公开(公告)号：JPS5139140A

公开(公告)日：1976-04-01

申请号：JP11306074

申请日：1974-09-30

Applicant: SHIMADZU CORP

Inventor： TSUNASAWA YOSHIO ,  NISHIDA MASANAO

IPC: G01J3/06 ,  G01J3/42

公开(公告)号：JP2014038875A

公开(公告)日：2014-02-27

申请号：JP2010273833

申请日：2010-12-08

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： NAGUMO YUZO ,  GOTO HIROOMI ,  ARAKAWA AKIRA ,  TSUNASAWA YOSHIO

IPC: H01L21/3065

CPC classification number: G01B11/22 ,  G01B11/2441 ,  H01L22/12

Abstract: PROBLEM TO BE SOLVED: To calculate, during etching, a hole-depth or a step accurately and with high resolution, with any influence of masking-film thickness removed.SOLUTION: Measurement light having a prescribed wavelength width is irradiated so as to span over portions to be etched and masking portions surrounding the etching portions, and an optical spectrum is obtained by conducting spectrum detection of interference light caused by various reflections, and then, an interference spectrum, which is normalized so as to have any influence by a light-emitting spectrum of a light source removed, is obtained (S1, S2). Since the interference spectrum can be considered to be a synthesis of a plurality of sine waves having different cycles, decomposed interference spectra decomposed for each of the cycles are obtained (S4). Since influence of the structures of a sample on the interference spectrum is separated for each of the structures by this decomposition, a cycle corresponding to a hole-depth is extracted on the basis of the direction to which an interference fringe of the decomposed interference spectrum moves accompanying the elapse in time, and the hole-depth is calculated by calculating the relative amount of change thereof from the amount of movement of the interference fringe of the decomposed interference spectrum of that cycle, in high-resolution, and adding the result to an absolute value obtained from a peak count (S5, S6).

Abstract translation: 要解决的问题：在蚀刻期间，精确地和高分辨率地计算掩模膜厚度的任何影响的蚀刻期间计算。解决方案：照射具有规定波长宽度的测量光以跨越 要蚀刻的部分和蚀刻部分周围的掩蔽部分，以及通过对由各种反射引起的干涉光进行光谱检测而获得光谱，然后将被归一化以便受到发光的任何影响的干涉光谱， 获得去除的光源的发光光谱（S1，S2）。 由于干涉光谱可以被认为是具有不同周期的多个正弦波的合成，因此获得了针对每个周期分解的分解的干涉光谱（S4）。 由于通过这种分解，对于每个结构对样本的结构的影响被分离，所以基于分解的干涉光谱的干涉条纹移动的方向提取对应于空穴深度的周期 伴随着时间的流逝，并且通过从高分辨率的该周期的分解的干涉光谱的干涉条纹的移动量计算其相对的变化量来计算孔深，并且将结果添加到 从峰值计数得到的绝对值（S5，S6）。

公开(公告)号：JP2014016305A

公开(公告)日：2014-01-30

申请号：JP2012155415

申请日：2012-07-11

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： HASHIMOTO TOYOYUKI ,  NAGAI MASAMICHI ,  HIRAIDE MASATO ,  TSUNASAWA YOSHIO

IPC: G01N21/956 ,  G01N21/84 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a substrate and a transmission illuminator for the apparatus for inspecting a substrate, which can accurately inspect a substrate by preventing an infrared light from an infrared light source from being incident on a camera without transmitting the substrate.SOLUTION: A form and a disposition of an infrared light source 2 are set so that a field of view of the infrared light source 2 by a CCD camera 6 is covered by a field of view of a substrate 1 by the CCD camera 6. By the actions of a Fresnel lens 5, an irradiation angle of an infrared light emitted from an LED element disposed in the vicinity of an end edge of the infrared light source 2 is deflected in the end edge direction of the substrate 1. Intensity of an infrared light with which the substrate 1 is irradiated from the infrared light source 2 is set larger in the end edge region of the substrate 1 than in the center of the substrate 1.

