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    System and Method for Oblique Incidence Scanning with 2D Array of Spots
    53.
    发明申请
    System and Method for Oblique Incidence Scanning with 2D Array of Spots 有权
    用2D阵列进行倾斜扫描的系统和方法

    公开(公告)号：US20160327493A1

    公开(公告)日：2016-11-10

    申请号：US14982747

    申请日：2015-12-29

    Applicant: KLA-Tencor Corporation

    Inventor： Jamie M. Sullivan ,  Yevgeniy Churin

    IPC: G01N21/88 ,  G02B5/32 ,  G02B27/12 ,  G02F1/33 ,  G02B27/10 ,  G01N21/95 ,  G02B26/12

    CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/0635 ,  G01N2201/104 ,  G01N2201/105 ,  G01N2201/106 ,  G02B26/101 ,  G02B27/1086 ,  G02B27/123 ,  G02F1/33

    Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.

    Abstract translation: 在斜角多光束点扫描晶片检查系统中产生多个光束线的系统包括：束扫描装置，被配置为扫描照射束;物镜相对于样品的表面以倾斜角度定向;以及 垂直于样品上的第一扫描方向的光轴和位于物镜和束扫描装置之间的一个或多个光学元件。 一个或多个光学元件将光束分成两个或更多个偏移光束，使得两个或更多个偏移光束在垂直于第一方向的至少第二方向上分离。 一个或多个光学元件进一步修改两个或多个偏移光束的相位特性，使得两个或更多个偏移光束在扫描期间同时聚焦在样本上。

    Data acquisition method using a laser scanner
    54.
    发明授权
    Data acquisition method using a laser scanner 有权
    数据采集​​方法采用激光扫描仪

    公开(公告)号：US08222615B2

    公开(公告)日：2012-07-17

    申请号：US12666035

    申请日：2009-02-13

    Applicant: Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

    Inventor： Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

    IPC: G01J1/58

    CPC classification number: G02B21/26 ,  G01N21/278 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2201/104 ,  G01N2201/11 ,  G02B21/0076

    Abstract: Method has laser scanner for pixel-precise imaging of fluorescent samples having fluorescent dyes. The scanner has sample table, laser and first optical system providing laser beam for exciting the samples, scanner head with deflecting element for scanning sample, first lens, second optical system for forwarding emission beams triggered by the laser beam and deflected by first lens and deflecting element to a detector, position encoder emitting position signals indicating location of the scanner head, electronic element for filtering the detector signals with a time constant and an A/D converter for digitizing the filtered detector signals. The filtered detector signals and the position encoder signals are acquired independently, in parallel and continuously by a computer and are related to a common time base, the A/D conversion being carried out often so that each pixel of an image is always assigned more than one data point.

    Abstract translation: 方法具有用于具有荧光染料的荧光样品的像素精确成像的激光扫描仪。 扫描仪具有样品台，激光和第一光学系统，提供用于激发样品的激光束，扫描头具有用于扫描样品的偏转元件，第一透镜，用于转发由激光束触发并由第一透镜偏转的发射光束的第二光学系统 发送位置信号的位置编码器，用于指示扫描仪头部的位置，用于对时间常数进行检测器信号的滤波的电子元件和用于数字化滤波的检测器信号的A / D转换器。 经滤波的检测器信号和位置编码器信号由计算机并行并连续地获取并且与公共时基相关，经常执行A / D转换，使得图像的每个像素总是被分配多于 一个数据点。

    Multi-spot scanning system and method
    55.
    发明授权
    Multi-spot scanning system and method 有权
    多点扫描系统及方法

    公开(公告)号：US08194301B2

    公开(公告)日：2012-06-05

    申请号：US12042252

    申请日：2008-03-04

    Applicant: Guoheng Zhao ,  Rex Runyon ,  Mehdi Vaez-Iravani

    Inventor： Guoheng Zhao ,  Rex Runyon ,  Mehdi Vaez-Iravani

    IPC: G02B26/08

    CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2201/10 ,  G01N2201/104 ,  G02B26/123 ,  Y10S359/90

    Abstract: A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.

    Abstract translation: 使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供大量斑点的可扩展性以及消除通道之间的串扰。 多点扫描技术可以为斑点阵列（1D或2D）选择多个斑点，确定斑点之间的距离以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。 执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。 这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。 在一个实施例中，扫描开始并在晶片上期望的扫描区域外部结束以确保全扫描覆盖。

    MICROSCOPE
    56.
    发明申请
    MICROSCOPE 审中-公开
    显微镜

    公开(公告)号：US20100014156A1

    公开(公告)日：2010-01-21

    申请号：US12438994

    申请日：2007-08-08

    Applicant: Yoshinori Iketaki

    Inventor： Yoshinori Iketaki

    IPC: G02B21/06

    CPC classification number: G02B21/16 ,  G01N21/6458 ,  G01N2021/6415 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1053 ,  G02B5/20 ,  G02B5/3083 ,  G02B21/002 ,  G02B26/06 ,  G02B2207/113

    Abstract: A microscope for observing a sample containing a substance having at least two excited quantum states includes a pump light source 21 for emitting pump light, an erase light source 22 for emitting erase light, a light combining section 23 to 26 for coaxially combining the pump light and the erase light, a light collecting section 62 for collecting the combined lights, a scanning section 44 and 45 for scanning the sample with the combined lights, a detecting section 50 for detecting photoresponsive signals generated from the sample, a wavelength selecting element 42 arranged in the light path of the combined lights and provided with an erase light selecting region having a high wavelength selectivity for the erase light and with a pump light selecting region having a high wavelength selectivity for the pump light, and a space modulating element 43 arranged in the light path of the combined lights for spatially modulating the erase light corresponding to the erase light selecting region of the wavelength selecting element.

