公开(公告)号：EP2274108B1

公开(公告)日：2013-12-25

申请号：EP09738898.7

申请日：2009-04-28

Applicant: Canon Kabushiki Kaisha

Inventor： CHANG, Chienliu

IPC: B06B1/02 ,  B81B3/00 ,  B81C1/00

CPC classification number: B06B1/0292 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/04 ,  B81C1/00476 ,  B81C2201/0114

Abstract: In a method of manufacturing a capacitive electromechanical transducer, a first electrode (8) is formed on a substrate (4), an insulating layer (9) which has an opening (6) leading to the first electrode is formed on the first electrode (8), and a sacrificial layer is formed on the insulating layer. A membrane (3) having a second electrode (1) is formed on the sacrificial layer, and an aperture is provided as an etchant inlet in the membrane. The sacrificial layer is etched to form a cavity (10), and then the aperture serving as an etchant inlet is sealed. The etching is executed by electrolytic etching in which a current is caused to flow between the first electrode (8) and an externally placed counter electrode through the opening (6) and the aperture of the membrane.

公开(公告)号：EP2477938A1

公开(公告)日：2012-07-25

申请号：EP10755157.4

申请日：2010-09-17

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives ,  Centre National de la Recherche Scientifique (CNRS)

Inventor： DIENY, Bernard ,  JOISTEN, Hélène ,  SABON, Philippe

IPC: B81C1/00 ,  A61B5/05 ,  H02N11/00

CPC classification number: B81C1/0019 ,  A61B1/00156 ,  B81B2201/038 ,  B81B2201/06 ,  B81C2201/038

Abstract: The present invention relates to a microparticle (2) comprising: at least one oblong flexible tail (6), capable of propelling said microparticle (2) in a solution along a path by flapping movements transverse to the path, said tail being provided with at least one magnetic element for this purpose, such that said magnetic element causes the flapping movements of said tail (6) by means of an external alternating magnetic field that is non-collinear with the path; and a head (4) mechanically connected to the proximal end of the tail. The microparticle (2) comprises at least one layer of a material made of a single piece and including said tail (6) and said head (4), the size and/or shape of said head (4) being selected such that the flapping movements of the proximal end of said tail (6) are limited relative to the flapping movements of the distal end of the tail (6), and such that said head (4) does not perform a complete revolution about an axis parallel to the path when exposed to the external alternating magnetic field.

Abstract translation: 微粒包括长椭圆形柔性尾部，其能够使用横向于轨迹的搏动沿着轨迹将微粒推进到溶液中，尾部包括至少一个磁性元件，使得磁性元件在外部交替作用下引起尾巴跳动 与轨迹非共线的磁场和机械连接到尾端的近端的磁头。 该微粒包括至少一层材料，其由一个部件形成并且包括尾部和头部，头部的尺寸和/或形状被选择为使得尾部的近端的节拍相对于节拍被限制 并且使得头部在外部交变磁场的作用下不围绕平行于轨迹的轴线进行完整的旋转。

公开(公告)号：EP1350758B1

公开(公告)日：2007-12-12

申请号：EP03002122.4

申请日：2003-01-30

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J.

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

公开(公告)号：EP1234799B1

公开(公告)日：2006-06-07

申请号：EP02003900.4

申请日：2002-02-21

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yasuda, Susumu ,  Mizutani, Hidemasa ,  Yagi, Takayuki ,  Shimada, Yasuhiro ,  Hirose, Futoshi ,  Kato, Takahisa

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/10

CPC classification number: G02B26/105 ,  B81B3/0051 ,  B81B3/0067 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C2201/0133 ,  G02B26/0841 ,  Y10S359/90 ,  Y10S359/904

公开(公告)号：EP1330411A4

公开(公告)日：2006-02-01

申请号：EP01980048

申请日：2001-10-19

Applicant: SILVERBROOK RES PTY LTD

Inventor： MCAVOY G J ,  SILVERBROOK K

IPC: B81C1/00 ,  B32B9/00 ,  B41J2/045 ,  B81B3/00 ,  B81B7/02 ,  B81C20060101 ,  B81C99/00 ,  F03G7/06 ,  H01H1/00 ,  H02N10/00

CPC classification number: B81C99/006 ,  B41J2/14427 ,  B81B3/0024 ,  B81B3/0035 ,  B81B2201/038 ,  F03G7/06 ,  F05C2203/0813 ,  F05C2203/083 ,  F05C2251/04 ,  F05C2251/044 ,  F05C2251/046 ,  H01H1/0036 ,  H01H2061/006 ,  H01H2061/008

Abstract: The invention concerns design of thermoelastic actuators incorporating an expansive element formed from material selected in accordance with a procedure involving the derivation of an indicator of the material's potential effectiveness for each application. Indicator ε is derived from: εη=Eη2T/ςC where E is Young's modulus of the material, η is coefficient of thermal expansion, T is maximum operating temperature, ς is density and C is specific heat capacity. Elements may be selected from a group including: borides, carbides, nitrides or silicides of chromium, molybdenum, niobium, tantalum, titanium, tungsten, vanadium or zirconium.