Abstract translation: 要解决的问题：提供一种用于检查用于检查基板的设备的基板和透射照明器的装置，其可以通过防止来自红外光源的红外光入射到相机上而不发射基板来准确地检查基板 基板。解决方案：设置红外光源2的形式和布置，使得CCD照相机6的红外光源2的视场由CCD照相机6被基板1的视场覆盖 通过菲涅尔透镜5的动作，从设置在红外光源2的端缘附近的LED元件发射的红外光的照射角度在基板1的端缘方向偏转。强度 基板1从红外光源2照射的红外光在基板1的端缘区域比基板1的中心大。

公开(公告)号：JP2006194094A

公开(公告)日：2006-07-27

申请号：JP2005003666

申请日：2005-01-11

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TSUNASAWA YOSHIO ,  ARAKAWA AKIRA ,  OZAKI JUNICHIRO ,  OFUJI MASAMIKI

IPC: F04D19/04

CPC classification number: F04D19/04

Abstract: PROBLEM TO BE SOLVED: To provide a vacuum pump for accurately determining the temperature of a rotor by utilizing a change in the magnetic permeability of a magnetic body.
SOLUTION: Targets 81, 82 are provided to a nut 42 facing a gap sensor 44, which is made of pure iron. A surface 80 facing the gap sensor 44 functions as the target. While the curie temperature of the target 80 is higher than the upper limit of the temperature monitoring range, the curie temperature of the targets 81, 82 fall within the upper limit of the temperature monitoring range. When the targets 80-82 face the gap sensor 44 by rotor rotation, three types of signals are output from the gap sensor 44. A difference signal generating part 67 generates a difference signal between signals of the targets 81, 82 with reference to a signal of the target 80. By comparing the level of the difference signal with a referential signal V
0 for curie temperature detection, the rotor temperature is determined.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种通过利用磁体的磁导率的变化来精确地确定转子的温度的真空泵。 解决方案：将目标81,82设置到面向由纯铁制成的间隙传感器44的螺母42。 面向间隙传感器44的表面80用作目标。 在目标80的居里温度高于温度监视范围的上限的情况下，目标81,82的居里温度落在温度监视范围的上限范围内。 当目标80-82通过转子旋转面对间隙传感器44时，三个类型的信号从间隙传感器44输出。差信号产生部分67参考信号产生目标81,82的信号之间的差分信号 通过将差分信号的电平与用于居里温度检测的参考信号V 0 进行比较，确定转子温度。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2002085412A

公开(公告)日：2002-03-26

申请号：JP2000282207

申请日：2000-09-18

Applicant: SHIMADZU CORP ,  ONISHI KANEHISA ,  ISOBE KENICHI ,  KUSAKA TAKASHI

Inventor： ONISHI KANEHISA ,  ISOBE KENICHI ,  KUSAKA TAKASHI ,  TSUNASAWA YOSHIO ,  TAKEUCHI SADAO ,  OIKAWA YUKIO ,  WADA YUKIHISA

IPC: A61B5/145 ,  A61B5/1455 ,  A61B10/00 ,  G01N21/35 ,  G01N21/359

Abstract: PROBLEM TO BE SOLVED: To directly measure an organ in the body in a noninvasive manner. SOLUTION: An apparatus for measuring a light directly emits the light to the organ in the body, determines an optical contrast medium such as an ICG or the like existing in the organ and out of the organ in the noninvasive manner, can thereby directly measure the organ in the body in the noninvasive manner, detects a behavior of the organ itself which cannot be known even by the behavior of a component in the blood such as hemoglobins or the like, evaluates it and measures the light emitted from the organism by an illuminating light. The apparatus comprises a light emitting probe for emitting lights of a plurality of wavelengths to the organism and a photodetecting probe for photodetecting the lights of the plurality of the wavelengths emitted from the body, a signal extracting means for separating to extract a wavelength component signal based on the contrast medium in the body from a light measurement signal of the plurality of the photodetected wavelengths from a wavelength component signal based on a component in the blood, and a signal processing means for measuring a response of the organ to be examined to the contrast medium according to the wavelength component signal based on the contrast medium.

公开(公告)号：JP2001231769A

公开(公告)日：2001-08-28

申请号：JP2000045903

申请日：2000-02-23

Applicant: SHIMADZU CORP

Inventor： TAMAI TETSUO ,  TSUNASAWA YOSHIO ,  ITO YASUNOBU ,  KOBAYASHI MANAMI ,  KONISHI IKUO

IPC: A61B5/145 ,  A61B5/1455 ,  A61N5/06 ,  G06T1/00

Abstract: PROBLEM TO BE SOLVED: To precisely adjust stimulation to be added to a subject in real time by precisely measuring the effect of therapy in real time. SOLUTION: The effectiveness of therapy is measured and the stimulation to be added to the subject is adjusted by combining a stimulation means for therapy and a peripheral circulatory monitor for judging the effectiveness of therapy by measuring the situation of peripheral circulatory. This therapeutic device is provided with a stimulation means 2 for stimulating a living body and an optical image measuring means 3 having an image measuring part for irradiating the living body with light to measure image data of plural wavelengths with time and an image calculation part for performing image calculation by using plural pieces of image data whose measuring wavelengths and measuring times are different respectively. The device measures the effectiveness of therapy by the stimulation means by obtaining the situation of the peripheral circulatory of the living body by image calculation. Furthermore, a control means 4 for controlling the stimulation to be added by the stimulation means based on the situation of the peripheral circulatory of the living body obtained by image calculation is provided to control the stimulation means to adjust the stimulation given to the subject.

