公开(公告)号：US12251508B2

公开(公告)日：2025-03-18

申请号：US17958723

申请日：2022-10-03

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Oriana Rita Antonia Di Marco ,  Domenico Giusti

IPC: A61M11/04 ,  A24F40/30 ,  A24F40/46 ,  A24F40/485 ,  A61M15/06 ,  H05B3/42 ,  A24F40/10

Abstract: A microfluidic dispenser device of inhalable substances includes a casing, housed in which are a driving circuit and a microfluidic cartridge having a tank that contains a liquid to be delivered. The microfluidic cartridge is provided with at least one nebulizer controlled by the driving device. The nebulizer includes: a substrate; a plurality of chambers formed on the substrate and fluidically coupled to the tank for receiving the liquid to be delivered; and a plurality of heaters, which are formed on the substrate in positions corresponding to respective chambers, are thermally coupled to the respective chambers and are separated from the respective chambers by an insulating layer, and are controlled by the driving device. Each chamber is fluidically connected with the outside by at least one respective nozzle.

公开(公告)号：US12195327B2

公开(公告)日：2025-01-14

申请号：US17497538

申请日：2021-10-08

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico Giusti ,  Marco Ferrera ,  Fabio Quaglia

IPC: B81B7/00 ,  B81B3/00 ,  B81C1/00 ,  H10N30/20 ,  H10N30/30

Abstract: A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.

公开(公告)号：US12185633B2

公开(公告)日：2024-12-31

申请号：US18329975

申请日：2023-06-06

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Carlo Luigi Prelini

IPC: H10N30/20 ,  B81B3/00

Abstract: A MEMS device having a body with a first and a second surface, a first portion and a second portion. The MEMS device further has a cavity extending in the body from the second surface; a deformable portion between the first surface and the cavity; and a piezoelectric actuator arranged on the first surface, on the deformable portion. The deformable portion has a first region with a first thickness and a second region with a second thickness greater than the first thickness. The second region is adjacent to the first region and to the first portion of the body.

公开(公告)号：US12023919B2

公开(公告)日：2024-07-02

申请号：US18064829

申请日：2022-12-12

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Andrea Nicola Colecchia ,  Gaetano Santoruvo

IPC: B41J2/03 ,  H10N30/074 ,  H10N30/20 ,  H10N39/00

CPC classification number: B41J2/03 ,  H10N30/074 ,  H10N30/2047 ,  H10N39/00

Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.

公开(公告)号：US11981558B2

公开(公告)日：2024-05-14

申请号：US17240782

申请日：2021-04-26

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Marco Ferrera ,  Carlo Luigi Prelini

IPC: H04R7/04 ,  B81B3/00 ,  B81C1/00 ,  F16K31/00 ,  H04R1/02 ,  H04R3/00 ,  H04R7/18 ,  H04R19/02

CPC classification number: B81B3/007 ,  B81C1/00658 ,  F16K31/005 ,  H04R1/02 ,  H04R3/00 ,  H04R7/04 ,  H04R7/18 ,  H04R19/02 ,  B81B2201/0257 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/0338 ,  B81B2203/04 ,  B81B2207/03 ,  H04R2201/003

Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

公开(公告)号：US11884071B2

公开(公告)日：2024-01-30

申请号：US17572374

申请日：2022-01-10

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Carlo Luigi Prelini ,  Lorenzo Tentori

IPC: B41J2/14 ,  B41J2/165

CPC classification number: B41J2/14201 ,  B41J2/1433 ,  B41J2/1652

Abstract: Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.

公开(公告)号：US11807519B2

公开(公告)日：2023-11-07

申请号：US17337296

申请日：2021-06-02

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Fabio Quaglia

IPC: B81B7/00 ,  B81C1/00 ,  F16F15/00

CPC classification number: B81B7/0016 ,  B81C1/00825 ,  F16F15/007 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81B2203/0307 ,  B81B2207/03 ,  B81C2203/032 ,  F16F2226/042

Abstract: A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.

公开(公告)号：US11541653B2

公开(公告)日：2023-01-03

申请号：US16882215

申请日：2020-05-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico Giusti ,  Andrea Nicola Colecchia ,  Gaetano Santoruvo

IPC: B41J2/03 ,  H01L27/20 ,  H01L41/09 ,  H01L41/314

Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.

公开(公告)号：US10946653B2

公开(公告)日：2021-03-16

申请号：US16414619

申请日：2019-05-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico Giusti ,  Mauro Cattaneo ,  Donata Asnaghi

IPC: B41J2/14 ,  B41J2/16

Abstract: The fluid ejection microfluidic device, has a substrate; a buried cavity within the first substrate; a membrane formed by the first substrate and extending between the buried cavity and a first main surface of the substrate; and an access channel extending through the substrate, laterally and externally to the buried cavity and to the membrane and isolated with respect to the buried cavity. A sealed actuation structure extends over the first main surface of the substrate. A containment layer, of polymeric material, extends over the first main surface of the substrate and forms a fluid containment chamber accommodating the sealed actuation structure. A nozzle body of semiconductor material closes the fluid containment chamber at the top and is traversed by an ejection opening, forming, together with the fluid containment chamber and the access channel, a fluidic path.

公开(公告)号：US10513428B2

公开(公告)日：2019-12-24

申请号：US15867491

申请日：2018-01-10

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico Giusti

IPC: B41J2/14 ,  H01L41/08 ,  B81B3/00 ,  H01L41/09

Abstract: What is described is a MEMS device comprising a piezoelectric actuator, which includes a film of piezoelectric material. The film is penetrated by a plurality of holes.