公开(公告)号：EP1570991A2

公开(公告)日：2005-09-07

申请号：EP05004352.0

申请日：2005-02-28

Applicant: ENPLAS CORPORATION

Inventor： Yamada, Kyouhei ,  Watanabe, Yasuhiro

IPC: B41J2/14

CPC classification number: B01L3/0241 ,  B01L3/0268 ,  B01L2200/12 ,  B01L2300/0819 ,  B41J2/1433 ,  B41J2002/14475 ,  B81B2201/038 ,  G01N2035/1041

Abstract: There is provided a liquid droplet ejecting apparatus capable of being efficiently produced at low production costs. The liquid droplet ejecting apparatus 1 includes a substrate 2 which has a hole 4 extending in thickness directions to pass through the substrate 2, and a photoresist film 3 which is formed on one side 2a of the substrate 2 so as to close one end of the hole 4, the photoresist film 3 having a small hole 5 which faces the one end of the hole 4 to open the one end of the hole 4 to the atmosphere. Thus, the liquid droplet ejecting apparatus 1 is designed to eject a droplet of a liquid from the small hole 5 by applying a pressure of a pressure source 6 to the other end of the hole 4 after the liquid is injected into the hole 4.

Abstract translation: 提供了能够以低生产成本有效地生产的液滴喷射装置。 液滴喷射装置1包括：基板2，其具有在厚度方向上延伸通过基板2的孔4;以及光致抗蚀剂膜3，其形成在基板2的一侧2a上，以封闭基板2的一端 孔4，光致抗蚀剂膜3具有面向孔4的一端的小孔5，以将孔4的一端打开到大气。 因此，液滴喷射装置1被设计成在将液体注入到孔4中之后，通过将压力源6的压力施加到孔4的另一端，从小孔5喷射液滴。

公开(公告)号：EP1281665A3

公开(公告)日：2005-02-16

申请号：EP02255271.5

申请日：2002-07-29

Applicant: Hewlett-Packard Company

Inventor： Hartwell, Peter G. ,  Walmsley, Robert G.

IPC: B81B7/00

CPC classification number: B81B7/04 ,  B81B2201/038

Abstract: Micromachine systems (100) are provided. An embodiment of such a micromachine system includes a substrate (111, 504) that defines a trench (116, 512). A first microelectromechanical device (110, 502) and a second microelectromechanical device (110, 502) are arranged at least partially within the trench. Each of the microelectromechanical devices incorporates a first portion that is configured to move relative to the substrate. Methods also are provided.

公开(公告)号：EP1486682A2

公开(公告)日：2004-12-15

申请号：EP04013250.8

申请日：2004-06-04

Applicant: LG Electronics Inc.

Inventor： Yee, Young-Joo ,  Ji, Chang-Hyeon ,  Choi, Jung-Hoon Sangnok-maeul Woosung

IPC: F15C5/00

CPC classification number: F16K99/0001 ,  B81B7/04 ,  B81B2201/038 ,  F15C5/00 ,  F16K99/0009 ,  F16K99/0046 ,  F16K2099/0074 ,  F16K2099/008

Abstract: Disclosed are a micro-actuator (100), a fabrication method thereof, and a micro-actuating valve (1000). The micro-actuating valve comprises: a first valve housing (200) having a fluid entrance (201) at the middle portion thereof; a second valve housing (300) coupled to the first valve housing thus to form a space portion (302) therein and having a fluid exit (301) connected to the fluid entrance of the first valve housing; a plate (110) installed at the space portion and having a micro-channel (111) at one side thereof to be connected to the fluid exit; a plurality of micro-driving members (130) installed to be near the plate for discharging a fluid introduced from the fluid entrance of the first valve housing to the fluid exit of the second valve housing by selectively opening and closing the micro-channel (111) of the plate; a micro-mover suspension installed at the plate for supporting the micro-mover; a coil installed at the micro-mover; a magnet installed with a certain gap from the coil; and an electrode portion formed at the plate for supplying a power source to the coil.

