公开(公告)号：JP5291300B2

公开(公告)日：2013-09-18

申请号：JP2007135981

申请日：2007-05-22

Applicant: 株式会社渡辺商行

Inventor： 晃 植原 ,  昌之 都田 ,  優 梅田

IPC: H01L21/02 ,  B65G49/07 ,  H01L21/677

CPC classification number: H01L21/67742 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67748

Abstract: Provided is a work processing device which can hold a plurality of works arranged coaxially and apart from one another in the vertical direction which orthogonally intersects the work convey direction (horizontal direction), which requires few constrains for an installation space. The work processing device includes: a work processing unit (10) which has a lot (13) for multi-mounting works (W) apart from one another in the vertical direction and processes the works in the multi-supported state; a work introduction unit (20) connected to the upper or lower portion of the work processing unit (10); and a work discharge unit (30) connected to the lower or upper portion of the work processing unit (10). Shutter members (23, 33) which shut off the communication state with the atmosphere side are arranged at an introduction opening (22) and a discharge opening (32) provided in the work introduction unit (20) and the work discharge unit (30).

公开(公告)号：JP5291281B2

公开(公告)日：2013-09-18

申请号：JP2004189444

申请日：2004-06-28

Applicant: 株式会社渡辺商行 ,  昌之 都田

Inventor： 昌之 都田 ,  優 梅田

IPC: B65G51/03 ,  B65G49/07 ,  H01L21/677

CPC classification number: B65G51/03 ,  B65G47/24 ,  H01L21/67784

Abstract: A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.

公开(公告)号：JPWO2012005344A1

公开(公告)日：2013-09-05

申请号：JP2012523925

申请日：2011-07-08

Applicant: 株式会社渡辺商行

Inventor： 共平 綱島 ,  共平 綱島 ,  一樹 楠原 ,  一樹 楠原

IPC: H01L21/677 ,  B65G49/07 ,  H01L21/304

CPC classification number: H01L21/67092 ,  H01L21/67057

Abstract: 枚葉化された多数枚のウエハ(W)を密着状態の横置きで収納すると共に少なくとも左右に開放するカセット(12)と、該カセットを着脱可能支持し且つ少なくとも左右に開放するカセット支持体(13)と、該カセット支持体を前記カセットと一体に昇降させる昇降装置(14)と、該昇降装置が下降した際に前記カセット支持体が前記カセットと一体に浸される液体を収容した液槽(16)と、該液槽内に設置されて前記カセット支持体の側面から多数枚のウエハに向って微細気泡を噴出するノズル(17)と、該ノズルから噴出される微細気泡を発生させる微細気泡発生装置(18)とを備えていることを特徴とするウエハ分離装置(11)。

公开(公告)号：JP5227078B2

公开(公告)日：2013-07-03

申请号：JP2008131238

申请日：2008-05-19

Applicant: 株式会社渡辺商行 ,  隆 杉野

Inventor： 隆 杉野 ,  昌樹 楠原 ,  優 梅田

IPC: H01L21/318 ,  H01L21/331 ,  H01L21/335 ,  H01L21/337 ,  H01L21/338 ,  H01L29/20 ,  H01L29/737 ,  H01L29/778 ,  H01L29/812

CPC classification number: H01L29/66924 ,  H01L29/2003 ,  H01L29/66318 ,  H01L29/66462 ,  H01L29/7371 ,  H01L29/7787

公开(公告)号：JP5221840B2

公开(公告)日：2013-06-26

申请号：JP2005040991

申请日：2005-02-17

Applicant: 株式会社渡辺商行 ,  隆 杉野

Inventor： 隆 杉野 ,  昌樹 楠原 ,  優 梅田

IPC: C23C16/38 ,  H01L21/318 ,  C23C16/452 ,  H01L21/768 ,  H01L23/522 ,  H01L23/532

公开(公告)号：JP5074946B2

公开(公告)日：2012-11-14

申请号：JP2008030866

申请日：2008-02-12

Applicant: 隆 杉野 ,  株式会社渡辺商行

Inventor： 隆 杉野 ,  優 梅田 ,  昌樹 楠原

IPC: H01L21/314 ,  C23C16/30 ,  C23C16/34 ,  C23C16/36 ,  H01L21/31 ,  H01L21/318 ,  H01L21/768 ,  H01L23/532

CPC classification number: H01L21/76829 ,  C23C16/30 ,  C23C16/36 ,  H01L21/318 ,  H01L21/76801 ,  H01L21/76828 ,  H01L21/76835

Abstract: A film formation method enables the creation of a low dielectric constant boron-carbon-nitrogen thin film. The film formation method includes the steps of generating plasma in a film formation chamber, reacting boron and carbon with nitrogen atoms inside the film formation chamber, forming a boron-carbon-nitrogen film on a substrate, and thereafter subjecting the formed film to light exposure (e.g., ultraviolet and/or infrared).

