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    마크로 조명 장치
    52.
    发明公开
    마크로 조명 장치 失效
    微距照明装置

    公开(公告)号：KR1020040088454A

    公开(公告)日：2004-10-16

    申请号：KR1020047001014

    申请日：2003-05-28

    Applicant: 올림푸스 가부시키가이샤

    Inventor： 간자끼가즈히로

    IPC: G01N21/84 ,  G01N21/88

    CPC classification number: G01N21/8806 ,  G01N21/958 ,  G01N2021/8812 ,  G01N2201/06126

    Abstract: 광원(23)과, 이 광원(23)으로부터 출력된 조명광을 수속시키는 프레넬 렌즈(24)와, 조명광을 산란시키거나 또는 그대로 통과시킬지의 절환을 실시하는 액정 산란판(25)과, 광화이버(26)의 출사단과 프레넬 렌즈(24)를 조명상자(22)에 수납하여 일체적으로 이동시켜 유리 기판(3) 면상의 마크로 조명 영역(W)을 이동시키는 조명 영역 이동 기구(28)를 구비하였다.

    Automatic high speed optical inspection system
    56.
    发明公开
    Automatic high speed optical inspection system 失效
    自动高速光学检测系统

    公开(公告)号：EP0426166A3

    公开(公告)日：1992-01-08

    申请号：EP90120932.0

    申请日：1990-10-31

    Applicant: KLA INSTRUMENTS CORP.

    Inventor： Chadwick, Curt H. ,  Sholes, Robert H. ,  Greene, John D. ,  Tucker, Francis D. III ,  Fein, Michael E. ,  Jann, P.C. ,  Harvey, David J. ,  Bell, William

    IPC: G01N21/88 ,  G01R31/308 ,  G06T7/60

    CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8907 ,  G01N2021/8908 ,  G01N2021/95615 ,  G01N2021/95638 ,  G01N2201/06126 ,  G01R31/309 ,  G01R31/311

    Abstract: Methods and apparatus for inspecting surface features of a substrate. In each configuration, at least one TDI sensor is used to image the portions of interest of the substrate, with those portions illuminated either with substantially uniform illumination. In one configuration, a substrate is compared to the expected characteristic features prestored in a memory. In a second configuration, a first and second pattern in a region of the surface of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other without the prestoring of an expected pattern. This is accomplished by illuminating at least the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Here, the comparison reveals whether the two patterns agree or not. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. Each time the comparison is performed, it is noted whether or not there has been agreement between the two patterns and which two patterns where compared. After all of the patterns are sequentially compared, the bad ones are identified by identifying those that did not compare with other patterns in the test process. This inspection technique is useful for doing die-to-die inspections. A variation of the second configuration uses two TDI sensors to simultaneously image the first and second patterns, thus eliminating the need for the temporary memory. In this configuration, the two patterns are simultaneous imaged and compared, then additional patterns are compared sequentially, in the same manner with the results of the comparisons and the pattern locations stored determine which patterns are bad when the inspection of all patterns is completed.

    Automatic high speed optical inspection apparatus and method
    57.
    发明公开
    Automatic high speed optical inspection apparatus and method 失效
    自动化设备Geschwindigkeit arbeitende optischePrüfungsvorrichtungund Verfahren。

    公开(公告)号：EP0426182A2

    公开(公告)日：1991-05-08

    申请号：EP90120956.9

    申请日：1990-10-31

    Applicant: KLA INSTRUMENTS CORP.

    Inventor： Chadwick, Curt H. ,  Sholes, Robert H. ,  Greene, John D. ,  Tucker, Francis D., III ,  Fein, Michael E. ,  Jann, P. C. ,  Harvey, David J. ,  Bell, William

    IPC: G01N21/88 ,  G01R31/308 ,  G06F15/62 ,  G01R31/00

    CPC classification number: G01R31/308 ,  G01N21/64 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2021/95638 ,  G01N2201/06126 ,  G01N2201/0826

    Abstract: Methods and apparatus for inspecting surface features of a substrate. In each configuration, at least one TDI sensor is used to image the portions of interest of the substrate, with those portions illuminated either with substantially uniform illumination or critical illumination. In one configuration, a substrate, is compared to the expected characteristic features prestored in a memory. In a second configuration, a first and second pattern in a region of the surface of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other without the prestoring of an expected pattern. This is accomplished by illuminating at least the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Here, the comparison reveals whether the two patterns agree or not. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. Each time the comparison is performed, it is noted whether or not there has been agreement between the two patterns and which two patterns where compared. After all of the patterns are sequentially compared, the bad ones are identified by identifying those that did not compare with other patterns in the test process. This inspection technique is useful for doing die-to-die inspections, as well as repeating pattern inspections within the same die. A variation of the second configuration uses two TDI sensors to simultaneously image the first and second patterns, thus eliminating the need for the temporary memory. In this configuration, the two patterns are simultaneous imaged and compared, then additional patterns are compared sequentially, in the same manner with the results of the comparisons and the pattern locations stored determine which patterns are bad when the inspection of all patterns is completed.

