公开(公告)号：CA2322122C

公开(公告)日：2003-12-23

申请号：CA2322122

申请日：2000-10-03

Applicant: LUCENT TECHNOLOGIES INC

Inventor： BISHOP DAVID JOHN ,  BOLLE CRISTIAN A ,  AKSYUK VLADIMIR ANATOLYEVICH ,  GILES RANDY CLINTON ,  PARDO FLAVIO

IPC: B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  B81B7/02 ,  G02B26/08

Abstract: A micro-electro-mechanical (MEM] optical device having a reduced footprint f or increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and secon d pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second bea m ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device f or reducing the contact area between the optic device edge and the substrate.

公开(公告)号：CA2323025C

公开(公告)日：2003-07-29

申请号：CA2323025

申请日：2000-10-06

Applicant: LUCENT TECHNOLOGIES INC

Inventor： BISHOP DAVID JOHN ,  JIN SUNGHO ,  KIM JUNGSANG ,  RAMIREZ AINISSA G

IPC: B81B3/00 ,  H01H50/00 ,  H01H50/42 ,  H01H51/22 ,  H01H51/27 ,  H01H47/04

Abstract: An actuation device employing square-loop latchable magnetic material having a magnetization direction (polarization) capable of being changed in response to exposure to an external magnetic field is disclosed. The magnetic field i s created by a conductor assembly with non-solenoid configuration. Once the magnetization direction of the material is so changed, the external magnetic field is no longer required to maintain the new magnetization direction. The latchable magnetic material is disposed on the mobile electrode of a switching device, and another magnetic material is disposed in spaced relation to the latchable magnetic material on a stationary electrode or surface. By applying an electrical current to a conductor assembly arranged proximate the latchable material, a magnetic field is created about the latchable magnetic material, to change the magnetization direction and thereby enable the attraction or repulsion of another magnetic material located on t he stationary electrode. The resulting relative displacement of the mobile and stationary electrodes effects the selective connection or disconnection of electrical contacts carried on or associated with the respective electrodes of the actuation device without requiring additional power in order to maintain the switched state of theele ctrodes.

公开(公告)号：DE60000565D1

公开(公告)日：2002-11-14

申请号：DE60000565

申请日：2000-08-21

Applicant: LUCENT TECHNOLOGIES INC

Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  BISHOP DAVID JOHN

IPC: F16S1/02 ,  B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  G01N13/10 ,  G02B26/08

Abstract: A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electro-mechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.

公开(公告)号：DE69800915T2

公开(公告)日：2002-03-28

申请号：DE69800915

申请日：1998-09-01

Applicant: AT & T CORP ,  LUCENT TECHNOLOGIES INC

Inventor： BARBER BRADLEY PAUL ,  FRIGO NICHOLAS J ,  BISHOP DAVID JOHN ,  GAMMEL PETER LEDEL

IPC: G02B6/35 ,  G02B26/02 ,  G02F1/01 ,  G02B6/34 ,  G02F1/313 ,  H04B10/12

公开(公告)号：CA2324182A1

公开(公告)日：2001-05-10

申请号：CA2324182

申请日：2000-10-25

Applicant: LUCENT TECHNOLOGIES INC

Inventor： GILES RANDY CLINTON ,  BISHOP DAVID JOHN

IPC: G01J1/06 ,  G02B6/35 ,  G02B26/08 ,  H04B10/08 ,  H04Q3/52

Abstract: A device and method for detecting rotational drift of mirror elements in a MEMS tilt mirror array used in an optical crossconnect. The optical crossconnect directs optical signals from an input fiber to an output fiber along an optical path by rotatably positioning mirror elements in desired positions. A monitoring device disposed outs ide of the optical path is used to obtain images of the MEMS array or t o transmit and receive a test signal through the crossconnect for detecting the presence of mirror element drift.

公开(公告)号：CA2322978A1

公开(公告)日：2001-04-15

申请号：CA2322978

申请日：2000-10-06

Applicant: LUCENT TECHNOLOGIES INC

Inventor： KIM JUNGSANG ,  GATES JOHN VANATTA II ,  BISHOP DAVID JOHN

IPC: B81B1/00 ,  B81B7/00 ,  H01L23/02 ,  H01L23/04 ,  H01L23/057 ,  H01L23/10 ,  B81C5/00 ,  B81B7/02

Abstract: A package for hermetically sealing a micro-electromechanical systems (MEMS) device in a hybrid circuit comprise a firewall formed on a substrate for the MEMS device and which has a height defining a cavity of the package in which the MEMS device will be sealed. A second substrate spaced from the first substra te hermetically seals the cavity when the second substrate is flip-chip bonded to the first substrate and soldered to the first substrate with a thin film metal materia l placed on at least a top portion of the firewall. The resulting firewall MEMS device package can be further packaged using conventional CMOS packaging techniques. By hermetically sealing the cavity, the enclosed MEMS device is protected from deleterious conditions found in the environment of conventional CMOS packagi ng techniques which is often detrimental to MEMS device function.