公开(公告)号：JP5057622B2

公开(公告)日：2012-10-24

申请号：JP2001297773

申请日：2001-09-27

Applicant: 株式会社Adeka ,  株式会社渡辺商行

Inventor： 桂子 三瓶 ,  啓史 上原 ,  仁一 尾見 ,  嗣貴 旭岡 ,  有康 栗田 ,  博 森田 ,  昌樹 楠原 ,  弘行 渡部 ,  真木雄 高橋

IPC: C01B33/158 ,  C03B8/02 ,  C01B33/154 ,  C03B19/10 ,  C03B20/00 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1065 ,  C03C2201/10 ,  C03C2203/24

公开(公告)号：JP2011233931A

公开(公告)日：2011-11-17

申请号：JP2011173287

申请日：2011-08-08

Applicant: M Watanabe & Co Ltd ,  Toda Masayuki ,  株式会社渡辺商行 ,  昌之 都田

Inventor： TSUDA MASAYUKI ,  KUSUHARA MASAKI ,  DOI MIKIO ,  UMEDA MASARU ,  FUKAGAWA MITSURU ,  KANNO YOICHI ,  UCHIZAWA OSAMU ,  YAMAMOTO KOHEI ,  MEGURO TOSHIKATSU

IPC: H01L21/31 ,  C23C16/448

Abstract: PROBLEM TO BE SOLVED: To provide a vaporizer for an MOCVD capable of obtaining a vaporized gas in which a material solution is uniformly dispersed, and further to provide a vaporizing method of the material solution.SOLUTION: A vaporizer for an MOCVD comprises: (1) a dispersion section 8 that includes a gas inlet port 4 for introducing a pressurized carrier gas 3 into a gas passage, means for supplying a raw material solution 5a to the gas passage, and a gas outlet 7 for sending a carrier gas containing the raw material solution to a vaporization section 22; and (2) the vaporization section 22 that includes a vaporizing tube 20a of which one end is connected to a reaction tube of the MOCVD device and other end is connected to the gas outlet 7 and heating means for heating the vaporizing tube 20a, and the vaporization section 22 heats and vaporizes the carrier gas containing the raw material solution supplied from a dispersion section 8. In the vaporizer for an MOCVD, (3) the dispersion section 8 comprises: a dispersion section main body 1 that includes a cylindrical hollow section; and a rod 10 having a smaller outer diameter than an inner diameter of the cylindrical hollow section, and includes spiral grooves 70 on the evaporator 22 side of an outer periphery of the rod 10. The rod 10 is inserted through the cylindrical hollow section.

Abstract translation: 要解决的问题：提供一种能够获得材料溶液均匀分散的汽化气体的MOCVD蒸发器，并且进一步提供材料溶液的蒸发方法。 解决方案：用于MOCVD的蒸发器包括：（1）分散部分8，其包括用于将加压载气3引入气体通道的气体入口4，用于将原料溶液5a供应到气体通道 和用于将含有原料溶液的载气送到蒸发部22的气体出口7; 和（2）蒸发部分22，其包括一端与MOCVD装置的反应管连接的蒸发管20a和另一端连接到气体出口7和加热蒸发管20a的加热装置， 蒸发部22对从分散部8供给的原料溶液的载气进行加热蒸发。在MOCVD蒸发器中，（3）分散部8包括：分散部主体1，其包括圆筒状的中空部; 以及具有比圆筒形中空部分的内径小的外径的杆10，并且在杆10的外周的蒸发器22侧上包括螺旋槽70.杆10穿过圆柱形中空部分插入。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP4649677B2

公开(公告)日：2011-03-16

申请号：JP2004200985

申请日：2004-07-07

Applicant: 株式会社Adeka ,  株式会社渡辺商行

Inventor： 仁一 尾見 ,  博 森田

IPC: C01B33/18

公开(公告)号：JP2010173857A

公开(公告)日：2010-08-12

申请号：JP2010059402

申请日：2010-03-16

Applicant: Watanabe Shoko:Kk ,  株式会社渡辺商行

Inventor： TANIKAI MICHIO ,  TSUJIMURA MASAYUKI ,  TSUDA MASAYUKI ,  KUSUHARA MASAKI

IPC: B65G51/03 ,  B65G49/06 ,  H01L21/677

Abstract: PROBLEM TO BE SOLVED: To provide a floating conveying device capable of quickly centering a plate-like body by eliminating influences of the shape and the weight of the plate-like body.
SOLUTION: This floating conveying device includes: a base 1 including a plate-like conveying surface (a top surface 1
1 ) to send the plate-like bodies along the conveying surface; a first injecting means for injecting gas from the conveying surface to float the plate-like bodies from the conveying surface and to move the floated plate-like bodies along the conveying surface; and a second injecting means (2F
1 -2H
1 and 2F
2 -2H
2) for injecting gas in order to hold the plate-like bodies floated by the first injecting means in the center position I
2 of the conveying surface.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供一种通过消除板状体的形状和重量的影响而能够快速地对准板状体的浮动输送装置。 解决方案：该浮动输送装置包括：基部1，其包括板状输送表面（顶表面1 1 ），以沿着输送表面发送板状体; 第一喷射装置，用于从输送表面喷射气体，以使板状体从输送表面浮起并使浮动的板状体沿输送表面移动; 和用于将气体注入的第二注入装置（2F 1 -2H 1 和2F 2 -2H 2） 以便将由第一喷射装置浮动的板状体保持在输送表面的中心位置I SB <2>。 版权所有（C）2010，JPO＆INPIT