公开(公告)号：JP2000251633A

公开(公告)日：2000-09-14

申请号：JP4909699

申请日：1999-02-25

Applicant: CANON KK

Inventor： KIYOUGAKU MASABUMI ,  MARUYAMA TOMOKO ,  SHIBATA MASAAKI ,  MIYAZAKI KAZUYA

IPC: H01J1/316 ,  H01J29/04 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To reduce instability in formation or activation processes by setting the softening point of the base body of a substrate, having a number of electron emitting elements arranged thereon and having a pair of element electrodes and a conductive thin film having an electron emission part to a specified temperature or higher. SOLUTION: A base body 1 of this electron source substrate has a softening point of 750 deg.C or higher, and borosilicate glass, soda lime glass, zinc borosilicate glass, or alumino borosilicate glass is used therefor, so that softening of a substrate near an electron emission part 5 and the deformation of the electron emission part are thereby suppressed. A surface conductive type electron emitting element is desirably used as the electron emitting element. A deposit composed mainly of carbon or a carbon compound and a thin film mainly composed of Pd or PdO are desirably used as an electron emission part 5 and a conductive thin film 4, respectively. A plurality of electron emitting elements is arranged in parallel on the substrate, and element electrodes are connected to mutually insulated X-direction and Y-direction metal wirings.

公开(公告)号：JP2000243327A

公开(公告)日：2000-09-08

申请号：JP4501799

申请日：1999-02-23

Applicant: CANON KK

Inventor： SHIBATA MASAAKI

IPC: H01J9/02 ,  H01J1/316 ,  H01J29/04 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To prevent peeling caused by the weak adhesiveness between metal wires and a substrate and to prevent the characteristic deterioration of element electrodes caused by the diffusion of the metal wires along the boundary face between the element electrodes and the substrate by forming the element electrodes with a conductive oxide. SOLUTION: An inexpensive soda lime glass substrate 1 contains sodium, and it is manufactured by the float method for mass production. A sodium diffusion preventing layer 9 mainly made of silica is provided on the substrate 1 to prevent the diffusion of sodium into an electron emitting element from the substrate 1 and to prevent the heat by the current of the electron emitting element from being transferred to the substrate 1. A conductive oxide, which has stable conductivity after a heat treatment process and prevents the thermal diffusion of the constituting metal of wires 6, 7, is used for opposite element electrodes 2, 3 on the preventing layer 9. The film thickness is set to about tens nm to apply sufficient conductivity, and the step coverage of a conductive thin film 4 is improved. A tin oxide or a composite oxide of the tin oxide and an indium oxide is preferably used as the conductive oxide.

公开(公告)号：JP2000243220A

公开(公告)日：2000-09-08

申请号：JP3895499

申请日：1999-02-17

Applicant: CANON KK

Inventor： MIYAZAKI KAZUYA ,  MARUYAMA TOMOKO ,  KIYOUGAKU MASABUMI ,  SHIBATA MASAAKI

IPC: H01J29/04 ,  C03C17/02 ,  H01J1/316 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To prevent deterioration due to heat and the like of a substrate and to keep satisfactory image quality over a long period by arranging a number of electron emissive elements, respectively comprising a pair of elemental electrodes formed on a base via a surface coating layer, and a conductive thin film having an electron emissive portion, and specifying the water content in the surface coating layer below a predetermined value. SOLUTION: An electron source substrate is formed by a base 1, elemental electrodes 2, 3, a conductive thin film 4, an electron emissive portion 5, a interlayer insulating layer 9 and a surface coating layer 9. The water content in the surface coating layer 9 is preferably below 50 ppm. The water content includes not only absorbed water molecules but a silanol group (Si-O-H) and an OH group terminating an outermost surface of the surface coating layer 9 and existing in the surface coating layer 9. The water content here means the weight ratio of the water molecule (H2O) and OH group with respect to the total composition of the surface coating layer 9.

公开(公告)号：JPH11354012A

公开(公告)日：1999-12-24

申请号：JP15942598

申请日：1998-06-08

Applicant: CANON KK

Inventor： YAMANOBE MASATO ,  SHIBATA MASAAKI

IPC: H01J9/24 ,  H01J5/03 ,  H01J29/87 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To increase creepage with stand voltage and suppress charging phenomena. SOLUTION: In a spacer for an electron beam device, used for an electron beam device having a first substrate 1 in which an electron source 5 is installed, a second substrate 3 in which an accelerating electrode for applying accelerating voltage to electrons emitted from the electron source 5 is installed, and a spacer 11 placed between the first substrate 1 and the second substrate 3, and organic resin having a carbon layer is used as a spacer base material.

公开(公告)号：JPH0917325A

公开(公告)日：1997-01-17

申请号：JP15947195

申请日：1995-06-26

Applicant: CANON KK

Inventor： YAMANOBE MASATO ,  HAMAMOTO YASUHIRO ,  SHIBATA MASAAKI ,  HIRABAYASHI KEIJI ,  TANIGUCHI YASUSHI

IPC: H01J9/02 ,  H01J1/30 ,  H01J1/316 ,  H01J31/12

Abstract: PURPOSE: To provide a high performance electron emitting element having a sufficient electron emitting quantity by providing a material mainly composed of diamond in this electron emitting part in the electron emitting element by arranging a conductive film having the electron emitting part between electrodes. CONSTITUTION: Element electrodes 2 and 3 (such as Pt) on which a width W is about 300μm and a mutual interval L is about 3μm is formed on a base board 1 by layering SiO2 on blue plate glass or the like. A conductive thin film 4 composed of Ir particulates is formed on these element electrodes 2 and 3, and foaming processing is performed on this conductive thin film 4, and a crack part being electron emission 5 is formed. Next, a diamond layer 6 which is composed of particulates mainly composed of diamond and has a thickness of about 200Å is formed on the conductive thin film 4, and a material mainly composed of diamond is provided in an electron emitting part 5. Therefore, a thermally stable and chemically stable electron emitting element having high heat conductivity can be obtained.

