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公开(公告)号：US09919917B2
公开(公告)日：2018-03-20
申请号：US14514356
申请日：2014-10-14
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Jong Woon Kim , Won Kyu Jeung
CPC classification number: B81C1/00158 , B81B3/0062 , B81B3/007 , B81B2201/0235 , B81B2203/053 , B81C1/00484 , B81C1/00531 , B81C1/00539 , B81C1/00571 , B81C2201/01 , B81C2201/0132 , B81C2201/0133 , B81C2201/014 , C09K13/00 , C09K13/08 , G01C19/56 , G01P15/0802 , G01P15/0922 , G01P15/18 , G01P2015/084 , G01P2015/0871
Abstract: Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.
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52.发明授权Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate 有权一种用于制造装置的方法，所述装置包括在悬置在半埋在衬底上的绝缘垫上的悬置元件和所述衬底之间形成的空腔公开(公告)号：US09029178B2
公开(公告)日：2015-05-12
申请号：US14355770
申请日：2012-11-08
Inventor： Vincent Larrey , Jean-Philippe Polizzi
CPC classification number: B81C1/00158 , B06B1/0292 , B81B2203/0307 , B81C1/00039 , B81C2201/01 , G01D5/02
Abstract: A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed.
Abstract translation: 一种用于制造装置的方法，所述装置包括限定在至少一个给定半导体材料中的基板和搁置在从所述基板突出的绝缘柱的顶部上的膜之间的多个空腔，所述方法允许所述空腔或空腔的高度独立于 绝缘柱的高度和允许形成不同高度的空腔。
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53.发明申请METHOD FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE 有权用于生产包含在基片和该基板上半埋的绝缘垫上的悬挂元件之间形成的CAVIERS的装置的方法公开(公告)号：US20140295606A1
公开(公告)日：2014-10-02
申请号：US14355770
申请日：2012-11-08
Inventor： Vincent Larrey , Jean-Philippe Polizzi
CPC classification number: B81C1/00158 , B06B1/0292 , B81B2203/0307 , B81C1/00039 , B81C2201/01 , G01D5/02
Abstract: A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed.
Abstract translation: 一种用于制造装置的方法，所述装置包括限定在至少一个给定半导体材料中的基板和搁置在从所述基板突出的绝缘柱的顶部上的膜之间的多个空腔，所述方法允许所述空腔或空腔的高度独立于 绝缘柱的高度和允许形成不同高度的空腔。
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54.发明申请ELECTRICALLY CONDUCTIVE PATTERNS WITH WIDE LINE-WIDTH AND METHODS FOR PRODUCING SAME 审中-公开具有宽线宽的电导电图案及其制造方法
公开(公告)号：WO2016053866A1
公开(公告)日：2016-04-07
申请号：PCT/US2015/052627
申请日：2015-09-28
Applicant: 3M INNOVATIVE PROPERTIES COMPANY
Inventor： CHEN, Chi-fan , CHEN, Wan-chun , LIN, Yu-chih , WANG, Tze, Yuan , LIU, Chia-yuan
CPC classification number: B81C1/00396 , A61B5/14532 , A61B5/150022 , A61B5/150274 , A61B5/150358 , A61B2562/0295 , A61B2562/125 , B01J2219/00382 , B41C1/003 , B41M1/12 , B41M1/26 , B81C1/00 , B81C1/00206 , B81C1/00388 , B81C2201/01 , H01L21/4867 , H05K1/0393 , H05K3/061 , H05K2203/0108 , H05K2203/1545
Abstract: A master tool is provided with an ink pattern on a major surface thereof. The ink pattern is formed by a screen printing process. A stamp-making material is applied to the major surface of the master tool to form a stamp having a stamping pattern being negative to the ink pattern of the master tool. The stamping pattern is inked with an ink composition and contacted with a metalized surface to form a printed pattern on a metalized surface of a substrate according to the stamping pattern. Using the printed pattern as an etching mask, the metalized surface is etched to form electrically conductive traces on the substrate.