公开(公告)号：JPH1082732A

公开(公告)日：1998-03-31

申请号：JP23774696

申请日：1996-09-09

Applicant: SHIMADZU CORP

Inventor： TSUNASAWA YOSHIO

IPC: G01N21/27 ,  G01N21/17

Abstract: PROBLEM TO BE SOLVED: To perform a measurement while distinguishing in the depth direction by employing a transmitting light containing different wavelengths and differentiating the distance between a light transmitting point and a light receiving point on a subject depending on the wavelength. SOLUTION: A light transmitting part S is set at one end of an optical fiber 3 connected with a light source 2. A light of two sets of wavelength is transmitted through a subject 9 from the same transmitting point. A set of wavelengths λL1, λL2 has longer wavelength than a set of wavelengths λS1, λS2. A detecting section DS detects a set of short wavelength and a detecting section DL detects a set of long wavelength. A detector 5-1 is disposed at the end of an optical fiber 4 and a processing circuit 5-3 performs signal processing through a preamplifier 5-2, and the like. The distance dS between the detecting section DS and the transmitting part S is set shorter than the distance dL between the detecting section DL and the transmitting part S. The detecting section DS receives light of short wavelengths λS1, λS2 and measures a shallow part of the subject 9. The detecting section DL receives light of long wavelengths λL1, λL2 and measures a deep part of the subject 9.

公开(公告)号：JP2560293B2

公开(公告)日：1996-12-04

申请号：JP23406586

申请日：1986-09-30

Applicant: SHIMADZU CORP

Inventor： TSUNASAWA YOSHIO ,  OOKUBO KUNIHIKO

IPC: G01J1/42 ,  G01J1/44 ,  G01J3/02 ,  G01N21/27

公开(公告)号：JPH0843295A

公开(公告)日：1996-02-16

申请号：JP19745794

申请日：1994-07-29

Applicant: SHIMADZU CORP

Inventor： ODA ICHIRO ,  TSUNASAWA YOSHIO ,  EDA HIDEO

IPC: G01N21/17 ,  A61B10/00 ,  G01N21/49

Abstract: PURPOSE:To optically measure a biological organism dealing with the light quantity over a wide range, to relatively shorten the measuring time, and to realize a small size and a low cost. CONSTITUTION:Pulses of light from a light source 22 are emitted toward a specimen 28 to be detected, and a diffused transmitted reflected light to be emitted from the position separated from a light emitting point is received by a photomultiplier 32. The photomultiplier 32 is driven by a gate signal synchronized with the irradiation light, and the signal is set to shorter than the interval T of the irradiation light pulse train, delayed, and the delay is sequentially varied. The signal of the photomultiplier 32 is integrated by an integrator 44 via a preamplifier 40, and fetched, and the integrated signal is sequentially changed between 0 to T to the light propagating waveform.

公开(公告)号：JPH0810244A

公开(公告)日：1996-01-16

申请号：JP30971994

申请日：1994-11-18

Applicant: SHIMADZU CORP

Inventor： TSUNASAWA YOSHIO ,  ODA ICHIRO ,  TSUNEISHI SHOICHI

IPC: A61B5/145 ,  A61B5/1455 ,  G01N21/27 ,  G01N21/59 ,  A61B5/14

Abstract: PURPOSE:To make absolute measurement of an optical constant by an ordinary ray method by detecting measuring light at plural photodetecting points parted by different distances from the incident point of the measuring light on the examinee by the ordinary ray method and calculating the product of the absorption coefft. of the examinee from the detected light and equiv. scattering coefft. as an integrated quantity. CONSTITUTION:Laser beams lambda1, lambda2, lambda3 are selectively transmitted from a laser device 3 and are sent to the examinee 2. Optical fibers 8-1, 8-2 for photodetection which detect the light at the photodetecting points apart distances a1 and a2 from the incident point are introduced to detectors 10-1, 10-2 and the detection signals thereof are I1, I2. These detection signals I1, I2 are converted to logarithms and a DELTAy calculating means calculates DELTAy by DELTAy=ln(I1/ I2). An m(lambda) calculating means determines m(lambda) as m(lambda)=p.DELTAy +q.DELTAy+r(p, q, r are coeffts.). A component concn. calculating means determines the component concns. xi of the respective measurement components (i) as the solution of an equation including m(lambda) for plural wavelengths lambda.