公开(公告)号：JPH07181495A

公开(公告)日：1995-07-21

申请号：JP34550093

申请日：1993-12-22

Applicant: CANON KK

Inventor： SHIBATA MASAAKI ,  HANIYU YUKIO

IPC: G02F1/1337

Abstract: PURPOSE:To realize a uniform orientation state and to make a contrast high and display characteristic excellent by setting the directions of rubbing treatments parallel with each other between a pair of upper and lower substrates so as to twist within the specific angle from the same direction. CONSTITUTION:This ferroelectric liquid crystal element is constituted by clamping ferroelectric liquid crystals which exhibit two stable states in an oriented state and increase the apparent tilt angle by impressing AC electric fields thereto between upper and lower substrates having electrodes and orientation control films subjected to a rubbing treatment. The directions of the rubbing treatments are so set as to be parallel with each other between the upper and lower substrates and to twist at

公开(公告)号：JPH06342163A

公开(公告)日：1994-12-13

申请号：JP5729394

申请日：1994-03-28

Applicant: CANON KK

Inventor： TSUKAMOTO TAKEO ,  SHIBATA MASAAKI

IPC: G02F1/13 ,  G02F1/1337

Abstract: PURPOSE:To make display of a high grade with good reproducibility by suppressing the generation of hysteresis. CONSTITUTION:This liquid crystal element is constituted by providing the boundary between a liquid crystal layer 4 and an oriented layer 3 for orienting the liquid crystal layer 4 with an adsorptive layer 5 consisting of neutral molecules and/or ionic molecules. This process for production consists in forming the adsorptive layer 5 on the oriented layer 3 prior to injection of the liquid crystal material for this purpose. As a result, the trap levels between the liquid crystal and the oriented layer known to be the cause for the hysteresis are filled to prevent the formation of asymmetric boundary electric fields, by which the hysteresis is suppressed and the display reproducibility is improved.

公开(公告)号：JPH06313878A

公开(公告)日：1994-11-08

申请号：JP10275393

申请日：1993-04-28

Applicant: CANON KK

Inventor： KANEKO SHUZO ,  SHINJO KATSUHIKO ,  MIYATA HIROKATSU ,  SHIBATA MASAAKI ,  OKADA SHINJIRO

IPC: G02F1/133 ,  G02F1/1343 ,  G09G3/36

Abstract: PURPOSE:To provide easily controllable gradation drive. CONSTITUTION:This is a liquid crystal element with a liquid FLC clamped between a pair of electrodes 14 and 1903. A plurality of stripe type projections 12 formed with different intervals are provided on one of the electrodes 14 and 1903 within a picture element formed at an intersection with the other electrode. In addition, the liquid crystal element features that means 10 and 11 are provided to form the change of space between the projections 12 along a slope within the picture element, and further form field strength acting on the liquid crystal element distributed along the change of the space slope.

公开(公告)号：JP2002063860A

公开(公告)日：2002-02-28

申请号：JP2001198995

申请日：2001-06-29

Applicant: CANON KK

Inventor： YAMANOBE MASATO ,  SHIBATA MASAAKI ,  KOBAYASHI TOYOKO ,  IKEDA SOTOMITSU

IPC: H01J9/24 ,  H01J9/20 ,  H01J29/87 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To provide a spacer with high resistance enabling restraint of the volume charged, even if the spacer is irradiated with an electron beam. SOLUTION: The image forming device comprises a rear plate with an electron emission element, a face plate arranged so as to face the rear plate with an image forming part, and a spacer interposed between the face plate and the rear plate. For the spacer, a spacer base material 31 is covered with organic resin and carbon, and the surface of the spacer has carbon, and the carbon as a carbon layer 52, covers the surface of the organic resin 51 covering the spacer base material.

公开(公告)号：JP2000311580A

公开(公告)日：2000-11-07

申请号：JP31928999

申请日：1999-11-10

Applicant: CANON KK

Inventor： SHIBATA MASAAKI ,  MOTOI YASUKO ,  AEBA TOSHIAKI ,  NAKAMURA HISAMI ,  UENO RIE ,  YAMANOBE MASATO

IPC: H01J31/12 ,  H01J1/316 ,  H01J29/04

Abstract: PROBLEM TO BE SOLVED: To provide a stable electron emitting element capable of enhancing thermal and chemical stability of a carbon film, having excellent electron emitting characteristics for a long time. SOLUTION: This electron emitting element has a substrate 1, first and second carbon films 10 disposed on the substrate 1 with a first space 7 interposed therebetween and first and second electrodes 2 and 3 electrically connected to the first and second carbon films 10, respectively. The carbon films 10 have an area with orientation; the direction of the orientation is approximately horizontal with respective to the surface of the substrate 1.