Abstract translation: 主工具在其主表面上设置有油墨图案。 油墨图案通过丝网印刷工艺形成。 印模制作材料被施加到主工具的主表面上以形成具有与主工具的油墨图案相反的冲压图案的印模。 冲压图案用油墨组合物着墨，并与金属化表面接触，以根据冲压图案在基材的金属化表面上形成印刷图案。 使用印刷图案作为蚀刻掩模，蚀刻金属化表面以在基板上形成导电迹线。
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55.发明申请PROCEDE AMELIORE DE REALISATION D'UN DISPOSITIF A CAVITES FORMEES ENTRE UN ELEMENT SUSPENDU REPOSANT SUR DES PLOTS ISOLANTS SEMI-ENTERRES DANS UN SUBSTRAT ET CE SUBSTRAT 审中-公开用于生产包含在基板和本基板上半埋的绝缘垫的悬挂元件之间形成的CAVIERS的装置的改进方法
公开(公告)号：WO2013068474A1
公开(公告)日：2013-05-16
申请号：PCT/EP2012/072156
申请日：2012-11-08
Inventor： LARREY, Vincent , POLIZZI, Jean-Philippe
CPC classification number: B81C1/00158 , B06B1/0292 , B81B2203/0307 , B81C1/00039 , B81C2201/01 , G01D5/02
Abstract: L'invention concerne un procédé amélioré de réalisation d'un dispositif comprenant plusieurs cavités (150a,150b) définies entre un substrat (100) à base d'au moins un matériau semi-conducteur donné et une membrane (140) reposant sur le sommet de plots isolants (104a, 104b, 104c) dépassant du substrat, le procédé permettant d'adapter la hauteur de la ou des cavités indépendamment de celle des plots isolants et de réaliser des cavités de hauteurs différentes.
Abstract translation: 本发明涉及一种用于生产装置的改进方法，该方法包括限定在基于至少一个给定半导体材料的基底（100）和搁置在绝缘垫顶部（140）之间的多个空腔（150a，150b） 104a，104b，104c），所述方法允许一个或多个空腔的高度独立于将要生产的不同高度的绝缘垫和空腔的高度来调节。
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Patent Agency Ranking56.发明授权PROCEDE AMELIORE DE REALISATION D'UN DISPOSITIF A CAVITES FORMEES ENTRE UN ELEMENT SUSPENDU REPOSANT SUR DES PLOTS ISOLANTS SEMI-ENTERRES DANS UN SUBSTRAT ET CE SUBSTRAT 有权制造器件的BETWEEN孔洞改进方法悬浮元件在衬底HALBVERGRABENEN INSULATING垫和该基板
公开(公告)号：EP2776364B1
公开(公告)日：2016-01-13
申请号：EP12786958.4
申请日：2012-11-08
Inventor： LARREY, Vincent , POLIZZI, Jean-Philippe
CPC classification number: B81C1/00158 , B06B1/0292 , B81B2203/0307 , B81C1/00039 , B81C2201/01 , G01D5/02
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57.发明公开PROCEDE AMELIORE DE REALISATION D'UN DISPOSITIF A CAVITES FORMEES ENTRE UN ELEMENT SUSPENDU REPOSANT SUR DES PLOTS ISOLANTS SEMI-ENTERRES DANS UN SUBSTRAT ET CE SUBSTRAT 有权制造器件的BETWEEN孔洞改进方法悬浮元件在衬底HALBVERGRABENEN INSULATING垫和该基板
公开(公告)号：EP2776364A1
公开(公告)日：2014-09-17
申请号：EP12786958.4
申请日：2012-11-08
Inventor： LARREY, Vincent , POLIZZI, Jean-Philippe
CPC classification number: B81C1/00158 , B06B1/0292 , B81B2203/0307 , B81C1/00039 , B81C2201/01 , G01D5/02
Abstract: The invention relates to an improved process for producing a device comprising a plurality of cavities (150a, 150b) defined between a substrate (100) based on at least one given semiconductor material and a membrane (140) resting on the tops of insulating pads (104a, 104b, 104c) that protrude from the substrate, the process allowing the height of the one or more cavities to be adjusted independently of that of the insulating pads and cavities of different heights to be produced.
