/14

Abstract: PROBLEM TO BE SOLVED: To improve the mechanical and optical characteristic of a silicon (SOI) wafer on an insulating body by using a micro-mechanical or a micro- optomechanical structure. SOLUTION: The micro-mechanical or the micro-optomechanical structure is manufactured by a process including following stages. The structure is defined on a mono crystal silicon layer 12 separated from a substrate layer 14 by an insulating layer 16. Poly silicon layers 40 and 42 are formed on the mono crystal silicon layer 12 by vapor deposition and etching as the poly silicon forming a mechanical element or an optical element of the structure is left. A selected range of the mono crystal silicon layer 12 is exposed. The formed structure is dissociated.

公开(公告)号：JP2002283297A

公开(公告)日：2002-10-03

申请号：JP2001360362

申请日：2001-11-27

Applicant: MICROSCAN SYSTEMS INC ,  XEROX CORP

Inventor： SCHARF BRUCE R ,  KUBBY JOEL A ,  LIN CHUANG-CHIA ,  TRAN ALEX T ,  ZOSEL ANDREW J ,  GULVIN PETER M ,  CHEN JINGKUANG

IPC: B81C1/00 ,  B81B3/00 ,  H01L21/762 ,  H01L27/14

Abstract: PROBLEM TO BE SOLVED: To improve mechanical and optical characteristics by a micromechanical or microoptomechanical structure in a silicon (SOI) wafer on an insulator. SOLUTION: This invention provides the micromechanical or microoptomechanical structure. This structure is manufactured by processing comprising the following stages: that is, to define the structure on a monocrystal silicon layer 12 separated from a substrate layer 14 by an insulating layer 16, to selectively etch the monocrystal silicon layer 12, to deposit and etch polysilicon layers 40 and 42 on the insulating layer 16 while leaving polysilicon for forming a mechanical element of the structure as it is, and to dissociate the formed structure.

公开(公告)号：JP2002240285A

公开(公告)日：2002-08-28

申请号：JP2002008241

申请日：2002-01-17

Applicant: XEROX CORP

Inventor： GULVIN PETER M ,  EKLUND ELLIOTT A

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  F04B43/04 ,  H02N1/00

Abstract: PROBLEM TO BE SOLVED: To increase an ejector capacity for an ink jet splash for discharging the ink splash of a practical size without decreasing an ejector size or without increasing a film thickness. SOLUTION: A microelectronic mechanical liquid ejector is provided with a substrate having an insulating layer thereon, a conductive part formed on the insulating layer, a membrane formed adjacent to the conductive part and having a corrugated multiplayer structure, a nozzle plate surrounding the membrane and having a nozzle top and a nozzle side, a pressure chamber which is formed between the nozzle plate and the membrane and in which a liquid is stored, nozzles formed to the nozzle plate for ejecting the liquid, and a power supply connected between the conductive part and the membrane for supplying electricity enough for deflecting a top part of the membrane towards the conductive part when the power supply is activated and for ejecting the liquid from nozzles in the pressure chamber.