    Abstract translation: 用于检查基板的表面特征的方法和装置。 在每个配置中，使用至少一个TDI传感器对基板的感兴趣部分进行成像，其中那些部分以基本均匀的照明或临界照明照亮。 在一种配置中，将衬底与预先存储在存储器中的预期特征特征进行比较。 在第二配置中，通过将一个图案与另一个基板的一个图案进行比较，并且注意到它们是否彼此一致而不预先预定图案，来检查至少一个基板的表面区域中的第一和第二图案。 这是通过照亮至少两个图案，对第一图案进行成像并将其特征存储在临时存储器中，然后对第二图案进行成像并将其与来自临时存储器的存储特性进行比较来实现的。 在这里，比较显示两种模式是否一致。 然后比较继续顺序地与第二图案相对于新的第二图案在下一个成像/比较序列中成为第一图案。 每次执行比较时，都注意到两种模式之间是否存在一致性，以及两种模式之间的比较。 在所有模式顺序比较之后，通过识别在测试过程中与其他模式不相比较的那些模式来识别不良模式。 该检查技术对于进行模 - 模检查以及在相同模具内重复图案检查是有用的。 第二配置的变化使用两个TDI传感器来同时对第一和第二图案进行成像，因此不需要临时存储器。 在该配置中，两个图案被同时成像和比较，然后以与比较的结果相同的方式对附加图案进行比较，并且存储的图案位置确定当所有图案的检查完成时哪些图案是不好的。

    마크로 조명 장치
    58.
    发明授权
    마크로 조명 장치 失效
    宏观照明设备

    公开(公告)号：KR100738741B1

    公开(公告)日：2007-07-12

    申请号：KR1020047001014

    申请日：2003-05-28

    Applicant: 올림푸스 가부시키가이샤

    Inventor： 간자끼가즈히로

    IPC: G01N21/84 ,  G01N21/88

    CPC classification number: G01N21/8806 ,  G01N21/958 ,  G01N2021/8812 ,  G01N2201/06126

    Abstract: 광원(23)과, 이 광원(23)으로부터 출력된 조명광을 수속시키는 프레넬 렌즈(24)와, 조명광을 산란시키거나 또는 그대로 통과시킬지의 절환을 실시하는 액정 산란판(25)과, 광화이버(26)의 출사단과 프레넬 렌즈(24)를 조명상자(22)에 수납하여 일체적으로 이동시켜 유리 기판(3) 면상의 마크로 조명 영역(W)을 이동시키는 조명 영역 이동 기구(28)를 구비하였다.
    광원, 조명광, 산란판, 광화이버, 유리 기판

    INSPECTION DEVICE FOR OBJECTS WITH A SPHERICAL SURFACE
    60.
    发明授权
    INSPECTION DEVICE FOR OBJECTS WITH A SPHERICAL SURFACE 有权
    检查设备与球形表面物体

    公开(公告)号：EP1676124B1

    公开(公告)日：2008-11-12

    申请号：EP04774958.5

    申请日：2004-09-21

    Applicant: Staalkat International B.V.

    Inventor： VAN SOEST, Robert

    IPC: G01N21/88 ,  G01N21/95 ,  G01N33/08

    CPC classification number: G01N33/025 ,  G01N21/8806 ,  G01N21/951 ,  G01N33/08 ,  G01N2201/06 ,  G01N2201/06126

    Abstract: A device (1) for inspecting objects with a substantially spherical surface, such as for example eggs or fruit, comprises optical observation means (8) for observing the objects. The device has a supporting surface (10) for supporting the objects. There is a light source for illuminating the objects. The device also comprises a box (2) with reflective walls (3a, 4b and 4a shown) which is positioned above the supporting surface (11). The light source and the observation means (8) are accomadated in the box (2). A plurality of objects can be placed next to one another on the supporting surface (10) and can be illuminated equally well.

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