MEMS OPTICAL LATCHING SWITCH
    1.
    发明专利

    公开(公告)号:CA2460765A1

    公开(公告)日:2004-09-19

    申请号:CA2460765

    申请日:2004-03-12

    Applicant: XEROX CORP

    Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M .times. N optical signal switching system. The optical MEMS switch comprises a plurali ty of optical waveguides formed on a cantilever beam platform for switching optica l states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical A dd- Drop Multiplexers (ROADMs), may be fabricated.

    2.
    发明专利
    未知

    公开(公告)号:BR0200848A

    公开(公告)日:2003-03-25

    申请号:BR0200848

    申请日:2002-03-18

    Applicant: XEROX CORP

    Abstract: A microstructure that may be used as an electrical connection in a microfabricated electro-mechanical system (MEMS) apparatus. The microstructure may have one or more isolatable electrical connections for signal transmission. The microstructure allows a MEMS apparatus to shield signal transmissions from the effects of electromagnetic interference or conductive fluids.

    5.
    发明专利
    未知

    公开(公告)号:BR0200848B1

    公开(公告)日:2014-08-05

    申请号:BR0200848

    申请日:2002-03-18

    Applicant: XEROX CORP

    Abstract: A microstructure that may be used as an electrical connection in a microfabricated electro-mechanical system (MEMS) apparatus. The microstructure may have one or more isolatable electrical connections for signal transmission. The microstructure allows a MEMS apparatus to shield signal transmissions from the effects of electromagnetic interference or conductive fluids.

    6.
    发明专利
    未知

    公开(公告)号:DE602004017661D1

    公开(公告)日:2008-12-24

    申请号:DE602004017661

    申请日:2004-03-19

    Applicant: XEROX CORP

    Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M x N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

    8.
    发明专利
    未知

    公开(公告)号:BR102012026587A2

    公开(公告)日:2013-10-29

    申请号:BR102012026587

    申请日:2012-10-17

    Applicant: XEROX CORP

    Abstract: A coating for an ink jet printhead front face, wherein the coating comprises an oleophobic low adhesion coating having high thermal stability as indicated by less than about 15 percent weight loss when heated to up to 300° C., and wherein a drop of ultra-violet (UV) gel ink or a drop of solid ink exhibits a contact angle of greater than about 45° and sliding angle of less than about 30° with a surface of the coating, wherein the coating maintains the contact angle and sliding angle after the coating has been exposed to a temperature of at least 200° C. for at least 30 minutes.

    9.
    发明专利
    未知

    公开(公告)号:DE60128440T2

    公开(公告)日:2008-01-24

    申请号:DE60128440

    申请日:2001-11-27

    Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a pattern on a single crystal silicon layer separated by an insulator layer from a substrate layer; defining a structure in the single-crystal silicon layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; and releasing the formed structure.

    10.
    发明专利
    未知

    公开(公告)号:DE60212229T2

    公开(公告)日:2006-10-05

    申请号:DE60212229

    申请日:2002-03-19

    Applicant: XEROX CORP

    Abstract: A microstructure that may be used as an electrical connection in a microfabricated electro-mechanical system (MEMS) apparatus. The microstructure may have one or more isolatable electrical connections for signal transmission. The microstructure allows a MEMS apparatus to shield signal transmissions from the effects of electromagnetic interference or conductive fluids.

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