Abstract translation: 公开了一种微致动器（100）及其制造方法以及微动阀（1000）。 微动阀包括：第一阀壳体（200），其中部处具有流体入口（201）; 第二阀壳体（300），其联接到第一阀壳体，从而在其中形成空间部分（302），并具有连接到第一阀壳体的流体入口的流体出口（301） 安装在所述空间部分处并且在其一侧具有与所述流体出口连接的微通道（111）的板（110）; 多个微型驱动构件（130），安装成靠近板，用于通过选择性地打开和关闭微通道（111）来将从第一阀壳体的流体入口引入的流体排放到第二阀壳体的流体出口 ）板; 安装在板上用于支撑微型移动器的微型悬架; 安装在微动机上的线圈; 安装有与线圈一定间隙的磁铁; 以及形成在所述板上用于向所述线圈供给电源的电极部。

公开(公告)号：WO2010137604A1

公开(公告)日：2010-12-02

申请号：PCT/JP2010/058872

申请日：2010-05-26

Applicant: アルプス電気株式会社 ,  高橋 功

Inventor： 高橋　功

IPC: H02N11/00 ,  B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/038 ,  B81B2203/0118 ,  F03G7/005 ,  Y10S310/80

Abstract: 　電極層表面からイオンが染み出した場合でも高分子アクチュエータの電極層と端子部間の導通性を良好にできる高分子アクチュエータ装置を提供することを目的としている。　電解質層１１及び電解質層１１の厚さ方向の両面に設けられた一対の電極層１２，１３を有し、前記一対の電極層間に電圧を付与すると湾曲する高分子アクチュエータ１０と、前記高分子アクチュエータ１０に電圧を付与するための端子部１６，１７と、を有する高分子アクチュエータ装置において、前記高分子アクチュエータ１０は、変形部１８と支持部１４とを備え、前記高分子アクチュエータ１０の前記支持部１４の負極側である第１電極層１２と、端子部１６との間に、導電性多孔質材２０が介在している。

Abstract translation: 即使离子从电极层的表面渗出，也可以使大分子致动器装置的电极层和端子部之间的导电性保持良好的高分子驱动装置。 具有：具有电解质层（11）的高分子致动器（10）和安装在电解质层（11）的厚度方向两侧的一对电极层（12,13）的高分子致动器装置 ），并且当在上述一对电极层之间施加电压时将弯曲; 以及用于向上述高分子致动器（10）施加电压的端子部分（16,17）。 还设置有变形部（18）和支撑部（14）。 并且导电性多孔质材料（20）介于作为上述高分子致动器（10）的上述支撑部（14）的负极侧的第一电极层（12）与端子部（16）之间。

公开(公告)号：WO2010099250A1

公开(公告)日：2010-09-02

申请号：PCT/US2010/025297

申请日：2010-02-25

Applicant: INSITUTEC, INC. ,  WOODY, Shane, C. ,  WOODY, Bethany, A. ,  BAUZA, Marcin, B. ,  SMITH, Stuart, T. ,  CHAKRABORTY, Nilay

Inventor： WOODY, Shane, C. ,  WOODY, Bethany, A. ,  BAUZA, Marcin, B. ,  SMITH, Stuart, T. ,  CHAKRABORTY, Nilay

IPC: G01N11/00

CPC classification number: B01F11/0088 ,  B01F13/0059 ,  B81B3/0027 ,  B81B2201/0292 ,  B81B2201/038 ,  B82Y15/00 ,  G01N11/162 ,  G01N2203/0286

Abstract: The present invention provides standing wave fluidic and biological tools, including: at least one elongated fiber that has mesoscale (i.e. milliscale), microscale, nanoscale, or picoscale dimensions, the at least one elongated fiber having a first end and a second end; and an actuator coupled to the first end of the at least one elongated fiber, wherein the actuator is operable for applying oscillation cycles to the at least one elongated fiber in one or more directions, and wherein the actuator is operable for generating a standing wave in the at least one elongated fiber. These standing wave fluidic and biological tools are selectively disposed in a fluid to provide a function such as mixing the fluid, measuring the viscosity of the fluid, attracting particles in the fluid, shepherding particles in the fluid, providing propulsive force in the fluid, pumping the fluid, dispensing the fluid, sensing particles in the fluid, and detecting particles in the fluid, among others.

Abstract translation: 本发明提供了驻波流体学和生物学工具，其包括：至少一种细长纤维，其具有中尺度（即，微米），微米级，纳米级或者尺寸尺寸，所述至少一种细长纤维具有第一端和第二端; 以及联接到所述至少一个细长光纤的第一端的致动器，其中所述致动器可操作以在一个或多个方向上对所述至少一根细长光纤施加振荡周期，并且其中所述致动器可操作以产生驻波 所述至少一根细长纤维。 这些驻波流体和生物工具选择性地设置在流体中以提供诸如混合流体，测量流体的粘度，吸引流体中的颗粒，流体中的游牧颗粒，在流体中提供推进力的泵送 流体，分配流体，感测流体中的颗粒，以及检测流体中的颗粒等。