公开(公告)号：JPH103853A

公开(公告)日：1998-01-06

申请号：JP17288396

申请日：1996-06-13

Applicant: CANON KK

Inventor： AEBA TOSHIAKI ,  MITOME MASANORI ,  NOMA TAKASHI ,  TAKADA KAZUHIRO

IPC: H01J1/30 ,  H01J1/316 ,  H01J9/02 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To provide an electron emitting element, in which a leakage and inactive area is reduced, by depositing an element electrode material on a substrate, and forming a narrow clearance between a pair of element electrodes and an electrode so as to form an electron emitting part in the narrow clearance. SOLUTION: A quarts glass is used as a substrate 1, and after sufficiently washing the substrate with an organic solvent, Ti and Pt with predetermined thicknesses are deposited on the substrate 1 by vacuum evaporation so as to form the element electrode material. Then, a part between the element electrodes is locally eliminated by the focusing ion beam(FIB) so as to form a narrow clearance between the element electrodes 2, 3 at a predetermined distances W, L. A predetermined voltage is applied between the element electrodes 2, 3, and the value of the flowing current is measured so as to confirm the insulation between the electrodes 2, 3. A predetermined voltage is applied between the electrodes 2, 3 in a vacuum container for electrifying (activation processing), and the element current and the emission current, the value of which was 0 before the activation processing is performed, is remarkably changed for increase, and an electron emitting part 5 is formed.

公开(公告)号：JPH103848A

公开(公告)日：1998-01-06

申请号：JP17287996

申请日：1996-06-13

Applicant: CANON KK

Inventor： MITOME MASANORI

IPC: H01J9/02 ,  H01J1/30 ,  H01J1/316 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To provide an electron emission element as an electron beam source capable of realizing a high-quality image forming device. SOLUTION: Element electrodes 2 and 3 are opposite to each other via a gap 4, a high-melting point metal 5 is deposited on both sides of the gap part 4, and an electron emission part 6 having carbon and/or carbon compound is formed in the gap 4. Thus, the position and shape of the electron emission part 6 can be controlled precisely, uniformity of element characteristics is realized, and an element with high electron emission efficiency and durability is obtained.

公开(公告)号：JPH0945221A

公开(公告)日：1997-02-14

申请号：JP21142495

申请日：1995-07-28

Applicant: CANON KK

Inventor： MITOME MASANORI ,  OKUDA MASAHIRO

IPC: H01J31/12 ,  H01J1/30 ,  H01J29/04

Abstract: PROBLEM TO BE SOLVED: To prevent defects of a picture element and provide a large display panel extremely large in number of picture elements by arranging a plurality of surface condition type of electron emission elements in parallel or in bridges. SOLUTION: A display panel is obtained by arranging a plurality of surface conduction type of electron emission elements as a single electron source. At that time, the above elements are arranged in parallel or in bridges. Hereby, the defect of picture elements is prevented, making use of any one electron emitting element usually and using other element when the element ceases to function. Moreover, the above elements are incorporated as different electric resistance, or a rectifier is put in the line in series to control currents, and in normal condition, the forming is controlled, and when other element causes defect, forming is performed, whereby they can be operated as electron sources.

公开(公告)号：JPH0829283A

公开(公告)日：1996-02-02

申请号：JP18516494

申请日：1994-07-15

Applicant: CANON KK

Inventor： MITOME MASANORI ,  OKUDA MASAHIRO

IPC: G01L21/34

Abstract: PURPOSE:To obtain a vacuum gage by which a degree of vacuum from a medium vacuum region up to a high vacuum region can be measured stably and safely by installing a cold-cathode electron source as an electron source used to generate an electric discharge. CONSTITUTION:As a cold cathode electron source, e.g. a metal/insulating layer/metal (MIM) type electron emission element, a surface conduction type electron emission element, an electron affinity type electron emission element or the like can be enumerated. In the case of an ionization vacuum gage using the MIM type electron emission element, a linear anode, plate cathodes 2, 3, and the MIM type electron emission element 4 are installed inside a glass container 5, and they are attached to a vacuum container in a direction shown by an arrow 6. A permanent magnet is installed at the outside of the glass container 5 so as to become the direction 7 of a magnetic field. The element 4 is connected to a DC constant-voltage power supply 18 via lead wires 10, 11, and an ion current is measured by an ampere meter 17. In this manner, when a cold cathode electron source is provided in the ionization vacuum gage and emitted electrons are used as an electric-discharge trigger, it is possible to prevent the phenomenon of the delay of an electric discharge or the suspension of the electric discharge, and the vacuum gage can be operated stably and safely.

公开(公告)号：JPH06273110A

公开(公告)日：1994-09-30

申请号：JP6429293

申请日：1993-03-23

Applicant: CANON KK

Inventor： KUSAKA TAKAO ,  MITOME MASANORI ,  TAKIMOTO KIYOSHI ,  KISHI ETSURO ,  KAWADA HARUNORI

IPC: G01B7/34 ,  G01N37/00 ,  G01Q30/04 ,  G01Q60/10 ,  H01J37/28

Abstract: PURPOSE:To provide a scanning tunnel microscope capable of obtaining an irregularity image on a specimen surface with high resolution. CONSTITUTION:Alternating voltage (modulation voltage) of a specified frequency is generated with an oscillator 2 and applied between a specimen 1 and a probe 3. A tunnel current value between the specimen 1 and the probe 3 is converted into an electric signal and a signal integrated with original modulation voltage by a multiplier 6 is obtained. The integration signal is processed with a low pass filter 7, a component synchronized with the modulation voltage out of the integration signal is found and an amplitude value of tunnel current is extracted. A distance between an electrode 3 and the specimen 1 is controlled with the amplitude value, which is output as irregularity of the specimen 1.

公开(公告)号：JPH06102310A

公开(公告)日：1994-04-15

申请号：JP27253992

申请日：1992-09-17

Applicant: CANON KK

Inventor： MITOME MASANORI

IPC: G01R31/26 ,  H01L21/66

Abstract: PURPOSE:To measure the current-voltage characteristics of a material easily and with good accuracy without changing the state of the material by applying pulse voltage which changes to a voltage desired to be measured to a material during a short time and measuring current in synchronization with this pulse voltage. CONSTITUTION:MIM element (element of a structure where electrodes are attached to both ends of a metal thin film) is kept in a certain regulated fixed state at the maximum value V0 of impressed voltage. On the other hand, if the time for applying pulse voltage V lower than the voltage V0 is too short to change the state of the element, the current flowing through the element is a value according to the voltage-current characteristics in the state regulated by the voltage V0. That is, the current is measured only for a time shorter than the time (t) in synchronization with the rectangular pulse, whereby the current-voltage characteristics can be measured quickly and with good accuracy, in the state of MIM element kept constant.