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公开(公告)号：EP3201004A4
公开(公告)日：2018-05-30
申请号：EP15846152
申请日：2015-09-28
Applicant: 3M INNOVATIVE PROPERTIES CO
Inventor： CHEN CHI-FAN , CHEN WAN-CHUN , LIN YU-CHIH , WANG TZE YUAN , LIU CHIA-YUAN
CPC classification number: B81C1/00396 , A61B5/14532 , A61B5/150022 , A61B5/150274 , A61B5/150358 , A61B2562/0295 , A61B2562/125 , B01J2219/00382 , B29C33/3842 , B41C1/003 , B41K1/00 , B41M1/12 , B41M1/26 , B81C1/00 , B81C1/00206 , B81C1/00388 , B81C2201/01 , H01L21/4867 , H05K1/0393 , H05K3/061 , H05K2203/0108 , H05K2203/1545
Abstract: A master tool is provided with an ink pattern on a major surface thereof. The ink pattern is formed by a screen printing process. A stamp-making material is applied to the major surface of the master tool to form a stamp having a stamping pattern being negative to the ink pattern of the master tool. The stamping pattern is inked with an ink composition and contacted with a metalized surface to form a printed pattern on a metalized surface of a substrate according to the stamping pattern. Using the printed pattern as an etching mask, the metalized surface is etched to form electrically conductive traces on the substrate.
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59.发明公开ELECTRICALLY CONDUCTIVE PATTERNS WITH WIDE LINE-WIDTH AND METHODS FOR PRODUCING SAME 审中-公开具有宽线宽的导电图案及其制造方法
公开(公告)号：EP3201004A1
公开(公告)日：2017-08-09
申请号：EP15846152.5
申请日：2015-09-28
Applicant: 3M Innovative Properties Company
Inventor： CHEN, Chi-Fan , CHEN, Wan-Chun , LIN, Yu-Chih , WANG, Tze, Yuan , LIU, Chia-Yuan
CPC classification number: B81C1/00396 , A61B5/14532 , A61B5/150022 , A61B5/150274 , A61B5/150358 , A61B2562/0295 , A61B2562/125 , B01J2219/00382 , B41C1/003 , B41M1/12 , B41M1/26 , B81C1/00 , B81C1/00206 , B81C1/00388 , B81C2201/01 , H01L21/4867 , H05K1/0393 , H05K3/061 , H05K2203/0108 , H05K2203/1545
Abstract: A master tool is provided with an ink pattern on a major surface thereof. The ink pattern is formed by a screen printing process. A stamp-making material is applied to the major surface of the master tool to form a stamp having a stamping pattern being negative to the ink pattern of the master tool. The stamping pattern is inked with an ink composition and contacted with a metalized surface to form a printed pattern on a metalized surface of a substrate according to the stamping pattern. Using the printed pattern as an etching mask, the metalized surface is etched to form electrically conductive traces on the substrate.
Abstract translation: 主工具在其主表面上设有墨水图案。 油墨图案通过丝网印刷工艺形成。 将印章制作材料施加到母版工具的主表面以形成具有对母版工具的印刷图案为负的印章图案的印章。 冲压图案用油墨组合物着色并且与金属化表面接触以根据冲压图案在基底的金属化表面上形成印刷图案。 使用印刷图案作为蚀刻掩模，蚀刻金属化表面以在衬底上形成导电迹线。
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公开(公告)号：JP2018500193A
公开(公告)日：2018-01-11
申请号：JP2017517006
申请日：2015-09-28
Applicant: スリーエム イノベイティブ プロパティズ カンパニー
Inventor： チェン チー−ファン , チェン ワン−チュン , リン ユイ−チー , ワーン ツェ ユエン , リウ チア−ユエン
CPC classification number: B81C1/00396 , A61B5/14532 , A61B5/150022 , A61B5/150274 , A61B5/150358 , A61B2562/0295 , A61B2562/125 , B01J2219/00382 , B41C1/003 , B41K1/00 , B41M1/12 , B41M1/26 , B81C1/00 , B81C1/00206 , B81C1/00388 , B81C2201/01 , H01L21/4867 , H05K1/0393 , H05K3/061 , H05K2203/0108 , H05K2203/1545
Abstract: 主表面上にインクパターンを有する、マスターツールが提供される。このインクパターンは、スクリーン印刷プロセスによって形成される。スタンプ作製材料が、マスターツールの主表面に適用されることにより、マスターツールのインクパターンに対してネガであるスタンピングパターンを有する、スタンプが形成される。このスタンピングパターンが、インク組成物でインク付けされ、金属化表面と接触されることにより、基材の金属化表面上に、スタンピングパターンに従って印刷パターンが作り出される。この印刷パターンをエッチングマスクとして使用して、その金属化表面をエッチングすることにより、基材上に導電性トレースが形成される。
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