    Abstract translation: 用于观察含有具有至少两个激发量子态的物质的样品的显微镜包括用于发射泵浦光的泵浦光源21，用于发射擦除光的擦除光源22，用于同时组合泵浦光的光合成部23至26 擦除光，用于收集组合光的光收集部分62，用于组合光扫描样本的扫描部分44和45;检测部分50，用于检测从样本产生的光响应信号;波长选择元件42，被布置 在组合光的光路中设置有对于擦除光具有高波长选择性的擦除光选择区域和对泵浦光具有高波长选择性的泵浦光选择区域，以及空间调制元件43，其布置在 用于空间调制对应于擦除光选择区域的擦除光的组合光的光路 的波长选择元件。

    VISION INSPECTION SYSTEM AND METHOD FOR INSPECTING WORKPIECE USING THE SAME
    57.
    发明申请
    VISION INSPECTION SYSTEM AND METHOD FOR INSPECTING WORKPIECE USING THE SAME 有权
    视觉检查系统及使用其检查工作的方法

    公开(公告)号：US20090087080A1

    公开(公告)日：2009-04-02

    申请号：US12266437

    申请日：2008-11-06

    Applicant: Woo Jung Ahn ,  Jung Hwan Kim ,  Hee Wook You

    Inventor： Woo Jung Ahn ,  Jung Hwan Kim ,  Hee Wook You

    IPC: G06K9/00

    CPC classification number: G01N21/88 ,  G01N21/8901 ,  G01N21/8903 ,  G01N2201/104

    Abstract: A vision inspection system and a workpiece inspection method are used in inspecting a workpiece. The vision inspection system includes a level block having an upper surface whose opposite end regions are defined as a first position and a second position. A first transfer device has a table for supporting the workpiece. The first transfer device is installed on the upper surface of the level block for rectilinearly moving the table between the first position and the second position. A camera is arranged above the level block for taking an image of the workpiece to output image data. A second transfer device is installed on the upper surface of the level block for rectilinearly moving the camera between the first position and the second position. A computer is connected to the first transfer means, the camera and the second transfer means to control them in a specified manner.

    Abstract translation: 在检查工件时使用视觉检查系统和工件检查方法。 视觉检查系统包括具有上表面的水平块，其相对的端部区域被定义为第一位置和第二位置。 第一传送装置具有用于支撑工件的工作台。 第一传送装置安装在水平块的上表面上，用于在第一位置和第二位置之间直线移动工作台。 摄像机布置在水平块上方，用于拍摄工件的图像以输出图像数据。 第二传送装置安装在水平块的上表面上，用于在第一位置和第二位置之间直线地移动照相机。 计算机连接到第一传送装置，照相机和第二传送装置，以指定方式控制它们。

    Non-destructive testing by laser scanning
    59.
    发明授权
    Non-destructive testing by laser scanning 失效
    通过激光扫描进行非破坏性测试

    公开(公告)号：US4824250A

    公开(公告)日：1989-04-25

    申请号：US191744

    申请日：1988-05-05

    Applicant: John W. Newman

    Inventor： John W. Newman

    IPC: G01N21/88 ,  G01N29/04

    CPC classification number: G01N21/88 ,  G01N2021/1759 ,  G01N2201/104

    Abstract: The invention provides a method and apparatus for non-destructive testing of bonded structures, such as laminated or composite materials. A beam of coherent light is directed successively onto each point of the object. The reflected beam creates a speckle pattern. The pattern is observed once while the object is stationary and once while the object is mechanically excited. If the point being observed is free of defects, the speckle pattern will be substantially unaffected by the vibration of the excited object. If the point is defective, vibration will blur the speckle pattern. The entire object is scanned, point by point, and the results of the comparison of the speckle patterns obtained for each point are stored and displayed. In another embodiment, the object is made to vibrate continuously, and the apparatus determines whether the speckle pattern is sharp or blurred, for each point being scanned. The sharpness of the speckle pattern can be inferred from the measured intensity of the speckle pattern, or it can be calculated directly by a suitable algorithm. In general, if the detector has a nonlinear response characteristic, the total intensity of the speckle pattern will be lower when the pattern is blurred, and higher when the pattern is sharp. A low intensity therefore indicates that the point on the object is defective. As in the first embodiment, the results of the analysis are stored in a computer memory and displayed on a video monitor.

    Abstract translation: 本发明提供了一种用于粘结结构如层压或复合材料的非破坏性测试的方法和装置。 一束相干光连续地指向物体的每个点。 反射光束产生斑点图案。 当物体静止时观察一次，一旦物体被机械激发，就会观察到该图案。 如果观察点没有缺陷，则斑点图案将基本上不受被激发物体的振动的影响。 如果点有缺陷，振动会使斑点图案模糊。 逐点扫描整个物体，并存储并显示每个点获得的斑点图案的比较结果。 在另一个实施例中，使物体连续地振动，并且该装置确定斑点图案是否锐利或模糊，对于每个被扫描的点。 斑点图案的清晰度可以从斑点图案的测量强度推断出来，或者可以通过适当的算法直接计算。 通常，如果检测器具有非线性响应特性，则当图案模糊时，斑点图案的总强度将较低，并且当图案清晰时，散斑图案的总强度将较低。 因此，低强度表示物体上的点有缺陷。 与第一实施例一样，分析结果存储在计算机存储器中并显示在视频监视器上。

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